CN208701203U - For covering the pump group system of PVD vacuum coating system prime parallel connection pumping more - Google Patents
For covering the pump group system of PVD vacuum coating system prime parallel connection pumping more Download PDFInfo
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- CN208701203U CN208701203U CN201821374617.XU CN201821374617U CN208701203U CN 208701203 U CN208701203 U CN 208701203U CN 201821374617 U CN201821374617 U CN 201821374617U CN 208701203 U CN208701203 U CN 208701203U
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- vacuum coating
- pump
- pump group
- pvd
- sliding vane
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Abstract
The utility model discloses a kind of for covering the pump group system of PVD vacuum coating system prime parallel connection pumping more, it includes a lobe pump and three sliding vane rotary pumps, vacuum coating furnace bodies in more set PVD vacuum coating systems are successively side by side, the air entry of lobe pump is connected with the roughing valve on all vacuum coating furnace bodies respectively by a thick pipe of taking out, and three sliding vane rotary pumps are connected with the exhaust outlet of lobe pump respectively；The utility model smart structural design, rationally three sliding vane rotary pumps are cooperated to form pump group system using a lobe pump, it can cooperating stage by stage, and horsepower is vacuumized with biggish, it can be connected with the vacuum coating furnace body in more set PVD vacuum coating systems, realize that cover PVD vacuum coating systems by same pump group system is to provide air extracting function more, effectively simplify the pump group structure in each PVD vacuum coating system, structure is more compact, occupied space is reduced, energy consumption is reduced, saves cost, and maintain easily, it is time saving and energy saving.
Description
Technical field
The utility model belongs to PVD vacuum coating system forepumping technical field, and in particular to one kind for covering PVD more
The pump group system of vacuum coating system prime parallel connection pumping.
Background technique
Vacuum coating technology is widely applied to hardware decoration, clock and watch jewellery, glassware, tool die, semiconductor, optics
Etc. industries, make a general survey of global industry, decoration film coating processing collects at home substantially, and as production capacity increases, plated film processing factory is to equipment
Demand increase, the enterprise for having certain scale generally requires dozens or even hundreds of coating system.Domestic plated film at present
Equipment is based on single devices, and the vacuum coating furnace body in every suit filming equipment is equipped with a set of pump group, its main feature is that setting
It is standby flexible and changeable, it can satisfy the needs of various film layers, but in terms of device structure and behaviour in service, there are some drawbacks, main
Have: 1, device structure is huge, and in addition to vacuum film-coated furnace is external, the pump group extract system of equipment occupies very big position and sky
Between, this and domestic vacuum pump pumping is slow, unstable certain association.2, energy consumption is big: backing system mostly uses bispin piece
Pump, vacuumize with it is always in coating process, consume energy it is very more.3, maintenance cost is high: other than equipment itself is equipped with, day
Often maintenance replacement pump oil, maintenance cost people, time-consuming, excessive fuel consumption lead to the unnecessary loss of enterprise.
Utility model content
In view of the above deficiencies, the purpose of the utility model is to provide it is a kind of it is reasonable in design, cleverly for covering more
The pump group system of PVD vacuum coating system prime parallel connection pumping.
To achieve the above object, technical solution provided by the utility model is: one kind for covering PVD Vacuum Deposition membrane system more
The pump group system that prime parallel connection of uniting is evacuated comprising a lobe pump and three sliding vane rotary pumps cover in PVD vacuum coating systems more
Successively side by side, the air entry of lobe pump is by a thick pipe of taking out respectively and on all vacuum coating furnace bodies for vacuum coating furnace body
Roughing valve is connected, and three sliding vane rotary pumps are connected with the exhaust outlet of lobe pump respectively.
As a kind of improvement of the utility model, the lobe pump is the lobe pump that model is preferably ZJ-1200.
As a kind of improvement of the utility model, the sliding vane rotary pump is the sliding vane rotary pump that model is preferably 2X-70.
It further include having a molecular pump as a kind of improvement of the utility model, the molecular pump and the vacuum coating
Essence on furnace body takes out valve and is connected.Molecular pump gives gas molecule MOMENTUM TRANSMISSION using high-speed rotating rotor, makes gas molecule
Directed velocity is obtained, vacuumizing effect is further promoted.
As a kind of improvement of the utility model, the molecular pump is the molecular pump that model is preferably TYFB-3600.
It further include having a sliding vane rotary pump as a kind of improvement of the utility model, the sliding vane rotary pump and the molecular pump phase
Connection.
The utility model has the following beneficial effects: the utility model smart structural design, rationally using a lobe pump cooperation
Three sliding vane rotary pumps form pump group systems, can cooperating stage by stage, and have it is biggish vacuumize horsepower, can be with more sets
Vacuum coating furnace body in PVD vacuum coating system is connected, and realizes that more set PVD vacuum coating systems are by same pump group system
Air extracting function is provided, the pump group structure in each PVD vacuum coating system is effectively simplified, structure is more compact, reduces and occupies sky
Between；Also greatly reduce energy consumption simultaneously, avoid the use of pump group in entire coating process, save cost, and easy to maintain, only
Need to carry out daily maintenance for a set of pump group system, it is time saving and energy saving, it is conducive to wide popularization and application.
With reference to the accompanying drawing with embodiment, the present invention will be further described.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Specific embodiment
It is provided in this embodiment a kind of for covering the pump group system of PVD vacuum coating system prime parallel connection pumping referring to Fig. 1 more
System a comprising lobe pump 1 and three sliding vane rotary pumps 2, the vacuum coating furnace bodies 3 covered in PVD vacuum coating systems successively simultaneously more
The air entry of row, lobe pump 1 are connected with the roughing valve 5 on all vacuum coating furnace bodies 3 respectively by a thick pipe 4 of taking out,
Three sliding vane rotary pumps 2 are connected with the exhaust outlet of lobe pump 1 respectively.In the present embodiment, the lobe pump 1 is preferably model ZJ-
1200 lobe pump 1.Starting is fast, and wasted work is few, and during-operation service expense is low, and pumping speed is big, high-efficient.The sliding vane rotary pump 2 is preferably type
Number be 2X-70 sliding vane rotary pump.High pumping speed, good operating stability, low noise, low vibration, structure are still able to maintain under low pressure
It is compact, it is small, save space.
When work, lobe pump 1 by slightly take out pipe 4 respectively with the vacuum coating furnace body 3 in more set PVD vacuum coating systems
Roughing valve 5 is connected, and when the vacuum coating furnace body 3 in certain set PVD vacuum coating system needs to vacuumize, while starting three
Platform sliding vane rotary pump 2 has the biggish roughing valve 5 for vacuumizing horsepower, opening on the vacuum coating furnace body 3, to the vacuum coating
Furnace body 3 is vacuumized.When vacuum film-coated furnace body 3 reaches 800Pa(Pascal)Within when, open lobe pump 1 further take out it is true
Sky closes the roughing valve 5 when vacuum reaches within 5 pas in vacuum film-coated furnace body 3.The essence for opening the vacuum coating furnace body 3 is taken out
Valve 6, in reality, the essence on each vacuum coating furnace body 3 takes out valve 6 and is connected with a molecular pump 8 and a sliding vane rotary pump in turn
7.It is worked at the same time by the molecular pump 8 and sliding vane rotary pump 7, so that vacuum coating furnace body 3 enters the pumping high vacuum stage.Work as vacuum simultaneously
After the completion of the thick pumping stage of plated film furnace body 3, lobe pump 1 is closed, You Santai sliding vane rotary pump 2 continues working, the interim work of lobe pump 1
Make, effectively the saving energy；At this point, when the vacuum coating furnace body 3 in other PVD vacuum coating systems such as needs to vacuumize, then phase
Roughing valve 5 thereon should be opened, if needing to take out black vacuum without vacuum coating furnace body 3, turns off three sliding vane rotary pumps 2,
It waits and next vacuumizes preparation.
Pump group system of the utility model for more covering PVD vacuum coating system prime parallel connection pumping specifically has following spy
Point:
1, compact overall structure, space occupied reduce half.
2, energy consumption is reduced, and avoids the use of pump group in entire coating process, and separate unit reduces 15 degree of the electricity charge or so per hour,
Save cost.
3, easy to maintain, it is only necessary to carry out daily maintenance for a set of pump group, reduce artificial, cooling water, pump oil etc., save
Shi Shengli.
According to the disclosure and teachings of the above specification, the utility model those skilled in the art can also be to above-mentioned reality
The mode of applying is changed and is modified.Therefore, the utility model is not limited to specific embodiment disclosed and described above, right
Some modifications and changes of the utility model should also be as falling into the protection scope of the claims of the present utility model.In addition, to the greatest extent
It is used some specific terms in pipe this specification, these terms are merely for convenience of description, not to the utility model
Any restrictions are constituted, using other systems of same or similar structure, in scope of protection of the utility model.
Claims (5)
1. a kind of for covering the pump group system of PVD vacuum coating system prime parallel connection pumping, it is characterised in that: it includes one more
Lobe pump and three sliding vane rotary pumps, the vacuum coating furnace bodies covered in PVD vacuum coating systems more successively side by side, the air entry of lobe pump
Be connected respectively with the roughing valve on all vacuum coating furnace bodies by a thick pipe of taking out, three sliding vane rotary pumps respectively with lobe pump
Exhaust outlet be connected.
2. according to claim 1 for covering the pump group system of PVD vacuum coating system prime parallel connection pumping, feature more
It is, the lobe pump is the lobe pump of model ZJ-1200.
3. it is according to claim 1 or 2 for covering the pump group system of PVD vacuum coating system prime parallel connection pumping more,
It is characterized in that, the sliding vane rotary pump is the sliding vane rotary pump of model 2X-70.
4. according to claim 1 for covering the pump group system of PVD vacuum coating system prime parallel connection pumping, feature more
It is, further includes having a molecular pump, which takes out valve with the essence on the vacuum coating furnace body and be connected.
5. according to claim 4 for covering the pump group system of PVD vacuum coating system prime parallel connection pumping, feature more
It is, further includes having a sliding vane rotary pump, which is connected with the molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821374617.XU CN208701203U (en) | 2018-08-24 | 2018-08-24 | For covering the pump group system of PVD vacuum coating system prime parallel connection pumping more |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821374617.XU CN208701203U (en) | 2018-08-24 | 2018-08-24 | For covering the pump group system of PVD vacuum coating system prime parallel connection pumping more |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208701203U true CN208701203U (en) | 2019-04-05 |
Family
ID=65944144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821374617.XU Expired - Fee Related CN208701203U (en) | 2018-08-24 | 2018-08-24 | For covering the pump group system of PVD vacuum coating system prime parallel connection pumping more |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208701203U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113265629A (en) * | 2021-06-30 | 2021-08-17 | 纳峰真空镀膜（上海）有限公司 | Double-body film coating machine |
-
2018
- 2018-08-24 CN CN201821374617.XU patent/CN208701203U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113265629A (en) * | 2021-06-30 | 2021-08-17 | 纳峰真空镀膜（上海）有限公司 | Double-body film coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190405 Termination date: 20210824 |