CN1075779A - Combined driving molecular pump - Google Patents
Combined driving molecular pump Download PDFInfo
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- CN1075779A CN1075779A CN 92101300 CN92101300A CN1075779A CN 1075779 A CN1075779 A CN 1075779A CN 92101300 CN92101300 CN 92101300 CN 92101300 A CN92101300 A CN 92101300A CN 1075779 A CN1075779 A CN 1075779A
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- pump
- drag
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- unit
- bleeding
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Abstract
A kind of drive molecular pump is by movable vane wheel, motive sealing, formations such as rotating shaft and pump case.Have the groove of bleeding of a multiple dragging face on the movable vane wheel at least, motive sealing is inserted in the groove of bleeding, and the groove of bleeding leaves suction port and relief opening respectively in the both sides of motive sealing.The coaxial installation in the above-mentioned unit of bleeding of some levels can be formed the multistage pump that series and parallel makes up.Above-mentioned single-stage or multistage pump can also be combined into composite vacuum pump with other molecular pumps and rotating machinery vacuum pump.This pump structure is simple, easy to process, and pumping speed and compression ratio are all higher, and cost is lower.
Description
The present invention relates to a kind of drive molecular pump.
Chinese patent CN-85105304A, CN-87101116.6-2 and U.S. Pat 3,794,449 have introduced some kinds of drive molecular pumps, though these molecular pump compression ratios are higher, but pumping speed is still not really high comparatively speaking, has limited further promoting the use of of they.
The purpose of this invention is to provide and a kind ofly have a plurality of higher novel drive molecular pumps of pumping speed that drag face, and the composite vacuum pump formed of this pump and other molecular pump and rotating machinery vacuum pump.
Molecular pump provided by the invention, form by movable vane wheel, motive sealing, rotating shaft, isolating ring, stationary blade wheel and pump case etc., the movable vane wheel is fixed in the rotating shaft, it is characterized in that having at least in this pump one group to have a plurality of unit of bleeding substantially that drag face, abbreviates as and drags the pump unit more.This unit of bleeding substantially is made up of following basic structure:
1. have a groove of bleeding along the circumferential direction at least on the movable vane wheel, the cross section of the groove of bleeding can be rectangle, arc or other shape.Bleeding the opening of groove can be in the side surface direction of circumference, perhaps in cross-sectional direction.
2. motive sealing is similar to the slot cross-section of bleeding by the cross section, but smaller arc body constitutes, and motive sealing is fixed on pump case, and perhaps isolating ring perhaps on the stationary blade wheel, and inserts in the groove of bleeding.Motive sealing and bleed and leave the working clearance between the groove inwall.
3. the groove of bleeding is respectively equipped with suction port and relief opening in the both sides of above-mentioned motive sealing, and all the other positions are by pump case, perhaps isolating ring, perhaps sealing such as stationary blade wheel.Sealing part leaves the working clearance.
4. in the same groove of bleeding, several motive sealings can be arranged, and several corresponding suction port and relief openings.At this moment, this groove of bleeding should be considered as the multistage unit of bleeding.
5. the dynamic and static structures such as groove and motive sealing of bleeding can be exchanged.
When movable vane wheel high speed rotating, the above-mentioned unit of bleeding just can constitute a molecular pump with practical value.Change the sense of rotation of movable vane wheel, can change the direction of bleeding.
The suction port and the relief opening of the some grades of unit of bleeding are substantially fused with gas channel respectively, can constitute parallel connection and bleed.The relief opening and the suction port of the some grades of unit of bleeding are substantially joined end to end successively, can constitute series connection and bleeding.With the coaxial installation in the multistage unit of bleeding, the unit parallel connection of the suction port of close pump is bled, and the units in series of the relief opening of close pump is bled, and can constitute a better molecular pump of performance.
Above-mentioned single-stage or many-level molecule pump and coaxial installations such as other molecular pumps, rotating machinery vacuum pump, the series and parallel combination can also constitute a better composite molecular pump of performance.
Advantage of the present invention:
1. the drive molecular pump of the present invention's proposition is simple in structure, easy to process, and cost is lower, and pumping speed and compression ratio are all higher, and the some grades of coaxial installations in unit, can constitute the multistage pump of series and parallel combination.
The drive molecular pump that proposes of the present invention can also with coaxial installations such as other molecular pumps, rotating machinery vacuum pump, constitute the composite vacuum pump of various function admirables.
Below in conjunction with drawings and Examples the present invention is further described.
Fig. 1 is the schematic representation that single-stage of the present invention is dragged pump (A) more.
Fig. 2 is the side view that single-stage of the present invention is dragged pump (A) more.
Fig. 3 is the multistage schematic representation that drag pump (A) of the present invention more.
Fig. 4 is the schematic representation that single-stage of the present invention is dragged pump (B) more.
Fig. 5 is the multistage schematic representation that drag pump (B) of the present invention more.
Fig. 6 is the schematic representation of combined driving molecular pump of the present invention.
Fig. 7 is the schematic representation of composite molecular pump of the present invention.
In the accompanying drawing: 1. movable vane wheel, 2. motive sealing, 3. rotating shaft, 4. pump case, the groove of 5. bleeding, 6. suction port, 7. relief opening, 8. isolating ring, the 9. suction port of pump, the 10. relief opening of pump, 11. motor, 12. pairs are dragged the pump unit, and 13. singly drag the pump unit, and 14. turbomolecular pump unit drag the pump stationary blade wheel more 15..
Embodiment 1: single-stage is dragged pump (A) more
Single-stage drags the channel opening of bleeding of pump (A) in the circumference side surface direction more, and its front view and side view take turns 1 by movable vane respectively as shown in Figure 1, 2, motive sealing 2, and rotating shaft 3 and pump case 4 wait formation.Movable vane wheel 1 is fixed in the rotating shaft 3, on the movable vane wheel 1 groove 5 of bleeding is arranged, and motive sealing 2 is fixed on the pump case 4, and gap and motive sealing 2 between pump case 4 and the movable vane wheel 1 and the gap of bleeding between the groove 5 should be smaller as far as possible, usually desirable 0.1～0.5mm.The body of waiting to bleed is entered by suction port 6, discharges through relief opening 7.
Embodiment 2: the multistage pumps (A) that drag more
The multistage pump (A) that drags drags the coaxial installation in pump (A) unit to constitute by rotating shaft 3, pump case 4, isolating ring 8 and some levels more more.The unit parallel connection of the suction port 9 of usually close pump is bled, and the units in series of the relief opening 10 of close pump is bled.Shown in Figure 3 multistagely drag pump to form by eight grades of unit more.Middle level Four unit parallel connection is bled, and both sides respectively have secondary unit to connect respectively to bleed.The motive sealing of middle level Four unit is positioned at the side top, and their suction port is aimed at the suction port 9 of pump, and the motive sealing of both sides lays respectively at side and side-lower, shown in the dotted line among Fig. 3.Isolating ring among Fig. 3 can, all motive sealings can directly be fixed on the pump case 4.The bleed relief opening and the suction port of unit of series connection joins end to end successively, and outermost row of cells gas port is positioned at the below of pump, directly links to each other with relief opening 10.Pumped gas is entered by the suction port 9 of pump, through the middle level Four parallel connection unit of bleeding, is divided into left and rightly two the tunnel then, respectively again through the unit that the two-stage tandem of and arranged on left and right sides is bled, is discharged by the relief opening 10 of pump at last.
Drag pump pressure when single-stage more and contract when higher, can add motive sealing between adjacent two series-connected stages, for example, add one-level and drag the pump unit more, perhaps two-stage tandem dish type pump (seeing patent CN-85105304A for details) unit of bleeding etc.
Example 3: single-stage is dragged pump (B) more
Single-stage drags the opening of the groove of bleeding of pump (B) in cross-sectional direction more, and its front view is made of movable vane wheel 1, rotating shaft 3, motive sealing 2, stationary blade wheel 15, pump case 4 and isolating ring 8 etc. as shown in Figure 4.Motive sealing 2 is fixed on the stationary blade wheel 15.Stationary blade wheel 15 is fixed on the pump case 4.Gap between the dynamic and static impeller and motive sealing and the gap of bleeding between the groove are smaller as far as possible, usually desirable 0.1～0.5mm.The groove of bleeding is respectively equipped with suction port and relief opening in the both sides of motive sealing.
Embodiment 4: the multistage pumps (B) that drag more
Multistagely drag pump (B) by same impeller, the some single-stages on the perhaps different impellers drag pump (B) to constitute more more, and multi-level unit can be connected as required and be bled or parallel connection is bled.Multistage pump B that drag shown in Figure 5 more.Constitute by movable vane wheel 1, rotating shaft 3, motive sealing 2, pump case 4, isolating ring 8 and stationary blade wheel 15 etc.On the movable vane wheel 1 two grooves 5 of bleeding are arranged, these two grooves 5 of bleeding connect with motive sealing 2 two of compositions bleed drag the pump unit more.Two motive sealings of bleeding groove are submitted the certain distance of fork at circumferential position, make the outside bleed the relief opening of unit near the bleed suction port of unit of inboard.Pumped gas is entered by the bleed suction port of unit of the outside, successively through unit and the inboard unit of bleeding of bleeding, the outside, is discharged by the bleed relief opening of unit of inboard at last.
Embodiment 5: combined driving molecular pump
Combined driving molecular pump coaxial mounted is dragged pump more, is twoly dragged pump (seeing patent CN-87101116.6-2 for details) and singly drag pump by rotating shaft 3, pump case 4, isolating ring 8 and some levels, for example compositions such as dish type pump (seeing patent CN-85105304A for details) and traditional cylindrical spiral groove drive molecular pump and other single dragging face molecular pump (Hereinafter the same) unit.Compound mode one: the pump unit is dragged in the suction port employing near pump more, drags the pump unit near the relief opening employing is two, perhaps singly drags the pump unit, perhaps their series and parallel combination.Compound mode two: near the two pump unit that drag of the suction port employing of pump, the pump unit is dragged in employing more near relief opening, perhaps series and parallels combinations of dragging the pump unit and singly dragging the pump unit more.Combined pump shown in Figure 6 is dragged by level Four that pump, secondary are two to drag pump 12 and level Four dish type singly to drag pump unit 13 to form more.Pumped gas is entered by the suction port 9 of pump, drags pump through what middle level Four parallel connection was bled more, is divided into left and rightly two the tunnel then, and the one-level of bleeding through the both sides series connection again is two respectively drags pump and secondary dish type singly to drag pump, is discharged by the relief opening 10 of pump at last.
Embodiment 6: composite molecular pump
Composite molecular pump by rotating shaft 3, pump case 4, motor 11 and the coaxial mounted turbomolecular pump of some levels, drag pump more, twoly drag pump and singly drag pump unit etc. to form.Adopt the turbomolecular pump unit near the suction port of pump, adopt near the relief opening of pump and drag the pump unit more, perhaps drag the pump unit and twoly drag pump, singly drag the series and parallel of pump unit to make up.Eight grades of turbomolecular pumps, one-levels that combined pump shown in Figure 7 is bled by series connection drag that pump and one-level are two drags the pump unit to form more.Suction port 9 near pump is the turbomolecular pump unit.Eight grades of turbomolecular pumps, one-levels that pumped gas is bled through series connection are dragged pump and the two pump unit that drag of one-level more, are discharged by relief opening 10 at last.
Embodiment 7: composite vacuum pump
Composite vacuum pump is dragged pump, turbomolecular pump more, twoly drags pump, is singly dragged pump and the coaxial installation of rotating machinery vacuum pump to form by some levels.Near the suction port of pump for dragging the pump unit more, perhaps turbomolecular pump unit and the combination of dragging the pump unit more, perhaps they and pair combinations of dragging the pump unit can be adopted then and singly drag the pump unit.The relief opening of afterbody molecular pump unit links to each other with the suction port of rotating machinery vacuum pump.For example ten grades of series connection drag pump and the coaxial installation of single-stage rotating machinery vacuum pump more, near pump steam inlet for dragging pump more.Afterbody drags the relief opening of pump to link to each other with the suction port of rotating machinery vacuum pump more, and pumped gas is entered by the suction port of pump, drags pump through what six grades of series connection were bled more, discharges through single-stage rotating machinery vacuum pump again.
Claims (13)
1, a kind of combined driving molecular pump is made up of movable vane wheel, motive sealing, rotating shaft, stationary blade wheel and pump case etc.It is characterized in that having at least in the described molecular pump one group to have a plurality of unit of bleeding substantially that drag face, abbreviate as and drag the pump unit more.This unit of bleeding substantially is made up of following basic structure:
(1) have a groove of bleeding along the circumferential direction at least on the movable vane wheel, the cross section of the groove of bleeding can be rectangle, arc or other shape.Bleeding the opening of groove can be in the side surface direction of circumference, perhaps in cross-sectional direction.
(2) motive sealing is similar to the slot cross-section of bleeding by the cross section, but smaller arc body constitutes, and motive sealing is fixed on pump case, and perhaps isolating ring perhaps on the stationary blade wheel, and inserts in the groove of bleeding.Motive sealing and bleed and leave the working clearance between the groove inwall.
(3) groove of bleeding is respectively equipped with suction port and relief opening in the both sides of above-mentioned motive sealing, and all the other positions are by pump case, perhaps isolating ring, perhaps sealing such as stationary blade wheel.Sealing part leaves the working clearance.
2, drag the pump elementary cell according to claim 1 is described more, it is characterized in that in the same groove of bleeding several motive sealings being arranged, and several corresponding suction port and relief openings.
3, describedly drag the pump elementary cell according to claim 1 and 2, dynamic and static structure such as it is characterized in that bleeding groove and motive sealing etc. is exchanged more.
4, according to claim 1 described many-level molecule pump, it is characterized in that some grades are dragged the coaxial installation in pump unit more, its suction port and relief opening fuse with gas channel respectively, constitute parallel connection and bleed.
5, according to claim 1 described many-level molecule pump, it is characterized in that some grades are dragged the coaxial installation in pump unit more, its relief opening and suction port join end to end successively, constitute series connection and bleed.
6, according to claim 1 described many-level molecule pump, it is characterized in that some grades are dragged the coaxial installation in pump unit more, the unit parallel connection of the suction port of close pump is bled, and the units in series of the relief opening of close pump is bled.
7, according to claim 1 described many-level molecule pump, it is characterized in that some grades are dragged pump unit and the coaxial installation of motive sealing more, dragging that adjacent two series connection are bled adds motive sealing more between the pump stage, and motive sealing can be adopted and drag pump more, perhaps dish type pump unit.
8, according to claim 1 described composite molecular pump, it is characterized in that some levels drags pump more, twoly drags pump and singly drag the coaxial installation in pump unit, the pump unit is dragged in suction port employing near pump more, relief opening near pump adopts two pump unit that drag, perhaps singly drag the pump unit, perhaps two pump unit and series and parallels that singly drag the pump unit of dragging make up.
9, according to claim 1 described composite molecular pump, it is characterized in that some levels drags pump more, twoly drags pump and singly drag the coaxial installation in pump unit, suction port near pump adopts two pump unit that drag, the pump unit is dragged in relief opening employing near pump more, and perhaps pump unit and series and parallels that singly drag the pump unit of dragging make up more.
10,, it is characterized in that some grades of turbomolecular pumps and drag the coaxial installation in pump unit more that the suction port employing turbomolecular pump unit near pump drags the pump unit near the relief opening employing of pump more according to claim 1 described composite molecular pump.
11, according to claim 1 described composite molecular pump, it is characterized in that some grades of turbomolecular pumps, drag pump more, twoly drag pump and singly drag coaxial installations such as pump unit, suction port near pump adopts the turbomolecular pump unit, the pump unit is dragged in relief opening employing near pump more, perhaps two pump unit that drag, perhaps singly drag the pump unit, perhaps their series and parallel combination.
12, according to claim 1 described composite vacuum pump, it is characterized in that some grades are dragged pump unit and the coaxial installation of rotating machinery vacuum pump more, the suction port of close pump for dragging the pump unit more, and afterbody drags the relief opening of pump unit to link to each other with the suction port of rotating machinery vacuum pump more.
13, according to claim 1 described composite vacuum pump, it is characterized in that some grades of turbomolecular pumps, drag pump unit and the coaxial installation of rotating machinery vacuum pump more, the suction port of close pump drags the pump unit for adopting the turbomolecular pump unit to adopt then more.Afterbody drags the relief opening of pump unit to link to each other with the suction port of rotating machinery vacuum pump more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92101300A CN1056914C (en) | 1992-02-28 | 1992-02-28 | Combined driving molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92101300A CN1056914C (en) | 1992-02-28 | 1992-02-28 | Combined driving molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1075779A true CN1075779A (en) | 1993-09-01 |
| CN1056914C CN1056914C (en) | 2000-09-27 |
Family
ID=4939054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN92101300A Expired - Fee Related CN1056914C (en) | 1992-02-28 | 1992-02-28 | Combined driving molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1056914C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003025400A1 (en) * | 2001-09-20 | 2003-03-27 | Chu, Jiguo | A molecular drag pump |
| CN1298885C (en) * | 2003-12-19 | 2007-02-07 | 储继国 | Vacuum deposition equipment |
| CN100354589C (en) * | 2003-11-24 | 2007-12-12 | 深圳大学 | Vacuum smelting furnace |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2918208A (en) * | 1956-02-02 | 1959-12-22 | Becker Willi | Molecular pump |
| SU572584A2 (en) * | 1966-01-03 | 1977-09-15 | Shchedov Anatolij K | Molecular vacuum pump |
| CN1009297B (en) * | 1987-06-03 | 1990-08-22 | 中国科学院北京真空物理实验室 | Disk turbine molecular pump |
-
1992
- 1992-02-28 CN CN92101300A patent/CN1056914C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003025400A1 (en) * | 2001-09-20 | 2003-03-27 | Chu, Jiguo | A molecular drag pump |
| CN100354589C (en) * | 2003-11-24 | 2007-12-12 | 深圳大学 | Vacuum smelting furnace |
| CN1298885C (en) * | 2003-12-19 | 2007-02-07 | 储继国 | Vacuum deposition equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1056914C (en) | 2000-09-27 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: NINGBO YUNSHENG VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: CHU JIGUO Effective date: 20011116 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20011116 Address after: 315040 No. 98 Nanjing Road, Zhejiang, Ningbo Patentee after: Ningbo Yunsheng Vacuum Technology Co. Ltd. Address before: 518060 Department of Applied Physics, Shenzhen University, Guangdong, Shenzhen Patentee before: Chu Jiguo |
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| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
| OR01 | Other related matters | ||
| C57 | Notification of unclear or unknown address | ||
| DD01 | Delivery of document by public notice |
Addressee: Ningbo Yunsheng Vacuum Technology Co. Ltd. Document name: Notification of Termination of Patent Right |
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| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |