CN201715245U - Argon double-storage-tank pipeline communicating device - Google Patents
Argon double-storage-tank pipeline communicating device Download PDFInfo
- Publication number
- CN201715245U CN201715245U CN2010202317460U CN201020231746U CN201715245U CN 201715245 U CN201715245 U CN 201715245U CN 2010202317460 U CN2010202317460 U CN 2010202317460U CN 201020231746 U CN201020231746 U CN 201020231746U CN 201715245 U CN201715245 U CN 201715245U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- storage
- argon gas
- cooling
- argon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses an argon double-storage-tank pipeline communicating device which comprises two storage tanks and two cooling ponds, wherein one of the two storage tanks is communicated with one of the two cooling ponds through a gas delivery pipe, gas outlet pipes at the gas outlets of the two cooling pond are combined into a pipeline, and a pressure valve is also installed on the combined pipeline. The device has the advantages of simple structure and easy installation and daily maintenance, can effectively solve the problem of insufficient output argon gas pressure, greatly improve the production efficiency of the semiconductor and reduce the production cost.
Description
Technical field
The utility model relates to the semiconductor production field, is specially the two storage tank pipeline communication apparatus of a kind of argon gas.
Background technique
Present semiconductor uses very extensive in people's life, particularly be unable to do without semiconductor especially in the electron electric power field.Need in the semiconductor production to use the shielding gas that argon gas is produced as monocrystalline, polycrystalline, argon gas generally needs holding vessel and preserves, but the single holding vessel of prior art tends to occur the problem of air pressure deficiency when argon gas is provided.
The model utility content
The purpose of this utility model provides the two storage tank pipeline communication apparatus of a kind of argon gas, occurs the problem of air pressure deficiency when carrying argon gas with the argon gas storage device that solves prior art.
In order to achieve the above object, the technological scheme that the utility model adopted is:
The two storage tank pipeline communication apparatus of argon gas, comprise two storage tanks that store argon gas, it is characterized in that: also include two bring into respectively, the cooling pond of air outlet, storage tank is communicated with one by one by the suction port correspondence of a pneumatic tube and a cooling pond, be separately installed with steam outlet pipe on the air outlet of two cooling ponds, the two-way steam outlet pipe is combined into one road pipeline, closes pressure valve also is installed on the pipeline of road.
The utility model is simple in structure, be easy to install and regular maintenance, be combined into one tunnel alternately output by the argon gas in two storage tanks, the two cooling pond, can solve the not enough problem of ar pressure of output effectively, simultaneously by closing setting pressure valve on the pipeline of road, can monitor the pressure that closes output argon gas in the pipeline of road in real time, improve semi-conductive manufacturing efficiency greatly, reduce cost of production.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1.The two storage tank pipeline communication apparatus of argon gas, comprise two storage tanks 1 that store argon gas, also include two bring into respectively, the cooling pond 2 of air outlet, storage tank is communicated with one by one by the suction port correspondence of a pneumatic tube 3 and a cooling pond, be separately installed with steam outlet pipe 4 on the air outlet of two cooling ponds 2, two-way steam outlet pipe 4 is combined into one road pipeline, closes pressure valve 6 also is installed on the road pipeline 5.
Claims (1)
1. two storage tank pipeline communication apparatus of argon gas, comprise two storage tanks that store argon gas, it is characterized in that: also include two bring into respectively, the cooling pond of air outlet, storage tank is communicated with one by one by the suction port correspondence of a pneumatic tube and a cooling pond, be separately installed with steam outlet pipe on the air outlet of two cooling ponds, the two-way steam outlet pipe is combined into one road pipeline, closes pressure valve also is installed on the pipeline of road.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202317460U CN201715245U (en) | 2010-06-17 | 2010-06-17 | Argon double-storage-tank pipeline communicating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202317460U CN201715245U (en) | 2010-06-17 | 2010-06-17 | Argon double-storage-tank pipeline communicating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201715245U true CN201715245U (en) | 2011-01-19 |
Family
ID=43461245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202317460U Expired - Fee Related CN201715245U (en) | 2010-06-17 | 2010-06-17 | Argon double-storage-tank pipeline communicating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201715245U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103982771A (en) * | 2013-05-12 | 2014-08-13 | 摩尔动力(北京)技术股份有限公司 | Hydraulic energy storage tank |
-
2010
- 2010-06-17 CN CN2010202317460U patent/CN201715245U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103982771A (en) * | 2013-05-12 | 2014-08-13 | 摩尔动力(北京)技术股份有限公司 | Hydraulic energy storage tank |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110119 Termination date: 20130617 |