CN212620153U - Rapid cooling system in furnace - Google Patents
Rapid cooling system in furnace Download PDFInfo
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- CN212620153U CN212620153U CN202020892109.1U CN202020892109U CN212620153U CN 212620153 U CN212620153 U CN 212620153U CN 202020892109 U CN202020892109 U CN 202020892109U CN 212620153 U CN212620153 U CN 212620153U
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Abstract
The utility model discloses a quick cooling system in stove, including the heating furnace body, be equipped with the boiler tube in the heating furnace body, still include radiator unit, connecting pipe, fan subassembly and controller, radiator unit sets up in the boiler tube, radiator unit's air intake and air outlet all pass the boiler tube outer wall and outwards stretch out, radiator unit's air intake passes through the connecting pipe and links to each other with the fan subassembly, the controller is used for controlling the fan subassembly and opens and stop and amount of wind size. The utility model has the advantages of simple structure, high cooling efficiency, good cooling effect and the like.
Description
Technical Field
The utility model relates to a photovoltaic and semiconductor device field refer in particular to a quick cooling system in stove.
Background
The heating furnace tube is widely applied to the fields of photovoltaic and semiconductor equipment, such as a diffusion furnace, a PECVD (plasma enhanced chemical vapor deposition), an LPCVD (low pressure chemical vapor deposition), an annealing furnace, an oxidation furnace, an alloy furnace and the like. The rapid temperature rise and fall is an important index of the heating furnace tube, and the rapid temperature rise is mainly realized by increasing the heat insulation layer of the heating furnace body, the heating power or auxiliary heating and the like; and the rapid cooling adopts a water-cooled furnace body or a thinned heating furnace body heat-insulating layer. The water-cooled furnace body has high requirements on the processing technology of the heating furnace body, and risks of water leakage, furnace body bubbling and cracking and the like exist; and the thinning of the heat-insulating layer of the heating furnace body can influence the heating rate and increase the heating power. Therefore, in view of the shortcomings of the two rapid cooling methods for heating furnace tubes, a need exists in the art for a system that can achieve rapid cooling of the heating furnace body without affecting the heat preservation and heating rate of the heating furnace body.
SUMMERY OF THE UTILITY MODEL
To the technical problem that prior art exists, the utility model provides a quick cooling system in stove that simple structure, cooling efficiency are high, the cooling is effectual.
In order to solve the technical problem, the utility model discloses a following technical scheme:
the utility model provides a quick cooling system in stove, includes the heating furnace body, be equipped with the boiler tube in the heating furnace body, still include radiator unit, connecting pipe, fan subassembly and controller, radiator unit sets up in the boiler tube, radiator unit's air intake and air outlet all pass the outer wall of boiler tube and outwards stretch out, radiator unit's air intake passes through the connecting pipe and links to each other with the fan subassembly, the controller is used for controlling the fan subassembly and opens and stop and the amount of wind size.
As a further improvement of the above technical solution: the heat dissipation assembly is a U-shaped heat dissipation tube or an S-shaped heat dissipation tube or a spiral heat dissipation tube, and an air inlet and an air outlet of the heat dissipation assembly penetrate through the outer wall of the tail end of the furnace tube and extend outwards.
As a further improvement of the above technical solution: the heat dissipation assemblies are arranged in the furnace pipe symmetrically.
As a further improvement of the above technical solution: the heat dissipation assemblies are arranged in the furnace tube in an annular and uniform mode.
As a further improvement of the above technical solution: the fan assembly is one and is respectively connected with the air inlets of the plurality of radiating assemblies through connecting pipes.
As a further improvement of the above technical solution: the number of the fan assemblies is matched with the number of the heat dissipation assemblies, and the fan assemblies are connected with the heat dissipation assemblies through connecting pipes.
As a further improvement of the above technical solution: the inner wall of the furnace tube is provided with a supporting component, and the heat dissipation component is arranged on the inner wall of the furnace tube through the supporting component.
As a further improvement of the above technical solution: the heat dissipation assembly is connected with the inner wall of the furnace tube in a welding mode.
As a further improvement of the above technical solution: the fan assembly is a high-pressure centrifugal fan or a blower.
As a further improvement of the above technical solution: the joints of the air inlet and the air outlet of the heat dissipation assembly and the outer wall of the furnace tube are sealed in a welding mode or are in sealing connection through sealing pieces.
As a further improvement of the above technical solution: the temperature measurement device is characterized by further comprising a temperature measurement component, wherein the temperature measurement component is arranged in the heating furnace body and connected with the controller, and the temperature measurement component is used for detecting the temperature of the furnace tube and feeding a temperature measurement result back to the controller.
Compared with the prior art, the utility model has the advantages of:
1. the utility model discloses a quick cooling system in stove, through setting up radiator unit, fan subassembly and controller, radiator unit links to each other with fan subassembly, the controller links to each other with fan subassembly, control fan subassembly open stop and amount of wind size, radiator unit's air intake passes through the connecting pipe and is connected with fan subassembly, when needs cool down to the boiler tube, controller control fan subassembly is opened, send into cooling air from radiator unit's air intake, the cooling air carries out the heat exchange with the boiler tube in radiator unit, carry the intraductal heat of stove and discharge from the air outlet, can reduce the intraductal temperature of stove fast, the amount of wind size through controller control fan subassembly, can realize different cooling rates, the air-cooled cooling mode that this system adopted, it is low to furnace body processing technology requirement, and can not have and leak, the risk such as furnace body tympanic bulla crack.
2. The utility model discloses a quick cooling system in stove, radiator unit adopt U type cooling tube or S-shaped cooling tube or spiral cooling tube, set up radiator unit into above-mentioned arbitrary shape through the aforesaid, the effectual increase radiator unit' S of homoenergetic surface area to can enlarge the heat exchange area of radiator unit and boiler tube, increase heat exchange capacity enables radiator unit and takes away more heats in equal time, realizes the interior quick cooling of stove.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 2 is a perspective view of the heat dissipation assembly according to the first embodiment of the present invention.
Fig. 3 is a side view structural diagram of the heat dissipation assembly of the present invention in the second embodiment.
Fig. 4 is a side view structural diagram of the heat dissipation assembly of the present invention in the third embodiment.
Illustration of the drawings:
1. heating the furnace body; 2. a furnace tube; 3. a heat dissipating component; 4. a connecting pipe; 5. a fan assembly; 6. and a controller.
Detailed Description
The invention will be described in further detail with reference to the drawings and specific examples.
Example one
As shown in fig. 1 to fig. 2, the utility model discloses a quick cooling system in stove, including heating furnace body 1, be equipped with boiler tube 2 in the heating furnace body 1, still include radiator unit 3, connecting pipe 4, fan subassembly 5 and controller 6, radiator unit 3 sets up in boiler tube 2, radiator unit 3's air intake and air outlet all pass boiler tube 2's outer wall and outwards stretch out, radiator unit 3's air intake passes through connecting pipe 4 and links to each other with fan subassembly 5, controller 6 is used for controlling fan subassembly 5 to open and stop and the amount of wind size.
The utility model discloses a quick cooling system in stove, through setting up radiator unit 3, fan subassembly 5 and controller 6, radiator unit 3 links to each other with fan subassembly 5, controller 6 links to each other with fan subassembly 5, control opening of fan subassembly 5 stops and the amount of wind size, radiator unit 3's air intake passes through connecting pipe 4 and is connected with fan subassembly 5, when needs cool down to boiler tube 2, controller 6 control fan subassembly 5 is opened, send into the cooling air from radiator unit 3's air intake, the cooling air exchanges heat with boiler tube 2 in radiator unit 3, carry the heat in boiler tube 2 and discharge from the air outlet, can reduce the temperature in boiler tube 2 fast, through controller 6 control fan subassembly 5's amount of wind size, can realize different cooling rates, the air-cooled cooling mode that this system adopted, to furnace body processing technology requirement low, and can not have the leak, The furnace body bubbles and cracks and other risks.
In this embodiment, the heat dissipation assembly 3 is a U-shaped heat dissipation tube, and the air inlet and the air outlet of the heat dissipation assembly 3 both penetrate through the outer wall of the tail end of the furnace tube 2 and extend outward. The quantity of U type cooling tube can set up according to the cooling needs, and is further, in preferred embodiment, U type cooling tube is a plurality of, for symmetrical arrangement or be annular evenly distributed in boiler tube 2, through setting up a plurality of U type cooling tubes, has increased the area of heat exchange, and symmetrical arrangement or be annular evenly distributed and can realize the even quick cooling of boiler tube 2, the cooling effect is better.
In this embodiment, fan subassembly 5 is one, and radiator unit 3 is a plurality of U type cooling tubes, and fan subassembly 5 passes through connecting pipe 4 and links to each other with a plurality of radiator unit 3's air intake respectively, and the air supply volume through controller 6 control fan subassembly 5 can realize letting in the cooling air to a plurality of radiator unit 3 simultaneously. In other embodiments, the number of fan assemblies 5 may match the number of heat dissipation assemblies 3, i.e., one fan assembly 5 is connected to one heat dissipation assembly 3 through a connecting pipe 4. Independent control of fan assemblies 5 can be realized by independently connecting fan assemblies 5 with radiating assemblies 3, and opening and closing control and air supply volume control can be independently performed on fan assemblies 5 according to different cooling requirements.
In this embodiment, the inner wall of the furnace tube 2 is provided with a supporting component, and the heat dissipation component 3 is installed on the inner wall of the furnace tube 2 through the supporting component. The heat dissipation component 3 is convenient to disassemble, assemble and maintain through the connection of the supporting component. In other embodiments, the heat dissipation assembly 3 and the inner wall of the furnace tube 2 can be directly connected in a welding manner, and the connection reliability is higher due to the welding manner.
In this embodiment, the fan assembly 5 is a centrifugal fan or a blower, and further, the fan assembly 5 is preferably a high-pressure centrifugal fan.
In this embodiment, the joints between the air inlet and the air outlet of the heat dissipation assembly 3 and the outer wall of the furnace tube 2 are sealed in a welding manner, and the sealing effect is good. In other embodiments, the connection between the air inlet and the air outlet of the heat dissipation assembly 3 and the outer wall of the furnace tube 2 can be hermetically connected through a sealing element, such as a sealing ring, so that the heat dissipation assembly 3 can be conveniently disassembled and assembled.
In this embodiment, the furnace further comprises a temperature measuring component, the temperature measuring component is arranged in the heating furnace body 1, the temperature measuring component is connected with the controller 6, and the temperature measuring component is used for detecting the temperature of the furnace tube 2 and feeding back a temperature measuring result to the controller 6. The temperature in the furnace tube 2 can be detected in real time through the temperature measuring component, the temperature measuring component feeds temperature measuring data back to the controller 6 in real time, and the controller 6 automatically controls the fan component 5 to adjust the air supply volume, so that the accurate adjustment of the cooling rate is realized.
Example two
As shown in fig. 3, the present embodiment is substantially the same as the first embodiment, except that in the present embodiment, the heat dissipation assembly 3 is an S-shaped heat dissipation tube, the S-shaped heat dissipation tube is formed by connecting upright U-shaped heat dissipation tubes and inverted U-shaped heat dissipation tubes in series, further, in the preferred embodiment, two upright U-shaped tubes and one inverted U-shaped heat dissipation tube in series are connected, in other embodiments, the number of the U-shaped heat dissipation tubes in series can be adjusted as required, and the heat exchange contact area can be effectively increased and the cooling rate can be increased by connecting a plurality of U-shaped heat dissipation tubes in series.
EXAMPLE III
As shown in fig. 4, the present embodiment is substantially the same as the first embodiment, except that in the present embodiment, the heat dissipation assembly 3 is a spiral heat dissipation tube, and the heat dissipation assembly 3 is designed to be spiral, so as to increase the heat exchange contact area, meanwhile, because the heat dissipation assembly 3 is spiral, the speed of the cooling air flowing in the heat dissipation assembly 3 is slower than that of the straight heat dissipation tube, thereby ensuring that the heat dissipation assembly 3 and the furnace tube 2 perform sufficient heat exchange, and increasing the utilization rate of the cooling air.
Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, a plurality of modifications and decorations without departing from the principle of the present invention should be considered as the protection scope of the present invention.
Claims (10)
1. The utility model provides a quick cooling system in stove, includes heating furnace body (1), be equipped with boiler tube (2) in heating furnace body (1), its characterized in that still includes radiator unit (3), connecting pipe (4), fan subassembly (5) and controller (6), radiator unit (3) set up in boiler tube (2), the outer wall that boiler tube (2) were all passed to radiator unit's (3) air intake and air outlet outwards stretches out, radiator unit's (3) air intake passes through connecting pipe (4) and links to each other with fan subassembly (5), controller (6) link to each other with fan subassembly (5), controller (6) are used for controlling fan subassembly (5) and open and stop and the amount of wind size.
2. The system for rapidly cooling a furnace according to claim 1, wherein the heat dissipation assembly (3) is a U-shaped heat dissipation pipe, an S-shaped heat dissipation pipe or a spiral heat dissipation pipe, and the air inlet and the air outlet of the heat dissipation assembly (3) both penetrate through the outer wall of the tail end of the furnace tube (2) and protrude outwards.
3. The system for rapidly cooling in a furnace according to claim 2, wherein the number of the heat dissipation assemblies (3) is multiple, and the heat dissipation assemblies (3) are symmetrically arranged in the furnace tube (2) or uniformly arranged in the furnace tube (2) in an annular shape.
4. The system for rapidly cooling in a furnace according to claim 3, wherein the number of the fan assemblies (5) is one, and the fan assemblies (5) are respectively connected with the air inlets of the plurality of heat dissipation assemblies (3) through connecting pipes (4).
5. The system for rapidly cooling the interior of a furnace in accordance with claim 3, wherein the number of the fan assemblies (5) is matched with the number of the heat dissipation assemblies (3), and the fan assemblies (5) are connected with the heat dissipation assemblies (3) through connecting pipes (4).
6. The system for rapidly cooling in a furnace according to any one of claims 1 to 5, wherein the inner wall of the furnace tube (2) is provided with a supporting component, and the heat dissipation component (3) is mounted on the inner wall of the furnace tube (2) through the supporting component.
7. The system for rapidly cooling in a furnace according to any one of claims 1 to 5, wherein the heat dissipation assembly (3) is connected with the inner wall of the furnace tube (2) by welding.
8. The rapid cooling system in a furnace according to any one of claims 1 to 5, wherein the fan assembly (5) is a high pressure centrifugal fan or a blower.
9. The system for rapidly cooling in a furnace according to any one of claims 1 to 5, wherein the joints of the air inlet and the air outlet of the heat dissipation assembly (3) and the outer wall of the furnace tube (2) are sealed by welding or by sealing elements.
10. The system for rapidly cooling in the furnace according to any one of claims 1 to 5, further comprising a temperature measurement component, wherein the temperature measurement component is arranged in the heating furnace body (1), the temperature measurement component is connected with the controller (6), and the temperature measurement component is used for detecting the temperature of the furnace tube (2) and feeding back the temperature measurement result to the controller (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020892109.1U CN212620153U (en) | 2020-05-25 | 2020-05-25 | Rapid cooling system in furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020892109.1U CN212620153U (en) | 2020-05-25 | 2020-05-25 | Rapid cooling system in furnace |
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| CN212620153U true CN212620153U (en) | 2021-02-26 |
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| CN202020892109.1U Active CN212620153U (en) | 2020-05-25 | 2020-05-25 | Rapid cooling system in furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113720161A (en) * | 2020-05-25 | 2021-11-30 | 湖南红太阳光电科技有限公司 | Rapid cooling system in furnace |
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- 2020-05-25 CN CN202020892109.1U patent/CN212620153U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113720161A (en) * | 2020-05-25 | 2021-11-30 | 湖南红太阳光电科技有限公司 | Rapid cooling system in furnace |
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