CN212594082U - Sublimation instrument with double pumps of 500 pipe diameters - Google Patents
Sublimation instrument with double pumps of 500 pipe diameters Download PDFInfo
- Publication number
- CN212594082U CN212594082U CN202020940351.1U CN202020940351U CN212594082U CN 212594082 U CN212594082 U CN 212594082U CN 202020940351 U CN202020940351 U CN 202020940351U CN 212594082 U CN212594082 U CN 212594082U
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- valve
- thermocouple
- pneumatic baffle
- pneumatic
- double
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- 238000000859 sublimation Methods 0.000 title claims description 13
- 230000008022 sublimation Effects 0.000 title claims description 13
- 239000010453 quartz Substances 0.000 claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims abstract description 28
- 238000005086 pumping Methods 0.000 claims abstract description 15
- 239000002775 capsule Substances 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 abstract description 12
- 238000011068 loading method Methods 0.000 abstract description 2
- 238000000605 extraction Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a double-pump 500-diameter sublimator, which comprises a ten-temperature-zone heating furnace, a cabinet body, an air inlet flange pipe, an observation port, a mass flow meter, a temperature controller, a vacuum controller, an air exhaust flange pipe, a touch screen, a cooling fan, a first mechanical pump, a first pneumatic baffle valve, a first molecular pump, a first ionization gauge, a first double-layer cold trap, a first rough pumping pipeline, a first fine pumping pipeline, a first gate valve and a second pneumatic baffle valve, the device comprises a third pneumatic baffle valve, a first resistance gauge, an air inlet valve, a quartz tube, a fourth pneumatic baffle valve, a second resistance gauge, a fifth pneumatic baffle valve, a second gate valve, a second double-layer cold trap, a second ionization gauge, a second molecular pump, a second mechanical pump, a sixth pneumatic baffle valve, a second rough pumping pipeline, a second fine pumping pipeline, an electric pull rod, a first thermocouple, a second thermocouple, a third thermocouple and a fourth thermocouple; the utility model discloses an adopt two-way vacuum system, promote the material loading volume according to the cavity diameter of increase quartz capsule.
Description
Technical Field
The utility model relates to a sublimation appearance vacuum system technical field specifically is a 500 pipe diameters of double pump's sublimation appearance.
Background
The existing sublimation instrument is a one-way vacuum system, so that the vacuum degree cannot reach a higher vacuum level, if an accident occurs, the existing sublimation instrument cannot run normally, the maximum pipe diameter of the existing sublimation instrument is 300mm, the material carrying amount cannot meet the existing material carrying requirement, and meanwhile, the design requirement of a temperature field during material purification cannot be met, and the requirement of the sublimation instrument on the uniformity of the temperature field cannot be met;
in order to solve the above-mentioned drawbacks, a technical solution is now provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a sublimation appearance of 500 pipe diameters of double pump, the utility model discloses an adopt two-way vacuum system, promote the material carrying volume according to the cavity diameter of increase quartz capsule, and still adopt the observing and controlling mode of four sides accuse temperature for the temperature field is more even, abandons the potential safety hazard that current single-point accuse temperature brought and observes and controls the precision, and improves the cavity vacuum in the quartz capsule, can guarantee wherein when the vacuum system of one end emergence emergency need cut off, still can drive equipment normal operating.
The utility model discloses the technical problem that will solve as follows:
how to improve the vacuum degree in the quartz tube and effectively prevent the chain reaction that the vacuum equipment at one end cannot normally operate due to emergency; the requirement of loading amount is difficult to meet, and the production efficiency of the sublimation instrument is low; meanwhile, the single-point temperature control mode of the existing sublimator cannot meet the requirement on the uniformity of the temperature field.
The purpose of the utility model can be realized by the following technical scheme:
a500-caliber sublimation instrument with double pumps comprises a ten-temperature-zone heating furnace, a cabinet body, an air inlet end flange pipe, an observation port, a mass flow meter, a temperature controller, a vacuum controller, an air exhaust end flange pipe, a touch screen, a cooling fan, a first mechanical pump, a first pneumatic baffle valve, a first molecular pump, a first ionization gauge, a first double-layer cold trap, a first rough exhaust pipeline, a first fine exhaust pipeline, a first gate valve, a second pneumatic baffle valve, a third pneumatic baffle valve, a first resistance gauge, an air inlet valve, a quartz pipe, a fourth pneumatic baffle valve, a second resistance gauge, a fifth pneumatic baffle valve, a second gate valve, a second double-layer cold trap, a second ionization gauge, a second molecular pump, a second mechanical pump, a sixth pneumatic baffle valve, a second rough exhaust pipeline, a second fine exhaust pipeline, an electric pull rod, a first thermocouple, a second thermocouple, a third thermocouple and a fourth thermocouple, wherein the ten-temperature-zone heating furnace is fixed at the top of the cabinet body through bolts, a quartz tube is arranged inside the ten-temperature-zone heating furnace;
one end of the quartz tube is movably connected with a gas inlet end flange tube through a flange, the outer edge of the gas inlet end flange tube is provided with an observation port, the top of the air inlet end flange pipe is respectively provided with a third pneumatic baffle valve and a first resistance gauge, one side of the air inlet end flange pipe is provided with an air inlet valve, the other side of the air inlet end flange pipe is communicated with an air inlet connecting pipe, and the air inlet connecting pipe is sequentially provided with a first ionization gauge, a first double-layer cold trap, a first gate valve and a second pneumatic baffle valve, the first double-layer cold trap is communicated with the second pneumatic baffle valve through a first fine pumping pipeline, the first double-layer cold trap is communicated with the third pneumatic baffle valve through a first coarse pumping pipeline, the outer edge of the air inlet connecting pipe is movably connected with a first molecular pump through a flange, one side of the first molecular pump is provided with a first mechanical pump, and the outer side of the first mechanical pump is provided with a first pneumatic baffle valve;
the other end of the quartz tube is movably connected with an exhaust end flange tube through a flange, one side of the exhaust end flange tube is embedded with a touch screen, the top of the flange pipe at the air exhaust end is respectively provided with a fourth pneumatic baffle valve and a second resistance gauge, the other side of the flange pipe at the air exhaust end is communicated with an air exhaust connecting pipe, and the air extraction connecting pipe is sequentially provided with a second ionization gauge, a second double-layer cold trap, a second gate valve and a fifth pneumatic baffle valve, the second double-layer cold trap is communicated with the fifth pneumatic baffle valve through a second fine pumping pipeline, the second double-layer cold trap is communicated with the fourth pneumatic baffle valve through a second coarse pumping pipeline, the outer edge of the air extraction connecting pipe is movably connected with a second molecular pump through a flange, one side of the second molecular pump is provided with a second mechanical pump, and the outer side of the second mechanical pump is provided with a sixth pneumatic baffle valve;
a mass flow meter, a temperature controller and a vacuum controller are respectively embedded in the side surface of the cabinet body, an electric pull rod is installed on one side of the ten-temperature-zone heating furnace, a cooling fan is uniformly embedded in the outer side of the ten-temperature-zone heating furnace, and the mass flow meter is electrically connected with the first pneumatic baffle valve, the first gate valve, the second pneumatic baffle valve, the third pneumatic baffle valve, the air inlet valve, the fourth pneumatic baffle valve, the fifth pneumatic baffle valve, the second gate valve and the sixth pneumatic baffle valve, and the temperature controller is electrically connected with the cooling fan, the first thermocouple, the second thermocouple, the third thermocouple and the fourth thermocouple, the vacuum controller is electrically connected with the first mechanical pump, the first molecular pump, the first ionization gauge, the first resistance gauge, the second ionization gauge, the second molecular pump and the second mechanical pump, and the electric pull rod is electrically connected with the touch screen;
wherein the ten-temperature-zone heating furnace is used for providing a temperature field for sublimation purification, the cabinet body is used for placing elements, the air inlet end flange pipe and the air outlet end flange pipe are used for connecting pipelines and lofting, the observation port is used for observing the purification process, the mass flow meter is used for controlling and feeding back the mass flow of a sample, the temperature controller is used for controlling the test temperature in the ten-temperature-zone heating furnace, the vacuum controller is used for the vacuum environment in the quartz tube, the touch screen is used for setting parameters, the cooling fan is used for cooling the ten-temperature-zone heating furnace, the first mechanical pump and the second mechanical pump are used for vacuumizing, the first pneumatic baffle valve, the second pneumatic baffle valve, the third pneumatic baffle valve, the fourth pneumatic baffle valve, the fifth pneumatic baffle valve, the sixth pneumatic baffle valve, the first gate valve and the second gate valve are used for opening and closing the vacuum pipeline, first molecular pump and second molecular pump are used for making ten warm areas heating furnace be in experimental vacuum, first ionization gauge and second ionization gauge are used for detection area vacuum, first double-deck cold-trap and the double-deck cold-trap of second are used for condensation and antifouling, first thick pipeline and the thick pipeline of taking out of second are used for taking out quartz capsule body thick, first thin pipeline and the thin pipeline of taking out of second are used for taking out quartz capsule body thin, first resistance gauge and second resistance gauge are used for showing the vacuum of quartz capsule body, the admission valve is used for opening and shutting the gas circuit passageway, the quartz capsule is used for providing the cavity test, and its pipe diameter is 500mm, electronic pull rod is used for opening and shutting ten warm areas heating furnace, first thermocouple, second thermocouple, third thermocouple and fourth thermocouple are used for observing and controling the furnace temperature of ten warm areas heating furnace.
Furthermore, a first thermocouple, a second thermocouple, a third thermocouple and a fourth thermocouple are respectively embedded in the contact positions of the quartz tube and the ten-temperature-zone heating furnace, and the first thermocouple, the second thermocouple, the third thermocouple and the fourth thermocouple are uniformly distributed.
The utility model has the advantages that:
the utility model discloses an adopt two-way vacuum system, promote the year material volume according to the cavity diameter of increase quartz capsule, and still adopt the observing and controlling mode of four sides accuse temperature for the temperature field is more even, discards the potential safety hazard that current single-point accuse temperature brought and observes and controls the precision, and improves the cavity vacuum in the quartz capsule, when the vacuum system that can guarantee wherein one end appears emergency and need cut off, still can drive equipment normal operating.
Drawings
In order to facilitate understanding of the present invention for those skilled in the art, the present invention will be further described with reference to the accompanying drawings;
FIG. 1 is a schematic overall side view of the present invention;
FIG. 2 is a top view of the whole of the present invention;
fig. 3 is a partial sectional view of the quartz tube of the present invention.
Detailed Description
As shown in figures 1-3, a double-pump 500-caliber sublimator comprises a ten-temperature-zone heating furnace 1, a cabinet 2, an air inlet end flange pipe 3, an observation port 4, a mass flow meter 5, a temperature controller 6, a vacuum controller 7, an air exhaust end flange pipe 8, a touch screen 9, a heat radiation fan 10, a first mechanical pump 11, a first pneumatic baffle valve 12, a first molecular pump 13, a first ionization gauge 14, a first double-layer cold trap 15, a first rough extraction pipeline 16, a first fine extraction pipeline 17, a first gate valve 18, a second pneumatic baffle valve 19, a third pneumatic baffle valve 20, a first resistance gauge 21, an air inlet valve 22, a quartz tube 23, a fourth pneumatic baffle valve 24, a second resistance gauge 25, a fifth pneumatic baffle valve 26, a second gate valve 27, a second double-layer cold trap 28, a second ionization gauge 29, a second molecular pump 30, a second mechanical pump 31, a sixth pneumatic valve 32, a second rough extraction pipeline 33, The heating furnace comprises a second fine pumping pipeline 34, an electric pull rod 35, a first thermocouple 36, a second thermocouple 37, a third thermocouple 38 and a fourth thermocouple 39, wherein the ten-temperature-zone heating furnace 1 is fixed at the top of the cabinet body 2 through bolts, and a quartz tube 23 is arranged inside the ten-temperature-zone heating furnace 1;
one end of a quartz tube 23 is movably connected with an air inlet end flange tube 3 through a flange, the outer edge of the air inlet end flange tube 3 is provided with an observation port 4, the top of the air inlet end flange tube 3 is respectively provided with a third pneumatic baffle valve 20 and a first resistance gauge 21, one side of the air inlet end flange tube 3 is provided with an air inlet valve 22, the other side of the air inlet end flange tube 3 is communicated with an air inlet connecting tube, the air inlet connecting tube is sequentially provided with a first ionization gauge 14, a first double-layer cold trap 15, a first gate valve 18 and a second pneumatic baffle valve 19, the first double-layer cold trap 15 and the second pneumatic baffle valve 19 are communicated through a first thin pumping pipeline 17, the first double-layer cold trap 15 and the third pneumatic baffle valve 20 are communicated through a first thick pumping pipeline 16, the outer edge of the air inlet connecting tube is movably connected with a first molecular pump 13 through a flange, one side of the first molecular pump 13 is provided with a first mechanical pump 11, and the outer side of the first mechanical pump 11 is provided with a first pneumatic baffle valve 12;
the other end of the quartz tube 23 is movably connected with an exhaust end flange tube 8 through a flange, one side of the exhaust end flange tube 8 is embedded with a touch screen 9, the top of the exhaust end flange tube 8 is respectively provided with a fourth pneumatic baffle valve 24 and a second resistance gauge 25, the other side of the exhaust end flange tube 8 is communicated with an exhaust connecting tube, and the air extraction connecting pipe is sequentially provided with a second ionization gauge 29, a second double-layer cold trap 28, a second gate valve 27 and a fifth pneumatic baffle valve 26, the second double-layer cold trap 28 is communicated with the fifth pneumatic baffle valve 26 through a second fine extraction pipeline 34, the second double-layer cold trap 28 is communicated with the fourth pneumatic baffle valve 24 through a second coarse extraction pipeline 33, the outer edge of the air extraction connecting pipe is movably connected with a second molecular pump 30 through a flange, one side of the second molecular pump 30 is provided with a second mechanical pump 31, and the outer side of the second mechanical pump 31 is provided with a sixth pneumatic baffle valve 32;
a mass flow meter 5, a temperature controller 6 and a vacuum controller 7 are respectively embedded in the side surface of the cabinet body 2, an electric pull rod 35 is installed at one side of the ten-temperature-zone heating furnace 1, a heat radiation fan 10 is evenly embedded at the outer side of the ten-temperature-zone heating furnace 1, the mass flow meter 5 is electrically connected with a first pneumatic baffle valve 12, a first gate valve 18, a second pneumatic baffle valve 19, a third pneumatic baffle valve 20, an air inlet valve 22, a fourth pneumatic baffle valve 24, a fifth pneumatic baffle valve 26, a second gate valve 27 and a sixth pneumatic baffle valve 32, the temperature controller 6 is electrically connected with the heat radiation fan 10, a first thermocouple 36, a second thermocouple 37, a third thermocouple 38 and a fourth thermocouple 39, and the vacuum controller 7 is electrically connected with a first mechanical pump 11, a first molecular pump 13, a first ionization gauge 14, a first resistance gauge 21, a second resistance gauge 25, a second ionization gauge 29, a second molecular pump 30 and a second mechanical pump 31, the electric pull rod 35 is electrically connected with the touch screen 9;
wherein, a first thermocouple 36, a second thermocouple 37, a third thermocouple 38 and a fourth thermocouple 39 are respectively embedded at the contact part of the quartz tube 23 and the ten-temperature-zone heating furnace 1, and the first thermocouple 36, the second thermocouple 37, the third thermocouple 38 and the fourth thermocouple 39 are uniformly distributed.
The working process is as follows:
firstly, the materials are completely loaded, after the sealing is completely confirmed, the first mechanical pump 11 and the second mechanical pump 31 are started until the vacuum degree of the cavity in the quartz tube 23 reaches 5 x 10-1Pa, the first molecular pump 13 and the second molecular pump 30 are started until the vacuum degree of the cavity in the quartz tube 23 reaches 5 x 10-4Pa, when the temperature rise condition is satisfied, the first gate valve 18 is closed to start controlHeating and sublimating the material in the quartz tube, closing the first molecular pump 13 until the material is completely stopped, then closing the first mechanical pump 11, controlling the cooling fan 10 to be opened when the heating and sublimating of the material in the quartz tube are finished, cooling the quartz tube 23 to room temperature, closing the fourth pneumatic baffle valve 24, the fifth pneumatic baffle valve 26 and the sixth pneumatic baffle valve 32, simultaneously closing the second molecular pump 30 until the material is completely stopped, then closing the second mechanical pump 31, opening the air inlet valve 22, injecting 1000sccm nitrogen into the cavity of the quartz tube 23, loosening the furnace door of the ten-temperature-zone heating furnace 1, and taking the material when the pressure in the cavity of the quartz tube 23 pushes the furnace door open.
The foregoing is merely exemplary and illustrative of the structure of the invention, and various modifications, additions and substitutions as described in the detailed description may be made by those skilled in the art without departing from the structure or exceeding the scope of the invention as defined in the claims.
Claims (2)
1. The utility model provides a 500 pipe diameters of double pump sublimator, including ten warm branchings heating furnace (1), the cabinet body (2), inlet end flange pipe (3), viewing aperture (4), mass flowmeter (5), temperature controller (6), vacuum controller (7), bleed end flange pipe (8), touch-sensitive screen (9), radiator fan (10), first mechanical pump (11), first pneumatic flapper valve (12), first molecular pump (13), first ionization gauge (14), first double-deck cold-trap (15), first thick pipeline (16), first thin pipeline (17), first push-pull valve (18), second pneumatic flapper valve (19), third pneumatic flapper valve (20), first resistance gauge (21), admission valve (22), quartz capsule (23), fourth pneumatic flapper valve (24), second resistance gauge (25), fifth pneumatic valve (26), second push-pull valve (27), The device comprises a second double-layer cold trap (28), a second ionization gauge (29), a second molecular pump (30), a second mechanical pump (31), a sixth pneumatic flapper valve (32), a second rough pumping pipeline (33), a second fine pumping pipeline (34), an electric pull rod (35), a first thermocouple (36), a second thermocouple (37), a third thermocouple (38) and a fourth thermocouple (39), and is characterized in that the top of a cabinet body (2) is fixed with a ten-temperature-zone heating furnace (1) through bolts, and a quartz tube (23) is installed inside the ten-temperature-zone heating furnace (1);
one end of the quartz tube (23) is movably connected with a gas inlet end flange tube (3) through a flange, the outer edge of the gas inlet end flange tube (3) is provided with an observation port (4), the top of the gas inlet end flange tube (3) is respectively provided with a third pneumatic baffle valve (20) and a first resistance gauge (21), one side of the gas inlet end flange tube (3) is provided with a gas inlet valve (22), the other side of the gas inlet end flange tube (3) is communicated with a gas inlet connecting pipe, the gas inlet connecting pipe is sequentially provided with a first ionization gauge (14), a first double-layer cold trap (15), a first gate valve (18) and a second pneumatic baffle valve (19), the first double-layer cold trap (15) and the second pneumatic baffle valve (19) are communicated through a first thin pumping pipeline (17), and the first double-layer cold trap (15) and the third pneumatic baffle valve (20) are communicated through a first thick pumping pipeline (16), the outer edge of the air inlet connecting pipe is movably connected with a first molecular pump (13) through a flange, one side of the first molecular pump (13) is provided with a first mechanical pump (11), and the outer side of the first mechanical pump (11) is provided with a first pneumatic baffle valve (12);
the other end of the quartz tube (23) is movably connected with a flange tube (8) at the air exhaust end through a flange, a touch screen (9) is embedded in one side of the flange tube (8) at the air exhaust end, a fourth pneumatic baffle valve (24) and a second resistance gauge (25) are respectively installed at the top of the flange tube (8) at the air exhaust end, the other side of the flange tube (8) at the air exhaust end is communicated with an air exhaust connecting pipe, a second ionization gauge (29), a second double-layer cold trap (28), a second gate valve (27) and a fifth pneumatic baffle valve (26) are sequentially arranged on the air exhaust connecting pipe, the second double-layer cold trap (28) and the fifth pneumatic baffle valve (26) are communicated through a second fine exhaust pipeline (34), the second double-layer cold trap (28) and the fourth pneumatic baffle valve (24) are communicated through a second coarse exhaust pipeline (33), and a second molecular pump (30) is movably connected at the outer edge of the air exhaust connecting pipe through a flange, a second mechanical pump (31) is arranged on one side of the second molecular pump (30), and a sixth pneumatic baffle valve (32) is arranged on the outer side of the second mechanical pump (31);
the side face of the cabinet body (2) is respectively embedded with a mass flow meter (5), a temperature controller (6) and a vacuum controller (7), one side of the ten-temperature-zone heating furnace (1) is provided with an electric pull rod (35), the outer side of the ten-temperature-zone heating furnace (1) is uniformly embedded with a cooling fan (10), the mass flow meter (5) is electrically connected with a first pneumatic baffle valve (12), a first gate valve (18), a second pneumatic baffle valve (19), a third pneumatic baffle valve (20), an air inlet valve (22), a fourth pneumatic baffle valve (24), a fifth pneumatic baffle valve (26), a second gate valve (27) and a sixth pneumatic baffle valve (32), the vacuum controller (7) is electrically connected with the cooling fan (10), the first thermocouple (36), the second thermocouple (37), the third thermocouple (38) and the fourth thermocouple (39), and the vacuum controller (7) is electrically connected with the first mechanical pump (11), The first molecular pump (13), the first ionization gauge (14), the first resistance gauge (21), the second resistance gauge (25), the second ionization gauge (29), the second molecular pump (30) and the second mechanical pump (31) are electrically connected, and the electric pull rod (35) is electrically connected with the touch screen (9).
2. The sublimation apparatus of the pipe diameter of the double pump 500 according to claim 1, wherein a first thermocouple (36), a second thermocouple (37), a third thermocouple (38) and a fourth thermocouple (39) are respectively embedded at the contact part of the quartz tube (23) and the ten-temperature-zone heating furnace (1), and the first thermocouple (36), the second thermocouple (37), the third thermocouple (38) and the fourth thermocouple (39) are uniformly arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020940351.1U CN212594082U (en) | 2020-05-29 | 2020-05-29 | Sublimation instrument with double pumps of 500 pipe diameters |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020940351.1U CN212594082U (en) | 2020-05-29 | 2020-05-29 | Sublimation instrument with double pumps of 500 pipe diameters |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212594082U true CN212594082U (en) | 2021-02-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020940351.1U Expired - Fee Related CN212594082U (en) | 2020-05-29 | 2020-05-29 | Sublimation instrument with double pumps of 500 pipe diameters |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212594082U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114452671A (en) * | 2022-02-28 | 2022-05-10 | 中国科学院长春应用化学研究所 | Temperature adjustment system and purification equipment |
-
2020
- 2020-05-29 CN CN202020940351.1U patent/CN212594082U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114452671A (en) * | 2022-02-28 | 2022-05-10 | 中国科学院长春应用化学研究所 | Temperature adjustment system and purification equipment |
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| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210226 |