CN107299331A - The spraying equipment that can be changed between normal pressure and low pressure - Google Patents
The spraying equipment that can be changed between normal pressure and low pressure Download PDFInfo
- Publication number
- CN107299331A CN107299331A CN201710558257.2A CN201710558257A CN107299331A CN 107299331 A CN107299331 A CN 107299331A CN 201710558257 A CN201710558257 A CN 201710558257A CN 107299331 A CN107299331 A CN 107299331A
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- Prior art keywords
- spraying
- spray
- spraying equipment
- normal pressure
- changed
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/131—Wire arc spraying
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
Abstract
The present invention relates to spraying equipment field, a kind of spraying equipment that can be changed between normal pressure and low pressure is disclosed, including：Spray booth, workbench, spray gun, evacuator and exhausting dust discharge mechanism, spray booth include base and the seal closure separably covered on base, sealing are formed between base and seal closure, to seal whole spray booth.Implement technical scheme, the spraying coating process such as normal pressure electric arc spraying, low-tension arc spraying, atmospheric plasma spray, low-voltage plasma spraying, normal pressure cold air power spraying and coating, low pressure cold air power spraying and coating are conveniently realized by changing different spray gun and Open-close sealing covers, greatly facilitate enterprise from a variety of sputtered target materials such as various technique spray metals, ceramics, alloys, be that enterprise has saved investment.
Description
Technical field
The present invention relates to spraying equipment field, more particularly, to a kind of spraying equipment that can be changed between normal pressure and low pressure.
Background technology
Spray magnetic control spattering target and be applied to touch-screen, building glass, vehicle glass, photovoltaic, art metal etc.
Industry, market capacity is huge.But in country spraying magnetic control spattering target market, high-end product is almost by Germany, the U.S., Belgium
Deng developed country's monopolization.Because technology is closed and is started late, domestic manufacturer is generally using the shaping of spray gun direct spraying material：
On the one hand due to being that thermet material is molded under unlimited atmospheric environment, oxygen nitrogen in the metal or alloy target material of shaping
Content is necessarily significantly increased, and causes film forming and electric conductivity of the be molded target material in magnetron sputtering not good and can not make
With；On the other hand, oxide ceramics target material is in atmospheric conditions by would generally oxygen loss, the oxygen of oxygen loss after high temperature thermal spraying
The need for compound coating disclosure satisfy that magnetically controlled DC sputtering because conductive, nonconducting target material is splashed in direct magnetic control
During penetrating at all can not the starting the arc, cause sputter procedure not carry out；Another further aspect：If separating and individually purchasing special equipment,
For enterprise, take up an area and fund just will at least have more one times.This is accomplished by a kind of multi-function device equipment：Make spraying process
Oxide-based magnetic control spattering target material can be sprayed under atmospheric pressure environment can quickly and easily form environment under low pressure again, spraying
Metal and its alloy etc. require the magnetic control spattering target of hypoxemia nitrogen content.But also without such device on current domestic and international market
Equipment.
The content of the invention
The technical problem to be solved in the present invention is, can be in normal pressure there is provided one kind for drawbacks described above of the prior art
The spraying equipment changed between low pressure.
The technical solution adopted for the present invention to solve the technical problems is：Construction is a kind of to be changed between normal pressure and low pressure
Spraying equipment, including：
Spray booth, including base and the seal closure that separably covers on base, are formed close between base and seal closure
Envelope, to seal whole spray booth；
Workbench, is located in spray booth, and which is provided with can install the installing mechanism of part to be sprayed；
Spray gun, if on the table, to be sprayed to the part to be sprayed on installing mechanism；
Vacuum device, with being connected inside spray booth；
Exhausting dust discharge mechanism, with being connected inside spray booth.
Preferably, spray gun slidably or is rotationally set on the table.
Preferably, spray gun can be slidably disposed within workbench with second direction in the first direction, first method and second party
To not parallel, the spraying equipment also drive mechanism including driving spray gun movement.
Preferably, spray gun is arc pistol, cold air powered spray gun or plasma gun.
Preferably, installing mechanism includes that the fixture of part to be sprayed can be clamped, to realize the installation of part to be sprayed.
Preferably, seal closure up covers workbench, and the opening shape of cover is corresponding with the profile of workbench.
Preferably, the spraying equipment includes the hoisting mechanism that can be connected with seal closure, to be opened or covered by hoisting mechanism
Upper seal closure.
Preferably, vacuum device and/or exhausting dust discharge mechanism are connected from workbench bottom to spray booth.
Preferably, connecting pipe is provided with pipeline switching machine between vacuum device and exhausting dust discharge mechanism and spray booth
Structure, pipeline switching mechanism includes valve, to open or close vacuum device and exhausting dust discharge mechanism and spraying by valve
Connection between room.
Preferably, the spraying equipment also includes pedestal, spray booth, workbench, spray gun, vacuum device and exhausting dust cleaning machine
Structure is located on pedestal.
Implement technical scheme, at least with following beneficial effect：The spraying equipment of the present invention is used to spray
Sputtering target material or other high-end products, conveniently realize normal pressure electric arc spraying, low by changing different spray gun and Open-close sealing covers
Press electric arc spraying, atmospheric plasma spray, low-voltage plasma spraying, normal pressure cold air power spraying and coating, low pressure cold air power spraying and coating etc.
Spraying coating process, greatly facilitates enterprise from a variety of sputtered target materials such as various technique spray metals, ceramics, alloys, for enterprise
Industry has saved investment.
Brief description of the drawings
Below in conjunction with drawings and Examples, the invention will be further described, in accompanying drawing：
Fig. 1 is the stereogram of the spraying equipment in one embodiment of the present invention (seal closure is in sealing state).
Fig. 2 is another stereogram of the spraying equipment in Fig. 1 (seal closure is in open mode).
Fig. 3 is the partial enlarged drawing at A positions in Fig. 2.
Fig. 4 is another stereogram of the spraying equipment in Fig. 1 (seal closure is in the state opened and placed aside).
Fig. 5 is another stereogram of the spraying equipment in Fig. 1 (seal closure is in sealing state)
Fig. 6 is another stereogram of the spraying equipment in Fig. 1 (seal closure is in open mode).
Fig. 7 is another stereogram of the spraying equipment in Fig. 1 (seal closure is in the state opened and placed aside).
Wherein, 1. spray booth, 11. bases, 12. seal closures, 12a. observation windows, 2. workbench, 21. fixtures, 3. spray guns, 4.
Vacuum device, 5. exhausting dust discharge mechanisms, 6. pipeline switching mechanisms, 61. connecting pipes, 7. hoisting mechanisms, 8. pedestals, 9. is to be painted
Apply part.
Embodiment
In order to which technical characteristic, purpose and effect to the present invention are more clearly understood from, now compare accompanying drawing and describe in detail
The embodiment of the present invention., it is necessary to manage in the description of the spraying equipment that can be changed between normal pressure and low pressure of the present invention
Solution, the term such as "front", "rear", " on ", " under ", " front ", " back side " is for only for ease of description technical side of the invention
Case, rather than indicate that the device or element of meaning must have specific orientation, therefore be not considered as limiting the invention.
As shown in figs. 1-7, the spraying equipment that can be changed between normal pressure and low pressure of the invention, including：
Spray booth 1, including base 11 and seal closure 12 on the pedestal 11 is separably covered, base 11 and seal closure 12
Between form sealing, to seal whole spray booth 1, base 11 is preferably tabular, in order to simplify sealed structure；
Workbench 2, is located in spray booth 1, and which is provided with can install the installing mechanism of part 9 to be sprayed；
Spray gun 3, is located on workbench 2, to be sprayed to the part to be sprayed 9 on installing mechanism；
Vacuum device 4, is connected with the inside of spray booth 1, for making to form vacuum in spray booth 1；
Exhausting dust discharge mechanism 5, is connected with the inside of spray booth 1, for removing the dirt on workbench 2.
Wherein, part 9 to be sprayed can be the magnetic control spattering target such as liner plate to be painted or bushing pipe dress；Vacuum device 4 generally may be used
Think that vavuum pump is vacuumized to realize；Dedusting can be realized in exhausting dust discharge mechanism 5 provided with blower fan.When need carry out normal pressure spray
Tu Shi, as shown in Fig. 2-4,6-7, seal closure 12 is separated from base 11, and part 9 to be sprayed is arranged on on installing mechanism and interior
Portion's water flowing cooling, starts exhausting dust discharge mechanism 5 to remove the dirt on workbench 2, starts spray gun 3 and send oxide-based ceramic powder, sprays
Rifle 3 starts to spray magnetic control spattering target by input program, wait spray to after given size stop powder, go out rifle, takes out the lining that has sprayed
Plate or bushing pipe, so, the magnetic control spattering target of the oxide type ceramic sprayed under an atmospheric pressure environment are just completed；By changing
Different spray guns 3, just can realize that normal pressure electric arc spraying, normal pressure cold air power spraying and coating, atmospheric plasma spray etc. spray magnetron sputtering
Target technique.When needing to carry out normal pressure spraying, as shown in Figure 1,5, part 9 to be sprayed is arranged on installing mechanism and internal logical
Water cooling, seal closure 12 is covered on the pedestal 11, sealed spray booth 1 is formed, and starting vacuum device 4 makes in spray booth 1
Air pressure, which is evacuated to after the vacuum of technological requirement, can start the spray metal of spray gun 3 or metal alloy powder, and spray gun 3 starts by input journey
Sequence sprays part 9 to be sprayed, wait spray to after given size stop powder, go out rifle, closes vacuum device 4, opened after the pressure release of spray booth 1
Seal closure 12, takes out the spray piece for melting and having penetrated, so, the metal or metal alloy magnetic control sprayed under a low pressure vacuum environment splashes
Material of shooting at the target just is completed；The spray gun 3 different by changing arc pistol, cold air powered spray gun or plasma gun etc., just can be real
The spraying magnetic control spattering target techniques such as existing low-tension arc spraying, low-voltage plasma spraying, low pressure cold air power spraying and coating.
Preferably, spray gun 3 slidably or is rotationally located on workbench 2, to change position or side by sliding or rotating
Always the positions and dimensions of part 9 to be sprayed are adapted to, part 9 to be sprayed can be comprehensively sprayed.In the present embodiment as shown in figure 3,
Spray gun 3 can be slidably disposed within workbench 2 with second direction in the first direction, and first method and second direction are not parallel, wherein
The spraying equipment also includes the drive mechanism for driving spray gun 3 to move, so that spray gun 3 can be with adjustment position.In the present embodiment,
Spray gun is fixed on mobile mechanical arm on the table, and mobile mechanical arm can be moved along first, second direction, so as to realize spray gun
Movement；First direction and second direction are respectively orthogonal X-direction and Y direction, can be sprayed by programming Control
Rifle 3 is automatically performed the motion of X-axis and Y-axis both direction.
In the present embodiment, installing mechanism includes that the fixture 21 of part 9 to be sprayed can be clamped, to realize the peace of part 9 to be sprayed
Dress.
Preferably, seal closure 12 up covers workbench 2, and the opening shape of cover is corresponding with the profile of workbench 2,
The profile of workbench 2 is rectangle in the present embodiment, to make spray booth 1 form good sealing state；In addition, workbench 2
Profile can also in operating room the size of mechanism use other shapes.Wherein, the periphery of workbench 2 is provided with sealing member
Part, such as silica gel sealing ring, to realize the sealing of spray booth 1；Seal closure 12 is steel construction seal closure of the surrounding with observation window 12a
12, to observe the situation in spray booth 1.
In the present embodiment, as shown in figs. 1-7, the spraying equipment includes the hoisting mechanism 7 that can be connected with seal closure 12, with
Seal closure 12 is lifted by hoisting mechanism 7, that is, opens or cover seal closure 12, in other words, when hoisting mechanism 7 rises seal closure 12
When, normal pressure spraying can be carried out, when hoisting mechanism 7 falls seal closure 12, low pressure spray can be carried out；Hoisting mechanism 7 is liquid
Pressure, mechanically or electrically dynamic device, it is convenient to low-pressure cover is risen and removes or falls back to sealing position.In addition, can certainly pass through
Miscellaneous equipment or manually mobile seal closure 12.
Preferably, vacuum device 4 and/or exhausting dust discharge mechanism 5 by connecting pipe 61 from the bottom of workbench 2 to spraying
Room 1 is connected, and can not so influence the division between workbench 2 and seal closure 12, and to appear the mechanism on workbench 2
It is as far as possible simple.
Preferably, connecting pipe is cut provided with pipeline between vacuum device 4 and exhausting dust discharge mechanism 5 and spray booth 1
Converting mechanism 6, pipeline switching mechanism 6 includes valve, to open or close vacuum device 4 and exhausting dust discharge mechanism by valve
Connection between 5 and spray booth 1, so that convenient switch between normal pressure and low pressure spray pattern.Specifically, pipeline switching machine
Structure 6 is made up of the pipeline valve such as butterfly valve or Pneumatic baffle valve, and the dust that can produce spraying operation area passes through pipeline switching mechanism 6
It is switched to air dedusting pattern or vacuum cleaning pattern.
Exhausting dust discharge mechanism 5 can be wet type or the industrial ventilation and dust removal equipment of dry type, and vacuum device 4 can be that water ring is true
The combination of the vavuum pumps such as empty pump, sliding valve vacuum pump, Roots vaccum pump or combinations thereof and they and dirt catcher, can be according to need
Select.
Preferably, spray equipment of the invention also includes pedestal 8, spray booth 1, workbench 2, spray gun 3, vacuum device 4
It is located at exhausting dust discharge mechanism 5 on pedestal 8.In the present embodiment, as shown in figs. 4-7, vacuum device 4 and/or exhausting dust discharge
Mechanism 5 is connected by connecting pipe 61 with spray booth 1, connecting pipe 61 first through the bottom of pedestal 8, then from the bottom of pedestal 8 to
On connect through pedestal 8 and base 11 and with spray booth 1；Wherein, pedestal 8 is the abundant non-porous metal base at one piece of steel construction bottom
Plate, to provide enough supports to the mechanism of the spraying equipment.
In summary, spraying equipment of the invention is used to spray sputtering target material or other high-end products, different by changing
Spray gun 3 and Open-close sealing cover 12 conveniently realize normal pressure electric arc spraying, low-tension arc spraying, atmospheric plasma spray, low pressure etc.
The spraying coating process such as plasma spray, normal pressure cold air power spraying and coating, low pressure cold air power spraying and coating, greatly facilitate enterprise to select various works
A variety of sputtered target materials such as skill spray metal, ceramics, alloy, are that enterprise has saved investment.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various changes, combination and change.Within the spirit and principles of the invention, made
Any modification, equivalent substitution and improvements etc., should be included within scope of the presently claimed invention.
Claims (10)
1. a kind of spraying equipment that can be changed between normal pressure and low pressure, it is characterised in that including：
Spray booth (1), including base (11) and the seal closure (12) that separably covers on the base (11), the base
(11) sealing is formed between the seal closure (12), to seal the whole spray booth (1)；
Workbench (2), is located in the spray booth (1), which is provided with can install the installing mechanism of part to be sprayed (9)；
Spray gun (3), is located on the workbench (2), to be sprayed to the part to be sprayed (9) on the installing mechanism
Apply；
Vacuum device (4), with being connected inside the spray booth (1)；
Exhausting dust discharge mechanism (5), with being connected inside the spray booth (1).
2. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that the spray gun
(3) slidably or rotationally it is located on the workbench (2).
3. the spraying equipment according to claim 2 that can be changed between normal pressure and low pressure, it is characterised in that the spray gun
(3) it can be slidably disposed within the first direction with second direction on the workbench (2), the first method and the second direction
Not parallel, the spraying equipment also includes the drive mechanism for driving the spray gun (3) mobile.
4. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that the base is in
Tabular.
5. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that the fitting machine
Structure includes that the fixture (21) of part to be sprayed (9) can be clamped, to realize the installation of the part to be sprayed (9).
6. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that the seal closure
(12) workbench (2) is up covered, the opening shape of the cover is corresponding with the profile of the workbench (2).
7. the spraying equipment according to claim 6 that can be changed between normal pressure and low pressure, it is characterised in that including can be with institute
The hoisting mechanism (7) of seal closure (12) connection is stated, to lift the seal closure (12) by the hoisting mechanism (7).
8. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that described to vacuumize
Mechanism (4) and/or exhausting dust discharge mechanism (5) are connected by connecting pipe from the workbench (2) bottom to the spray booth (1)
It is logical.
9. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that described to vacuumize
Connecting pipe between mechanism (4) and the exhausting dust discharge mechanism (5) and the spray booth (1) is provided with pipeline switching mechanism
(6), the pipeline switching mechanism (6) include valve, with by the valve open or close the vacuum device (4) and
Connection between the exhausting dust discharge mechanism (5) and the spray booth (1).
10. the spraying equipment according to claim 1 that can be changed between normal pressure and low pressure, it is characterised in that also including base
Seat (8), the spray booth (1), workbench (2), spray gun (3), vacuum device (4) and exhausting dust discharge mechanism (5) are located at described
On pedestal (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558257.2A CN107299331A (en) | 2017-07-10 | 2017-07-10 | The spraying equipment that can be changed between normal pressure and low pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558257.2A CN107299331A (en) | 2017-07-10 | 2017-07-10 | The spraying equipment that can be changed between normal pressure and low pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107299331A true CN107299331A (en) | 2017-10-27 |
Family
ID=60132802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710558257.2A Pending CN107299331A (en) | 2017-07-10 | 2017-07-10 | The spraying equipment that can be changed between normal pressure and low pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107299331A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI677589B (en) * | 2019-01-14 | 2019-11-21 | 宏進金屬科技股份有限公司 | A preparation method of sputtering target |
| CN111889280A (en) * | 2020-05-26 | 2020-11-06 | 深圳第三代半导体研究院 | Surface coating method and equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203525964U (en) * | 2013-10-23 | 2014-04-09 | 湖南源创高科工业技术有限公司 | Coating device for electronic product |
| CN204385280U (en) * | 2014-12-30 | 2015-06-10 | 江阴恩特莱特镀膜科技有限公司 | Rotary target uses low-voltage plasma spraying room |
| CN106521456A (en) * | 2016-11-18 | 2017-03-22 | 北京大学 | Multifunctional large-sized chemical vapor deposition equipment with air inlet mode and pressure capable of being adjusted |
| CN207331055U (en) * | 2017-07-10 | 2018-05-08 | 深圳市众诚达应用材料科技有限公司 | The spraying equipment that can be changed between normal pressure and low pressure |
-
2017
- 2017-07-10 CN CN201710558257.2A patent/CN107299331A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203525964U (en) * | 2013-10-23 | 2014-04-09 | 湖南源创高科工业技术有限公司 | Coating device for electronic product |
| CN204385280U (en) * | 2014-12-30 | 2015-06-10 | 江阴恩特莱特镀膜科技有限公司 | Rotary target uses low-voltage plasma spraying room |
| CN106521456A (en) * | 2016-11-18 | 2017-03-22 | 北京大学 | Multifunctional large-sized chemical vapor deposition equipment with air inlet mode and pressure capable of being adjusted |
| CN207331055U (en) * | 2017-07-10 | 2018-05-08 | 深圳市众诚达应用材料科技有限公司 | The spraying equipment that can be changed between normal pressure and low pressure |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI677589B (en) * | 2019-01-14 | 2019-11-21 | 宏進金屬科技股份有限公司 | A preparation method of sputtering target |
| CN111889280A (en) * | 2020-05-26 | 2020-11-06 | 深圳第三代半导体研究院 | Surface coating method and equipment |
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| CB02 | Change of applicant information |
Address after: 518000 1st floor, No.16, second industrial zone, Xiacun community, Gongming street, Guangming District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Zhongchengda Applied Materials Co.,Ltd. Address before: Building 39, Zone C, Liantang Industrial City, Shangcun, Gongming Street, Guangming New District, Shenzhen City, Guangdong Province, 518000 Applicant before: SHENZHEN APG MATERIAL TECHNOLOGY Co.,Ltd. |
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| CB02 | Change of applicant information |