CN209702843U - Electronic beam evaporation type vacuum film coating machine - Google Patents
Electronic beam evaporation type vacuum film coating machine Download PDFInfo
- Publication number
- CN209702843U CN209702843U CN201920110787.5U CN201920110787U CN209702843U CN 209702843 U CN209702843 U CN 209702843U CN 201920110787 U CN201920110787 U CN 201920110787U CN 209702843 U CN209702843 U CN 209702843U
- Authority
- CN
- China
- Prior art keywords
- component
- cavity components
- pump
- coating machine
- beam evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 14
- 230000008020 evaporation Effects 0.000 title claims abstract description 14
- 238000009504 vacuum film coating Methods 0.000 title claims abstract description 12
- 238000009792 diffusion process Methods 0.000 claims abstract description 15
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 102000006391 Ion Pumps Human genes 0.000 claims abstract description 3
- 108010083687 Ion Pumps Proteins 0.000 claims abstract description 3
- 230000003373 anti-fouling effect Effects 0.000 claims description 5
- 239000003595 mist Substances 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 8
- 230000000694 effects Effects 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000003796 beauty Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Electronic beam evaporation type vacuum film coating machine, including cavity components, umbrella stand component, high valve module, cryogenic system, pipe-line system, diffusion pump, lobe pump, mechanical pump, ion source component, electron gun structure, power control cabinet component, wire casing component and door clamping component；The umbrella stand component is fixed on cavity components, and the high valve module is connected with cavity components, and the high valve module, diffusion pump, lobe pump and mechanical pump are linked together by pipe-line system, and the door clamping component is installed on cavity components；The electron gun part of the electron gun structure, the ion source portion of ion source component are installed in cavity components；The cryogenic system includes 2 deep cooling coil pipes, and 1 is mounted in cavity components, and 1 is mounted in high valve module.The utility model has mechanism simple, and uniformly repeatability is high for coating structure, and cavity size is up to 2700mm, the features such as plated film is high-efficient.
Description
Technical field
The utility model relates to a kind of electronic beam evaporation type vacuum film coating machines.
Background technique
Currently, existing electronic beam evaporation type vacuum coating is insufficient as present on design, there are mechanism complexity, plated film
Uniform low, plated film low efficiency the defect of repeatability of structure.
Utility model content
Technical problem to be solved by the utility model is to provide a kind of mechanism is simple, uniformly repeatability is high for coating structure,
Cavity size is up to 2700mm, the high-efficient electronic beam evaporation type vacuum film coating machine of plated film.
The technical scheme adopted by the utility model to solve the technical problem is as follows: a kind of electronic beam evaporation type vacuum coating
Machine, including cavity components, umbrella stand component, high valve module, cryogenic system, pipe-line system, diffusion pump, lobe pump, mechanical pump, ion
Source component, electron gun structure, power control cabinet component, wire casing component and door clamping component；The umbrella stand component is fixed on cavity components
On, the high valve module is connected with cavity components, and the high valve module, diffusion pump, lobe pump and mechanical pump pass through pipeline system
System links together, and the door clamping component is installed on cavity components；The electron gun part of the electron gun structure, ion source
The ion source portion of component is installed in cavity components；The cryogenic system includes 2 deep cooling coil pipes, and 1 is mounted on cavity
In component, 1 is mounted in high valve module.
Further, the diffusion pump is 2, and the mechanical pump is 2.
Further, mist filtration component is installed on the mechanical pump.
Further, the power supply placement of the wire casing component, power control cabinet component, the power supply of electron gun structure, ion source component
On the right side of cavity components, the deep cooling machine of the cryogenic system is placed on rear on the left of cavity components.
Further, it is additionally provided with foot pedal component, the foot pedal component is placed on immediately ahead of cavity components.
Further, halogen lamp, antifouling liner plate, revision board etc. are also equipped in the cavity components simultaneously.The work of halogen lamp
With first heating to inboard wall of furnace body when being that coating machine is started to work, the effect of antifouling liner plate is to prevent work goods and materials from polluting furnace body
Inner wall (it is simpler than cleaning inboard wall of furnace body to clean antifouling liner plate), and the effect of revision board is to correct the uniformity of coating film thickness.
Compared with prior art, the utility model has mechanism simple, and uniformly repeatability is high for coating structure, and cavity size can
Up to 2700mm, the features such as plated film is high-efficient.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment；
In figure: 1. cavity components, 2. umbrella stand components, 3. high valve modules, 4. cryogenic systems, 5. pipe-line systems, 6. oil filterings
Component, 7. diffusion pumps, 8. lobe pumps, 9. mechanical pumps, 10. ion source components, 11. electron gun structures, 12. power control cabinet components, 13.
Wire casing component, 14. clamping components, 15. foot pedal components.
Specific embodiment
The following is a further explanation of the present invention with reference to the accompanying drawings and embodiments.
Embodiment
Referring to Fig.1, a kind of electronic beam evaporation type vacuum film coating machine, including 1 set of 1,1 set of cavity components, 2,1 sets of umbrella stand component
3,1 sets of cryogenic systems 4 of high valve module, 1 set of tubes system 5, the 2 oily diffusion pumps 7,1 lobe pump 8,2 of filter assemblies 6,2
9,1 sets of mechanical pump, 10,1 sets of ion source component, 11,1 sets of electron gun structure, 12,1 sets of power control cabinet component, 13, two doors of wire casing component
Clamping component 14 and 1 set foot pedal component 15；The umbrella stand component 2 is fixed on cavity components 1, the high valve module 3 and chamber
Body component 1 is connected, and the high valve module 3, diffusion pump 7, lobe pump 8 and mechanical pump 9 are linked together by pipe-line system 5,
The door clamping component 14 is installed on cavity components 1, the compression and sealing visited for controlling cavity components 1 with cavity；Institute
It states foot pedal component 15 and is placed on 1 front of cavity components, the wire casing component 13, power control cabinet component 12, electron gun structure 11
In power supply, the power supply in ion source component 10 be placed on the right side of cavity components 1, the deep cooling machine in the cryogenic system 4 is placed
At 1 left side rear of cavity components, the electron gun part of the electron gun structure 11, the ion source portion of ion source component 10 are pacified
In cavity components 1, it is also equipped with halogen lamp, antifouling liner plate, revision board etc. simultaneously in the cavity components 1；The deep cooling
System 4 includes 2 deep cooling coil pipes, and 1 is mounted in cavity components 1, and 1 is mounted in high valve module 3；Described two mechanical pumps
Oily filter assemblies 6 are mounted on 9, the recycling and recycling for mist of oil in mechanical pump 9.
The effect of the cryogenic system 4 is to 1 deep cooling coil pipe in cavity components 1 and 1 depth in high valve module 3
Cooling coil is cooled to certain temperature, using high/low temperature by aqueous vapor and oil gas adsorb in cavity components 1 and in high valve module 3
Chamber intracorporal vacuum degree when improving plated film.
Pipe-line system 5 links together high valve module 3, diffusion pump 7, lobe pump 8 and mechanical pump 9, for vacuumizing
The channel of gas in the process.
Ion source component 10 is used for during machine operation, the cleaning of workpiece surface；Electron gun structure 11 is for processed
Cheng Zhongwei workpiece plated film provides original plating membrane material.
Sequential control and function monitor of the power control cabinet component 12 for entire machine, wire casing component 14 are used for the cabling of machine
So that the regular beauty of route, foot pedal component 15 is used for the loading and unloading of workpiece.
When coating machine is started to work, the workpiece umbrella stand set is placed on umbrella stand group by foot pedal component 15 by operator
On part 2, the fire door closed on cavity components 1 recycles door clamping component to clamp fire door, and coating machine is started to work, and first opens 2
The mechanical pump 9(oil vapour recycling that 2 start-up operations of oil mist filters 6 will volatilize in mechanical pump 9 in the course of work at this time enters machine
Tool pump), when cavity components 1 detect that vacuum degree reaches a numerical value in cavity, lobe pump 8 is opened, further to cavity group
Cavity in part 1 vacuumizes, while deep cooling component 4 is started to work, after vacuum degree is further lowered into certain numerical value in cavity,
2 diffusion pumps 7 are opened, and are further vacuumized to the cavity in cavity components 1, when vacuum degree is further lowered into centainly in cavity
After numerical value, 2 start-up operation plated film of umbrella stand component formally starts, while according to requiring out ion source component 10 and electron gun structure
11；
After plated film, first slowly stop umbrella stand component 2, closes deep cooling component 4, ion source component 10 and electron gun structure
11, then successively close diffusion pump 7, lobe pump 8, the closing mist filtration component device 6 of mechanical pump 9(mechanical pump 9 and be automatically stopped work).
Workpiece is placed in cavity components 1 in umbrella stand system 2 when the machine operation, umbrella stand drive system band in the course of work
Part of starting building does stable at the uniform velocity rotation along the central axis of cavity in cavity components 1, and crystal oscillator dress is also equipped in umbrella stand system 2
Set the monitoring for coating film thickness in coating process.
First 2 mechanical pumps 9 work when work, and after vacuum degree reaches certain value in cavity components 1, lobe pump 8 is opened, cavity
Vacuum degree further declines in component 1, and after reaching certain value, diffusion pump 7 is opened, after final vacuum reaches operating condition, machine
Device starts plated film.
Claims (6)
1. electronic beam evaporation type vacuum film coating machine, it is characterised in that: including cavity components, umbrella stand component, high valve module, deep cooling system
System, pipe-line system, diffusion pump, lobe pump, mechanical pump, ion source component, electron gun structure, power control cabinet component, wire casing component and
Door clamping component；The umbrella stand component is fixed on cavity components, and the high valve module is connected with cavity components, the high valve group
Part, diffusion pump, lobe pump and mechanical pump are linked together by pipe-line system, and the door clamping component is installed on cavity components
On；The electron gun part of the electron gun structure, the ion source portion of ion source component are installed in cavity components；The depth
Cooling system includes 2 deep cooling coil pipes, and 1 is mounted in cavity components, and 1 is mounted in high valve module.
2. electronic beam evaporation type vacuum film coating machine according to claim 1, it is characterised in that: the diffusion pump is 2, institute
Stating mechanical pump is 2.
3. electronic beam evaporation type vacuum film coating machine according to claim 1 or 2, it is characterised in that: pacify on the mechanical pump
Equipped with mist filtration component.
4. electronic beam evaporation type vacuum film coating machine according to claim 1 or 2, it is characterised in that: the wire casing component, electricity
Control cabinet component, the power supply of electron gun structure, ion source component power supply be placed on the right side of cavity components, the depth of the cryogenic system
Cold is placed on rear on the left of cavity components.
5. electronic beam evaporation type vacuum film coating machine according to claim 1 or 2, it is characterised in that: be additionally provided with foot-operated board group
Part, the foot pedal component are placed on immediately ahead of cavity components.
6. electronic beam evaporation type vacuum film coating machine according to claim 1 or 2, it is characterised in that: in the cavity components
It is also equipped with halogen lamp, antifouling liner plate, revision board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920110787.5U CN209702843U (en) | 2019-01-23 | 2019-01-23 | Electronic beam evaporation type vacuum film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920110787.5U CN209702843U (en) | 2019-01-23 | 2019-01-23 | Electronic beam evaporation type vacuum film coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209702843U true CN209702843U (en) | 2019-11-29 |
Family
ID=68641001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920110787.5U Expired - Fee Related CN209702843U (en) | 2019-01-23 | 2019-01-23 | Electronic beam evaporation type vacuum film coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209702843U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109628895A (en) * | 2019-01-23 | 2019-04-16 | 湖南宇诚精密科技有限公司 | A kind of electronic beam evaporation type vacuum film coating machine |
| CN111607762A (en) * | 2020-05-13 | 2020-09-01 | 北京航空航天大学 | Device for realizing automatic evaporation of ceramic target material by electron beam physical vapor deposition |
-
2019
- 2019-01-23 CN CN201920110787.5U patent/CN209702843U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109628895A (en) * | 2019-01-23 | 2019-04-16 | 湖南宇诚精密科技有限公司 | A kind of electronic beam evaporation type vacuum film coating machine |
| CN111607762A (en) * | 2020-05-13 | 2020-09-01 | 北京航空航天大学 | Device for realizing automatic evaporation of ceramic target material by electron beam physical vapor deposition |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209702843U (en) | Electronic beam evaporation type vacuum film coating machine | |
| CN107365973B (en) | Vacuum coating production line and coating method | |
| CN104832398B (en) | Vaccum-pumping equipment | |
| CN106808341A (en) | It is a kind of can adjust automatically adsorb dynamics glass processing protection device | |
| CN209222786U (en) | Using the non-oxidation laser cleaning equipment of protective gas atmosphere | |
| CN108775286A (en) | A kind of cleaning device of dry vacuum pump | |
| CN109365416A (en) | Using the non-oxidation laser cleaning equipment of protective gas atmosphere | |
| CN201844662U (en) | Vacuum depressurizing normal-temperature drier | |
| CN216738513U (en) | PVD equipment and auxiliary device thereof | |
| CN109628895A (en) | A kind of electronic beam evaporation type vacuum film coating machine | |
| CN113606949A (en) | Vacuum pumping system of multi-station degassing furnace | |
| CN103762310B (en) | Substrate pre-treatment equipment | |
| CN207043740U (en) | Voltage regulation batch meter machining production line | |
| CN216765032U (en) | Pipeline inner wall parylene coating equipment | |
| CN204058586U (en) | Double door vacuum plating unit used by a kind of pottery | |
| CN207347652U (en) | Cathode arc target assembly and vacuum multi-arc ion plating machine | |
| CN212871635U (en) | Multi-station helium mass spectrometer leak detection system with pre-evacuation function | |
| CN218936655U (en) | High-efficient heating's heat treatment facility | |
| CN218626443U (en) | Vacuum control system for rapidly checking air leakage point | |
| CN208898980U (en) | A kind of earpiece electroplating device | |
| JP2010027836A (en) | Plasma treatment apparatus | |
| WO2019214032A1 (en) | Lamination apparatus and lamination method | |
| CN213476086U (en) | Vacuum pipeline structure for titanium plating machine | |
| CN219099285U (en) | Vacuum coating chamber for welding | |
| CN205473977U (en) | Horizontal plasma metal surface processingequipment of large capacity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191129 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |