CN105546984A - Vacuum heating device - Google Patents
Vacuum heating device Download PDFInfo
- Publication number
- CN105546984A CN105546984A CN201610075552.8A CN201610075552A CN105546984A CN 105546984 A CN105546984 A CN 105546984A CN 201610075552 A CN201610075552 A CN 201610075552A CN 105546984 A CN105546984 A CN 105546984A
- Authority
- CN
- China
- Prior art keywords
- heater
- vacuum
- vacuum chamber
- temperature sensor
- calandria
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/02—Crucible or pot furnaces with tilting or rocking arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/04—Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/14—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/20—Arrangement of controlling, monitoring, alarm or like devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/04—Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
- F27B2014/045—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B2014/0825—Crucible or pot support
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Induction Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a vacuum heating device which comprises a vacuum chamber, a vacuum pump and a furnace body. The furnace body is arranged inside the vacuum chamber. A plurality of heating bodies are arranged on the furnace body. The vacuum pump is communicated with the vacuum chamber. A substrate is arranged on the top of the vacuum chamber. The bottom of the furnace body is supported into the vacuum chamber through a supporting spring. An electromagnet controlled by a controller to be opened is correspondingly arranged nearby the furnace body. According to the vacuum heating device, controllable, precise and uniform heating can be achieved.
Description
Technical field
The present invention relates to firing equipment field, be specially a kind of vacuum heater.
Background technology
Vacuum heater is a kind of under vacuum conditions to the equipment that the materials such as polymer crystal heat, the structure of existing vacuum heater is simple, and due to the reason of material behavior, inevitably there will be heating-up temperature uncontrollable, heat uneven and by problems such as the volatilization of thermogenetic air-flow are slow, cause material to burn, burnt, even stick in crucible bottom, have impact on heating effect greatly, reduce operating efficiency and the service life of firing equipment.
Summary of the invention
The object of the present invention is to provide a kind of vacuum heater, with realize controlled, accurately and uniformly heat.
Vacuum heater of the present invention, comprise vacuum chamber, vavuum pump and at least one body of heater, described body of heater is arranged in vacuum chamber, body of heater is furnished with multiple calandria, crucible is placed with in body of heater, described vavuum pump and vacuum chamber, vacuum chamber top is provided with substrate, described calandria comprises correspondence and is arranged in multiple calandrias that a calandria of bottom of furnace body and equi-spaced apart are arranged in body of heater periphery, described calandria is controlled by controller, with temperature sensor on described each calandria, controller gathers the temperature signal of each temperature sensor, the bottom of described body of heater is supported in vacuum chamber by support spring, the electromagnet being controlled unlatching by controller is furnished with in the other correspondence of body of heater, the induction fan of the corresponding adjustable speed being furnished with temperature sensor and controlled by controller is gone back above described each body of heater.
Preferably, described induction fan and the temperature sensor be positioned at above body of heater are arranged in directly over body of heater by a mounting bracket.
Preferably, the welded top of described support spring is fixed with mount pad, and this mount pad is connected with the threaded mounting hole at bottom of furnace body center by the nipple on its top.
Preferably, the bottom of described mounting bracket is dismountable is fixed on body of heater.
Preferably, described induction fan is rotating is arranged on mounting bracket.
This vacuum heater structure is simple, automaticity is high, solves that heating-up temperature in prior art is uncontrollable, the uneven and gaseous matter of being heated volatilizees slow equitemperature, thus improves operating efficiency and the service life of heater.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment one;
Fig. 2 is the mounting structure schematic diagram of described support spring and body of heater;
Fig. 3 is the structural representation of embodiment two.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is further elaborated, and following examples only for explaining the present invention, do not form limiting the scope of the present invention.
Embodiment one:
Vacuum heater as shown in Figure 1 and Figure 2, comprises vacuum chamber 1, vavuum pump 2 and a body of heater 3, is provided with the silica crucible for placing raw material, vacuum chamber top is provided with substrate 4 in body of heater.
Be furnished with an annular calandria 5 bottom body of heater 3, sidewall of the furnace body periphery equi-spaced apart is furnished with four calandrias 5, and described calandria can adopt resistance heated, induction coil to heat or the mode such as heating using microwave.
With temperature sensor on each calandria 5, controller gathers the temperature signal of each temperature sensor and controls the heating-up temperature of each calandria.
Described body of heater 3 is supported in the middle of bottom vacuum chamber 1 by support spring 6, is fixed with mount pad 7 in the welded top of described support spring 6, and this mount pad 7 is connected with the threaded mounting hole of body of heater 3 bottom centre by the nipple on its top.
Be equipped with in the other stationary cloth of body of heater 3 electromagnet 8 being controlled unlatching by controller, when electromagnet is opened, body of heater 3 is adsorbed to electromagnet side, and now electromagnet disconnects, and be subject to the effect of bottom support spring 6, body of heater 3 can rock back and forth.
Directly over described body of heater 3, be furnished with the induction fan 11 of a temperature sensor 10 and adjustable speed by mounting bracket 9, the lower end of this mounting bracket 9 is dismountable to be arranged on body of heater.
Temperature sensor 10 above body of heater 3 and induction fan 11 are arranged on the top nose of mounting bracket 9 along the center line of body of heater 3, and this temperature sensor 10 is positioned at the below of induction fan 11.
Above-mentioned each temperature sensor in the present embodiment can adopt PT100 type temperature sensor.
Above-mentioned vacuum heater in use, first raw material (as macromolecular material, crystalline material, mineral aggregate etc.) is put into crucible, again crucible is put into body of heater, being spun by body of heater 3 is fixed on the mount pad 7 of support spring 6, again mounting bracket 9 is in place, vacuum chamber is evacuated to vacuum state by vavuum pump 2, then sets technological temperature and time on the controller according to the characteristic of raw material.In heating process, the temperature of each temperature sensor of controller Real-Time Monitoring, when occurring that heating-up temperature difference is larger, the blas (being realized by mcu programming) of controller regulates the heating-up temperature of some calandrias on body of heater 3, makes heating-up temperature even.In heating process, electromagnet 8 is controlled by the controller and periodically disconnects, and crucible ceaselessly rocks with body of heater, raw material is evenly distributed in crucible, and avoid amount of localized heat in raw material to concentrate, rock the effect also played heat radiation and stir raw material in addition, make raw material thermally equivalent.
After homogeneous heating a period of time, when heated material arrival distillation is temperature required, vapor stream can be produced, when vapor stream arrives the temperature sensor 10 be arranged in above crucible, this temperature sensor is by the vapor stream temperature feedback that detects to controller, and the rotating speed of controller adjustment induction fan 11, to control the vapor stream rate of climb and temperature, avoid hot gas to assemble on crucible top, under induction fan effect, gaseous matter is just upwards plated on substrate.
Embodiment two:
See Fig. 3, in the present embodiment, in vacuum chamber, be centrally arranged symmetrically with two cover bodies of heater 3, in each body of heater, be provided with the silica crucible for placing raw material, vacuum chamber center of top being provided with substrate 4.
Be furnished with an annular calandria 4 bottom each body of heater 3, sidewall of the furnace body periphery equi-spaced apart is furnished with four calandrias 4, and described calandria can adopt resistance heated, induction coil to heat or the mode such as heating using microwave.
With temperature sensor on each calandria, controller gathers the temperature signal of each temperature sensor and controls the heating-up temperature of each calandria.
Described two bodies of heater are supported in vacuum chamber respectively by a support spring 6, are fixed with mount pad in the welded top of described support spring, and this mount pad is connected with the threaded mounting hole at bottom of furnace body center by the nipple on its top.
Be equipped with an electromagnet 8 opened by controller control in the other stationary cloth of each body of heater, when electromagnet is opened, body of heater is adsorbed to electromagnet side, and now electromagnet disconnects, and be subject to the effect of bottom support spring, body of heater can rock back and forth.
Directly over described body of heater, be furnished with the induction fan 11 of a temperature sensor 10 and adjustable speed by mounting bracket, the lower end of this mounting bracket is dismountable to be arranged on body of heater.
Temperature sensor 10 above body of heater 3 and induction fan 11 are arranged on the top nose of mounting bracket, and this temperature sensor 10 is positioned at the below of induction fan 11.
Above-mentioned each temperature sensor in the present embodiment can adopt PT100 type temperature sensor.
The adjustable angle of described induction fan 11 on mounting bracket, it is the drive motors realization by being arranged on mounting bracket top, and this drive motors is controlled by controller, drives the induction fan be fixedly mounted in its rotating shaft to swing by this drive motors.In order to reach optimum technological effect, the air supply direction (i.e. angle of inclination) of corresponding induction fan can be set up in advance according to the relative position between each body of heater 3 and substrate 4.Also as required, in heating process, the rotation of corresponding induction fan can be controlled by the blas in controller, such as realize to substrate back and forth back and forth air-supply or two induction fan blow alternately to substrate.
The present embodiment itself and operation principle, with reference to embodiment one, do not repeat them here.
Claims (5)
1. a vacuum heater, comprise vacuum chamber, vavuum pump and at least one body of heater, described body of heater is arranged in vacuum chamber, body of heater is furnished with multiple calandria, in body of heater, is placed with crucible, described vavuum pump and vacuum chamber, vacuum chamber top is provided with substrate, it is characterized in that:
Described calandria comprises correspondence and is arranged in multiple calandrias that a calandria of bottom of furnace body and equi-spaced apart are arranged in body of heater periphery, described calandria is controlled by controller, with temperature sensor on described each calandria, controller gathers the temperature signal of each temperature sensor, the bottom of described body of heater is supported in vacuum chamber by support spring, be furnished with in the other correspondence of body of heater the electromagnet being controlled unlatching by controller, above described each body of heater, go back the induction fan of the corresponding adjustable speed being furnished with temperature sensor and controlled by controller.
2. vacuum heater according to claim 1, is characterized in that: described induction fan and the temperature sensor be positioned at above body of heater are arranged in directly over body of heater by a mounting bracket.
3. vacuum heater according to claim 1 and 2, is characterized in that: the welded top of described support spring is fixed with mount pad, and this mount pad is connected with the threaded mounting hole at bottom of furnace body center by the nipple on its top.
4. vacuum heater according to claim 2, is characterized in that: the bottom of described mounting bracket is dismountable to be fixed on body of heater.
5. vacuum heater according to claim 2, is characterized in that: described induction fan is rotating to be arranged on mounting bracket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610075552.8A CN105546984B (en) | 2016-02-03 | 2016-02-03 | A kind of vacuum heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610075552.8A CN105546984B (en) | 2016-02-03 | 2016-02-03 | A kind of vacuum heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105546984A true CN105546984A (en) | 2016-05-04 |
| CN105546984B CN105546984B (en) | 2017-06-30 |
Family
ID=55826354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610075552.8A Expired - Fee Related CN105546984B (en) | 2016-02-03 | 2016-02-03 | A kind of vacuum heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105546984B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19607089C1 (en) * | 1996-02-24 | 1997-04-17 | Didier Werke Ag | Closure and regulating device for flow of metal |
| CN1595036A (en) * | 2003-11-24 | 2005-03-16 | 深圳大学 | Vacuum smelting furnace |
| CN101782325A (en) * | 2010-03-08 | 2010-07-21 | 南通汉瑞实业有限公司 | Vacuum intermediate frequency induction furnace |
| CN203629290U (en) * | 2013-12-02 | 2014-06-04 | 乳源瑶族自治县力强磁铁制品有限公司 | Vacuum induction melting furnace |
| CN104224544A (en) * | 2014-09-19 | 2014-12-24 | 天津紫恩玄泰科技有限公司 | Intelligent medicine decocting machine |
-
2016
- 2016-02-03 CN CN201610075552.8A patent/CN105546984B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19607089C1 (en) * | 1996-02-24 | 1997-04-17 | Didier Werke Ag | Closure and regulating device for flow of metal |
| CN1595036A (en) * | 2003-11-24 | 2005-03-16 | 深圳大学 | Vacuum smelting furnace |
| CN101782325A (en) * | 2010-03-08 | 2010-07-21 | 南通汉瑞实业有限公司 | Vacuum intermediate frequency induction furnace |
| CN203629290U (en) * | 2013-12-02 | 2014-06-04 | 乳源瑶族自治县力强磁铁制品有限公司 | Vacuum induction melting furnace |
| CN104224544A (en) * | 2014-09-19 | 2014-12-24 | 天津紫恩玄泰科技有限公司 | Intelligent medicine decocting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105546984B (en) | 2017-06-30 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170630 Termination date: 20190203 |