CN105441908A - Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating - Google Patents
Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating Download PDFInfo
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- CN105441908A CN105441908A CN201511033386.7A CN201511033386A CN105441908A CN 105441908 A CN105441908 A CN 105441908A CN 201511033386 A CN201511033386 A CN 201511033386A CN 105441908 A CN105441908 A CN 105441908A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/12—Etching in gas atmosphere or plasma
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides vacuumizing equipment for chain type dry-method texturing and vacuum coating. The vacuumizing equipment comprises a loading cavity, an unloading cavity, a first vacuum pump and a second vacuum pump, wherein the loading cavity is vacuumized before an etching technology is performed on a silicon chip; after the etching technology is completed on the silicon chip, atmosphere discharge materials are filled back to the unloading cavity; the loading cavity is connected with the first vacuum pump and the second vacuum pump, and the unloading cavity is connected with the first vacuum pump and the second vacuum pump. The vacuumizing method comprises the following steps that a master control valve is opened so as to achieve the purpose that the first vacuum pump and the second vacuum pump work at the same time to vacuumize the loading cavity, after vacuumizing the loading cavity is completed, the master control valve is closed, and then the master control valve is reopened so as to achieve the purpose that the first vacuum pump and the second vacuum pump work at the same time to vacuumize the unloading cavity. In a chain type continuous cycle production system, the loading cavity and the unloading cavity are alternately vacuumized and backfilled with air so as to achieve the purpose of completing the loading work and the unloading work within the shortest time. According to the vacuumizing equipment and the method disclosed by the invention, the productivity of the equipment is the highest, the operation is convenient, the cost is low, and significant economic benefits are created.
Description
Technical field
The present invention relates to crystal silicon solar batteries production unit field, in particular to a kind of vaccum-pumping equipment and the method that are applicable to the making herbs into wool of chain type dry method and PECVD vacuum plating production crystal silicon solar batteries technique.
Background technology
Crystal silicon solar batteries has that technique is simple, solar conversion efficiency comparatively advantages of higher and by large-scale application, start there is trend such as replacing traditional fossil energy now.
In the production of crystal silicon battery, the making herbs into wool of RIE dry method and PECVD vacuum plating are two important vacuum technology technology.The making herbs into wool of RIE dry method is the uneven surface forming antiradar reflectivity under vacuum chemistry atmosphere through excitation of plasma.And the chemical vapour deposition of plasma strengthening (PECVD) vacuum plating is the formation being used in front surface silicon nitride antireflection film and back surface aluminum oxide and silicon nitride passive film.
In prior art, the usual technical process of the making herbs into wool of RIE dry method and PECVD vacuum coating technology is: be placed in an atmosphere on support plate by silicon chip, and support plate is transferred in load chamber by pulley, vacuumizes be extracted into about 10Pa in load chamber.And then be transferred to process cavity accept RIE etching or PECVD plated film.After technique completes, support plate enters unloading chamber (air discharge cavity), passes into nitrogen or air to normal atmosphere in unloading chamber after nitrogen purging several times.Carrier plate transmission goes out to unload chamber.Then silicon chip takes off from support plate and carries out next process.Support plate is recycled to loading area and carries out a new ripple silicon chip process.Load chamber, after support plate exports, carries out nitrogen purging several times, then passes into nitrogen or air to normal atmosphere accepts new support plate.Same unloading chamber will vacuumize and accept the support plate that next block completes technique afterwards.
Load chamber, unloading chamber vacuumize, general meeting is respectively controlled by a pump, and need in operation to be in step with on the treatment time technique just can be made to carry out smoothly, especially in order to realize higher production capacity, reach certain economic benefit, support plate is limited in the total time that load chamber stops.Such as one piece can fill the support plate of 40 silicon chips, and its pitch time is the processing power that just can meet the silicon chip of more than 3600 slices/hour 40 seconds., in the case, because transmission and purging also need the time, the time vacuumized is just very limited, needs as calculated to complete in 8 seconds, is evacuated down to 10Pa.This just has higher requirement to the pumping speed of vacuum pump, and the commercially available pump (such as Britain EdwardIQX500 pump) generally used generally needs the vacuum tightness that just can be extracted into 10Pa 12 seconds, can not meet operational requirement.When design with when selecting larger pump, power consumption, noise etc. just find to increase thereupon.So need the pumping speed of raising pump and don't outfit of equipment operation cost can be increased.
In view of this, special proposition the present invention.
Summary of the invention
The first object of the present invention is to provide vaccum-pumping equipment used in a kind of dry method leather producing process flow process, described vaccum-pumping equipment is well applicable to the making herbs into wool of RIE dry method and produces solar energy polycrystalline silicon battery system, have and simplify treatment process, improve production capacity, easy to operate, cost is low, create significant economic benefit, by adopting two lower-powered pumps, and by coordinating control valve, realize mutually mating acting in conjunction between two pumps, a chain type continuous cyclic production system, load chamber and unloading chamber alternately vacuumize and backfill air and within the minimum time, complete loading and unloading work to reach, very scientific and effective.
The second object of the present invention is to provide and adopts this vacuum system to carry out the method vacuumized, and described vacuum pumping method can match with vaccum-pumping equipment and adapt to, and by software design instruction, smooth and low cost completes whole vacuum pumping.
In order to realize above-mentioned purpose of the present invention, spy by the following technical solutions:
Embodiments provide and be a kind ofly applicable to the making herbs into wool of chain type dry method and produce the vaccum-pumping equipment of polysilicon process, this equipment comprises following assembly: the load chamber vacuumized before carrying out etching technics for silicon chip, for carrying out backfilling the unloading chamber of air discharging, the first vacuum pump and the second vacuum pump after silicon chip being completed etching technics;
Described load chamber is connected with described first vacuum pump, the second vacuum pump simultaneously, and described unloading chamber is connected with described first vacuum pump, the second vacuum pump simultaneously.
The usual technical process of RIE dry method making herbs into wool technology of the prior art is: be placed in an atmosphere on support plate by silicon chip, support plate is transferred in load chamber by pulley, vacuumizes be extracted into about 10Pa in load chamber.And then be transferred to process cavity accept RIE etching or PECVD plated film.After technique completes, support plate enters unloading chamber (air discharge cavity), passes into nitrogen or air to normal atmosphere in unloading chamber after nitrogen purging several times.Carrier plate transmission goes out to unload chamber.Then silicon chip is removed to next process from support plate.Support plate is recycled to loading area and carries out a new ripple silicon chip process.Load chamber, after support plate exports, carries out nitrogen purging several times, then passes into nitrogen or air to normal atmosphere accepts new support plate.Same unloading chamber will vacuumize and accept the support plate that next block completes technique afterwards.
Load chamber, unloading chamber vacuumize, general meeting is respectively controlled by a pump, and need in operation to be in step with on the treatment time technique just can be made to carry out smoothly, especially in order to realize higher production capacity, reach certain economic benefit, support plate is limited in the total time that load chamber stops.Such as one piece can fill the support plate of 40 silicon chips, and its pitch time is the processing power that just can meet the silicon chip of more than 3600 slices/hour 40 seconds.In the case, because transmission and purging also need the time, the time vacuumized is just extremely important, needs as calculated to complete in 8 seconds, is evacuated down to 10Pa.This just has higher requirement to the pumping speed of vacuum pump, and commercially available common pump generally needed for 12 seconds just can be extracted into the vacuum tightness of 10Pa, can not meet operational requirement.When design with when selecting larger pump, power consumption, noise etc. just find to increase thereupon.So need the pumping speed of raising pump and don't outfit of equipment operation cost can be increased.In view of the demand of cost and production output, the common manufacturing process of prior art can not meet the demands, the present invention is in order to solve the technical problem of above appearance, spy provides a kind of vaccum-pumping equipment being applicable to dry method making herbs into wool production polysilicon process, this equipment is except the load chamber of carrying out etching for silicon chip and the unloading chamber for silicon chip being carried out discharging, also comprise the first vacuum pump and the second vacuum pump, load chamber is connected with two vacuum pumps simultaneously, unloading chamber is also connected with these two vacuum pumps simultaneously, like this when load chamber need of work vacuumizes, two vacuum pumps work simultaneously and vacuumize, when unloading chamber work, two vacuum pumps work simultaneously and to vacuumize unloading chamber, if when unloading chamber and load chamber do not work certainly, at this moment two vacuum pumps can not work, select according to concrete operations condition free, such design pumped vacuum systems both can realize low cost, the pump adopting two relative powers smaller just can meet operational requirement, and can also realize being evacuated down to 10Pa in 8S, the normal production of polysilicon solar cell can not be incured loss through delay.
Further, in order to optimize pumped vacuum systems further, this vaccum-pumping equipment also comprises the first connecting tube, second connecting tube and the 3rd connecting tube, overhead control valve, one end of described first connecting tube connects load chamber, the other end connects the first vacuum pump, one end of described second connecting tube connects unloading chamber, the other end connects the second vacuum pump, described 3rd connecting tube is communicated with the first connecting tube, the second connecting tube respectively, and described overhead control valve is arranged on described 3rd connecting tube.
So load chamber is connected with the first vacuum pump by the first connecting tube, unloading chamber is connected with the second vacuum pump by the second connecting tube, then the first connecting tube is communicated with the second connecting tube by the 3rd connecting tube again, two vacuum pumps are equivalent to perfectly to be communicated with, facilitate when load chamber or the work of unloading chamber and use, conveniently control to be provided with control valve on the 3rd connecting tube, during specific works, principle of work is as follows: when load chamber needs to vacuumize, control valve is open mode, such first vacuum pump and the second vacuum pump work simultaneously, quickening vacuumizes, shortening is evacuated to the time of 10pa in 8s,
Complete when vacuumizing, overhead control valve cuts out, when silicon chip enters unloading chamber, when the second vacuum pump needs to blow air, overhead control valve is opened again, unloading chamber unloading chamber vacuumized by the first vacuum pump and the second vacuum pump simultaneously, the time of silicon chip unloading can be accelerated like this, because could accept the support plate of next block technique again after will vacuumizing.Visible use not only facilitates, and also improves working efficiency, reduces running cost.
Preferably, first connecting tube, the pipe diameter of the second connecting tube and the 3rd connecting tube preferably controls between 100-200mm, caliber needs to control in suitable scope, can not too thick cost higher, if but too carefully can affect the speed of evacuation, therefore need to control in suitable scope.
Preferably, overhead control valve is chosen as the wherein one in wiping board, angle valve and ball valve, and ball valve is driven by valve rod, and around the valve that ball valve axis rotates.Also can be used for the regulating and control of fluid, wherein firmly seal between V-type ball valve its V-type ball core and metal seat valve of pile-up welding hard alloy and there is very strong shearing force, be specially adapted to the medium of fibre-bearing, a small solid material etc.And multi-pass ball valve not only can the interflow of control agent, shunting and the switching that flows to flexibly on pipeline, also can close arbitrary passage simultaneously and two other passage is connected, ball valve resistance to flow is little, but the lightweight fluid being unsuitable for flow too large passes through, unrestricted choice can be carried out as required during practical application, more excellently in addition also realize autocontrol valve by Controlling System, do not need manually to operate, more convenient and smart.
Preferably, the power of described first vacuum pump and the second vacuum pump controls between 1000-6000W, and more preferably, power is 4000W.Power need not be too large, and small power can meet the demands, and two pumps are used in conjunction and meet need of work completely.Also have when carrying out vacuum pump type selecting, described first vacuum pump and the second vacuum pump are lobe pump.
In addition, if conveniently the follow-up damage comparison of vacuum pump keeps in repair well be also more of value to control, preferably respectively Safety control valve is set on the first connecting tube with on the second connecting tube, such first Safety control valve is arranged on described first connecting tube, described second Safety control valve is arranged on described second connecting tube, conveniently dismantles control in time.
The present invention is applicable to the making herbs into wool of chain type dry method produces the vaccum-pumping equipment of polysilicon process except providing a kind of, additionally provide adapt with it be applicable to the method that this vaccum-pumping equipment carries out vacuumizing, comprise the steps:
Overhead control valve opens to realize the first vacuum pump, the second vacuum pump works simultaneously carries out load chamber and vacuumizes, after vacuumizing overhead control valve close, then overhead control valve open to realize the first vacuum pump again, the second vacuum pump work simultaneously to unloading chamber vacuumize.
Preferably, the first vacuum pump, the second vacuum pump work simultaneously and carry out time controling that load chamber vacuumizes within 8s, preferred 6-7s; The vacuum tightness of load chamber is also had preferably to control between 10-15Pa.
Certain aforesaid method directly can be realized by system software, and the method can realize the dry method making herbs into wool that the short period completes silicon chip, saves working efficiency.
Prior art is compared, and beneficial effect of the present invention is:
(1) a kind of chain type that is suitable for is embodiments provided in the vaccum-pumping equipment of dry method making herbs into wool production polysilicon process, described vaccum-pumping equipment is well applicable to the making herbs into wool of RIE dry method and produces solar energy polycrystalline silicon battery system, have and simplify treatment process, easy to operate, cost is low, create certain economic benefit, by adopting two lower-powered pumps, and by coordinating switch-valve, realize mutually mating acting in conjunction between two pumps, and the dry method making herbs into wool of silicon chip is completed in the short period, very scientific and effective;
(2) be of the present inventionly applicable to the making herbs into wool of chain type dry method to produce the method that the vaccum-pumping equipment of polysilicon process carries out vacuumizing simple to operate, do not need professional can realize manipulation yet, whole operating process can realize operation in the environment of normal temperature and pressure, operational condition gentleness is not harsh, what this method perfectly solved making herbs into wool of the prior art vacuumizes problem, cost is low simple to operate, be worth follow-up reference application, extensive popularization, for the vacuum pumping technology of this area compensate for technological gap;
(3) vaccum-pumping equipment investment of the present invention is little, floor space is little, working cost is low, and modern dry method making herbs into wool enterprise can realize slitless connection, for enterprise provides cost savings, creates certain economic benefit.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below.
Fig. 1 is the schema of the dry method making herbs into wool production polysilicon process of the embodiment of the present invention one;
Fig. 2 is the structure iron of the vaccum-pumping equipment of the dry method making herbs into wool production polysilicon process of the embodiment of the present invention one;
Fig. 3 be the embodiment of the present invention two dry method making herbs into wool produce polysilicon process vaccum-pumping equipment structure iron,
Reference numeral:
101-load chamber; 102-unloads chamber;
103-first vacuum pump; 104-second vacuum pump;
105-first connecting tube; 106-second connecting tube;
107-the 3rd connecting tube; 108-overhead control valve;
109-first Safety control valve; 110-second Safety control valve.
Embodiment
Below in conjunction with embodiment, embodiment of the present invention are described in detail, but it will be understood to those of skill in the art that the following example only for illustration of the present invention, and should not be considered as limiting the scope of the invention.Unreceipted actual conditions person in embodiment, the condition of conveniently conditioned disjunction manufacturers suggestion is carried out.Agents useful for same or the unreceipted production firm person of instrument, be and can buy by commercially available the conventional products obtained.
Embodiment 1
Accompanying drawing 1 is the technical process of the dry method making herbs into wool of the embodiment of the present invention, whole technique is mainly divided into silicon slice loading and unloading two large steps, be placed in an atmosphere on support plate by silicon chip, support plate is transferred in load chamber by pulley, vacuumizes be extracted into about 10Pa in load chamber.And then be transferred to process cavity accept RIE etching or PECVD plated film.After technique completes, support plate enters unloading chamber (air discharge cavity), passes into nitrogen or air to normal atmosphere in unloading chamber after nitrogen purging several times.Carrier plate transmission goes out to unload chamber.Then silicon chip is removed to next process from support plate.Support plate is recycled to loading area and carries out a new ripple silicon chip process.Load chamber, after support plate exports, carries out nitrogen purging several times, then passes into nitrogen or air to normal atmosphere accepts new support plate.The support plate that next block completes technique could be accepted after same unloading chamber will vacuumize;
Accompanying drawing 2 is the structure iron of the vaccum-pumping equipment of the dry method making herbs into wool production polysilicon process of the embodiment of the present invention, wherein one end of the first connecting tube 105 connects load chamber 101, the other end connects the first vacuum pump 103, second connecting tube 106 one end connects unloading chamber 102, the other end connects the second vacuum pump 104,3rd connecting tube 107 is communicated with the first connecting tube 105 and the second connecting tube 106 respectively, and overhead control valve 108 is arranged on the 3rd connecting tube 107;
During the work concrete operations of vaccum-pumping equipment, when load chamber 101 needs to vacuumize, overhead control valve 108 is open mode, such first vacuum pump 103 and the second vacuum pump 104 work simultaneously, quickening vacuumizes, shortening is evacuated to the time of 15pa in 8s, and the pump of EdwardIQX500 model used respectively by the first vacuum pump and the second vacuum pump, and power controls at about 4000W;
Complete when vacuumizing, control valve is closed, when silicon chip enters unloading chamber 102, when the second vacuum pump 104 needs to blow air, overhead control valve 108 is opened again, is vacuumized simultaneously, can accelerate the time of silicon chip unloading like this by the first vacuum pump 103 and the second vacuum pump 104.
Embodiment 2
Whole technique is mainly divided into silicon slice loading and unloading two large steps, and be placed in an atmosphere on support plate by silicon chip, support plate is transferred in load chamber by pulley, vacuumizes be extracted into about 10Pa in load chamber.And then be transferred to process cavity accept RIE etching or PECVD plated film.After technique completes, support plate enters unloading chamber (air discharge cavity), passes into nitrogen or air to normal atmosphere in unloading chamber after nitrogen purging several times.Carrier plate transmission goes out to unload chamber.Then silicon chip is removed to next process from support plate.Support plate is recycled to loading area and carries out a new ripple silicon chip process.Load chamber, after support plate exports, carries out nitrogen purging several times, then passes into nitrogen or air to normal atmosphere accepts new support plate.The support plate that next block completes technique could be accepted after same unloading chamber will vacuumize, accompanying drawing 3 is the structure iron of the vaccum-pumping equipment of the dry method making herbs into wool production polysilicon process of the embodiment of the present invention, wherein one end of the first connecting tube 105 connects load chamber 101, the other end connects the first vacuum pump 103, second connecting tube 106 one end connects unloading chamber 102, the other end connects the second vacuum pump 104, 3rd connecting tube 107 is communicated with the first connecting tube 105 and the second connecting tube 106 respectively, overhead control valve 108 is arranged on the 3rd connecting tube 107, first connecting tube 105 and the second connecting tube 106 are respectively arranged with the first Safety control valve 109 and the second Safety control valve 110, wherein overhead control valve is wiping board valve,
During the work concrete operations of vaccum-pumping equipment, when load chamber 101 needs to vacuumize, overhead control valve 108, first Safety control valve 109 is open mode, such first vacuum pump 103 and the second vacuum pump 104 work simultaneously, quickening vacuumizes, shorten be evacuated to 10pa time to 6-7s, the first vacuum pump and the second vacuum pump send out the pump not using Korea S LOTFD3000, power controls at 6000W;
Complete when vacuumizing, control valve is closed, when silicon chip enters unloading chamber 102, when the second vacuum pump 104 needs to blow air, overhead control valve 108 and the second Safety control valve 110 are opened again, vacuumized by the first vacuum pump 103 and the second vacuum pump 104 simultaneously, the time of silicon chip unloading can be accelerated like this, when vacuum pump is changed by needs, first Safety control valve 109 and the second Safety control valve 110 can be arranged to closing condition, then vacuum pump is disassembled the pump housing more renewed, flexible to operation.
Embodiment 3
Other operation stepss are substantially identical with the embodiment of the present invention 2, and just the pipe diameter of the second connecting tube and the 3rd connecting tube needs to control between 100-200mm.
Although illustrate and describe the present invention with specific embodiment, however it will be appreciated that can to make when not deviating from the spirit and scope of the present invention many other change and amendment.Therefore, this means to comprise all such changes and modifications belonged in the scope of the invention in the following claims.
Claims (10)
1. the vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating, it is characterized in that, comprising: the load chamber vacuumized before carrying out etching technics for silicon chip, for carrying out backfilling the unloading chamber of air discharging, the first vacuum pump and the second vacuum pump after silicon chip being completed etching technics;
Described load chamber is connected with described first vacuum pump, the second vacuum pump, and described unloading chamber is with being connected with described first vacuum pump, the second vacuum pump.
2. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 1, is characterized in that, also comprise the first connecting tube, the second connecting tube and the 3rd connecting tube, overhead control valve;
One end of described first connecting tube connects load chamber, the other end connects the first vacuum pump, one end of described second connecting tube connects unloading chamber, the other end connects the second vacuum pump, described 3rd connecting tube is communicated with the first connecting tube, the second connecting tube respectively, and described overhead control valve is arranged on described 3rd connecting tube.
3. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 2, it is characterized in that, the first connecting tube, the pipe diameter of the second connecting tube and the 3rd connecting tube controls between 100-200mm.
4. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 2, is characterized in that, described overhead control valve is wherein a kind of in wiping board, angle valve and ball valve.
5. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 1, it is characterized in that, the power of described first vacuum pump and the second vacuum pump controls between 1000-6000W.
6. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 5, it is characterized in that, described first vacuum pump and the second vacuum pump are lobe pump.
7. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 2, it is characterized in that, also comprise the first Safety control valve, described first Safety control valve is arranged on described first connecting tube.
8. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 7, it is characterized in that, also comprise the second Safety control valve, described second Safety control valve is arranged on described second connecting tube.
9. adopt the vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating described in any one of claim 2-8 to carry out the method vacuumized, it is characterized in that, comprise the steps:
Overhead control valve opens to realize the first vacuum pump, the second vacuum pump works simultaneously carries out load chamber and vacuumizes, after vacuumizing overhead control valve close, then overhead control valve open to realize the first vacuum pump again, the second vacuum pump work simultaneously to unloading chamber vacuumize.
10. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum plating according to claim 9 carries out the method that vacuumizes, it is characterized in that, first vacuum pump, the second vacuum pump work simultaneously and carry out time controling that load chamber vacuumizes within 8s, preferred 6-7s;
Preferably, the vacuum degree control of load chamber is between 10-15Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511033386.7A CN105441908A (en) | 2015-12-31 | 2015-12-31 | Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511033386.7A CN105441908A (en) | 2015-12-31 | 2015-12-31 | Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating |
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| CN105441908A true CN105441908A (en) | 2016-03-30 |
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| CN201511033386.7A Pending CN105441908A (en) | 2015-12-31 | 2015-12-31 | Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105957925A (en) * | 2016-07-14 | 2016-09-21 | 常州比太科技有限公司 | Chain transmission system |
| CN106544725A (en) * | 2016-10-17 | 2017-03-29 | 镇江荣德新能源科技有限公司 | Device is saved in a kind of polycrystalline furnace vacuum pump failure bridging |
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| CN108063107A (en) * | 2018-01-19 | 2018-05-22 | 常州比太黑硅科技有限公司 | A kind of high yield energy chain type transmission vacuum etching and filming equipment |
| CN111843407A (en) * | 2020-07-29 | 2020-10-30 | 扬州大学 | Nitriding device and nitriding processing method for 304 stainless steel spiral reamer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105957925A (en) * | 2016-07-14 | 2016-09-21 | 常州比太科技有限公司 | Chain transmission system |
| CN106544725A (en) * | 2016-10-17 | 2017-03-29 | 镇江荣德新能源科技有限公司 | Device is saved in a kind of polycrystalline furnace vacuum pump failure bridging |
| CN107142464A (en) * | 2017-05-02 | 2017-09-08 | 惠科股份有限公司 | A kind of chemical vapor deposition film device |
| CN108063107A (en) * | 2018-01-19 | 2018-05-22 | 常州比太黑硅科技有限公司 | A kind of high yield energy chain type transmission vacuum etching and filming equipment |
| CN111843407A (en) * | 2020-07-29 | 2020-10-30 | 扬州大学 | Nitriding device and nitriding processing method for 304 stainless steel spiral reamer |
| CN111843407B (en) * | 2020-07-29 | 2021-11-02 | 扬州大学 | Nitriding device and nitriding processing method for 304 stainless steel spiral reamer |
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Application publication date: 20160330 |