CN109854483B - Vacuum device - Google Patents
Vacuum device Download PDFInfo
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- CN109854483B CN109854483B CN201910131731.2A CN201910131731A CN109854483B CN 109854483 B CN109854483 B CN 109854483B CN 201910131731 A CN201910131731 A CN 201910131731A CN 109854483 B CN109854483 B CN 109854483B
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Abstract
The invention provides a vacuum device and an exhaust method thereof, comprising a working chamber, a vacuum pump and a vacuum pump, wherein the working chamber is used for processing parts and is communicated with an exhaust valve; the air suction port of the primary pump is communicated with the working chamber; the auxiliary chamber is communicated with the working chamber, the auxiliary chamber is communicated with the working chamber through a first channel and a second channel, and the primary pump is arranged on the second channel; a molecular pump, wherein an air suction port of the molecular pump is communicated with the auxiliary chamber; the first air valve is arranged on the first channel; the second air valve is arranged on a second channel between the primary pumping pump and the working chamber; and the third air valve is arranged on a second channel between the primary pumping pump and the auxiliary chamber. According to the vacuum device provided by the invention, when parts are replaced, the working chamber and the auxiliary chamber are not communicated, and the vacuum degree of the auxiliary chamber is kept unchanged, so that the molecular pump can continuously work under the vacuum degree, the time waste caused by the shutdown of the molecular pump is avoided, and the time required by the next vacuum pumping is shortened.
Description
Technical Field
The invention belongs to the technical field of vacuum processing, and particularly relates to a vacuum device.
Background
The vacuum device is widely used in the processing of parts, such as brazed products of copper, aluminum and the like, so as to ensure that the processing of the parts is carried out in a vacuum state without being interfered by air, impurities and the like in the processing process of the parts. Such as a vacuum heating furnace, the parts can be quenched, annealed, tempered, sintered, magnetized and the like in the vacuum heating furnace so as to meet the production requirement. However, the vacuum apparatus on the market requires a long time to pump it to a high vacuum, and the molecular pump needs to be stopped many times during mass production in order to replace parts to be processed when the molecular pump is stopped. The molecular pump can be started only after reaching a certain vacuum degree, and after parts are replaced each time, the vacuum device needs to be vacuumized again to reach the vacuum degree required by the molecular pump, and then the vacuum pump is started. This results in a long production cycle in mass production.
Disclosure of Invention
The invention aims to provide a vacuum device to solve the technical problem that a molecular pump needs to be started and stopped for multiple times in the prior art, so that the production period is long.
In order to achieve the purpose, the invention adopts the technical scheme that: provided is a vacuum apparatus including:
the working chamber is used for processing parts and communicated with an exhaust valve for breaking vacuum;
the air suction port of the primary pump is communicated with the working chamber;
the auxiliary chamber is communicated with the working chamber, the auxiliary chamber is communicated with the working chamber through a first channel and a second channel, and an air suction port of the primary pump is arranged on the second channel;
the air suction port of the molecular pump is communicated with the auxiliary cavity;
the first air valve is arranged on the first channel and used for controlling the opening and closing of the first channel;
the second air valve is arranged on a second channel between the air suction port of the primary pump and the working chamber and used for controlling a passage between the air suction port of the primary pump and the auxiliary chamber;
and the third air valve is arranged on a second channel between the air suction port of the primary pumping pump and the auxiliary chamber and used for controlling a passage between the working chamber and the air suction port of the primary pumping pump.
Further, the vacuum degree detection device further comprises a first vacuum gauge for detecting the vacuum degree of the working chamber and a second vacuum gauge for detecting the vacuum degree of the auxiliary chamber.
Further, the work cavity is used for heating the part, be equipped with heater and temperature sensor in the work cavity.
Further, the heater ring is arranged on the periphery of the working chamber, a protective cover is arranged on the periphery of the heater, and a cooling water pipe is arranged in the protective cover.
Furthermore, the working chamber is provided with an opening, the opening is provided with a protective door used for sealing the opening, a cooling water ring is arranged in the protective door, and the vacuum device further comprises a water cooling machine which is communicated with the cooling water pipe and the cooling water ring.
Further, the first air valve is a gate valve.
Further, the exhaust valve is a manual exhaust valve, a pneumatic exhaust valve or a combination of the two.
Another object of the present invention is to provide an exhaust method using the vacuum apparatus, comprising the steps of:
s10: the primary pumping pump, the molecular pump and the third air valve are opened through the control system, and air in the auxiliary chamber is exhausted;
s20: when the vacuum degree in the auxiliary chamber reaches a preset value, closing the third air valve, opening the second air valve and exhausting the air in the working chamber;
s30: when the vacuum degree in the vacuum cavity reaches the preset numerical value, closing the second air valve, opening the third air valve, opening the first air valve, and simultaneously exhausting the air in the working cavity and the auxiliary cavity to enable the vacuum degrees to reach the working numerical value;
s40: processing the parts in the working chamber, closing the first air valve and the second air valve after the parts are processed, opening the exhaust valve, breaking the vacuum state in the working chamber, replacing the parts and closing the exhaust valve;
s50: steps S20 to S40 are repeated.
Furthermore, the working chamber is used for heating the parts, and a heater and a temperature sensor are arranged in the working chamber;
in step S40, the temperature sensor detects the temperature in the working chamber in real time and feeds back the detection result to the control system, and compares the detection result with the standard temperature in real time, and when the temperature curve formed by the detection result is within the error range allowed by the standard temperature curve, the heating of the part is completed.
Further, in step S30, when the vacuum degree in the vacuum chamber reaches a preset value, it is detected whether the vacuum degree in the auxiliary chamber reaches the preset value:
if the vacuum degree in the auxiliary chamber reaches the preset value, closing the second air valve, opening the third air valve and opening the first air valve;
if the degree of vacuum in the auxiliary chamber does not reach the preset value, S20 is repeated.
The vacuum device provided by the invention has the beneficial effects that: compared with the prior art, the vacuum device comprises a working chamber and an auxiliary chamber, parts are placed in the working chamber for processing, the working chamber is communicated with a primary pumping pump, the auxiliary chamber is communicated with a molecular pump, the auxiliary chamber is communicated with the working chamber through a first channel and a second channel, a first air valve controls the opening and closing of the first channel, a second air valve controls a passage between the primary pumping pump and the auxiliary chamber, and a third air valve controls a passage between the working chamber and the auxiliary chamber; after parts machining finishes, when changing next part, first pneumatic valve, second pneumatic valve are closed, with first passageway and second passageway disconnection, work cavity and auxiliary chamber do not communicate each other to break away the vacuum of work cavity through discharge valve, the vacuum of auxiliary chamber keeps unchangeable, makes the molecular pump continue work under this vacuum, avoids the time waste that the molecular pump shut down and cause, can also make full use of auxiliary chamber's vacuum, shortens the required time of next evacuation.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
FIG. 1 is a front view of a vacuum apparatus provided in accordance with an embodiment of the present invention;
FIG. 2 is a side view of a vacuum apparatus provided by an embodiment of the present invention;
fig. 3 is a flowchart of an exhaust method according to an embodiment of the present invention.
Wherein, in the figures, the respective reference numerals:
1-a working chamber; 11-a primary pump; 12-manual exhaust valve; 13-a pneumatic exhaust valve; 14-a first vacuum gauge; 141-high vacuum sensor; 142-a low vacuum sensor; 15-a temperature sensor; 16-a heater; 17-a protective cover; 171-cooling water pipes; 18-a guard gate; 2-an auxiliary chamber; 21-a molecular pump; 22-cooling water ring; 23-a second vacuum gauge; 3-a first channel; 4-a second channel; 5-a first air valve; 6-a second air valve; 7-third air valve.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Referring to fig. 1 and 2 together, the vacuum apparatus of the present invention will now be described. The vacuum device comprises a working chamber 1, an auxiliary chamber 2, a primary pumping pump 11, a molecular pump 21, an exhaust valve, a first air valve 5, a second air valve 6 and a third air valve 7. The part to be processed is placed in the working chamber 1, and when the working chamber 1 reaches a certain vacuum degree, the part can be heated, magnetized and the like. An air suction port of the primary pump 11 is communicated with the working chamber 1, and the primary pump 11 can pump air to enable the working chamber 1 to form a primary vacuum state. The exhaust valve is also communicated with the working chamber 1 and is used for breaking the vacuum state of the working chamber 1 and enabling the working chamber 1 to reach the atmospheric pressure state so as to replace parts in the working chamber 1. The auxiliary chamber 2 is communicated with the working chamber 1 through a first channel 3 and a second channel 4, a first air valve 5 is arranged on the first channel 3, and the first air valve 5 can directly control the opening and closing of the first channel 3. An air suction port of the primary pumping pump 11 is communicated with the second channel 4, a second air valve 6 is arranged on the second channel 4 between the air suction port of the primary pumping pump 11 and the working chamber 1, and the second air valve 6 is used for controlling a passage between the air suction port of the primary pumping pump 11 and the auxiliary chamber 2; a third air valve 7 is provided in the second passage 4 between the priming pump 11 and the auxiliary chamber 2 for controlling the passage between the working chamber 1 and the suction inlet of the priming pump 11. More specifically, when the first air valve 5 and the second air valve 6 are closed simultaneously and the third air valve 7 is opened, the molecular pump 21 and the preliminary pumping pump 11 are both communicated with the auxiliary chamber 2 to pump air in the auxiliary chamber 2; when the first air valve 5 is closed, the second air valve 6 is opened and the third air valve 7 is closed, the channels between the auxiliary chamber 2 and the working chamber 1 are all closed, and the primary pumping pump 11 and the molecular pump 21 respectively pump the air in the working chamber 1 and the air in the auxiliary chamber 2; when the first air valve 5 is opened, the second air valve 6 is closed and the third air valve 7 is opened, the auxiliary chamber 2 and the working chamber 1 are communicated through the first channel 3, and the primary pumping pump 11 and the molecular pump 21 can simultaneously pump air in the auxiliary chamber 2 and the working chamber 1.
When a first part is machined, the first air valve 5 and the second air valve 6 are closed simultaneously, the third air valve 7 is opened, and the primary pumping pump 11 performs primary pumping on air in the auxiliary chamber 2; when the air in the auxiliary chamber 2 reaches a first vacuum degree, the first air valve 5 is closed, the second air valve 6 is opened, the third air valve 7 is closed, and the primary pumping pump 11 performs primary pumping on the working chamber 1 to enable the working chamber 1 to reach the first vacuum degree; and then the first air valve 5 is opened, the second air valve 6 is closed, the third air valve 7 is opened, and the primary pumping pump 11 and the molecular pump 21 can simultaneously pump the air of the auxiliary chamber 2 and the air of the working chamber 1, so that the working chamber 1 and the auxiliary chamber 2 reach a second vacuum degree as soon as possible, and the second vacuum degree can meet the processing conditions of parts. The first degree of vacuum may be 10-2torr, second vacuum may be 10-6torr. After the first part is machined, the first air valve 5 and the second air valve 6 are closed, the auxiliary chamber 2 is isolated from the working chamber 1, the exhaust valve is opened, the vacuum state of the working chamber 1 is broken, the exhaust valve is closed, the working chamber 1 is opened, parts are replaced, after the working chamber 1 is closed, the second air valve 6 is opened, and the air in the working chamber 1 is discharged by the primary pumping pump 11, so that the operation is repeated.
Compared with the prior art, the vacuum device provided by the invention comprises a working chamber 1 and an auxiliary chamber 2, parts are placed in the working chamber 1 for processing, the working chamber 1 is communicated with a primary pumping pump 11, the auxiliary chamber 2 is communicated with a molecular pump 21, the auxiliary chamber 2 is communicated with the working chamber 1 through a first channel 3 and a second channel 4, a first air valve 5 controls the opening and closing of the first channel 3, a second air valve 6 controls a passage between the primary pumping pump 11 and the auxiliary chamber 2, and a third air valve 7 controls a passage between the working chamber 1 and the primary pumping pump 11; after parts machining finishes, when changing next part, first pneumatic valve 5, second pneumatic valve 6 are closed, break off first passageway 3 and second passageway 4, work cavity 1 and supplementary cavity 2 do not communicate each other, and break away the vacuum of work cavity 1 through discharge valve, the vacuum of supplementary cavity 2 remains unchanged, make molecular pump 21 continue work under this vacuum, avoid the time waste that molecular pump 21 shut down and cause, can also make full use of the vacuum of supplementary cavity 2, shorten the required time of next evacuation.
In one embodiment, referring to fig. 1, one end of the second channel 4 close to the auxiliary chamber 2 is directly connected to an exhaust port of the molecular pump 21, the auxiliary chamber 2, the molecular pump 21, the third air valve 7, the roughing pump 11 and the working chamber 1 are sequentially communicated through the second channel 4, and when the third air valve 7 is opened, the roughing pump 11 and the molecular pump 21 simultaneously pump air in the auxiliary chamber 2.
In another embodiment, the second channel 4 is directly communicated with the auxiliary chamber 2 near one end of the auxiliary chamber 2, the third air valve 7, the priming pump 11 and the working chamber 1 are sequentially communicated through the second channel 4, and when the third air valve 7 is opened, the priming pump 11 and the molecular pump 21 can also simultaneously pump air in the auxiliary chamber 2.
In one embodiment, referring to fig. 1, the vacuum apparatus further includes a first vacuum gauge 14 for detecting a vacuum degree of the working chamber 1, and a second vacuum gauge 23 for detecting a vacuum degree of the auxiliary chamber 2. Optionally, the first vacuum gauge 14 includes a low vacuum sensor 142 and a high vacuum sensor 141, the low vacuum sensor 142 may detect whether the working chamber 1 reaches a first vacuum degree, and the high vacuum sensor 141 may detect whether the working chamber 1 reaches a second vacuum degree. The second vacuum gauge 23 may be a low vacuum sensor that detects whether the auxiliary chamber 2 reaches the first vacuum level.
In one embodiment, a second vacuum gauge 23 is provided in the auxiliary chamber 2. In another embodiment, a second vacuum gauge 23 is provided on the second channel 4 between the auxiliary chamber 2 and the third gas valve 7.
Alternatively, the vacuum apparatus controls the roughing pump 11, the molecular pump 21, the first air valve 5, the second air valve 6, the third air valve 7, the first vacuum gauge 14, the second vacuum gauge 23, and the like through a Programmable Logic Controller (PLC). The first air valve 5, the second air valve 6 and the third air valve 7 can be selected as electromagnetic valves. More specifically, when the vacuum degree detected by the second vacuum gauge 23 reaches the first vacuum degree, the second vacuum gauge 23 feeds the information back to the PLC, the PLC controls the relay, the relay opens the first air valve 5, closes the second air valve 6, opens the third air valve 7, and the preliminary pump 11 performs preliminary vacuum pumping on the working chamber 1; when the vacuum degree detected by the first vacuum gauge 14 reaches the first vacuum degree, the first vacuum gauge 14 feeds the information back to the PLC, the PLC controls the relay, the relay enables the first air valve 5 to be opened, the second air valve 6 to be closed and the third air valve 7 to be opened, the molecular pump 21 and the primary pumping pump 11 continue to pump air in the working chamber 1 and the auxiliary chamber 2, when the vacuum degrees of the working chamber 1 and the auxiliary chamber 2 reach the second vacuum degree, the second vacuum gauge 23 feeds the information back to the PLC, the PLC controls the relay, the relay controls the temperature controller, the power regulator and the like, and parts are processed under a preset temperature curve.
In one embodiment, referring to fig. 1 and 2, the working chamber 1 is used for heating a part, and a heater 16 and a temperature sensor 15 are disposed in the working chamber 1, so that the vacuum device can heat the part, and the part can be annealed and tempered by setting different working temperatures. The heater 16 is used to heat the working chamber 1 to bring the working chamber 1 to a predetermined temperature. Alternatively, the heater 16 is formed in a ring shape and provided at the outer circumference of the working chamber 1, so that the working chamber 1 can be rapidly warmed up. The heater 16 may alternatively be a heating lamp. The heater 16 and the temperature sensor 15 are controlled by a PLC, the temperature sensor 15 can upload the temperature value in the working chamber 1 to the PLC, the PLC calculates the current of the heater 16 according to the temperature value, and adjusts the current of the heater 16 by adjusting the current.
In one embodiment, the working chamber 1 is used for heating parts, a heater 16 and a temperature sensor 15 are arranged in the working chamber 1, the heater 16 is arranged around the periphery of the working chamber 1, a protective cover 17 is arranged on the periphery of the heater 16, and a cooling water pipe 171 is arranged in the protective cover 17. The protective cover 17 is used for isolating the outer wall and the periphery of the working chamber 1 so as to avoid scalding workers and reduce heat dissipation. The function of the cooling water pipe 171 is to reduce the temperature of the working chamber 1 so that the temperature profile of the working chamber 1 is the same as the temperature profile of the part to be machined.
In another embodiment, referring to fig. 1 and 2, the working chamber 1 has an opening, a protective door 18 for sealing the opening is disposed at the opening, a cooling water ring is disposed in the protective door 18, and the vacuum apparatus further includes a water chiller, which is communicated with the cooling water pipe 171 and the cooling water ring 22. When replacing parts, the protective door 18 can be opened to access the parts through the opening. The water chiller provides cooling fluid to the cooling water tube 171 and the cooling water ring, facilitating the adjustment of the temperature of the working chamber 1. A cooling water ring 22 is also arranged on one side of the molecular pump 21, which can cool the molecular pump 21 and provide cooling liquid for the water chiller.
In one embodiment, the first air valve 5 is a gate valve, which ensures that the first channel 3 has a larger cross section, so that when the first air valve 5 is opened, the molecular pump 21 can rapidly pump air in the working chamber 1, and the first channel 3 does not affect the pumping speed of the molecular pump 21. Optionally, the working chamber 1 and the auxiliary chamber 2 are directly communicated through a gate valve, which is the second channel 4. In another embodiment, the second channel 4 is connected smoothly with the working chamber 1 and the auxiliary chamber 2 without the appearance of a neck shape.
In one embodiment, referring to FIG. 1, the exhaust valve is a manual exhaust valve 12, a pneumatic exhaust valve, or a combination thereof.
The invention also provides an exhaust method, which adopts the vacuum device in any embodiment, and comprises the following steps:
s10: the primary pumping pump 11, the molecular pump 21 and the third air valve 7 are opened through the control system, and air in the auxiliary chamber 2 is exhausted;
s20: when the vacuum degree in the auxiliary chamber 2 reaches a preset value, the third air valve 7 is closed, the second air valve 6 is opened, and air in the working chamber 1 is exhausted;
s30: when the vacuum degree in the vacuum cavity is the same as the vacuum degree in the auxiliary cavity 2, closing the second air valve 6, opening the third air valve 7, opening the first air valve 5, and simultaneously exhausting the air in the working cavity 1 and the auxiliary cavity 2 to enable the vacuum degrees to reach a working value;
s40: processing the parts in the working chamber 1, closing the first air valve 5 and the second air valve 6 after the processing is finished, opening the exhaust valve, breaking the vacuum state in the working chamber 1, replacing the parts and closing the exhaust valve;
s50: steps S20 to S40 are repeated.
Wherein, the control system can be a PLC. The preset value is the first vacuum degree, and the working value is the second vacuum degree. In step S10, the preliminary pump 11 and the molecular pump 21 preliminarily evacuate the auxiliary chamber 2, so that the auxiliary chamber 2 reaches a low vacuum state; in step S20, the preliminary pump 11 preliminarily pumps the working chamber 1 to make the working chamber 1 reach a low vacuum state; in step S30, the molecular pump 21 and the roughing pump 11 simultaneously evacuate the working chamber 1 and the auxiliary chamber 2 again, so that the working chamber 1 and the auxiliary chamber 2 reach a high vacuum state, that is, a working state satisfying the part processing is satisfied.
In one embodiment, the working chamber 1 is used for heating parts, a heater 16 and a temperature sensor 15 are arranged in the working chamber 1, and the heater 16 and the temperature sensor 15 can be controlled by a control system such as a PLC, so that the temperature in the working chamber 1 can be effectively controlled, and the temperature of the parts can be changed according to a standard processing temperature curve. In step S40, the temperature sensor 15 detects the temperature in the working chamber 1 in real time and feeds back the detection result to the control system, and compares the detection result with the standard temperature in real time, and when the temperature curve formed by the detection result is within the error range allowed by the standard temperature curve, the heating of the part is completed.
In one embodiment, in step S30, when the vacuum degree in the vacuum chamber reaches a preset value, it is detected whether the vacuum degree in the auxiliary chamber 2 reaches the preset value:
if the vacuum degree in the auxiliary chamber 2 reaches the preset value, closing the second air valve 6, opening the third air valve 7 and opening the first air valve 5;
if the vacuum degree in the auxiliary chamber 2 does not reach the preset value, S20 is repeated to make the vacuum degree in the auxiliary chamber 2 reach the preset value.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (7)
1. Vacuum apparatus, characterized in that it comprises:
the working chamber is used for processing parts and communicated with an exhaust valve for breaking vacuum;
the air suction port of the primary pump is communicated with the working chamber;
the auxiliary chamber is communicated with the working chamber, the auxiliary chamber is communicated with the working chamber through a first channel and a second channel, and an air suction port of the primary pump is arranged on the second channel;
the air suction port of the molecular pump is communicated with the auxiliary cavity;
the first air valve is arranged on the first channel and used for controlling the opening and closing of the first channel;
the second air valve is arranged on a second channel between the air suction port of the primary pumping pump and the working chamber and used for controlling a passage between the air suction port of the primary pumping pump and the working chamber;
the third air valve is arranged on a second channel between the air suction port of the primary pumping pump and the auxiliary chamber and used for controlling a passage between the auxiliary chamber and the air suction port of the primary pumping pump;
the primary pumping pump, the molecular pump and the third air valve are opened through the control system, and air in the auxiliary chamber is exhausted; when the vacuum degree in the auxiliary chamber reaches a preset value, closing the third air valve, opening the second air valve and exhausting the air in the working chamber; when the vacuum degree in the working chamber reaches the preset value, closing the second air valve, opening the third air valve, opening the first air valve, and simultaneously exhausting the air in the working chamber and the auxiliary chamber to enable the vacuum degrees to reach the working value; and processing the parts in the working chamber, closing the first air valve and the second air valve after the parts are processed, opening the exhaust valve, breaking the vacuum state in the working chamber, replacing the parts and closing the exhaust valve.
2. The vacuum apparatus as claimed in claim 1, further comprising a first vacuum gauge for detecting a vacuum degree of the working chamber, and a second vacuum gauge for detecting a vacuum degree of the auxiliary chamber.
3. The vacuum apparatus as claimed in claim 1, wherein the working chamber is used for heating parts, and a heater and a temperature sensor are provided outside the working chamber.
4. The vacuum apparatus according to claim 3, wherein the heater ring is disposed on an outer periphery of the working chamber, the heater ring is provided with a shield on an outer periphery thereof, and the shield is provided with a cooling water pipe therein.
5. The vacuum apparatus according to claim 4, wherein the working chamber has an opening, a protective door for sealing the opening is provided at the opening, a cooling water ring is provided in the protective door, and the vacuum apparatus further comprises a water chiller, the water chiller being communicated with the cooling water pipe and the cooling water ring.
6. The vacuum device of claim 1, wherein the first gas valve is a gate valve.
7. The vacuum apparatus of claim 1, wherein the exhaust valve is a manual exhaust valve, a pneumatic exhaust valve, or a combination of both.
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| CN201910131731.2A CN109854483B (en) | 2019-02-22 | 2019-02-22 | Vacuum device |
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| CN201910131731.2A CN109854483B (en) | 2019-02-22 | 2019-02-22 | Vacuum device |
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| CN109854483B true CN109854483B (en) | 2020-05-05 |
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| CN110360835B (en) * | 2019-06-18 | 2020-07-28 | 西安交通大学 | Ultrahigh vacuum degassing device and method |
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| CN202432852U (en) * | 2012-01-18 | 2012-09-12 | 宁德市星宇科技有限公司 | Smelting furnace |
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- 2019-02-22 CN CN201910131731.2A patent/CN109854483B/en active Active
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| CN1623004A (en) * | 2002-03-25 | 2005-06-01 | 谷口裕久 | Hot gas quenching devices, and hot gas heat treating system |
| CN1665955A (en) * | 2002-06-28 | 2005-09-07 | 东京电子株式会社 | Method and system for arc suppression in a plasma processing system |
| CN1595036A (en) * | 2003-11-24 | 2005-03-16 | 深圳大学 | Vacuum smelting furnace |
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