CN204385280U - Rotary target uses low-voltage plasma spraying room - Google Patents
Rotary target uses low-voltage plasma spraying room Download PDFInfo
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- CN204385280U CN204385280U CN201420861005.9U CN201420861005U CN204385280U CN 204385280 U CN204385280 U CN 204385280U CN 201420861005 U CN201420861005 U CN 201420861005U CN 204385280 U CN204385280 U CN 204385280U
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- pressure chamber
- spray gun
- guide rail
- rotated bed
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Abstract
The utility model relates to a kind of rotary target low-voltage plasma spraying room, feature is: comprise the cylindric low-pressure chamber be assembled into by low-pressure chamber upper housing and low-pressure chamber lower housing, in low-pressure chamber lower housing, fixed arm is installed, fixed arm is fixed servomotor, spray gun running gear and rotated bed; Described rotated bed comprises rotated bed guide rail, in one end of rotated bed guide rail, main transmission box is installed, arranging at the other end of rotated bed guide rail can along the tailstock of rotated bed guide rail movement, tailstock is arranged clamping termination, described servomotor is connected with the power intake of main transmission box by belt, the clutch end connecting chuck of main transmission box, clamping workpiece between chuck and clamping termination; Described spray gun running gear comprises spray gun running gear guide rail, and spray gun running gear guide rail arranges gun, and gun is provided with spray gun retaining plate, and spray gun installed by spray gun retaining plate.The utility model can realize subatmospheric and protective atmosphere, reduces the oxygen level of product, improves the density of product.
Description
Technical field
The utility model relates to a kind of rotary target low-voltage plasma spraying room, and especially a kind of device producing lower pressure when plasma spraying rotary target material, belongs to technical field of vacuum equipment.
Background technology
Magnetic control spattering target under suitable processing condition, sputters at by magnetron sputtering coating system sputtering source substrate being formed various function film.
A lot of magnetic control spattering target needs to be produced by plasma spray coating process, in spraying process the atmosphere of surrounding environment and air pressure very large to the quality influence of target.At present, the domestic multiplex method (i.e. normal pressure spraying) sprayed in an atmosphere produces target, and product density is low, and oxygen level is high, and resistivity is high, can not meet the demand of high-end plated film.
Summary of the invention
The purpose of this utility model overcomes the deficiencies in the prior art; a kind of rotary target low-voltage plasma spraying room is provided; produce subatmospheric and protective atmosphere; effectively can improve the density of rotary target material; control oxygen level; and significantly improve powder utilization, while improving the quality of products, reduce production cost.
According to the technical scheme that the utility model provides, a kind of rotary target uses low-voltage plasma spraying room, feature is: comprise the cylindric low-pressure chamber be assembled into by semicircle low-pressure chamber upper housing and semicircle low-pressure chamber lower housing, in low-pressure chamber lower housing, fixed arm is installed, fixed arm is fixed respectively servomotor, spray gun running gear and rotated bed, spray gun running gear and rotated bed are arranged side by side along the length direction of low-pressure chamber, and servomotor is positioned at one end of rotated bed; Described rotated bed comprises the rotated bed guide rail arranged along low-pressure chamber length direction, in one end of rotated bed guide rail, main transmission box is installed, arranging at the other end of rotated bed guide rail can along the tailstock of rotated bed guide rail movement, tailstock is arranged clamping termination, described servomotor is connected with the power intake of main transmission box by belt, the clutch end connecting chuck of main transmission box, clamping workpiece between chuck and clamping termination; Described spray gun running gear comprises the spray gun running gear guide rail arranged along low-pressure chamber length direction, and spray gun running gear guide rail is arranged can along the gun of spray gun running gear guide rail movement, and gun is provided with spray gun retaining plate, and spray gun installed by spray gun retaining plate.
Further, the bonding surface of described low-pressure chamber upper housing and low-pressure chamber lower housing is trim, is provided with sealing-ring at trim, and trim outside is fixed by securing gear.
Further, described low-pressure chamber lower housing is provided with bleeding point, bleeding point connects extraction pipe.
Further, global function interface is provided with in the end of described low-pressure chamber lower housing.
Further, described low-pressure chamber upper housing is provided with viewing window.
The utility model has the following advantages: the utility model product structure is simple, be skillfully constructed rationally, can realize subatmospheric and protective atmosphere, reduce the oxygen level of product, improve the density of product.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the side-view of Fig. 1.
Embodiment
Below in conjunction with concrete accompanying drawing, the utility model is described in further detail.
As shown in Fig. 1 ~ Fig. 2: as described in rotary target low-voltage plasma spraying room comprise servomotor 1, main transmission box 2, chuck 3, viewing window 4, gun stand 5, workpiece 6, clamping termination 7, tailstock 8, low-pressure chamber upper housing 9, securing gear 10, rotated bed guide rail 11, fixed arm 12, spray gun running gear guide rail 13, gun 14, spray gun 15, spray gun retaining plate 16, bleeding point 17, sealing-ring 18, extraction pipe 19, global function interface 20, low-pressure chamber lower housing 21, spray gun running gear 22, rotated bed 23 etc.
As shown in Figure 1 and Figure 2, the utility model is assembled into cylindric low-pressure chamber by semicircle low-pressure chamber upper housing 9 and semicircle low-pressure chamber lower housing 21, the bonding surface of low-pressure chamber upper housing 9 and low-pressure chamber lower housing 21 is trim, be provided with sealing-ring 18 at trim, trim outside is fixed by securing gear 10; In described low-pressure chamber lower housing 21, fixed arm 12 is installed, fixed arm 12 is fixed respectively servomotor 1, spray gun running gear 22 and rotated bed 23, spray gun running gear 22 and rotated bed 23 are arranged side by side along the length direction of low-pressure chamber, and servomotor 1 is positioned at one end of rotated bed 23;
Described rotated bed 23 comprises the rotated bed guide rail 11 arranged along low-pressure chamber length direction, installs main transmission box 2 in one end of rotated bed guide rail 11, arranges along the tailstock 8 of rotated bed guide rail 11 movement, tailstock 8 can be arranged clamping termination 7 at the other end of rotated bed guide rail 11; Described servomotor 1 is connected by the power intake of belt with main transmission box 2, the clutch end connecting chuck 3 of main transmission box 2, clamping workpiece 6 between chuck 3 and clamping termination 7;
Described spray gun running gear 22 comprises the spray gun running gear guide rail 13 arranged along low-pressure chamber length direction, spray gun running gear guide rail 13 is arranged can along the gun 14 of spray gun running gear guide rail 13 movement, gun 14 is provided with spray gun retaining plate 16, spray gun retaining plate 16 is installed spray gun 15;
Described low-pressure chamber lower housing 21 is provided with bleeding point 17, and bleeding point 17 connects extraction pipe 19; Be provided with global function interface 20 in the end of described low-pressure chamber lower housing 21, water, electricity, gas are connected to required equipment by global function interface 20;
Described low-pressure chamber upper housing 9 is provided with 3 viewing windows 4, is convenient to observe in production process.
The principle of work that the utility model is novel and working process: low-pressure chamber upper housing 9 of slinging, by workpiece 6 clamping in rotated bed 23, adjustment gun 14 and spray gun retaining plate 16, make spray gun 15 meet processing requirement to the height and distance of workpiece 6; The sealing-ring 18 of low-pressure chamber lower housing 21 coats vacuum silicon grease, puts down low-pressure chamber upper housing 9, its trim is combined by trim with low-pressure chamber lower housing 21, install and tighten securing gear 10.Start vacuum pump, by extraction pipe 19 and bleeding point 17, pressure in low-pressure chamber is reduced to 1-100Pa.Start servomotor 1, make rotated bed 23 drive workpiece 6 to rotate with certain speed, start spray gun running gear 22 subsequently, make spray gun 15 with the axial direction due to-and-fro movement of certain speed along workpiece 6, start spray gun 15, the powderject of molten state on workpiece 6.Protective gas can pass into low-pressure chamber by global function interface 20 with certain flow as required.Due to vacuum pump continued running, can ensure pressure in low-pressure chamber stable remain on the level that technique needs.
Claims (5)
1. a rotary target uses low-voltage plasma spraying room, it is characterized in that: comprise the cylindric low-pressure chamber be assembled into by semicircle low-pressure chamber upper housing (9) and semicircle low-pressure chamber lower housing (21), in low-pressure chamber lower housing (21), fixed arm (12) is installed, fixed arm (12) is fixed respectively servomotor (1), spray gun running gear (22) and rotated bed (23), spray gun running gear (22) and rotated bed (23) are arranged side by side along the length direction of low-pressure chamber, and servomotor (1) is positioned at one end of rotated bed (23); Described rotated bed (23) comprises the rotated bed guide rail (11) arranged along low-pressure chamber length direction, in one end of rotated bed guide rail (11), main transmission box (2) is installed, arranging at the other end of rotated bed guide rail (11) can along the tailstock (8) of rotated bed guide rail (11) movement, tailstock (8) is arranged clamping termination (7), described servomotor (1) is connected by the power intake of belt with main transmission box (2), the clutch end connecting chuck (3) of main transmission box (2), clamping workpiece (6) between chuck (3) and clamping termination (7); Described spray gun running gear (22) comprises the spray gun running gear guide rail (13) arranged along low-pressure chamber length direction, the upper setting of spray gun running gear guide rail (13) can along the gun (14) of spray gun running gear guide rail (13) movement, gun (14) is provided with spray gun retaining plate (16), spray gun retaining plate (16) is installed spray gun (15).
2. rotary target as claimed in claim 1 uses low-voltage plasma spraying room, it is characterized in that: the bonding surface of described low-pressure chamber upper housing (9) and low-pressure chamber lower housing (21) is trim, be provided with sealing-ring (18) at trim, trim is outside to be fixed by securing gear (10).
3. rotary target as claimed in claim 1 uses low-voltage plasma spraying room, it is characterized in that: on described low-pressure chamber lower housing (21), be provided with bleeding point (17), and bleeding point (17) connects extraction pipe (19).
4. rotary target as claimed in claim 1 uses low-voltage plasma spraying room, it is characterized in that: be provided with global function interface (20) in the end of described low-pressure chamber lower housing (21).
5. rotary target as claimed in claim 1 uses low-voltage plasma spraying room, it is characterized in that: on described low-pressure chamber upper housing (9), be provided with viewing window (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420861005.9U CN204385280U (en) | 2014-12-30 | 2014-12-30 | Rotary target uses low-voltage plasma spraying room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420861005.9U CN204385280U (en) | 2014-12-30 | 2014-12-30 | Rotary target uses low-voltage plasma spraying room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204385280U true CN204385280U (en) | 2015-06-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420861005.9U Active CN204385280U (en) | 2014-12-30 | 2014-12-30 | Rotary target uses low-voltage plasma spraying room |
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| CN (1) | CN204385280U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106319431A (en) * | 2016-10-31 | 2017-01-11 | 芜湖映日科技有限公司 | Mandrel-free target spraying equipment |
| CN107299331A (en) * | 2017-07-10 | 2017-10-27 | 深圳市众诚达应用材料科技有限公司 | The spraying equipment that can be changed between normal pressure and low pressure |
| CN107694805A (en) * | 2017-11-23 | 2018-02-16 | 中山市君禾机电设备有限公司 | A kind of spray room system for pipeline spraying |
| CN107893209A (en) * | 2017-09-18 | 2018-04-10 | 佛山先进表面技术有限公司 | A kind of rotary target material thermal spray system and method |
| CN108570637A (en) * | 2018-05-11 | 2018-09-25 | 广州市尤特新材料有限公司 | A kind of thermal spraying rotary target material equipment frock |
| CN109811293A (en) * | 2019-04-10 | 2019-05-28 | 吕喜鹏 | A kind of water-cooled flexibility positioning spindle-less clamping increasing material heat-processing equipment |
-
2014
- 2014-12-30 CN CN201420861005.9U patent/CN204385280U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106319431A (en) * | 2016-10-31 | 2017-01-11 | 芜湖映日科技有限公司 | Mandrel-free target spraying equipment |
| CN107299331A (en) * | 2017-07-10 | 2017-10-27 | 深圳市众诚达应用材料科技有限公司 | The spraying equipment that can be changed between normal pressure and low pressure |
| CN107893209A (en) * | 2017-09-18 | 2018-04-10 | 佛山先进表面技术有限公司 | A kind of rotary target material thermal spray system and method |
| CN107893209B (en) * | 2017-09-18 | 2023-09-26 | 佛山先进表面技术有限公司 | Rotary target thermal spraying system and method |
| CN107694805A (en) * | 2017-11-23 | 2018-02-16 | 中山市君禾机电设备有限公司 | A kind of spray room system for pipeline spraying |
| CN108570637A (en) * | 2018-05-11 | 2018-09-25 | 广州市尤特新材料有限公司 | A kind of thermal spraying rotary target material equipment frock |
| CN108570637B (en) * | 2018-05-11 | 2020-01-07 | 广州市尤特新材料有限公司 | Hot spraying rotating target equipment tool |
| CN109811293A (en) * | 2019-04-10 | 2019-05-28 | 吕喜鹏 | A kind of water-cooled flexibility positioning spindle-less clamping increasing material heat-processing equipment |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |