CN107893209B - Rotary target thermal spraying system and method - Google Patents
Rotary target thermal spraying system and method Download PDFInfo
- Publication number
- CN107893209B CN107893209B CN201710841050.6A CN201710841050A CN107893209B CN 107893209 B CN107893209 B CN 107893209B CN 201710841050 A CN201710841050 A CN 201710841050A CN 107893209 B CN107893209 B CN 107893209B
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- sealed
- spraying bin
- butterfly valve
- heat exchange
- electric butterfly
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/137—Spraying in vacuum or in an inert atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spray Control Apparatus (AREA)
- Nozzles (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
The invention discloses a rotary target thermal spraying system, which comprises a sealed spraying bin, wherein a workpiece rotating mechanism and a spray gun operating mechanism are arranged in the sealed spraying bin; the dust remover is connected to an air outlet of the sealed spraying bin, the fan is connected to the air outlet of the dust remover, the sealed spraying bin, the dust remover and the fan form a closed loop through a ventilation pipeline, the heat exchange device is arranged on the ventilation pipeline, and the ventilation pipeline penetrates through the heat exchange device; the vacuum pump and the nitrogen gas inlet are communicated with each other through pipelines respectively to seal the spraying bin. The system has the advantages of simple and efficient design, low oxide content of the coating, thorough dust treatment, no environmental pollution, simple equipment manufacture and good treatment and processing effects and economic benefits.
Description
Technical Field
The invention belongs to the field of coating equipment, and particularly relates to a rotary target thermal spraying system and a spraying method.
Background
At present, the domestic high-quality rotary target material is produced by adopting a vacuum plasma spraying process. It is characterized by low oxide content. However, the equipment has high air tightness requirement and high manufacturing price. In addition, no gas flows in the spraying process, and dust generated by spraying can pollute the coating and influence the quality of the coating.
SUMMARY OF THE PATENT FOR INVENTION
The invention aims at the problems and provides a rotary target thermal spraying system which has low oxygen content in a spraying bin, can greatly reduce the oxide content of a coating, and can take away and filter dust generated by spraying through flowing gas in the spraying process to improve the quality of the coating.
In order to achieve the above object, the present invention provides the following technical solutions:
the rotary target thermal spraying system comprises a sealed spraying bin, wherein a workpiece rotating mechanism and a spray gun operating mechanism are arranged in the sealed spraying bin, and the spray gun operating mechanism is arranged below the workpiece rotating mechanism; the dust remover is connected to an air outlet of the sealed spraying bin, the fan is connected to the air outlet of the dust remover, the sealed spraying bin, the dust remover and the fan form a closed loop through a ventilation pipeline, the heat exchange device is arranged on the ventilation pipeline, and the ventilation pipeline penetrates through the heat exchange device; still include vacuum pump and nitrogen gas air inlet, vacuum pump and nitrogen gas air inlet are respectively through pipeline intercommunication sealed spraying storehouse, are provided with first electric butterfly valve on the communication pipeline of vacuum pump, and nitrogen gas air inlet department is provided with the second electric butterfly valve, is provided with the third electric butterfly valve between sealed spraying storehouse air outlet and the dust remover.
The sealed spraying bin is provided with a first oxygen detector, and a pipeline for communicating the vacuum pump with the outlet end of the sealed spraying bin is provided with a second oxygen detector.
The vent pipe is provided with a pressure relief valve.
The heat exchange device is a fin type heat exchange device and comprises a water inlet and a water outlet which are respectively arranged at two ends, and a plurality of heat exchange plates are arranged in the heat exchange device.
Simultaneously, a corresponding rotary target thermal spraying method is provided, which comprises the following steps:
step one: installing a workpiece, and closing a sealed spraying bin;
step two: starting a vacuum pump, opening a first electric butterfly valve, and vacuumizing a closed loop to form negative pressure;
step three: opening a second electric butterfly valve, and filling nitrogen into the sealed spraying bin;
step four: detecting the oxygen content in the sealed spraying bin, closing the first electric butterfly valve and the second electric butterfly valve when the oxygen concentration is lower than 0.1%, opening the third electric butterfly valve, starting a workpiece rotating mechanism and a spray gun operating mechanism, and simultaneously starting a dust remover, a fan and a heat exchange device to thermally spray the workpiece;
step five: continuously detecting the oxygen concentration, when the oxygen concentration is higher than 0.5%, opening a second electric butterfly valve, filling nitrogen into the sealed spraying bin, and regulating the oxygen concentration in the system to be a normal value;
step six: and regulating the pressure of the system, and when the pressure of the system is higher than 0.2Mpa, opening a pressure relief valve, and regulating the pressure in the system to ensure that the pressure is kept below 0.2 Mpa.
Compared with the prior art, the invention has the following beneficial effects:
the rotary target thermal spraying system is simple and efficient in design, has extremely low oxygen content in the spraying atmosphere, does not need to be in a vacuum environment, can greatly reduce the oxide content of the coating, can take away and filter dust generated by spraying through flowing gas in the spraying process, improves the coating quality, has low oxide content of the coating, and is thorough in dust treatment and free from environmental pollution. The equipment does not need vacuum pressure resistance, and the manufacturing cost is reduced. The equipment is simple to manufacture, and has good treatment and processing effects and economic benefits.
Drawings
FIG. 1 is a schematic diagram of a rotary target thermal spray system of the present invention.
FIG. 2 is a schematic flow chart of the rotary target thermal spraying method of the present invention.
In the figure: 1-sealing a spraying bin; 2-a workpiece rotation mechanism; 3-a spray gun operating mechanism; 4-a dust remover; 5-
A vacuum pump; 6-a heat exchange device; 7-a ventilation pipeline; 8-a first electric butterfly valve; 9-a third electric butterfly valve;
10-a second electric butterfly valve; 11-a first oxygen detector; 12-a second oxygen detector; 13-pressure relief valve.
Detailed Description
The present invention will be described in further detail with reference to the drawings and detailed description.
As shown in figure 1, the rotary target thermal spraying system mainly comprises a sealed spraying bin 1, a workpiece rotating mechanism 2, a spray gun operating mechanism 3, a dust remover 4, a vacuum pump 5, a heat exchange device 6, a fan and a ventilation pipeline 7.
The sealed spraying bin 1 is cylindrical, and two ends are respectively provided with an air inlet and an air outlet. The bin gate is arranged in the middle of the cylinder and can be opened to load and unload workpieces. The sealed spraying bin 1 is provided with a first oxygen detector 12 for detecting the oxygen concentration in the bin body. The sealed spraying bin 1 is internally provided with a workpiece rotating mechanism 2 and a spray gun operating mechanism 3. The workpiece rotating mechanism 2 comprises a machine base, a power head and a tailstock, wherein the machine base is fixed in the sealed spraying bin, and the power head and the tailstock are arranged at two ends of the machine base. The workpiece is arranged between the power head and the tailstock, and the power head is provided with a rotating motor for driving the workpiece to rotate. The spray gun operating mechanism 3 is arranged below the workpiece rotating mechanism, and comprises a fixed base and a spray gun arranged on the fixed base, wherein the spray gun is of an X-Y axis spray gun structure. When the workpiece rotates, the spray gun can move transversely and longitudinally to spray the workpiece.
The dust remover 4 sets up in the air outlet of sealed spraying storehouse 1, and the air inlet of fan is connected to the air outlet of dust remover 4, and the fan air outlet passes through ventilation line 7 and is connected with the air intake of sealed spraying storehouse 1 for sealed spraying storehouse 1, dust remover 4, fan have formed a closed loop through ventilation line 7. The pipeline for communicating the air outlet of the sealed spraying bin 1 with the dust remover 4 is also provided with a third electric butterfly valve 9 which can be used for closing the closed loop, so that the closed loop becomes a one-way pipeline.
A dust collecting device is arranged below the dust remover 4, and dust generated in the spraying process collected by the dust remover is placed in the dust collecting device.
A pressure release valve 13 and a heat exchange device 6 are arranged on the ventilation pipeline 7 connected between the air outlet of the fan and the sealed spraying bin. The pressure release valve 13 is used for controlling the pressure inside the system, and when the pressure inside the system is excessive, the pressure release valve 13 can be opened for reducing the pressure. The heat exchange device 6 is a fin type heat exchange device and comprises a water inlet and a water outlet, a plurality of heat exchange fins are arranged in the heat exchange device, cold water enters from the water inlet, heated water is output from the water outlet after heat exchange, a ventilation pipeline penetrates through the heat exchange device, and gas flowing through the ventilation pipeline is cooled, so that the temperature of the system can be reduced.
The air outlet of the sealed spraying bin 1 is communicated with a vacuum pump 5, and a first electric butterfly valve 8 is arranged on a pipeline between the vacuum pump 5 and the air outlet of the sealed spraying bin 1 and can be used for turning off the vacuum pump to vacuumize the system; a first oxygen sensor 11 is also provided for detecting the oxygen concentration in the system.
The pipeline that the air outlet of sealed spraying storehouse 1 and dust remover 4 intercommunication is provided with the nitrogen gas air inlet, and nitrogen gas air inlet department is provided with second electric butterfly valve 10 for the input of control nitrogen gas.
As shown in fig. 2, the spraying process of the workpiece is as follows:
step one: installing the workpiece on a workpiece rotating mechanism 2 in the sealed spraying bin 1, and closing the sealed spraying bin 1;
step two: starting a vacuum pump 5, opening a first electric butterfly valve 8, and vacuumizing a closed loop to form negative pressure;
step three: opening a second electric butterfly valve 10, and filling nitrogen into the sealed spraying bin 1;
step four: detecting the oxygen content in the sealed spraying bin 1, when the oxygen concentration is lower than 0.1%, closing the first electric butterfly valve 8 and the second electric butterfly valve 10, opening the third electric butterfly valve 9, starting the workpiece rotating mechanism 2 and the spray gun operating mechanism 3, simultaneously starting the dust remover 4, the fan and the heat exchange device 6, carrying out thermal spraying on the workpiece, and realizing the recycling of gas through a closed loop;
step five: when the oxygen concentration is higher than 0.5%, the second electric butterfly valve 10 is opened, nitrogen is filled into the sealed spraying bin 1, and the oxygen concentration in the system is regulated to be a normal value.
Step six: and regulating the pressure of the system, and when the pressure of the system is higher than 0.2Mpa, opening a pressure relief valve, and regulating the pressure in the system to ensure that the pressure is kept below 0.2 Mpa.
The foregoing detailed description is directed to embodiments of the invention which are not intended to limit the scope of the invention, but rather to cover all modifications and variations within the scope of the invention.
Claims (3)
1. A rotary target thermal spray system, characterized by: the spray gun comprises a sealed spray coating bin, wherein a workpiece rotating mechanism and a spray gun operating mechanism are arranged in the sealed spray coating bin, and the spray gun operating mechanism is arranged below the workpiece rotating mechanism; the dust remover is connected to an air outlet of the sealed spraying bin, the fan is connected to the air outlet of the dust remover, the sealed spraying bin, the dust remover and the fan form a closed loop through a ventilation pipeline, the heat exchange device is arranged on the ventilation pipeline, and the ventilation pipeline penetrates through the heat exchange device; the vacuum pump is communicated with the sealing spraying bin through a pipeline respectively, a first electric butterfly valve is arranged on a communication pipeline of the vacuum pump, a second electric butterfly valve is arranged at the nitrogen inlet, and a third electric butterfly valve is arranged between an air outlet of the sealing spraying bin and the dust remover; a first oxygen detector is arranged on a pipeline, communicated with the outlet end of the sealed spraying bin, of the vacuum pump, and a second oxygen detector is arranged on the sealed spraying bin; and a pressure relief valve is arranged on the ventilation pipeline.
2. The rotary target thermal spray system of claim 1, wherein: the heat exchange device is a fin type heat exchange device and comprises a water inlet and a water outlet which are respectively arranged at two ends, and a plurality of heat exchange plates are arranged in the heat exchange device.
3. A rotary target thermal spray method for use in the rotary target thermal spray system of any one of claims 1 to 2, characterized by: the method comprises the following steps:
step one: installing a workpiece, and closing a sealed spraying bin;
step two: starting a vacuum pump, opening a first electric butterfly valve, and vacuumizing a closed loop to form negative pressure;
step three: opening a second electric butterfly valve, and filling nitrogen into the sealed spraying bin;
step four: detecting the oxygen content in the sealed spraying bin, closing the first electric butterfly valve and the second electric butterfly valve when the oxygen concentration is lower than 0.1%, opening the third electric butterfly valve, starting a workpiece rotating mechanism and a spray gun operating mechanism, and simultaneously starting a dust remover, a fan and a heat exchange device to thermally spray the workpiece;
step five: continuously detecting the oxygen concentration, when the oxygen concentration is higher than 0.5%, opening a second electric butterfly valve, filling nitrogen into the sealed spraying bin, and regulating the oxygen concentration in the system to be a normal value;
step six: and regulating the pressure of the system, and when the pressure of the system is higher than 0.2Mpa, opening a pressure relief valve, and regulating the pressure in the system to ensure that the pressure is kept below 0.2 Mpa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710841050.6A CN107893209B (en) | 2017-09-18 | 2017-09-18 | Rotary target thermal spraying system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710841050.6A CN107893209B (en) | 2017-09-18 | 2017-09-18 | Rotary target thermal spraying system and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107893209A CN107893209A (en) | 2018-04-10 |
| CN107893209B true CN107893209B (en) | 2023-09-26 |
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ID=61803477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710841050.6A Active CN107893209B (en) | 2017-09-18 | 2017-09-18 | Rotary target thermal spraying system and method |
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| Country | Link |
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| CN (1) | CN107893209B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108504982A (en) * | 2018-05-25 | 2018-09-07 | 基迈克材料科技（苏州）有限公司 | Paint finishing |
| CN109811293A (en) * | 2019-04-10 | 2019-05-28 | 吕喜鹏 | A kind of water-cooled flexibility positioning spindle-less clamping increasing material heat-processing equipment |
| CN113953125A (en) * | 2021-11-30 | 2022-01-21 | 广州市尤特新材料有限公司 | Dust collecting system for spraying equipment and thermal spraying method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202257164U (en) * | 2011-09-29 | 2012-05-30 | 厦门映日光电科技有限公司 | Monitoring device for spraying rotary target material |
| CN203834000U (en) * | 2014-05-14 | 2014-09-17 | 厦门映日新材料科技有限公司 | Vacuum spraying rotary target automatic exhauster |
| CN104174544A (en) * | 2014-08-26 | 2014-12-03 | 法柯特科技（江苏）有限公司 | Vacuum spraying target production equipment |
| CN204385280U (en) * | 2014-12-30 | 2015-06-10 | 江阴恩特莱特镀膜科技有限公司 | Rotary target uses low-voltage plasma spraying room |
| CN207276692U (en) * | 2017-09-18 | 2018-04-27 | 佛山先进表面技术有限公司 | A kind of rotary target material thermal spray system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040200418A1 (en) * | 2003-01-03 | 2004-10-14 | Klaus Hartig | Plasma spray systems and methods of uniformly coating rotary cylindrical targets |
-
2017
- 2017-09-18 CN CN201710841050.6A patent/CN107893209B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202257164U (en) * | 2011-09-29 | 2012-05-30 | 厦门映日光电科技有限公司 | Monitoring device for spraying rotary target material |
| CN203834000U (en) * | 2014-05-14 | 2014-09-17 | 厦门映日新材料科技有限公司 | Vacuum spraying rotary target automatic exhauster |
| CN104174544A (en) * | 2014-08-26 | 2014-12-03 | 法柯特科技（江苏）有限公司 | Vacuum spraying target production equipment |
| CN204385280U (en) * | 2014-12-30 | 2015-06-10 | 江阴恩特莱特镀膜科技有限公司 | Rotary target uses low-voltage plasma spraying room |
| CN207276692U (en) * | 2017-09-18 | 2018-04-27 | 佛山先进表面技术有限公司 | A kind of rotary target material thermal spray system |
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| Publication number | Publication date |
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| CN107893209A (en) | 2018-04-10 |
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