CN202465952U - Vacuum-pumping device - Google Patents
Vacuum-pumping device Download PDFInfo
- Publication number
- CN202465952U CN202465952U CN2011205508873U CN201120550887U CN202465952U CN 202465952 U CN202465952 U CN 202465952U CN 2011205508873 U CN2011205508873 U CN 2011205508873U CN 201120550887 U CN201120550887 U CN 201120550887U CN 202465952 U CN202465952 U CN 202465952U
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- vacuum
- pump
- sliding vane
- vane rotary
- valve
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Abstract
The utility model relates to the technical field of vacuum equipment, and in particular relates to a vacuum-pumping device required by a polycrystalline furnace process in the photovoltaic industry. The vacuum-pumping device comprises a Roots-pump oil rotary vane pump unit, an oil rotary vane vacuum pump, a vacuum valve and a vacuum gauge. The vacuum-pumping device vacuumizes a workpiece or a vacuum box by employing the Roots-pump oil rotary vane vacuum pump unit; at an argon charging pressure maintaining stage, the oil rotary vane vacuum pump with low energy consumption is employed to realize pressure maintenance of the device; and the vacuum-pumping device has the advantages of effectively saving electrical energy, reducing the loss of the oil rotary vane vacuum pump, etc.
Description
Technical field
The utility model belongs to the vacuum apparatus technical field, the needed vacuum extractor of polycrystalline furnace technology in particularly a kind of photovoltaic industry.
Background technology
At present, in the polycrystalline furnace production technique, draw a stove polysilicon, vacuum extractor generally will move 50 hours, wherein be evacuated to≤3Pa after the operation about about 6 hours, all the other packing stage pressure of 44 hours maintain about 6 * 10
4Pa.Conventional vacuum extractor; Just adopt a cover lobe pump oil sliding vane rotary pump vacuum unit (roughing vacuum pump+lobe pump combination), because the pressure reduction of the two differs greatly, in vacuumizing phase; Vacuum extractor is full-load operation; And at the packing stage that accounts for the overwhelming majority time, the ability of lobe pump oil sliding vane rotary pump vacuum unit seems and is flush with money, and also is that utilization ratio is low.
The utility model content
In order to solve the deficiency that exists in the conventional equipment technology; The utility model technical problem to be solved provides a kind of effective conservation of power energy; According to the demands of different of different time sections in the crystal pulling technique, can carry out the device of segmentation use according to lobe pump oil sliding vane rotary pump vacuum unit and oily sliding vane rotary vacuum pump to vacuum tightness.
The technical scheme that the utility model solves the problems of the technologies described above is following: a kind of vacuum extractor comprises:
Lobe pump oil sliding vane rotary pump vacuum unit; The oil sliding vane rotary vacuum pump; Three vacuum valves; Vacuumometer, lobe pump oil sliding vane rotary pump vacuum unit is connected through vacuum pipe with the import of first vacuum valve and on the two vacuum pipe that is connected, vacuumometer is housed, and oily sliding vane rotary vacuum pump is connected through vacuum pipe with the import of second vacuum valve; The outlet of first vacuum valve and second vacuum valve is connected through vacuum pipe with the import of the 3rd vacuum valve through the vacuum pipe back that is connected, and the outlet of the 3rd vacuum valve is connected through vacuum pipe with the import of polycrystalline furnace.
The beneficial effect of the utility model is: in crystal pulling technique, vacuum is utilized lobe pump oil sliding vane rotary pump vacuum unit, effectively brings into play its powerful exhaust capacity; At the argon filling packing stage, adopt the oily sliding vane rotary vacuum pump of less energy-consumption to realize.Therefore this vacuum extractor has the characteristics such as loss of effective conservation of power energy, the oily sliding vane rotary vacuum pump of reduction.
On the basis of technique scheme, the utility model can also be done following improvement.
Further, said oily sliding vane rotary vacuum pump and lobe pump oil sliding vane rotary pump vacuum unit respectively through one independently vacuum valve be connected with polycrystalline furnace, perhaps be connected with polycrystalline furnace through a T-valve jointly.
Further, said lobe pump oil sliding vane rotary pump vacuum unit comprises lobe pump and oily sliding vane rotary vacuum pump.
Further, the venting port of said oily sliding vane rotary vacuum pump also is connected with oil mist filter.
The beneficial effect that adopts above-mentioned further scheme is number and a vacuum pipe of having saved the independent vacuum valve, controls convenient succinct.
Description of drawings
Fig. 1 is a kind of structured flowchart that is applied to the vacuum extractor in the crystal pulling technique of the utility model;
In the accompanying drawing, the list of parts of each label representative is following:
1, oily sliding vane rotary vacuum pump, 2, lobe pump oil sliding vane rotary pump vacuum unit, 3, second vacuum valve, 4, oil mist filter, 5, polycrystalline furnace, 6, first vacuum valve, the 7, the 3rd vacuum valve, 8, vacuumometer.
Embodiment
Below in conjunction with accompanying drawing the principle and the characteristic of the utility model are described, institute gives an actual example and only is used to explain the utility model, is not the scope that is used to limit the utility model.
Embodiment 1
As shown in Figure 1; Lobe pump oil sliding vane rotary pump vacuum unit 2 also is equipped with vacuumometer 8 with the import of first vacuum valve 6 through on the pipeline that vacuum pipe is connected and the two is connected; Oil sliding vane rotary vacuum pump 1 is connected through vacuum pipe with the import of second vacuum valve 3; First vacuum valve 6 is connected through vacuum pipe with the outlet of second vacuum valve 3 and afterwards is connected through vacuum pipe with the import of the 3rd vacuum valve 7; The outlet of the 3rd vacuum valve 7 is connected through vacuum pipe with the import of polycrystalline furnace 5; The venting port of two oily sliding vane rotary vacuum pumps 1 all is connected with oil mist filter 4 respectively, and all is to be connected through vacuum pipe between each parts of device.
Lobe pump oil sliding vane rotary pump vacuum unit comprises lobe pump and oily sliding vane rotary vacuum pump, and its effect is in vacuumizing phase the vacuum oven device to be vacuumized.
The oil sliding vane rotary vacuum pump is that device carries out pressurize at the argon filling packing stage.
The effect that is connected with oil mist filter on the venting port of oil sliding vane rotary vacuum pump is to filter the oil smoke of discharging from the vacuum pump venting port, and the pump recovery of oil that will get off from filtering oil smoke to practice thrift pump oil, purifies air in vacuum pump.
The above is merely the preferred embodiment of the utility model, and is in order to restriction the utility model, not all within the spirit and principle of the utility model, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (4)
1. vacuum extractor; Comprise lobe pump oil sliding vane rotary pump vacuum unit; The oil sliding vane rotary vacuum pump, three vacuum valves, vacuumometer; It is characterized in that: lobe pump oil sliding vane rotary pump vacuum unit is connected through vacuum pipe with the import of first vacuum valve and on the two vacuum pipe that is connected, vacuumometer is housed; The import of oil sliding vane rotary vacuum pump and second vacuum valve is connected through vacuum pipe, and the outlet of first vacuum valve and second vacuum valve is connected with the import process vacuum pipe of the 3rd vacuum valve through the vacuum pipe back that is connected, and the outlet of the 3rd vacuum valve is connected with the import of polycrystalline furnace process vacuum pipe.
2. a kind of vacuum extractor according to claim 1; It is characterized in that: said oily sliding vane rotary vacuum pump and lobe pump oil sliding vane rotary pump vacuum unit respectively through one independently vacuum valve be connected with polycrystalline furnace, perhaps be connected with polycrystalline furnace through a T-valve jointly.
3. a kind of vacuum extractor according to claim 1 is characterized in that: said lobe pump oil sliding vane rotary pump vacuum unit comprises lobe pump and oily sliding vane rotary vacuum pump.
4. vacuum extractor according to claim 1 is characterized in that: the venting port of said oily sliding vane rotary vacuum pump also is connected with oil mist filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205508873U CN202465952U (en) | 2011-12-26 | 2011-12-26 | Vacuum-pumping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205508873U CN202465952U (en) | 2011-12-26 | 2011-12-26 | Vacuum-pumping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202465952U true CN202465952U (en) | 2012-10-03 |
Family
ID=46914129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205508873U Expired - Fee Related CN202465952U (en) | 2011-12-26 | 2011-12-26 | Vacuum-pumping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202465952U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108385162A (en) * | 2018-05-14 | 2018-08-10 | 扬州晶樱光电科技有限公司 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
-
2011
- 2011-12-26 CN CN2011205508873U patent/CN202465952U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108385162A (en) * | 2018-05-14 | 2018-08-10 | 扬州晶樱光电科技有限公司 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121003 Termination date: 20191226 |