CN212457854U

CN212457854U - Safe efficient vacuum annealing stove

Info

Publication number: CN212457854U
Application number: CN202020807333.6U
Authority: CN
Inventors: 王升; 陈建余; 林金革; 卓余锋; 黄国平
Original assignee: Nanjing Menghe Electronics Technology Co ltd
Current assignee: Nanjing Menghe Electronics Technology Co ltd
Priority date: 2020-05-15
Filing date: 2020-05-15
Publication date: 2021-02-02
Anticipated expiration: 2030-05-15

Abstract

The utility model provides a safe efficient vacuum annealing stove, includes furnace body, stove courage, heating element and heat sink, the stove courage is established in the furnace body, heating element establishes on the furnace body outer wall and in the stove courage, the heat sink is established in stove courage and furnace body. The utility model aims at providing a safe efficient vacuum annealing stove has realized two-way heat transfer, makes each annealing work piece thermally equivalent, improves the quality of whole annealing work piece, and simultaneously, the design of two-way cooling can make and improve cooling rate greatly, has improved work efficiency.

Description

Safe efficient vacuum annealing stove

Technical Field

The utility model belongs to the technical field of vacuum annealing furnace, specifically, relate to a safe efficient vacuum annealing furnace.

Background

The vacuum annealing furnace is typical heat treatment equipment in semiconductor processing, and is used for annealing, alloying, sintering and other processes in integrated circuits, discrete devices and solar photovoltaic industries. The process can obviously improve the surface performance of the material, improve the surface purity of the material, improve the fatigue strength, plasticity, initial property, corrosion resistance and other parameters of the material, is a processing and manufacturing technology with high precision, high quality, energy conservation, cleanness and no pollution in the aspect of material modification, and is an important field of the current manufacturing technology and a hotspot field of process development. In order to improve the utilization rate of the vacuum annealing furnace and reduce the cooling time of equipment after the process is finished, the maximum cooling rate of the annealing furnace is required to be not less than 80C/min. The cooling device mainly comprises an air cooling device and a water cooling device, wherein the air cooling device mainly comprises a strong cooling fan, and the water cooling device mainly comprises a water cooling pipeline and a cooling water system in the end cover of the furnace body. The method of combining the strong cooling fan with the water cooling pipeline is adopted in the prior art, because the cooling positions are at two ends of the furnace body, and the furnace is required to pass through the process of transferring heat from the middle of the furnace body to the two ends, the cooling effect is not ideal, the cooling speed is improved mainly by increasing the power of the strong cooling fan, accelerating the flow rate of cooling water and the like, and the cooling speed has certain limitation because the scheme accelerates the heat transfer outside the furnace to realize cooling. In addition, the space occupied by the powerful cooling fan with high power is large, great influence is exerted on the overall layout of all parts of the equipment, and great noise can be generated in the operation process of the powerful cooling fan.

Meanwhile, a vacuum annealing furnace adopted in the traditional metal material heat treatment has an internal heating type and an external heating type, wherein the internal heating type is that a heating element is arranged on the inner wall of a furnace pipe to directly heat a workpiece, and the external heating type is that the heating element is arranged on the outer wall of the furnace pipe to heat the workpiece through the furnace pipe wall. Both of these two types of heat transfer methods are heating methods in which heat is gradually transferred from the periphery to the center of the workpiece, and when the furnace is made larger to increase the throughput, the heat transfer distance is also longer, resulting in a great difference in the actual heat treatment effect of each workpiece. However, in practical applications, it is always required that the heat treatment effect of each workpiece in the same furnace is consistent, and the conventional vacuum annealing furnace cannot achieve the effect.

SUMMERY OF THE UTILITY MODEL

Utility model purpose: the utility model aims at providing a safe efficient vacuum annealing stove has realized two-way heat transfer, makes each annealing work piece thermally equivalent, improves the quality of whole annealing work piece, and simultaneously, the design of two-way cooling can make and improve cooling rate greatly, has improved work efficiency.

The technical scheme is as follows: the utility model provides a safe efficient vacuum annealing stove, including furnace body, stove courage, heating element and heat sink, the stove courage is established in the furnace body, heating element establishes on the furnace body outer wall and in the stove courage, the heat sink is established in stove courage and furnace body. Safe efficient vacuum annealing stove, can realize the vacuum operation through the design of furnace body and stove courage, can realize the bidirectional heating through heating element to the heating of furnace body and stove courage, the bidirectional heating can make being heated of annealing work piece even, improves the quality of whole annealing work piece, the heat sink can cool down stove courage and furnace body, also realizes two-way cooling, improves cooling rate, improves vacuum annealing stove's work efficiency.

Further, foretell safe efficient vacuum annealing stove, be equipped with the inner bag in the stove courage, be equipped with the bell on the stove courage, inner bag fixed connection bell, the inner bag axis coincides with bell and stove courage axis, form the blowing district between inner bag and the stove courage. The bell can make the temperature in the stove courage, reduces calorific loss, and the inner bag provides space and attachment position for inside heating and cooling device, realizes the heating and the cooling bidirectionality of whole annealing stove, improves the quality of work piece and takes off the work efficiency of goods stove, and the inner bag can make the annealing work piece that is close to the inner bag be heated evenly with bell and furnace body axis coincidence design.

Furthermore, foretell safe efficient vacuum annealing stove, the furnace body includes stove outer covering, heat preservation, insulating layer, the furnace body is stove outer covering, heat preservation, insulating layer from outside to inside in proper order, be cavity between heat preservation and the insulating layer, be equipped with the cooling passageway in. The heat preservation can make the internal temperature of furnace not leak, reduces calorific loss, and the insulating layer can make heating element not have the electric leakage phenomenon to outer, increases the security, is the cavity design between heat preservation and the insulating layer simultaneously, just in time provides a cooling passageway, can take heating element's heat when the cooling, improves cooling rate.

Further, the safe and efficient vacuum annealing furnace comprises a first heating element and a second heating element, wherein the first heating element is arranged on the outer wall of the furnace liner, an insulating layer is arranged on the outer side of the first heating element, and the second heating element is arranged on the inner wall of the furnace liner. The first heating element heats on the outer wall of the furnace liner, and the second heating element heats on the inner wall of the furnace liner, so that the annealing workpiece is heated inside and outside, the bidirectional heating effect is realized, and the whole annealing workpiece is heated uniformly.

Further, in the safe and efficient vacuum annealing furnace, the cooling device comprises a first cooling device and a second cooling device, the first cooling device comprises a cooler and a cooling channel, the cooler is connected with the cooling channel, and the cooler is arranged outside the furnace body; the second cooling device comprises a cooler, an air inlet pipe and an air exhaust pipe, wherein the air inlet pipe and the air exhaust pipe are arranged on the furnace cover. First heat sink is at the inside cooling of furnace body, inputs cold air entering cooling passageway through the cooler, passes through the heat exchange at the cooling passageway, realizes the cooling, simultaneously again, makes the interior annealing work piece cooling of furnace courage, carries out the heat exchange, and the rethread exhaust tube is taken away the gas that has the heat, realizes inside and outside cooling function, both can accelerate cooling rate, can make annealing work piece cooling even again, improves the quality of annealing work piece.

Further, foretell safe efficient vacuum annealing stove, the intake pipe includes air intake manifold, connecting portion, air intake branch, air intake manifold establishes on the furnace lid, air intake manifold connects connecting portion, air intake branch all establish in the inner bag, connecting portion are connected to air intake branch one end, and one end extends to the inner bag bottom. The design of air inlet branch increases the area of heat exchange, improves cooling rate, and air inlet branch one end extends to the inner bag bottom, can make, and the cold air in the air inlet branch escapes from the inner bag bottom, through reverse motion, fully carries out the heat exchange.

Furthermore, in the safe and efficient vacuum annealing furnace, the vacuumizing interface is arranged at the top of the left side of the furnace pipe. Used for vacuumizing the furnace pipe.

Furthermore, the safe and efficient vacuum annealing furnace is characterized in that an air outlet is formed in the top of the cooling channel. The air with heat can be output through the air outlet.

Furthermore, according to the safe and efficient vacuum annealing furnace, the sealing ring is arranged between the furnace cover and the furnace pipe. The tightness of the inner container and the furnace cover is increased, and the annealing workpiece is prevented from being oxidized due to gas entering.

Further, in the safe and efficient vacuum annealing furnace, the first heating element is a resistance heating rod, and the second heating element is an electric heating wire. Easy to realize, economical and practical.

Above-mentioned technical scheme can find out, the utility model discloses following beneficial effect has: safe efficient vacuum annealing stove, simple structure, reasonable, convenient to use, through the design of two hot structures and two heat sinks, can realize two-way heating through heating element to the heating of furnace body and stove courage, two-way heating can make being heated of annealing work piece even, improves the quality of whole annealing work piece, the heat sink can cool down stove courage and furnace body, also realizes two-way cooling, improves cooling rate, improves vacuum annealing stove's work efficiency, application cost is low, adaptability has very high spreading value well.

Drawings

FIG. 1 is a schematic structural view of a safe and efficient vacuum annealing furnace according to embodiment 1 of the present invention;

FIG. 2 is a schematic structural view of a safe and efficient vacuum annealing furnace according to embodiment 2 of the present invention;

FIG. 3 is a schematic structural view of a safe and efficient vacuum annealing furnace according to embodiment 3 of the present invention;

FIG. 4 is a schematic view of a furnace chamber with a single gas inlet branch pipe;

FIG. 5 is a schematic view of a furnace chamber with multiple gas inlet branch pipes.

In the figure: the device comprises a furnace body 1, a furnace container 2, a heating element 3, a temperature reduction device 4, a furnace shell 11, a heat preservation layer 12, an insulating layer 13, a temperature reduction channel 14, a furnace container 21, a furnace cover 22, a material discharge area 23, a vacuum pumping interface 24, a first heating element 31, a second heating element 32, a first temperature reduction device 41, a second temperature reduction device 42, a temperature reducer 43, an air inlet pipe 44, an air exhaust pipe 45, an air inlet header pipe 441, a connecting part 442 and an air inlet branch pipe 443.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "a plurality" means two or more unless explicitly defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

Example 1

As shown in fig. 1 and 5, the safe and efficient vacuum annealing furnace comprises a furnace body 1, a furnace pipe 2, a heating element 3 and a cooling device 4, wherein the furnace pipe 2 is arranged in the furnace body 1, the heating element 3 is arranged on the outer wall of the furnace body 1 and in the furnace pipe 2, and the cooling device 4 is arranged in the furnace pipe 2 and the furnace body 1.

The inner container 21 is arranged in the furnace pipe 2, the furnace pipe 2 is provided with the furnace cover 22, the inner container 21 is fixedly connected with the furnace cover 22, the central axis of the inner container 21 coincides with the central axis of the furnace cover 22 and the central axis of the furnace pipe 2, a discharge area 23 is formed between the inner container 21 and the furnace pipe 2, a vacuumizing interface 24 is arranged at the top of the left side of the furnace pipe 2, and a sealing ring is arranged between the furnace cover 22 and the furnace pipe 2.

In addition, furnace body 1 includes stove outer covering 11, heat preservation 12, insulating layer 13, furnace body 1 is stove outer covering 11, heat preservation 12, insulating layer 13 from outside to inside in proper order, be the cavity between heat preservation 12 and the insulating layer 13, be equipped with cooling passageway 14 in.

The heating element 3 includes a first heating element 31 and a second heating element 32, the first heating element 31 is disposed on the outer wall of the furnace liner 2, the outer side of the first heating element 31 is the insulating layer 13, the second heating element 32 is disposed on the inner wall of the liner 22, wherein the first heating element 31 is a resistance heating rod, and the second heating element 32 is an electric heating wire.

In addition, the cooling device 4 comprises a first cooling device 41 and a second cooling device 42, the first cooling device 41 comprises a cooler 43 and a cooling channel 14, the top of the cooling channel 14 is provided with an air outlet 15, the cooler 43 is connected with the cooling channel 14, and the cooler 43 is arranged outside the furnace body 1; the second cooling device 42 comprises a cooler 43, an air inlet pipe 44 and an air exhaust pipe 45, wherein the air inlet pipe 44 and the air exhaust pipe 45 are arranged on the furnace cover 22.

The intake pipe 44 includes an intake manifold 441, a connecting portion 442, and intake branches 443, the intake manifold 441 is disposed on the furnace cover 22, the intake manifold 441 is connected to the connecting portion 442, the connecting portion 442 and the intake branches 443 are both disposed in the inner container 21, one end of the intake branch 443 is connected to the connecting portion 442, and the other end extends to the bottom of the inner container 21, wherein the number of the intake branches 443 is three.

Example 2

As shown in fig. 2 and 4, the safe and efficient vacuum annealing furnace comprises a furnace body 1, a furnace pipe 2, a heating element 3 and a cooling device 4, wherein the furnace pipe 2 is arranged in the furnace body 1, the heating element 3 is arranged on the outer wall of the furnace body 1 and in the furnace pipe 2, and the cooling device 4 is arranged in the furnace pipe 2 and the furnace body 1.

The heating element 3 comprises a first heating element 31 and a second heating element 32, the first heating element 31 is arranged on the outer wall of the furnace pipe 2, the outer side of the first heating element 31 is provided with an insulating layer 13, the second heating element 32 is arranged on the inner wall of the inner container 22, and the first heating element 31 and the second heating element 32 are resistance heating rods.

The intake pipe 44 includes an intake manifold 441, a connecting portion 442, and intake branches 443, the intake manifold 441 is disposed on the furnace cover 22, the intake manifold 441 is connected to the connecting portion 442, both the connecting portion 442 and the intake branches 443 are disposed in the inner container 21, one end of the intake branch 443 is connected to the connecting portion 442, and the other end extends to the bottom of the inner container 21, wherein the number of the intake branches 443 is one.

Example 3

As shown in fig. 3 and 5, the safe and efficient vacuum annealing furnace comprises a furnace body 1, a furnace pipe 2, a heating element 3 and a cooling device 4, wherein the furnace pipe 2 is arranged in the furnace body 1, the heating element 3 is arranged on the outer wall of the furnace body 1 and in the furnace pipe 2, and the cooling device 4 is arranged in the furnace pipe 2 and the furnace body 1.

The heating element 3 includes a first heating element 31 and a second heating element 32, the first heating element 31 is disposed on the outer wall of the furnace pipe 2, the outer side of the first heating element 31 is the insulating layer 13, the second heating element 32 is disposed on the inner wall of the inner container 22, wherein the first heating element 31 and the second heating element 32 are both heating wires.

Safe efficient vacuum annealing stove's theory of operation do:

put into blowing district 23 to the product, cover bell 22, through evacuation interface 24 take out into the vacuum in blowing district 23, open first heating element 31 and second heating element 32 again and heat up and carry out the heating heat preservation processing to the product, treat that the heat preservation process ends, open first heat sink 41 and second heat sink 42, carry cold air through desuperheater 43 in cooling passageway 14 and intake pipe 44, cold air passes through the heat exchange, take away the heat, export hot-air through air outlet 15 and exhaust tube 45, carry out inside and outside heating and cooling treatment to the product, can reduce because of the distance problem of blowing district 23 and bring the difference of product to the heat preservation and the cooling treatment of product. And taking out the product after cooling to finish the annealing process.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications can be made without departing from the principles of the present invention, and these modifications should also be regarded as the protection scope of the present invention.

Claims

1. A safe and efficient vacuum annealing furnace is characterized in that: including furnace body (1), stove courage (2), heating element (3) and heat sink (4), establish in furnace body (1) stove courage (2), establish on furnace body (1) outer wall and in stove courage (2) heating element (3), heat sink (4) are established in stove courage (2) and furnace body (1).

2. The safe and efficient vacuum annealing furnace according to claim 1, characterized in that: be equipped with inner bag (21) in stove courage (2), be equipped with bell (22) on stove courage (2), inner bag (21) fixed connection bell (22), inner bag (21) axis and bell (22) and stove courage (2) axis coincidence, form blowing district (23) between inner bag (21) and stove courage (2).

3. The safe and efficient vacuum annealing furnace according to claim 2, characterized in that: furnace body (1) is including stove outer covering (11), heat preservation (12), insulating layer (13), furnace body (1) is stove outer covering (11), heat preservation (12), insulating layer (13) from outer to interior in proper order, be cavity between heat preservation (12) and insulating layer (13), be equipped with cooling passageway (14) in.

4. The safe and efficient vacuum annealing furnace according to claim 3, characterized in that: the heating element (3) comprises a first heating element (31) and a second heating element (32), the first heating element (31) is arranged on the outer wall of the furnace pipe (2), an insulating layer (13) is arranged on the outer side of the first heating element (31), and the second heating element (32) is arranged on the inner wall of the furnace pipe (21).

5. The safe and efficient vacuum annealing furnace according to claim 4, characterized in that: the cooling device (4) comprises a first cooling device (41) and a second cooling device (42), the first cooling device (41) comprises a cooler (43) and a cooling channel (14), the cooler (43) is connected with the cooling channel (14), and the cooler (43) is arranged outside the furnace body (1); the second cooling device (42) comprises a cooler (43), an air inlet pipe (44) and an air exhaust pipe (45), the air inlet pipe (44) and the air exhaust pipe (45) are arranged on the furnace cover (22), the cooler (43) is connected with the air inlet pipe (44) and is arranged outside the inner container (21).

6. The safe and efficient vacuum annealing furnace according to claim 5, characterized in that: the air inlet pipe (44) comprises an air inlet main pipe (441), a connecting portion (442) and air inlet branch pipes (443), wherein the air inlet main pipe (441) is arranged on the furnace cover (22), the air inlet main pipe (441) is connected with the connecting portion (442), the connecting portion (442) and the air inlet branch pipes (443) are arranged in the inner container (21), one end of each air inlet branch pipe (443) is connected with the connecting portion (442), and the other end of each air inlet branch pipe extends to the bottom of the inner container (21).

7. The safe and efficient vacuum annealing furnace according to claim 1, characterized in that: and a vacuumizing interface (24) is arranged at the top of the left side of the furnace pipe (2).

8. The safe and efficient vacuum annealing furnace according to claim 3, characterized in that: and an air outlet (15) is arranged at the top of the cooling channel (14).

9. The safe and efficient vacuum annealing furnace according to claim 3, characterized in that: and a sealing ring is arranged between the furnace cover (22) and the furnace pipe (2).

10. The safe and efficient vacuum annealing furnace according to claim 4, characterized in that: the first heating element (31) is a resistance heating rod, and the second heating element (32) is an electric heating wire.