CN108385162A - A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems - Google Patents
A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems Download PDFInfo
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- CN108385162A CN108385162A CN201810456410.5A CN201810456410A CN108385162A CN 108385162 A CN108385162 A CN 108385162A CN 201810456410 A CN201810456410 A CN 201810456410A CN 108385162 A CN108385162 A CN 108385162A
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- Prior art keywords
- vacuum
- furnace body
- pump
- furnace
- sliding valve
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Abstract
The present invention discloses a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems, including one group of furnace body, the furnace body pump that matches with each furnace body and be connected by furnace tubes and a sliding valve vacuum pump；The sliding valve vacuum pump is connected with sliding valve vacuum pump pipeline by the Pneumatic butterfly valve component of setting；The sliding valve vacuum pump pipeline is connected and installed with shunt tubes again；And the shunt tubes are connected and installed with steel wire corrugated conduit.One He Yitai used spare sliding valve vacuum pumps are set in the present invention and by the Pneumatic butterfly valve component and check-valves of the sliding valve vacuum pump pipeline of setting, shunt tubes, steel wire corrugated conduit and corresponding installation, the furnace body that is connected again pumps and the furnace body of ingot furnace, the operation that temporary close furnace body pump when furnace body melted for 2 stage is realized by PLC program control and the mutual switching of furnace body pump, to effectively realize the purpose for saving electric energy in intelligent control pumped vacuum systems in each stages operating.
Description
Technical field
The present invention relates to the auxiliary use devices of polycrystalline silicon ingot or purifying furnace pumped vacuum systems, specifically a kind of to be used for polycrystalline
The intelligentized energy-saving apparatus of silicon ingot furnace pumped vacuum systems.
Background technology
In the pumped vacuum systems device of existing polycrystalline silicon ingot or purifying furnace, each polycrystalline silicon ingot or purifying furnace is required to equipped with one
Furnace body pumps, and existing furnace body pump is set as mechanical pump or lobe pump, and existing ingot furnace is when operation, since furnace body
Stove is thrown until in furnace body during 2 stages of fusing, furnace body pump is in working condition, and not in the state vacuumized
The work for needing furnace body to pump, therefore more furnace bodies pump works cause power supply energy consumption larger always, and more furnace bodies pumps one head straight for
Generate noise is big, exhaust gas is more, energy-saving effect is excessively poor.
Invention content
The purpose of the present invention is in view of the deficienciess of the prior art, providing a kind of for polycrystalline silicon ingot casting stove evacuation system
The intelligentized energy-saving apparatus of system.
Technical solution：It is of the present invention solve the problems, such as used by technical solution be：One kind being used for polycrystalline silicon ingot casting stove evacuation
The intelligentized energy-saving apparatus of system, including one group of furnace body, the furnace body that matches with each furnace body and be connected by furnace tubes
Pump and a sliding valve vacuum pump；The sliding valve vacuum pump is connected with sliding valve vacuum pump pipe by the Pneumatic butterfly valve component of setting
Road；The sliding valve vacuum pump pipeline is connected and installed with shunt tubes again；And the shunt tubes are connected and installed with steel wire
Corrugated conduit is also connected on the steel wire corrugated conduit and is equipped with the fast loaded check valve of the first vacuum, and first vacuum
Fast loaded check valve, which is also connected with, is equipped with vacuum fast-assembling three-way component, and two branches of the vacuum fast-assembling three-way component then divide
It is not communicated in furnace body and furnace body pump, and the branch road being wherein connected to furnace body pump is also equipped with the second vacuum fast-assembling non-return
Valve；A main pipeline is also equipped between the sliding valve vacuum pump pipeline and shunt tubes；Each furnace body is mating to be provided with one
Section main pipeline, whole main pipelines, which is connected, constitutes whole main pipeline.
Preferably, in order to ensure the stability of sliding valve vacuum pump and guiding valve vacuum pipe, the sliding valve vacuum pump
The fast loaded check valve of vacuum, vacuum clamp component and corrugated connecting tube are also equipped between Pneumatic butterfly valve component and vacuum-pump line
Road.
Preferably, being also equipped with Pneumatic butterfly valve component and vacuum fast-assembling closure plate in the shunt tubes；In order to just
In control shunt tubes and ensure its vacuum leakproofness, Pneumatic butterfly valve component and closure plate are set.
Preferably, the both ends of the main pipeline are also separately installed with flange sealing plate, the flange between adjacent main pipeline
It is connected by the ring flange of setting after sealing plate docking and constitutes whole main pipeline；Installation master can be connected with easy disassembly by ring flange
Pipeline.
Preferably, being additionally provided with vacuum clamp component on the steel wire corrugated conduit for vacuum fast-assembling three-way component
Installation.
Preferably, the furnace body and matching used furnace body pump are provided with group altogether；And in addition to currently in use
Sliding valve vacuum pump is additionally provided with a spare sliding valve vacuum pump；A use is arranged by setting for the present apparatus and one spare
Sliding valve vacuum pump the Intelligent energy-saving of group ingot furnace can be achieved at the same time.
Advantageous effect：Compared with prior art, the present invention haing the following advantages：Be arranged in the present invention one it is using and one
The spare sliding valve vacuum pump of platform simultaneously passes through the sliding valve vacuum pump pipeline of setting, shunt tubes, steel wire corrugated conduit and corresponding peace
The Pneumatic butterfly valve component and check-valves of dress, then the furnace body that is connected pumps and the furnace body of ingot furnace, passes through PLC program control and furnace body
The operation of temporary close furnace body pump when furnace body melted for 2 stage is realized in the mutual switching of pump, to effectively realize intelligence
Control the purpose for saving electric energy in pumped vacuum systems in each stages operating, and noise and the exhaust gas ratio generated during the work time
It is less；And multigroup ingot furnace and furnace body pump are connected, it can be achieved that a sliding valve vacuum pump by the main pipeline of setting in the present apparatus
Multigroup furnace body is controlled, realizes the Intelligent energy-saving purpose of multigroup furnace body.
Description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is the specifically used structure chart of the present invention；
Fig. 3 is enlarged drawing at A in Fig. 1.
Specific implementation mode
In the following with reference to the drawings and specific embodiments, the present invention is furture elucidated, and the present embodiment is with technical solution of the present invention
Premised under implemented, it should be understood that these examples are only for illustrating the present invention and are not intended to limit the scope of the present invention.
As shown in Figure 1, Figure 2 and Figure 3, a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems, packet
One group of furnace body 1 is included, is matched with each furnace body 1 and 3 and a sliding valve vacuum pump are pumped by the furnace body that furnace tubes 2 are connected
4；The sliding valve vacuum pump 4 is connected with sliding valve vacuum pump pipeline 6 by the Pneumatic butterfly valve component 5 of setting；The guiding valve is true
Empty pump line road 6 is connected and installed with shunt tubes 7 again；And the shunt tubes 7 are connected and installed with steel wire corrugated conduit 8, institute
It is also connected on the steel wire corrugated conduit 8 stated and the fast loaded check valve 9 of the first vacuum is installed, and the fast loaded check valve of the first vacuum
9 are also connected with and are equipped with vacuum fast-assembling three-way component 10, and two branches of the vacuum fast-assembling three-way component 10 then connect respectively
It leads in furnace body 1 and furnace body pump 3, and the branch road being wherein connected to furnace body pump 3 is also equipped with the fast loaded check valve of the second vacuum
11；It is also equipped with a main pipeline 12 between the sliding valve vacuum pump pipeline 6 and shunt tubes 7；The mating setting of each furnace body 1
There is one section of main pipeline 12, whole main pipelines 12, which is connected, constitutes whole main pipeline.
In order to ensure the stability of sliding valve vacuum pump 4 and guiding valve vacuum pipe 6, the pneumatic butterfly of the sliding valve vacuum pump 4
The fast loaded check valve 13 of vacuum, vacuum clamp component 14 and corrugated connecting tube road are also equipped between valve module 5 and vacuum-pump line 6
15。
Pneumatic butterfly valve component 5 and vacuum fast-assembling closure plate 16 are also equipped in the shunt tubes 7；For the ease of control
Shunt tubes 7 and ensure its vacuum leakproofness, setting Pneumatic butterfly valve component 5 and closure plate 16.
The both ends of the main pipeline 12 are also separately installed with flange sealing plate 17, pass through setting between adjacent main pipeline 12
Ring flange, which is connected, constitutes whole main pipeline；Installation main pipeline 12 can be connected with easy disassembly by ring flange.
Peace of the vacuum clamp component 14 for vacuum fast-assembling three-way component 9 is additionally provided on the steel wire corrugated conduit 8
Dress.
The furnace body 1 and matching used furnace body pump 3 are provided with 11 groups altogether；And in addition to guiding valve currently in use is true
Sky pump 4, is additionally provided with a spare sliding valve vacuum pump 4；A use and a spare cunning is arranged by setting in the present apparatus
The Intelligent energy-saving of 11 groups of ingot furnaces can be achieved at the same time in valve vacuum pump 4.
In the present apparatus, a sliding valve vacuum pump interacts phase by the connection setting of main pipeline with 11 groups of ingot furnaces and furnace body pump
Even；Since at work, the working condition of each ingot furnace has casting in different conditions at each time point
Ingot stove needs to carry out vacuum pumping, therefore sliding valve vacuum pump is constantly in working condition；And the gas on guiding valve vacuum tube
Dynamic butterfly valve component and the fast loaded check valve of vacuum are also synchronous opening/closing, are in normally open in the process of running.
In a certain ingot furnace when throwing stove starts, furnace body pumps normally-open work；Pneumatic butterfly valve component in shunt tubes
And the first vacuum fast-assembling closure of check ring of installation is connected on steel wire corrugated conduit, and vacuum fast-assembling three-way component is pumped with furnace body
Between the fast loaded check valve of the second vacuum open, so that the path blockade of sliding valve vacuum pump, the access of furnace body pump is opened, ingot furnace is just
Often work terminates up to 1 stage of process melts；And at the beginning of 2 stage of process melts, control close furnace body pump and
The fast loaded check valve of the second vacuum is closed, while opening the Pneumatic butterfly valve group in the fast loaded check valve of the first vacuum and shunt tubes
Part makes the access of sliding valve vacuum pump open and close furnace body pump；Ingot furnace is set to be charged to atmospheric pressure always by sliding valve vacuum pump
Afterwards, then by the Pneumatic butterfly valve component in shunt tubes it closes；And next throwing stove is then turned on furnace body pump work after starting.
Since the working condition that at same time point, each furnace body is in is different, therefore can be by opening shunt tubes
On Pneumatic butterfly valve component and the connection of main pipeline carry out access between spool control valve vacuum pump and different furnace bodies and realize to be connected to；
Achieve the purpose that a sliding valve vacuum pump is connected to more furnace bodies, setting is to beginning to only having a sliding valve vacuum pump in work eventually in this way
Make；And 11 groups of furnace body pumps are then in intermittent work state, can significantly save electric energy, reach Intelligent energy-saving purpose.
The spare sliding valve vacuum pumps of one He Yitai used and the sliding valve vacuum pump pipe by setting are set in the present invention
Road, shunt tubes, steel wire corrugated conduit and corresponding installation Pneumatic butterfly valve component and check-valves, then be connected furnace body pump and
The furnace body of ingot furnace is realized by PLC program control and the mutual switching of furnace body pump and is temporarily closed when furnace body melted for 2 stage
The operation of closed furnace body pump, to effectively realize the purpose for saving electric energy in intelligent control pumped vacuum systems in each stages operating,
And the noise and exhaust gas generated during the work time is fewer；And multigroup casting is connected by the main pipeline of setting in the present apparatus
Ingot stove and furnace body pump realize the Intelligent energy-saving purpose of multigroup furnace body, it can be achieved that a multigroup furnace body of sliding valve vacuum pump control.
Above-mentioned specific implementation mode is a preferred embodiment of the present invention, is not the implementation for limiting the present invention
The equivalence changes made with right, the content described in all ranges of patent protection according to the present invention and modification,
It should all be included within the scope of present patent application.
Claims (6)
1. a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems, it is characterised in that：Including one group of furnace body
(1), it is matched with each furnace body (1) and (3) and a sliding valve vacuum pump is pumped by the furnace body that furnace tubes (2) are connected
(4)；The sliding valve vacuum pump (4) is connected with sliding valve vacuum pump pipeline (6) by the Pneumatic butterfly valve component (5) of setting；It is described
Sliding valve vacuum pump pipeline (6) and be connected and installed with shunt tubes (7)；And the shunt tubes (7) are connected and installed with steel
Silk corrugated conduit (8) is also connected on the steel wire corrugated conduit (8) and is equipped with the fast loaded check valve of the first vacuum (9), and described
The fast loaded check valve of the first vacuum (9) be also connected with vacuum fast-assembling three-way component (10) be installed, and the vacuum fast-assembling threeway
Two branches of component (10) are then respectively communicated in furnace body (1) and furnace body pump (3), and be wherein connected to furnace body pump (3)
Branch road is also equipped with the fast loaded check valve of the second vacuum (11)；Between the sliding valve vacuum pump pipeline (6) and shunt tubes (7)
It is also equipped with a main pipeline (12)；Each furnace body (1) is mating to be provided with one section of main pipeline (12), whole main pipelines (12) phase
Even constitute whole main pipeline.
2. a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems according to claim 1, special
Sign is：It is also equipped with vacuum fast-assembling between the Pneumatic butterfly valve component (5) and vacuum-pump line (6) of the sliding valve vacuum pump (4)
Check-valves (13), vacuum clamp component (14) and corrugated connecting tube road (15).
3. a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems according to claim 1, special
Sign is：Pneumatic butterfly valve component (5) and vacuum fast-assembling closure plate (16) are also equipped in the shunt tubes (7).
4. a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems according to claim 1, special
Sign is：The both ends of the main pipeline (12) are also separately installed with flange sealing plate (17), the method between adjacent main pipeline (12)
It is connected by ring flange after blue sealing plate (17) docking and constitutes whole main pipeline.
5. a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems according to claim 1, special
Sign is：Vacuum clamp component (14) is additionally provided on the steel wire corrugated conduit (8) for vacuum fast-assembling three-way component (9)
Installation.
6. a kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems according to claim 1, special
Sign is：The furnace body (1) and matching used furnace body pump (3) are provided with 11 groups altogether；And in addition to cunning currently in use
Valve vacuum pump (4) is additionally provided with a spare sliding valve vacuum pump (4).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810456410.5A CN108385162A (en) | 2018-05-14 | 2018-05-14 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810456410.5A CN108385162A (en) | 2018-05-14 | 2018-05-14 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
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| Publication Number | Publication Date |
|---|---|
| CN108385162A true CN108385162A (en) | 2018-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810456410.5A Pending CN108385162A (en) | 2018-05-14 | 2018-05-14 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111893429A (en) * | 2020-08-10 | 2020-11-06 | 北京北方华创磁电科技有限公司 | Vacuumizing system and method applied to neodymium iron boron vacuum diffusion furnace |
| CN117287976A (en) * | 2023-11-24 | 2023-12-26 | 杭州嘉悦智能设备有限公司 | Graphitizing furnace |
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| CN201882916U (en) * | 2010-11-04 | 2011-06-29 | 浙江芯能光伏科技有限公司 | Vacuum system for multiple polycrystal furnaces to operate in parallel |
| CN202323112U (en) * | 2011-11-07 | 2012-07-11 | 江西旭阳雷迪高科技股份有限公司 | Ingot casing furnace group |
| CN202465952U (en) * | 2011-12-26 | 2012-10-03 | 宁波爱发科真空技术有限公司 | Vacuum-pumping device |
| CN208667899U (en) * | 2018-05-14 | 2019-03-29 | 扬州晶樱光电科技有限公司 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
-
2018
- 2018-05-14 CN CN201810456410.5A patent/CN108385162A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201882916U (en) * | 2010-11-04 | 2011-06-29 | 浙江芯能光伏科技有限公司 | Vacuum system for multiple polycrystal furnaces to operate in parallel |
| CN202323112U (en) * | 2011-11-07 | 2012-07-11 | 江西旭阳雷迪高科技股份有限公司 | Ingot casing furnace group |
| CN202465952U (en) * | 2011-12-26 | 2012-10-03 | 宁波爱发科真空技术有限公司 | Vacuum-pumping device |
| CN208667899U (en) * | 2018-05-14 | 2019-03-29 | 扬州晶樱光电科技有限公司 | A kind of intelligentized energy-saving apparatus for polycrystalline silicon ingot or purifying furnace pumped vacuum systems |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111893429A (en) * | 2020-08-10 | 2020-11-06 | 北京北方华创磁电科技有限公司 | Vacuumizing system and method applied to neodymium iron boron vacuum diffusion furnace |
| CN117287976A (en) * | 2023-11-24 | 2023-12-26 | 杭州嘉悦智能设备有限公司 | Graphitizing furnace |
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