CN204058586U - Double door vacuum plating unit used by a kind of pottery - Google Patents
Double door vacuum plating unit used by a kind of pottery Download PDFInfo
- Publication number
- CN204058586U CN204058586U CN201420362826.8U CN201420362826U CN204058586U CN 204058586 U CN204058586 U CN 204058586U CN 201420362826 U CN201420362826 U CN 201420362826U CN 204058586 U CN204058586 U CN 204058586U
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- vacuum
- vacuum chamber
- pump
- chamber body
- door
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Abstract
A kind of double door vacuum plating unit, comprise vacuum chamber, arc evaporation source, vacuum system, water-cooling system and air-channel system, described vacuum chamber is by the vacuum chamber body be fixedly installed and can the room door of workpiece loading and unloading form, it is characterized in that: described vacuum plating unit is provided with the room door that two are articulated with the arranged on left and right sides of vacuum chamber body respectively, the outer wall of this vacuum chamber body and room door is provided with water-cooling groove, and the arc target of described arc evaporation source is arranged on vacuum chamber body and room door.According to the double door vacuum plating unit that the utility model provides, adopt two can the room door of workpiece loading and unloading, when a room door and vacuum chamber body carry out work, another room door can workpiece loading and unloading, save the working hour of half, improve working efficiency, two room doors and vacuum chamber body are equipped with arc evaporation source, and two different vacuum chambers can be arranged to according to the suitable increase and decrease of the needs of plated film, and be provided with water-cooling groove on vacuum chamber body and room door.
Description
Technical field
The utility model belongs to vacuum coating film equipment field, particularly a kind of vacuum plating unit of double door.
Background technology
Vacuum plating unit is arc evaporation formula high vacuum coating equipment, is mainly used in metallization or alloy material on the surface of the workpiece, can be coated with the superhard films such as TiN, TiC; The decoration such as high temperature low temperature corrosion-resisting film or stainless steel copper, the brass protective membranes such as Al, Ag, Cu, use widely in fields such as machinery, chemical industry, metallurgy, light industry, electronics.The main workflow of existing vacuum coating film equipment is first positioned over by workpiece on the work rest in vacuum chamber, start evaporation power supply, plated film is carried out to the workpiece in vacuum chamber, after to be coated, the product of plated film is needed to be placed on work rest next batch again taking out from work rest with the product of plated film in vacuum chamber, cycle operation like this.Because workpiece takes out from vacuum chamber need the regular hour installing to work rest, and the space of vacuum chamber is larger, the time of required workpiece loading and unloading is longer, and now coating equipment is in waiting status, and production efficiency is low.
Utility model content
In order to solve the not high problem of existing vacuum plating unit production efficiency, the utility model provides a kind of double door vacuum plating unit.
For this reason, the utility model provides a kind of double door vacuum plating unit, comprise vacuum chamber, arc evaporation source, vacuum system, water-cooling system and air-channel system, described vacuum chamber is by the vacuum chamber body be fixedly installed and can the room door of workpiece loading and unloading form, it is characterized in that: described vacuum plating unit is provided with the room door that two are articulated with the arranged on left and right sides of vacuum chamber body respectively, the outer wall of this vacuum chamber body and room door is provided with water-cooling groove, and the arc target of described arc evaporation source is arranged on vacuum chamber body and room door.
Further, described vacuum chamber body and Vacuum door adopt stainless steel assembly welding to form.
Further, described vacuum system comprises main pump, holding pump, roughing vacuum pump and topping-up pump.
Further, the main pump of described vacuum system is vacuum diffusion pump, holding pump is sliding vane rotary pump, roughing vacuum pump is slide valve pump, topping-up pump is lobe pump.
Further, described air-channel system is provided with air filter device.
Further, also include an electric control system, described electric control system is made up of man-machine interface and programmable logic controller, and arc evaporation power supply, air-path control system are connected with controller with the control end of vacuum-control(led) system.
The utility model has following beneficial effect:
According to the double door vacuum plating unit that the utility model provides, adopt two can the room door of workpiece loading and unloading, when a room door and vacuum chamber body carry out work, another room door can workpiece loading and unloading, save the working hour of half, improve working efficiency, two room doors and vacuum chamber body are equipped with arc evaporation source, and two different vacuum chambers can be arranged to according to the suitable increase and decrease of the needs of plated film, and be provided with water-cooling groove on vacuum chamber body and room door.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described in further detail.
Schematic diagram when Fig. 1 is the work of the present embodiment double door vacuum plating unit.
Fig. 2 is the schematic diagram of the present embodiment double door vacuum plating unit when quitting work.
Fig. 3 is the workflow diagram of the present embodiment double door vacuum plating unit.
Embodiment
In order to better understand the technical solution of the utility model, describe below in conjunction with accompanying drawing the embodiment that the utility model provides in detail.
With reference to shown in Fig. 1,2, this double door vacuum plating unit, comprises vacuum chamber 1, is made up of the vacuum chamber body 101 be fixedly installed and room door 102,103, be respectively equipped with the work rest 104 for workpiece loading and unloading in room door 102,103.Vacuum chamber body 101 and room door 102,103 adopt stainless steel assembly welding to form, two 102,103, Room doors are articulated with the arranged on left and right sides of vacuum chamber body 101 respectively, the outer wall of this vacuum chamber body 101 and room door 102,103 is provided with water-cooling groove 2, and the arc target of arc evaporation source 3 is arranged on vacuum chamber body 101 and room door 102,103.
With reference to shown in Fig. 3, this double door vacuum plating unit also comprises first and slightly takes out that valve 4, first slide valve pump 5, second slightly takes out valve 6, second slide valve pump 7, lobe pump 8, foreline valve 9, sliding vane rotary pump 10, diffusion pump 11, essence take out valve 12, inflation valve 13, throttling valve 14, stopping valve 15.
The workflow of the present embodiment:
Pre-heating stage: provide pressurized air, water coolant, working gas to vacuum pump set, switch on power, starts electrical apparatus control system (not shown).Open sliding vane rotary pump 10 by electrical apparatus control system, after about 2-3 minute, start diffusion pump 11, carry out heating when diffusion pump temperature reaches about 180-200 DEG C to the electric furnace of diffusion pump 12, casing enters normal work stage.
Working stage: first start inflation valve 13, inflate in vacuum chamber 1, vacuum chamber 1 opens room door 102 after being filled with air, workpiece to be coated to be placed on work rest 104, to shut room door 102 fastening door lock.Start the first slide valve pump 5, second slide valve pump 7 successively, open and slightly take out valve 4 and slightly take out valve 6, vacuum chamber 1 is slightly taken out, then by the Heating temperature of electric system setting vacuum chamber 1, regulate electric current, work rest 104 is driven to rotate, after vacuum pressure reaches 200pa, start lobe pump 8, close first and slightly take out valve 4, stop the first slide valve pump 5, after vacuum pressure reaches 2pa, closedown second is slightly taken out valve 6 and is stopped the second slide valve pump 7, open foreline valve 9, open essence to take out valve 12 pairs of vacuum chambers and carry out essence and take out, after reaching predetermined plated film pressure, open throttling valve 14, atmosphere in vacuum chamber 1 is stablized, opening stop valve 15 provides working gas, arc 2 power supply is opened after pressure is stable, arc current is regulated to carry out plated film on certain, after last workpiece plates, close arc 2 power supply successively, close stopping valve 15, close vacuum chamber 1 and heat, close throttling valve 14, close essence and take out valve 12, close foreline valve 9, stop lobe pump 8, start inflation valve 13 and be filled with air in vacuum chamber 1, vacuum chamber 1 is filled with macroclimate, opens room door 102 and takes out workpiece, room door 103 is sent into 101 fastening door locks, cyclical operation.
The above, be only the utility model preferred embodiment, therefore can not limit with this scope that the utility model implements, the equivalence namely done according to the utility model claim and description change with modify, all should still belong in scope that the utility model patent contains.
Claims (6)
1. double door vacuum plating unit used by a pottery, comprise vacuum chamber, arc evaporation source, vacuum system, water-cooling system and air-channel system, described vacuum chamber is by the vacuum chamber body be fixedly installed and can the room door of workpiece loading and unloading form, it is characterized in that: described room door is provided with two, two room doors are articulated with the arranged on left and right sides of vacuum chamber body respectively, the outer wall of this vacuum chamber body and room door is provided with water-cooling groove, and the arc target of described arc evaporation source is arranged on vacuum chamber body and room door.
2. pottery double door vacuum plating unit according to claim 1, is characterized in that: described vacuum chamber body and Vacuum door adopt stainless steel assembly welding to form.
3. pottery double door vacuum plating unit according to claim 1, is characterized in that: described vacuum system comprises main pump, holding pump, roughing vacuum pump and topping-up pump.
4. pottery double door vacuum plating unit according to claim 3, is characterized in that: the main pump of described vacuum system is vacuum diffusion pump, holding pump is sliding vane rotary pump, roughing vacuum pump is slide valve pump, topping-up pump is lobe pump.
5. pottery double door vacuum plating unit according to claim 1, is characterized in that: described air-channel system is provided with air filter device.
6. pottery double door vacuum plating unit according to claim 1, it is characterized in that: also include an electric control system, described electric control system is made up of man-machine interface and programmable logic controller, and arc evaporation power supply, air-path control system are connected with controller with the control end of vacuum-control(led) system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420362826.8U CN204058586U (en) | 2014-07-02 | 2014-07-02 | Double door vacuum plating unit used by a kind of pottery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420362826.8U CN204058586U (en) | 2014-07-02 | 2014-07-02 | Double door vacuum plating unit used by a kind of pottery |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204058586U true CN204058586U (en) | 2014-12-31 |
Family
ID=52200136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420362826.8U Expired - Fee Related CN204058586U (en) | 2014-07-02 | 2014-07-02 | Double door vacuum plating unit used by a kind of pottery |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204058586U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104726828A (en) * | 2015-03-26 | 2015-06-24 | 青州市宝丰镀膜科技有限公司 | Double-opening induction-heating thermal coating machine |
| CN105543790A (en) * | 2016-02-15 | 2016-05-04 | 佛山市佛欣真空技术有限公司 | Vacuum coating machine system and operating method thereof |
-
2014
- 2014-07-02 CN CN201420362826.8U patent/CN204058586U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104726828A (en) * | 2015-03-26 | 2015-06-24 | 青州市宝丰镀膜科技有限公司 | Double-opening induction-heating thermal coating machine |
| CN105543790A (en) * | 2016-02-15 | 2016-05-04 | 佛山市佛欣真空技术有限公司 | Vacuum coating machine system and operating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141231 Termination date: 20150702 |
|
| EXPY | Termination of patent right or utility model |