CN207452246U - A kind of vacuum coating equipment - Google Patents
A kind of vacuum coating equipment Download PDFInfo
- Publication number
- CN207452246U CN207452246U CN201721590761.2U CN201721590761U CN207452246U CN 207452246 U CN207452246 U CN 207452246U CN 201721590761 U CN201721590761 U CN 201721590761U CN 207452246 U CN207452246 U CN 207452246U
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- Prior art keywords
- transition
- plated film
- target
- connector
- vacuum coating
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Abstract
The utility model provides a kind of vacuum coating equipment, including cavity, the cavity includes several end to end plated film spaces, target is both provided in each plated film space, tap probe, substrate and the first vacuumizing assembly, spatial transition is both provided between the two neighboring plated film space, the volume of spatial transition is less than the volume in any plated film space, the both sides of the spatial transition are both provided with transition wall, transition valve is both provided on the transition wall, the spatial transition may be selected to connect or completely cut off with positioned at the plated film space of the spatial transition both sides by the transition valve, the second vacuumizing assembly is both provided in each spatial transition.A kind of vacuum coating equipment provided by the utility model can improve manufacture efficiency.
Description
Technical field
The utility model belongs to filming equipment field, is related to a kind of vacuum coating equipment.
Background technology
Vacuum Coating method is that a kind of opto-electronics, semiconductor industry in touch panel, solar cell etc. is common
Coating technique, it is known that Vacuum Coating method includes the modes such as physical vapor deposition (PVD), chemical vapor deposition (CVD).With film too
, it is necessary to plate transparent conductive film electrode, photoelectric conversion layer in a substrate using vacuum coating mode exemplified by positive energy battery manufacturing procedure
Etc. film layers or, such as copper and indium gallium thin-film solar cells make when, then need to plate Copper thin film, indium film prior to substrate
Carry out selenization again afterwards.Therefore, existing a kind of vacuum coating equipment is that several chambers, each chamber are equipped in a cavity
Room can carry out the film-plating process of different materials film, and valve is equipped between adjacent chamber, be controlled by valve opening and closing between chamber
Connection whether.Therefore when carrying out the film-plating process of solar cell, mainly first make substrate in plating first in first chamber
The film of kind material then opens the valve between first chamber and second chamber, the substrate is made to be transported to second chamber
The film of second of material is plated, follow-up the rest may be inferred, opens next valve, and substrate is transported to next chamber plated film.
But because control valve opens and closes, the regular hour can be expended.And after valve opening, adjacent two chamber
Will interconnect, the working gas in a upper chamber can be flowed in next chamber, and then under the influence of the indoor vacuum degree of a chamber,
And any chamber is when will carry out plated film, it is necessary to will be first extracted into chamber after certain vacuum degree and be passed through working gas again, therefore
After substrate is sent into next chamber, in order to maintain the vacuum degree of next chamber, and it must vacuumize again and expend the time, such as
This causes that processing procedure is troublesome, the time is long, and manufacture efficiency is low.
Utility model content
The purpose of this utility model is to provide a kind of vacuum coating equipments, it is intended to solve the problems, such as that manufacture efficiency is low.
In order to solve the above technical problems, the utility model provides a kind of vacuum coating equipment, and including cavity, the cavity
Include several end to end plated film spaces, be both provided in each plated film space target, tap probe, substrate with
And first vacuumizing assembly, it is both provided with spatial transition, the volume of spatial transition between the two neighboring plated film space
Less than the volume in any plated film space, the both sides of the spatial transition are both provided with transition wall, are both provided on the transition wall
Transition valve, the spatial transition by the transition valve may be selected with positioned at the spatial transition both sides plated film space connect or every
Absolutely, it is both provided with the second vacuumizing assembly in each spatial transition.
The utility model is further arranged to, and the first heating structure is provided in the spatial transition, for empty to transition
Between be internally heated.
The utility model is further arranged to, and volume reduction body is provided in the spatial transition, may flow into for reducing
Cross the volume of gas in space.
The utility model is further arranged to, and has been further included and has been prepared chamber and prepare wall, has been set on the preparation wall
Preparation valve is equipped with, the preparation chamber is located at the end of cavity, for being pre-processed to substrate to be processed, the preparation chamber
Room connects or completely cuts off with plated film space by preparing valve, and the 3rd vacuumizing assembly is provided in the preparation chamber.
The utility model is further arranged to, and the second heating structure is additionally provided in the preparation chamber, for being located at
The substrate prepared in chamber is heated.
The utility model is further arranged to, and connector and driving body, the drive are additionally provided in the plated film space
Kinetoplast is connected with connector and is used to be drivingly connected body activity, and the target is connected with connector, and the connector is used to drive
Target activity simultaneously to tap the different parts that probe may act on target.
The utility model is further arranged to, and the target and connector are cirque structure, the driving body driving
Connector and target do circular ring shape rotation, and the probe that taps may act on the cirque structure of target.
The utility model is further arranged to, and further includes the cooling water pipe being arranged on the connector, for being passed through
Cooling water cools down to connector, and the cooling water pipe is cirque structure, and cooling water pipe fits in the side of connector.
The utility model is further arranged to, and the flow direction of the cooling water is opposite with the rotation direction of connector.
The utility model is further arranged to, and the target and connector are string configuration, and the driving body drives
It moves the connector and does straight reciprocating motion with target, the probe that taps may act on the string configuration of target.
Compared with prior art, the utility model provides a kind of vacuum coating equipment, carry out several step plated films when
It waits, substrate is first into progress first layer vacuum coating in first plated film space, after first layer is completed in spatial transition,
Then the transition valve of spatial transition both sides is closed, and the second vacuumizing assembly activity exhausts the shape that is evacuated in the spatial transition
A transition valve of the spatial transition is opened afterwards and so that the substrate is entered in next plated film space, substrate enters down
Transition valve is closed after in one coating chamber, the activity and by the evacuating air in spatial transition again of the second vacuumizing assembly；
Wherein when the substrate is located in spatial transition, previous plated film space due to be in isolation with closing state, institute so as to
Simultaneously to next substrate carry out plated film, when next substrate first layer plated film complete after can be sent directly into
In the spatial transition of vacuum state, it is flowed into the plated film space, ensure that without having the gas in next plated film space
Coating quality, simultaneously because vacuum state in the plated film space again need not be processed next substrate, so
So that the process of the plated film is faster, similarly subsequent plated film space also need not all be evacuated in plated film, only need spatial transition
The transmission of substrate can be carried out by being evacuated, simultaneously because the volume of spatial transition thus makes compared to plated film space smaller
Vacuumizing for spatial transition can also carry out faster, speed of substrate when plated film also just faster, improves manufacture effect
Rate.
Description of the drawings
Fig. 1 is a kind of structure diagram of one embodiment of vacuum coating equipment of the utility model；
Fig. 2 is the top view of one embodiment driving body of the utility model and cooling water pipe.
Wherein, 1, cavity；2nd, plated film space；3rd, target；4th, probe is tapped；5th, substrate；6th, the first vacuumizing assembly；7th, mistake
Cross space；8th, transition wall；9th, transition valve；10th, the second vacuumizing assembly；11st, volume reduction body；12nd, chamber is prepared；13rd, wall is prepared；
14th, valve is prepared；15th, the 3rd vacuumizing assembly；16th, connector；17th, driving body；18th, cooling water pipe.
Specific embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes a kind of vacuum coating equipment make further it is detailed
It describes in detail bright.According to following explanation and claims, will be become apparent from feature the advantages of the utility model.It is it should be noted that attached
Figure is only new conveniently, lucidly to aid in illustrating this practicality using very simplified form and using non-accurate ratio
The purpose of type embodiment.The same or similar reference numeral represents the same or similar component in attached drawing.
Embodiment 1
A kind of vacuum coating equipment, as depicted in figs. 1 and 2, including cavity 1, the cavity 1 includes several head and the tail phases
Plated film space 2 even is both provided with target 3 in each plated film space 2, taps probe 4, substrate 5 and first vacuumize
Component 6, wherein target 3 can be one kind in gold or other noble metals, such as ruthenium, rhodium, palladium, osmium, iridium, platinum, this implementation
Target 3 is gold in example, and spatial transition 7, the appearance of spatial transition 7 are both provided between the two neighboring plated film space 2
Product is less than the volume in any plated film space 2, and the both sides of the spatial transition 7 are both provided with transition wall 8, on the transition wall 8
Transition valve 9 is provided with, the spatial transition 7 may be selected empty with the plated film positioned at 7 both sides of spatial transition by the transition valve 9
Between 2 connections or isolation, be both provided with the second vacuumizing assembly 10 in each spatial transition 7.
The first heating structure is provided in the spatial transition 7, for being internally heated to spatial transition 7.The mistake
It crosses in space 7 and is provided with volume reduction body 11, for reducing the volume that may flow into gas in spatial transition 7.
It has further included and has prepared chamber 12 and prepare wall 13, be provided on the preparation wall 13 and prepare valve 14, it is described
Prepare the end that chamber 12 is located at cavity 1, for being pre-processed to substrate to be processed, the preparation chamber 12 passes through preparation
Valve 14 is connected or completely cut off with plated film space 2, and the 3rd vacuumizing assembly 15, the preparation chamber are provided in the preparation chamber 12
The second heating structure is additionally provided in 12, for being heated to being located at the substrate in preparation chamber 12.
Connector 16 and driving body 17 are additionally provided in the plated film space 2, the driving body 17 connects with connector 16
It connects and is used to be drivingly connected 16 activity of body, the target 3 is connected with connector 16, and the connector 16 is used to that target 3 to be driven to live
It moves and so that taps the different parts that probe 4 may act on target 3.
Wherein, the target 3 and connector 16 are cirque structure, and the driving body 17 is drivingly connected body 16 and target
Material 3 does circular ring shape rotation, and the probe 4 that taps is acted on the cirque structure of target 3.It has further included and has been arranged at the connection
Cooling water pipe 18 on body 16 cools down to connector 16 for being passed through cooling water, and the cooling water pipe 18 is circular ring shape knot
Structure, and cooling water pipe 18 fits in the side of connector 16, the flow direction of the cooling water and the rotation direction of connector 16
On the contrary.
In conclusion a kind of vacuum coating equipment provided by the utility model, when plated film is carried out, first substrate into
Enter into preparation chamber 12, while prepare valve 14 and close, do not interfere with the normal plated film in follow-up plated film space 2；Preparing chamber
3rd vaccum-pumping equipment and the activity of the second heating structure in 12, will prepare chamber 12 and be evacuated, while adherency and substrate surface
Air can be cleaned, simultaneously because the second heating structure can heat substrate, so allow for substrate surface
Air cleaning quality is more preferably.
The preparation valve 14 that substrate cleaning prepares after completing on wall 13 is opened, and substrate enters first plated film space 2
In, all in closed state, 6 activity of the first vacuumizing assembly simultaneously causes the preparation valve 14 and transition valve 9 of 2 both sides of plated film space
In vacuum state in plated film space 2, and normal plated film being carried out, after plated film is completed, the transition valve 9 on transition wall 8 is opened,
And substrate is entered in spatial transition 7, second vacuumizing assembly 10 is movable in spatial transition 7 and is pumped into spatial transition 7
Vacuum, the activity of the second vacuumizing assembly 10 when prepare chamber 12 and previous plated film space 2 directly to second substrate into
Row processing, after spatial transition 7 exhausts, the transition valve 9 of 7 opposite side of spatial transition open and so that substrate enter it is next
In plated film space 2, at the same the activity of the second vacuumizing assembly 10 so that spatial transition 7 recover vacuum wait next substrate into
Enter, successively back and forth, complete the plated film layer by layer to substrate.
Wherein, after substrate is entered from a plated film space 2 in spatial transition 7, can directly carry out to next base
The plated film of piece, without being carried out after the plated film space 2 is evacuated, wherein since the volume of spatial transition 7 is less than
The volume in plated film space 2, so spatial transition 7 is more than the conduction of velocity of substrate the rate that plated film space 2 carries out plated film, institute
To work as plated film space 2 complete that directly substrate can be sent in spatial transition 7 after plated film, improve the rate of plated film with
Manufacturing speed；And due to each spatial transition 7 receive or send out after substrate all can vacuum state, so can also prevent
Stop bit makes a difference between each other in the plated film space 2 of both sides, the guarantee that the quality of plated film can be higher.
The total amount for entering air in spatial transition 7 is reduced by volume reduction body 11, so the second vacuumizing assembly 10 exists
When being vacuumized can relatively simple convenience, not only increase processing efficiency, while also reduce second and vacuumize group
The load of part 10, when substrate is located in spatial transition 7, substrate is heated by the first heating structure can be preferable
Will adhere to and removed with the residual gas on substrate, improve the cleaning effect to substrate, while but also substrate next
It can preferably be carried out in coating process so that the quality higher of plated film.
When carrying out plated film to substrate in plated film space 2, percussion probe 4 back and forth towards 3 activity of target and taps target
3, while driving body 17 is drivingly connected body 16 and target 3 and moves in a circle, the whole circumference shape structure of such target 3 can be by
To the effect for tapping probe 4, it is therefore prevented that the loss of whole uniformity can occur for the loss that target 3 is concentrated, i.e. target 3,
Improve the utilization quality of target 3；The position of cooling water pipe 18 is fixed, while cooling water pipe 18 is also circle, and is fitted in
On connector 16, relatively rotated with connector 16, so when flow of cooling water just can preferably to connector 16 into
Row cooling, while the rotation direction of the flow direction of cooling water and connector 16 is on the contrary, so cooling water is to the cold of connector 16
It is better.
Embodiment 2
A kind of vacuum coating equipment, the difference is that, the target 3 and connector 16 are length with embodiment 1
Strip structure, the driving body 17 drives the connector 16 to do straight reciprocating motion with target 3, described to tap 4 effect of probe
In on the string configuration of target 3, the utilization quality higher of target 3.
Driving body 17 drives target 3 to do straight reciprocating motion, while taps probe 4 and do compared with the past of 3 direction of target
Multiple movement, the loss that such target 3 is subject to also can be uniformly distributed in the overall structure of target 3.
It should be noted that each embodiment is described by the way of progressive in this specification, each embodiment emphasis is said
Bright is all difference from other examples, and just to refer each other for identical similar portion between each embodiment.
Foregoing description is only the description to the utility model preferred embodiment, not to any limit of the scope of the utility model
Calmly, any change, the modification that the those of ordinary skill in the utility model field does according to the disclosure above content, belonging to right will
Seek the protection domain of book.
Claims (10)
1. a kind of vacuum coating equipment, which is characterized in that including cavity (1), the cavity (1) includes several and joins end to end
Plated film space (2), target (3) is both provided in each plated film space (2), taps probe (4), substrate (5) and the
One vacuumizing assembly (6) is both provided with spatial transition (7), spatial transition between the two neighboring plated film space (2)
(7) volume is less than the volume of any plated film space (2), and the both sides of the spatial transition (7) are both provided with transition wall (8), institute
It states and transition valve (9) is both provided on transition wall (8), the spatial transition (7) may be selected to be somebody's turn to do with being located at by the transition valve (9)
It is true to be each both provided with the second pumping in the spatial transition (7) for plated film space (2) connection or isolation of spatial transition (7) both sides
Empty component (10).
2. a kind of vacuum coating equipment according to claim 1, which is characterized in that be provided in the spatial transition (7)
First heating structure, for being internally heated to spatial transition (7).
3. a kind of vacuum coating equipment according to claim 1 or 2, which is characterized in that set in the spatial transition (7)
There is volume reduction body (11), for reducing the volume that may flow into gas in spatial transition (7).
4. a kind of vacuum coating equipment according to claim 3, which is characterized in that further included preparation chamber (12) and
Prepare wall (13), be provided on the preparation wall (13) and prepare valve (14), the preparation chamber (12) is located at cavity (1)
End, for being pre-processed to substrate to be processed, the preparation chamber (12) is by preparing valve (14) and plated film space (2)
Connection or isolation, it is described to prepare to be provided with the 3rd vacuumizing assembly (15) in chamber (12).
5. a kind of vacuum coating equipment according to claim 4, which is characterized in that also set up in the preparation chamber (12)
There is the second heating structure, for being heated to being located at the substrate in preparation chamber (12).
6. a kind of vacuum coating equipment according to claim 1, which is characterized in that also set up in the plated film space (2)
There are connector (16) and driving body (17), the driving body (17) is connected with connector (16) and for being drivingly connected body (16)
Activity, the target (3) are connected with connector (16), and the connector (16) is used to drive target (3) activity and to tap
Probe (4) may act on the different parts of target (3).
7. a kind of vacuum coating equipment according to claim 6, which is characterized in that the target (3) and connector (16)
It is cirque structure, the driving body (17) is drivingly connected body (16) and target (3) does circular ring shape rotation, and described tap is visited
Head (4) may act on the cirque structure of target (3).
8. a kind of vacuum coating equipment according to claim 7, which is characterized in that further included and be arranged at the connector
(16) cooling water pipe (18) on cools down to connector (16) for being passed through cooling water, and the cooling water pipe (18) is circle
Loop configuration, and cooling water pipe (18) fits in the side of connector (16).
9. a kind of vacuum coating equipment according to claim 8, which is characterized in that the flow direction of the cooling water and company
The rotation direction of junctor (16) is opposite.
10. a kind of vacuum coating equipment according to claim 6, which is characterized in that the target (3) and connector
(16) it is string configuration, the driving body (17) drives the connector (16) to do straight reciprocating motion with target (3), institute
Percussion probe (4) is stated to may act on the string configuration of target (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721590761.2U CN207452246U (en) | 2017-11-24 | 2017-11-24 | A kind of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721590761.2U CN207452246U (en) | 2017-11-24 | 2017-11-24 | A kind of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207452246U true CN207452246U (en) | 2018-06-05 |
Family
ID=62276990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721590761.2U Expired - Fee Related CN207452246U (en) | 2017-11-24 | 2017-11-24 | A kind of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207452246U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113403589A (en) * | 2021-03-19 | 2021-09-17 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
-
2017
- 2017-11-24 CN CN201721590761.2U patent/CN207452246U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113403589A (en) * | 2021-03-19 | 2021-09-17 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
| CN113403589B (en) * | 2021-03-19 | 2023-08-18 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180605 Termination date: 20181124 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |