CN201763565U - Vacuum pump system - Google Patents
Vacuum pump system Download PDFInfo
- Publication number
- CN201763565U CN201763565U CN2010201676555U CN201020167655U CN201763565U CN 201763565 U CN201763565 U CN 201763565U CN 2010201676555 U CN2010201676555 U CN 2010201676555U CN 201020167655 U CN201020167655 U CN 201020167655U CN 201763565 U CN201763565 U CN 201763565U
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- Prior art keywords
- vacuum pump
- control valve
- connecting pipeline
- communicating pipeline
- check valve
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- Expired - Fee Related
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Abstract
The utility model relates to a vacuum pump system which comprises a vacuum pump, a first communicating pipeline (L1), a control valve, a second communicating pipeline (L2), a third communicating pipeline (L3) and a check valve, wherein the control valve is assembled between the first communicating pipeline and the second communicating pipeline; the first communicating pipeline is respectively connected to the air discharging end of the control valve and the sucking side of the vacuum pump; the second communicating pipeline is respectively connected to the air charging end of the control valve and the exhaust side of the vacuum pump; and the third communicating pipeline is respectively connected to the exhaust side of the vacuum pump and the air charging side of the check valve. The sucking side and the exhaust side of the vacuum pump are selectively communicated by the control valve. Accordingly, an energy-saving vacuum pump system is obtained at the very low establishing cost, and the follow-up maintenance cost is not high.
Description
Technical field
The utility model relates to a kind of vacuum pump system, refers to a kind of vacuum pump system energy-conservation when reaching pump no-load running especially.
Background technique
The main purpose of vacuum pump is the vacuum environment that is lower than atmospheric pressure in creation, and so as to the environment of building cleaning more, good technology and quality of product, so vacuum pump is widely used in petrochemical industry, manufacturing industry and the hospitality industry environment.
Under known pumped vacuum systems organizational system, reach when the processing chamber vacuum condition, just cut off being communicated with of pump and processing chamber, and this simultaneously vacuum pump be to be in the no-load running state.Because of the suction side exists quite big pressure reduction with discharging side, this no-load running wasted work is very big.
TaiWan, China patent announcement I267581 discloses a kind of vacuum pumping hardware, and as shown in Figure 1, its main framework is the discharge side that a check valve 2 is located at a main vacuum pump 1, and it is in parallel with check valve 2 to install a backing vacuum pump 3 additional.Reduce by the discharge side pressure of backing vacuum pump 3 with main vacuum pump 1, it is poor with the discharge side pressure to dwindle the suction side, to save the energy consumption of main vacuum pump 1 under idling conditions.
Yet above-mentioned known solution need additionally provide a vacuum pump, obviously incur a considerable or great expense, and this additional vacuum pumps also has necessity of maintenance, more increases the entire system cost burden, is not very good therefore.
The model utility content
The purpose of this utility model provides a kind of vacuum pump system, enables to save the power consumption of vacuum pump when no-load running.
For reaching above-mentioned purpose, technical solution of the present utility model is:
A kind of vacuum pump system comprises one first connecting pipeline, one second connecting pipeline, a third connecting pipe, one first control valve, a vacuum pump, reaches a check valve.Above-mentioned vacuum pump include a suction side, with one discharge side.
Above-mentioned first connecting pipeline is connected to an outlet side and the vacuum pump suction side of first control valve, second connecting pipeline is connected to an air inlet end and the vacuum pump of first control valve and discharges side, and third connecting pipe is connected to the air inlet end that vacuum pump is discharged side and check valve.The suction side of vacuum pump is communicated with by the first control valve selecting type with discharging between the side.Above-mentioned check valve is to be located at after second connecting pipeline.
The suction side of above-mentioned vacuum pump can be communicated to a process cavity by one the 4th connecting pipeline, and can organize on the 4th connecting pipeline and be provided with one second control valve.
Pass through said system, the process cavity that is communicated with when the vacuum pump suction side has reached required pressure, and second control valve that is connected between process cavity and the vacuum pump is closed, when vacuum pump is in no-load running, this moment, first control valve promptly can be opened, and discharged side gas because of vacuum pump and was led go back to the suction side once again, and gas obtains balance in pump inner loop, pressure at two ends, avoided discharging side gas and constantly be repeated to compress and the situation of wasted work, the whole system power consumption also obtains very big improvement.
Vacuum pump system also can comprise a pressure transducer, with a controller, pressure transducer is to be located in the process cavity, controller is electrically connected on the pressure transducer and second control valve respectively, when controller receives the signal that pressure transducer reaction process cavity has reached goal pressure, promptly close second control valve.
Auto-control Design about first control valve has following two kinds at least.One is, controls first control valve simultaneously by the controller of above-mentioned second control valve; Perhaps, other is provided with the switching that a nonshared control unit is responsible for first control valve.These two kinds of designs all can be set when the buttoned-up signal of second control valve that receives between process cavity and the vacuum pump, open first control valve automatically, make system enter energy saver mode.
Vacuum pump system also can comprise a baffler, is mounted on the outlet side of check valve.
The beneficial effects of the utility model are, need install an additional vacuum pumps additional compared to known existing patent case, and the utility model only need install a solenoid valve additional, initial stage low cost of manufacture not only, and follow-up maintenance cost obviously also is an advantage.
Description of drawings
Fig. 1 is known vacuum pump system schematic representation;
Fig. 2 is the vacuum pump system schematic representation of the utility model first preferred embodiment;
Fig. 3 is the vacuum pump system schematic representation of the utility model second preferred embodiment.
The primary component symbol description
Backing vacuum pump 3
First control valve, 13 air inlet ends 131,141,151
Outlet side 132,142,152 second control valves 14
The first connecting pipeline L1, the second connecting pipeline L2
Third connecting pipe L3 the 4th connecting pipeline L4
Embodiment
With reference to figure 2, be the employed pumped vacuum systems of semiconductor technology among the figure, include the relevant process cavity 11 of semiconductor, a vacuum pump 12, one first control valve 13, one second control valve 14, a check valve 15, a baffler 16, a controller 17, reach a pressure transducer 18.
Between process cavity 11 and the vacuum pump 12 is to be connected by one the 4th connecting pipeline L4, and second control valve 14 is mounted among the 4th connecting pipeline L4, and the second control valve air inlet end 141 is corresponding to process cavity 11, and 142 of outlet sides are corresponding to vacuum pump 12.The discharge side 122 of vacuum pump 12 picks out a third connecting pipe L3 in addition, and check valve 15 is mounted among the third connecting pipe L3 after the discharge side 122 of vacuum pump 12 in regular turn with baffler 16, check valve air inlet end 151 is corresponding to vacuum pump 12, and outlet side 152 is corresponding to baffler 16.
Finished the step (being that cavity internal pressure has been low to moderate specified level) that process cavity 11 is vacuumized when vacuum pump 12, this moment, pressure transducer 18 was passed to controller 17 with the pressure information that is read, and 17 of controllers begin to close second control valve 14 and open first control valve 13.
This moment is because of the unlatching of first control valve 13, the first connecting pipeline L1 and the second connecting pipeline L2 make vacuum pump 12 suction side 121 with discharge side 122 for being communicated with, discharge side 122 gases and led go back to suction side 121, gas is convenient to circulate in the vacuum pump 12 itself, means that also this two places pressure is close to balance.In view of the above, even vacuum pump 12 continuous runnings, minimum with discharge side 122 pressure differences because of suction side 121, its power consumption is not high.
Check valve 15 among the third connecting pipe L 3 can be guaranteed the unlikely rise again of vacuum pump 12 discharge sides 122 pressure.Baffler 16 is responsible for noise during the pump running is lowered.
From the above, the utility model be with the vacuum pump two ends with pipeline connection, and in pipeline, establish a valve and open and close the connection of pipeline with selecting type, when the connection of pipeline is closed, be fit to vacuum pump and run well; And when the connection of pipeline was opened, gas circulated in vacuum pump and constantly is repeated to compress wasted work to avoid discharging side gas, was fit to vacuum pump no-load running.Through the actual verification result, utilize pumped vacuum systems of the present utility model can allow the vacuum pump current drain save, even can reach 40%.
In comparison, aforementioned known patent backing vacuum pump is to turn round simultaneously with main vacuum pump, more power consumption during obviously than the main vacuum pump individual operation, it is more accepted as unavoidable and merges the running of two pumps and consume electric power and only finished at process cavity and vacuumize step, backing vacuum pump when really beginning to play a role, and overall power consumption just can begin to reduce.And utilize the utility model more to exempt necessity of maintenance backing vacuum pump.
With reference to figure 3, be second embodiment's vacuum pump system schematic representation.The difference of the present embodiment system architecture and first example is that the switching of first control valve 13 is controlled by another controller 19, and controller 19 also is electrically connected with second control valve 14 certainly.The signal controlled device 19 of closing when second control valve 14 receives, and controller 19 is just opened first control valve 13 so that system enters energy saver mode.
The foregoing description only is to give an example for convenience of description, and the interest field that the utility model is advocated is from should be with described being as the criterion of scope of claims protections, but not only limits to the foregoing description.
Claims (7)
1. a vacuum pump system is characterized in that, comprising:
One first connecting pipeline;
One second connecting pipeline;
One third connecting pipe;
One first control valve is mounted between this first connecting pipeline and this second connecting pipeline;
One check valve; And
One vacuum pump, include a suction side, with one discharge side, wherein this first connecting pipeline is connected to an outlet side and this suction side of this first control valve, this second connecting pipeline is connected to an air inlet end and this discharge side of this first control valve, this third connecting pipe is connected to an air inlet end of this discharge side and this check valve, and this check valve is positioned at after this second connecting pipeline, is communicated with by this first control valve selecting type between this suction side of this vacuum pump and this discharge side.
2. the system as claimed in claim 1 is characterized in that, this suction side of described vacuum pump is communicated to a process cavity by one the 4th connecting pipeline.
3. system as claimed in claim 2 is characterized in that, also comprises one second control valve, is mounted in the 4th connecting pipeline.
4. system as claimed in claim 3 is characterized in that, also comprise a pressure transducer, with one first controller, this pressure transducer is located in this process cavity, this first controller is electrically connected on this pressure transducer and this second control valve respectively.
5. system as claimed in claim 4 is characterized in that, described first controller also is electrically connected on this first control valve.
6. system as claimed in claim 4 is characterized in that, also comprises one second controller, is electrically connected on this first control valve.
7. the system as claimed in claim 1 is characterized in that, also comprises a baffler, is mounted on an outlet side of this check valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201676555U CN201763565U (en) | 2010-04-06 | 2010-04-06 | Vacuum pump system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201676555U CN201763565U (en) | 2010-04-06 | 2010-04-06 | Vacuum pump system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201763565U true CN201763565U (en) | 2011-03-16 |
Family
ID=43716171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201676555U Expired - Fee Related CN201763565U (en) | 2010-04-06 | 2010-04-06 | Vacuum pump system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201763565U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102777371A (en) * | 2012-07-19 | 2012-11-14 | 奇瑞汽车股份有限公司 | Durability test mechanism and durability test method for vehicle vacuum pump |
| CN107165687A (en) * | 2017-06-30 | 2017-09-15 | 国电科学技术研究院 | A kind of flexibility cuts off the extraction for heat supply system and control method of low pressure (LP) cylinder |
| CN107850062A (en) * | 2015-06-26 | 2018-03-27 | 莱宝有限公司 | Vacuum pump system |
-
2010
- 2010-04-06 CN CN2010201676555U patent/CN201763565U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102777371A (en) * | 2012-07-19 | 2012-11-14 | 奇瑞汽车股份有限公司 | Durability test mechanism and durability test method for vehicle vacuum pump |
| CN102777371B (en) * | 2012-07-19 | 2015-11-25 | 奇瑞汽车股份有限公司 | A kind of endurance test mechanism of vehicle vacuum pump and durability test method thereof |
| CN107850062A (en) * | 2015-06-26 | 2018-03-27 | 莱宝有限公司 | Vacuum pump system |
| CN107165687A (en) * | 2017-06-30 | 2017-09-15 | 国电科学技术研究院 | A kind of flexibility cuts off the extraction for heat supply system and control method of low pressure (LP) cylinder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110316 Termination date: 20120406 |