CN205258603U - A evacuation equipment that is used for making herbs into wool of chain dry process and vacuum coating - Google Patents
A evacuation equipment that is used for making herbs into wool of chain dry process and vacuum coating Download PDFInfo
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- CN205258603U CN205258603U CN201521136886.9U CN201521136886U CN205258603U CN 205258603 U CN205258603 U CN 205258603U CN 201521136886 U CN201521136886 U CN 201521136886U CN 205258603 U CN205258603 U CN 205258603U
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Abstract
The utility model provides an evacuation equipment that is used for making herbs into wool of chain dry process and vacuum coating, include: an uninstallation chamber, first vacuum pump and second vacuum pump that be used for the silicon chip carry on evacuation before the etching process the loading chamber, be used for accomplishing the silicon chip and backfill the atmosphere behind the etching process and unload, load chamber and first vacuum pump, the 2nd vacuum pump connection, uninstallation chamber and first vacuum pump, the 2nd vacuum pump connection. A continuous recycling production system of chain, loading and uninstallation work are accomplished with alternative evacuation in uninstallation chamber and backfill air in order to reach in the loading chamber in the minimum time. The utility model discloses a make equipment capacity the highest, convenient operation, it is with low costs, created the economic benefits who is showing.
Description
Technical field
The utility model relates to crystal silicon solar batteries production equipment field, is applicable to chain type in particular to oneThe equipment that the equipment of dry method making herbs into wool and PECVD vacuum coating production crystal silicon solar batteries technique vacuumizes.
Background technology
Crystal silicon solar batteries has that technique is simple, solar conversion efficiency is compared with advantages of higher and by large-scale application, andThe present starts to have the trend such as the traditional fossil energy of replacement.
In the production of crystal silicon battery, the making herbs into wool of RIE dry method and PECVD vacuum coating are two important vacuum technology skillsArt. The making herbs into wool of RIE dry method is the rough surface that forms antiradar reflectivity under vacuum chemistry atmosphere through excitation of plasma. And plasma is strongChemical vapour deposition (CVD) (PECVD) vacuum coating of changing is to be used in front surface silicon nitride anti-reflective film and back of the body surface alumina oxide and nitrogenizeThe formation of silicon passivating film.
In prior art, the common technological process of the making herbs into wool of RIE dry method and PECVD vacuum coating technology is: by silicon chip greatlyIn gas, be placed on support plate, support plate is transferred in load chamber by pulley, vacuumizes and is extracted into 10Pa left and right in load chamber. And thenBe transferred to process cavity and accept RIE etching or PECVD plated film. After technique completes, support plate enters unloading chamber (air discharge cavity), in unloading chamberThrough passing into nitrogen or atmosphere after nitrogen blowing several times to atmospheric pressure. Carrier plate transmission goes out to unload chamber. Then silicon chip is got from support plateUnder carry out next process. Support plate is recycled to loading area and carries out a new ripple silicon chip processing. Load chamber, after support plate output, is carried out severalInferior nitrogen blowing, then passes into nitrogen or atmosphere to atmospheric pressure and accepts new support plate. Same unloading chamber will vacuumize rear acceptanceNext piece completes the support plate of technique.
Load chamber, unloading chamber vacuumize, and generally can respectively be controlled by a pump, and need to locate in operating processOn the reason time, be in step with and just can make technique carry out smoothly, especially in order to realize higher production capacity, reach certain economy effectBenefit, the total time that support plate stops in load chamber is limited. Such as a support plate that can fill 40 silicon chips, its pitch time isJust can meet the disposal ability of 3600 slices/hour above silicon chips 40 seconds. In the case, also need because transmitting and purgingTime, the time vacuumizing is just very limited, need in 8 seconds, complete as calculated, is evacuated down to 10Pa. This is just to veryThe pumping speed of empty pump is had higher requirement, and the commercially available pump (for example Britain EdwardIQX500 pump) generally using is generalThe vacuum that needs just can be extracted into for 12 seconds 10Pa, can not meet operation requirements. In the time of design and the larger pump of selection,Power consumption, noise etc. are just found to increase thereupon. So need to improve the pumping speed of pump and don't can increase outfit of equipment operation cost.
In view of this, special the utility model that proposes.
Utility model content
The first object of the present utility model is to provide vaccum-pumping equipment used in a kind of dry method process for etching flow process, instituteState vaccum-pumping equipment and be well applicable to RIE dry method making herbs into wool production solar energy polycrystalline silicon battery system, have and simplified processing sideMethod, has improved production capacity, easy to operate, and cost is low, has created significant economic benefit, by adopting two lower-powered pumps,And by coordinating control valve, realize coupling acting in conjunction mutually between two pumps, and a chain type continuous circulation production system, dressCarrying chamber alternately vacuumizes with backfill air and within the minimum time, completes loading and unloading work, very science to reach with unloading chamberEffectively.
The second object of the present utility model is to provide the method that adopts this vacuum system to vacuumize, described in vacuumizeThe method adaptation that can match with vaccum-pumping equipment, completes the whole behaviour of vacuumizing smoothly and cheaply by Software for Design instructionDo.
In order to realize above-mentioned purpose of the present utility model, spy by the following technical solutions:
The utility model embodiment provide a kind of be applicable to the making herbs into wool of chain type dry method produce vacuumizing of polysilicon process establishStandby, this equipment comprises following assembly: the load chamber of carrying out vacuumizing before etching technics for silicon chip, for silicon chip is completed to etchingAfter technique, carry out unloading chamber, the first vavuum pump and second vavuum pump of the discharging of backfill atmosphere;
Described load chamber is connected with described the first vavuum pump, the second vavuum pump simultaneously, the described unloading chamber while and described theOne vavuum pump, the second vavuum pump connect.
The common technological process of RIE dry method making herbs into wool technology of the prior art is: silicon chip is placed in atmosphere to support plateUpper, support plate is transferred in load chamber by pulley, vacuumizes and is extracted into 10Pa left and right in load chamber. And then be transferred to process cavity and connectBe subject to RIE etching or PECVD plated film. After technique completes, support plate enters unloading chamber (air discharge cavity), blows through nitrogen several times in unloading chamberAfter sweeping, pass into nitrogen or atmosphere to atmospheric pressure. Carrier plate transmission goes out to unload chamber. Then silicon chip is removed to next process from support plate.Support plate is recycled to loading area and carries out a new ripple silicon chip processing. Load chamber, after support plate output, is carried out nitrogen blowing several times, then logicalEnter nitrogen or atmosphere to atmospheric pressure and accept new support plate. Same unloading chamber will vacuumize rear next piece of accepting and complete carrying of techniquePlate.
Load chamber, unloading chamber vacuumize, and generally can respectively be controlled by a pump, and need to locate in operating processOn the reason time, be in step with and just can make technique carry out smoothly, especially in order to realize higher production capacity, reach certain economy effectBenefit, the total time that support plate stops in load chamber is limited. Such as a support plate that can fill 40 silicon chips, its pitch time isJust can meet the disposal ability of 3600 slices/hour above silicon chips 40 seconds. In the case, also need because transmitting and purgingTime, the time vacuumizing is just extremely important, need in 8 seconds, complete as calculated, is evacuated down to 10Pa. This is just rightThe pumping speed of vavuum pump is had higher requirement, and commercially available common pump generally need to just can be extracted into the true of 10Pa 12 secondsReciprocal of duty cycle, can not meet operation requirements. In the time of design and the larger pump of selection, power consumption, noise etc. are just found to increase thereupon.So need to improve the pumping speed of pump and don't can increase outfit of equipment operation cost. In view of the demand of cost and production output,The common manufacturing process of prior art can not meet the demands, and the utility model is in order to solve the technical problem of above appearance,Spy provides a kind of vaccum-pumping equipment that is applicable to dry method making herbs into wool production polysilicon process, and this equipment is except carving for silicon chipErosion load chamber and for silicon chip being carried out to the unloading chamber of discharging, also comprise the first vavuum pump and the second vavuum pump, loadChamber is connected with two vavuum pumps simultaneously, and unloading chamber is also connected with these two vavuum pumps simultaneously, like this when load chamber need of work is taken outWhen vacuum, two vavuum pumps are worked and are vacuumized simultaneously, and in the time of the work of unloading chamber, two vavuum pumps are worked to unloading chamber simultaneouslyVacuumize, if when certain unloading chamber and load chamber are not worked, at this moment two vavuum pumps can not worked, according toConcrete operations condition free is selected, and designs like this pumped vacuum systems and both can realize low cost, adopts two relative powersSmaller pump just can meet operation requirements, and can also realize in 8S and be evacuated down to 10Pa, can not incur loss through delay the polysilicon sunThe normal production of energy battery.
Further, in order further to optimize pumped vacuum systems, this vaccum-pumping equipment also comprises the first connecting pipe, secondConnecting pipe and the 3rd connecting pipe, master control valve, one end of described the first connecting pipe connects load chamber, and the other end connectsThe first vavuum pump, one end of described the second connecting pipe connects unloading chamber, and the other end connects the second vavuum pump, and the described the 3rd connectsPipeline is communicated with the first connecting pipe, the second connecting pipe respectively, and described master control valve is arranged in described the 3rd connecting pipe.
So load chamber is connected with the first vavuum pump by the first connecting pipe, and unloading chamber is by the second connecting pipeBe connected with the second vavuum pump, then the first connecting pipe is communicated with the second connecting pipe by the 3rd connecting pipe again, is equivalent toTwo vavuum pumps are perfectly communicated with, while facilitating load chamber or the work of unloading chamber, use, in order to be conveniently controlled at the 3rd connectionOn pipeline, be provided with control valve, when specific works, operation principle is as follows: in the time that load chamber need to vacuumize, control valve is for openingState, such the first vavuum pump and the second vavuum pump are worked simultaneously, accelerate to vacuumize, and shorten the time that is evacuated to 10pa to 8sIn;
Complete when vacuumizing, master control valve cuts out, when silicon chip enters unloading chamber, and in the time that the second vavuum pump need to blow atmosphere,Master control valve is opened again, unloading chamber is vacuumized by the first vavuum pump and the second vavuum pump simultaneously, can accelerate like this silicon chipThe time of unloading, because unloading chamber could be accepted the support plate of next piece technique again after will vacuumizing. Visible use is not only convenient, alsoImprove operating efficiency, reduced running cost.
Preferably, the first connecting pipe, the pipe diameter of the second connecting pipe and the 3rd connecting pipe is preferably controlled atBetween 100-200mm, caliber need to be controlled in suitable scope, and can not be too thick cost is higher, if but too thinCan affect the speed of evacuation, therefore need to be controlled in suitable scope.
Preferably, master control valve is chosen as the wherein one in wiping board, angle valve and ball valve, and ball valve is driven by valve rod, andThe valve rotating around ball valve axis. Also can be used for adjusting and the control of fluid, wherein firmly seal its V-type ball of V-type ball valveBetween core and the metal seat valve of pile-up welding hard alloy, there is very strong shearing force, be specially adapted to fibre-bearing, small solid particleDeng medium. And multi-pass ball valve not only switching of the interflow of control medium, shunting and the flow direction flexibly on pipeline, also simultaneouslyCan close arbitrary passage and two other passage is connected, ball valve flow resistance is little, but lightweight to be unsuitable for flow too largeFluid passes through, and when practical application, can carry out as required free selection, in addition more excellent can also realization automatically by control systemBy-pass valve control, does not need manually to operate, more convenient and smart.
Preferably, the power of described the first vavuum pump and the second vavuum pump is controlled between 1000-6000W, more preferablyGround, power is 4000W. Power need not be too large, and small-power can meet the demands, and two pumps are used in conjunction and meet need of work completely. Also haveIn the time carrying out vavuum pump type selecting, described the first vavuum pump and the second vavuum pump are lobe pump.
In addition, if be also more of value to control in order to facilitate the follow-up damage comparison of vavuum pump to keep in repair well, preferably respectivelyIn one connecting pipe with in the second connecting pipe, Safety control valve is set, such the first Safety control valve is arranged at described first and connectsTake on road, described the second Safety control valve is arranged in described the second connecting pipe, and convenient dismounting is in time controlled.
The utility model is except providing a kind of vaccum-pumping equipment that is applicable to chain type dry method making herbs into wool production polysilicon process, alsoThe method that this vaccum-pumping equipment vacuumizes that is applicable to adapting is with it provided, has comprised the steps:
Master control valve is opened to realize the first vavuum pump, the second vavuum pump and is worked simultaneously and carry out load chamber and vacuumize, and takes out trueAfter sky, master control valve cuts out, and it is right that then master control valve opens to realize the first vavuum pump again, the second vavuum pump is worked simultaneouslyUnloading chamber vacuumizes.
Preferably, the first vavuum pump, the second vavuum pump work simultaneously carry out time that load chamber vacuumizes be controlled at 8s withIn, preferably 6-7s; Also have the vacuum of load chamber to be preferably controlled between 10-15Pa.
Certainly said method can directly be realized by systems soft ware, and the method can realize the short period and complete silicon chipDry method making herbs into wool, has saved operating efficiency.
Prior art is compared, and the beneficial effects of the utility model are:
(1) the utility model embodiment provides a kind of applicable chain type to produce vacuumizing of polysilicon process in dry method making herbs into woolEquipment, described vaccum-pumping equipment is well applicable to the making herbs into wool of RIE dry method and produces solar energy polycrystalline silicon battery system, has and has simplifiedProcessing method, easy to operate, cost is low, has created certain economic benefit, by adopting two lower-powered pumps, and passes throughCoordinate switch valve, realize coupling acting in conjunction mutually between two pumps, and complete the dry method making herbs into wool of silicon chip in the short period, veryScientific and effective;
(2) vaccum-pumping equipment that is applicable to chain type dry method making herbs into wool production polysilicon process of the present utility model vacuumizesMethod simple to operate, do not need professional can realize manipulation yet, whole operating process is in the environment of normal temperature and pressureRealize operation, operating condition gentleness is not harsh, and this method has perfectly solved the problem that vacuumizes of making herbs into wool of the prior art,Cost is low simple to operate, is worth follow-up reference application, extensively promotes, for the vacuum pumping technology of this area has made up technological gap;
(3) vaccum-pumping equipment investment of the present utility model is little, floor space is little, operating cost is low, and modern dry method making herbs into woolEnterprise can realize slitless connection, for enterprise provides cost savings, has created certain economic benefit.
Brief description of the drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, below will be to embodimentOr in description of the Prior Art, the accompanying drawing of required use is briefly described.
Fig. 1 is the flow chart that polysilicon process is produced in the dry method making herbs into wool of the utility model embodiment mono-;
Fig. 2 is the structure chart that the vaccum-pumping equipment of polysilicon process is produced in the dry method making herbs into wool of the utility model embodiment mono-;
Fig. 3 is the structure chart that the vaccum-pumping equipment of polysilicon process is produced in the dry method making herbs into wool of the utility model embodiment bis-.
Reference numeral:
101-load chamber; 102-unloads chamber;
103-the first vavuum pump; 104-the second vavuum pump;
105-the first connecting pipe; 106-the second connecting pipe;
107-the 3rd connecting pipe; 108-master control valve;
109-the first Safety control valve; 110-the second Safety control valve.
Detailed description of the invention
Below in conjunction with embodiment, embodiment of the present utility model is described in detail, but those skilled in the artWill be understood that, the following example is only for the utility model is described, and should not be considered as limiting scope of the present utility model. EmbodimentIn unreceipted actual conditions person, carry out according to the condition of normal condition or manufacturer suggestion. The unreceipted life of agents useful for same or instrumentProduce the person of manufacturer, be the conventional products that can obtain by commercially available purchase.
Embodiment 1
Accompanying drawing 1 is the technological process of the dry method making herbs into wool of the utility model embodiment, and whole technique is mainly divided into silicon slice loadingWith unloading two large steps, silicon chip is placed in atmosphere on support plate, support plate is transferred in load chamber by pulley, in load chamberVacuumize and be extracted into 10Pa left and right. And then be transferred to process cavity and accept RIE etching or PECVD plated film. After technique completes, support plate entersEnter to unload chamber (air discharge cavity), in unloading chamber through passing into nitrogen or atmosphere after nitrogen blowing several times to atmospheric pressure. Carrier plate transmission goes outUnloading chamber. Then silicon chip is removed to next process from support plate. Support plate is recycled to loading area and carries out a new ripple silicon chip processing. DressCarry chamber after support plate output, carry out nitrogen blowing several times, then pass into nitrogen or atmosphere to atmospheric pressure and accept new support plate. EquallyUnloading chamber could accept next piece after will vacuumizing and complete the support plate of technique;
Accompanying drawing 2 is the structure chart that the vaccum-pumping equipment of polysilicon process is produced in the dry method making herbs into wool of the utility model embodiment,Wherein one end of the first connecting pipe 105 connects load chamber 101, and the other end connects the first vavuum pump 103, the second connecting pipes106 one end connect unloading chamber 102, the other end connect the second vavuum pump 104, the three connecting pipes 107 respectively with the first tube connectorRoad 105 and the second connecting pipe 106 are communicated with, and master control valve 108 is arranged in the 3rd connecting pipe 107;
When the work concrete operations of vaccum-pumping equipment, in the time that load chamber 101 need to vacuumize, master control valve 108 is for openingState, such the first vavuum pump 103 and the second vavuum pump 104 are worked simultaneously, accelerate to vacuumize, shorten be evacuated to 15pa timeBetween to 8s, the first vavuum pump and the second vavuum pump are used respectively the pump of EdwardIQX500 model, power is controlled at 4000WLeft and right;
Complete when vacuumizing, control valve is closed, when silicon chip enters unloading chamber 102, when the second vavuum pump 104 need to blow atmosphereTime, master control valve 108 is opened again, vacuumizes by the first vavuum pump 103 and the second vavuum pump 104 simultaneously, like this canAccelerate the time of silicon chip unloading.
Embodiment 2
Whole technique is mainly divided into silicon slice loading and unloading two large steps, silicon chip is placed in atmosphere on support plate, carriesPlate is transferred in load chamber by pulley, vacuumizes and is extracted into 10Pa left and right in load chamber. And then be transferred to process cavity and accept RIEEtching or PECVD plated film. After technique completes, support plate enters unloading chamber (air discharge cavity), in unloading chamber through after nitrogen blowing several timesPass into nitrogen or atmosphere to atmospheric pressure. Carrier plate transmission goes out to unload chamber. Then silicon chip is removed to next process from support plate. Support plateBe recycled to loading area and carry out a new ripple silicon chip processing. Load chamber, after support plate output, is carried out nitrogen blowing several times, then passes into nitrogenGas or atmosphere to atmospheric pressure is accepted new support plate. After same unloading chamber will vacuumize, could accept next piece and complete carrying of techniquePlate; Accompanying drawing 3 is the structure chart that the vaccum-pumping equipment of polysilicon process is produced in the dry method making herbs into wool of the utility model embodiment, Qi ZhongOne end of one connecting pipe 105 connects load chamber 101, and the other end connects first vavuum pump 103, the second connecting pipe 106 one endConnect unloading chamber 102, the other end connect the second vavuum pump 104, the three connecting pipes 107 respectively with the first connecting pipe 105 withAnd second connecting pipe 106 be communicated with, master control valve 108 is arranged in the 3rd connecting pipe 107, the first connecting pipe 105 andIn the second connecting pipe 106, be respectively arranged with the first Safety control valve 109 and the second Safety control valve 110, wherein master control valveFor wiping board valve;
When the work concrete operations of vaccum-pumping equipment, in the time that load chamber 101 need to vacuumize, master control valve 108, the first peaceFull control valve 109 is open mode, and such the first vavuum pump 103 and the second vavuum pump 104 are worked simultaneously, accelerates to vacuumize contractingThe short time that is evacuated to 10pa, sending out of the first vavuum pump and the second vavuum pump do not used Korea S LOTFD3000's to 6-7sPump, power is controlled at 6000W;
Complete when vacuumizing, control valve is closed, when silicon chip enters unloading chamber 102, when the second vavuum pump 104 need to blow atmosphereTime, master control valve 108 and the second Safety control valve 110 are opened again, same by the first vavuum pump 103 and the second vavuum pump 104Shi Jinhang vacuumizes, and can accelerate like this time of silicon chip unloading, in the time that needs are changed vavuum pump, and can be by the first safetyControl valve 109 and the second Safety control valve 110 are arranged to closed condition, then vavuum pump are disassembled to the pump housing more renewing,Flexible to operation.
Embodiment 3
Other operating procedures and the utility model embodiment 2 are basic identical, and just the second connecting pipe and the 3rd connectsThe pipe diameter of pipeline need to be controlled between 100-200mm.
Although illustrated and described the utility model with specific embodiment, but it will be appreciated that and do not deviating from this realityWith making many other change and amendments in the situation of novel spirit and scope. Therefore, this means in appended powerProfit requires to comprise all such changes and modifications that belong within the scope of the utility model.
Claims (10)
1. for a vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating, it is characterized in that, comprising: carry out for silicon chipThe load chamber that vacuumizes before etching technics, for silicon chip being completed to the unloading chamber, of carrying out the discharging of backfill atmosphere after etching technicsOne vavuum pump and the second vavuum pump;
Described load chamber is connected with described the first vavuum pump, the second vavuum pump, described unloading chamber with described the first vavuum pump, theTwo vavuum pumps connect.
2. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 1, its feature existsIn, also comprise the first connecting pipe, the second connecting pipe and the 3rd connecting pipe, master control valve;
One end of described the first connecting pipe connects load chamber, and the other end connects the first vavuum pump, described the second connecting pipeOne end connects unloading chamber, and the other end connects the second vavuum pump, and described the 3rd connecting pipe connects with the first connecting pipe, second respectivelyConnect pipeline communication, described master control valve is arranged in described the 3rd connecting pipe.
3. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 2, its feature existsIn, the first connecting pipe, the pipe diameter of the second connecting pipe and the 3rd connecting pipe is controlled between 100-200mm.
4. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 2, its feature existsIn, described master control valve is the wherein one in wiping board, angle valve and ball valve.
5. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 1, its feature existsIn, the power of described the first vavuum pump and the second vavuum pump is controlled between 1000-6000W.
6. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 5, its feature existsIn, described the first vavuum pump and the second vavuum pump are lobe pump.
7. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 2, its feature existsIn, also comprising the first Safety control valve, described the first Safety control valve is arranged in described the first connecting pipe.
8. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 7, its feature existsIn, also comprising the second Safety control valve, described the second Safety control valve is arranged in described the second connecting pipe.
9. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 7, its feature existsIn, described the first Safety control valve is angle valve or gate valve.
10. a kind of vaccum-pumping equipment for the making herbs into wool of chain type dry method and vacuum coating according to claim 8, its feature existsIn, described the second Safety control valve is angle valve or gate valve.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521136886.9U CN205258603U (en) | 2015-12-31 | 2015-12-31 | A evacuation equipment that is used for making herbs into wool of chain dry process and vacuum coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521136886.9U CN205258603U (en) | 2015-12-31 | 2015-12-31 | A evacuation equipment that is used for making herbs into wool of chain dry process and vacuum coating |
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| CN205258603U true CN205258603U (en) | 2016-05-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105441908A (en) * | 2015-12-31 | 2016-03-30 | 常州比太科技有限公司 | Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating |
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2015
- 2015-12-31 CN CN201521136886.9U patent/CN205258603U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105441908A (en) * | 2015-12-31 | 2016-03-30 | 常州比太科技有限公司 | Vacuumizing equipment and method for chain type dry-method texturing and vacuum coating |
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