TWI426557B - Coating device - Google Patents

Coating device Download PDF

Info

Publication number
TWI426557B
TWI426557B TW98127661A TW98127661A TWI426557B TW I426557 B TWI426557 B TW I426557B TW 98127661 A TW98127661 A TW 98127661A TW 98127661 A TW98127661 A TW 98127661A TW I426557 B TWI426557 B TW I426557B
Authority
TW
Taiwan
Prior art keywords
coating
track
conveyor belt
bracket
turntable
Prior art date
Application number
TW98127661A
Other languages
Chinese (zh)
Other versions
TW201108318A (en
Inventor
Shao Kai Pei
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW98127661A priority Critical patent/TWI426557B/en
Publication of TW201108318A publication Critical patent/TW201108318A/en
Application granted granted Critical
Publication of TWI426557B publication Critical patent/TWI426557B/en

Links

Description

鍍膜裝置 Coating device

本發明涉及一種鍍膜裝置。 The invention relates to a coating device.

鍍膜是一種被廣泛應用於工業生產中的技術以改變工件的表面特性,為了能夠使工件的表面獲得多種不同的性能,往往需要對工件進行多重鍍膜,因此,需要將鍍膜工件在不同的鍍膜機之間轉換從而獲得不同的鍍膜層。然而,現有技術中的鍍膜機往往採用單線流水作業的方式,即,將複數鍍膜機並排設置在同一條流水線上,流水線貫穿所有鍍膜裝置。工件通過流水線依次經過每一鍍膜機從而進行鍍膜,每一鍍膜機上均設置有兩個門以方便工件的進出。這種運送的工件方式使得鍍膜機之間需要通過閥門相互聯通,容易在產品的移轉過程中發生鍍膜氣體的相互對流而污染鍍膜空間,影響產品的鍍膜品質,此外,鍍膜機的維護也會因為彼此相連變得十分麻煩。 Coating is a technology widely used in industrial production to change the surface characteristics of workpieces. In order to obtain a variety of different properties on the surface of the workpiece, it is often necessary to perform multiple coating on the workpiece. Therefore, it is necessary to apply the coated workpiece to different coating machines. Switch between to obtain different coating layers. However, the prior art coating machine often adopts a single-line flow operation method, that is, the plurality of coating machines are arranged side by side on the same line, and the assembly line runs through all the coating devices. The workpiece is sequentially coated through each coating machine through a pipeline, and each coating machine is provided with two doors to facilitate the entry and exit of the workpiece. The method of transporting the workpieces requires that the coating machines need to communicate with each other through the valves, and it is easy to cause convection of the coating gases during the transfer of the product to contaminate the coating space, affecting the coating quality of the products, and in addition, the maintenance of the coating machine will also Because connecting to each other becomes very troublesome.

有鑒於此,有必要提供一種可提高鍍膜品質的鍍膜裝置。 In view of this, it is necessary to provide a coating device that can improve the quality of the coating.

一種鍍膜裝置,其包括一支架,複數鍍膜腔體,複數獨立的傳送帶,複數轉臺,以及至少一承載盤。所述複數鍍膜腔體間隔設置在所述支架上,每一鍍膜腔體包括一艙門。所述複數傳送帶環繞所述每一鍍膜腔體設置在所述支架上並延伸至每一鍍膜腔體的艙 門外。所述複數轉臺分別設置在每兩條相互獨立的傳送帶之間。所述至少一承載盤承載在所述傳送帶上,並在所述傳送帶的帶動下依次進入所述複數鍍膜腔體對承載在承載盤上的工件鍍膜。 A coating apparatus includes a bracket, a plurality of coating chambers, a plurality of independent conveyor belts, a plurality of turrets, and at least one carrier tray. The plurality of coating chambers are spaced apart from each other on the support, and each of the coating chambers includes a hatch. The plurality of conveyor belts are disposed around the each coating cavity on the bracket and extend to each of the coating chambers Outside the door. The plurality of turrets are respectively disposed between each of two mutually independent conveyor belts. The at least one carrier disk is carried on the conveyor belt, and is sequentially driven by the conveyor belt to enter the plurality of coating chambers to coat the workpieces carried on the carrier tray.

相較現有技術,本發明鍍膜裝置通過鋪設在鍍膜腔體週邊並延伸至鍍膜腔體的艙門前的傳送帶配合轉臺來實現承載盤在複數鍍膜腔體之間的自動轉換,從而使複數鍍膜腔體彼此分開設置,避免了鍍膜氣體的污染從而提高了鍍膜的品質,此外,自動化的過程有效的提高了生產效率。 Compared with the prior art, the coating device of the present invention realizes the automatic conversion between the plurality of coating cavities by the conveyor belt laying on the periphery of the coating chamber and extending to the front of the coating chamber, thereby realizing the automatic conversion between the plurality of coating cavities, thereby making the plurality of coating cavities The bodies are arranged separately from each other, which avoids the contamination of the coating gas and improves the quality of the coating. In addition, the automated process effectively increases the production efficiency.

100‧‧‧鍍膜裝置 100‧‧‧ coating device

110‧‧‧支架 110‧‧‧ bracket

112‧‧‧軌道 112‧‧‧ Track

114‧‧‧變軌感測器 114‧‧‧Track sensor

120‧‧‧鍍膜腔體 120‧‧‧coating cavity

122‧‧‧艙門 122‧‧‧hatch

130‧‧‧傳送帶 130‧‧‧Conveyor belt

140‧‧‧轉臺 140‧‧ Turntable

141‧‧‧導軌 141‧‧‧rail

142‧‧‧感測器 142‧‧‧ sensor

144‧‧‧旋轉伺服機構 144‧‧‧Rotary servo

146‧‧‧傳送伺服機構 146‧‧‧Transmission servo

150‧‧‧承載盤 150‧‧‧carrier tray

152‧‧‧滾輪 152‧‧‧Roller

圖1係本發明提供的一種鍍膜裝置的立體示意圖。 1 is a perspective view of a coating apparatus provided by the present invention.

圖2係圖1中鍍膜裝置的局部放大圖。 Figure 2 is a partial enlarged view of the coating device of Figure 1.

圖3係圖1中鍍膜裝置的承載盤的俯視圖。 Figure 3 is a plan view of the carrier tray of the coating apparatus of Figure 1.

圖4係圖1中鍍膜裝置的承載盤的立體示意圖。 4 is a perspective view of a carrier tray of the coating device of FIG. 1.

請參閱圖1至圖2,本發明較佳實施方式提供的一種鍍膜裝置100。該鍍膜裝置100包括一支架110,複數鍍膜腔體120,複數獨立的傳送帶130,複數轉臺140,以及至少一承載盤150。所述複數鍍膜腔體120間隔設置在所述支架110上,每一鍍膜腔體120包括一艙門122。所述複數傳送帶130設置在所述支架110上,且環繞所述每一鍍膜腔體120並延伸至每一鍍膜腔體120的艙門122外。所述複數轉臺140分別設置在每兩條相互獨立的傳送帶130之間。所述至少一承載盤150承載在所述傳送帶130上,並在所述傳送帶130的帶動下依次進入所述複數鍍膜腔體120進行鍍膜。 Referring to FIG. 1 to FIG. 2, a coating apparatus 100 according to a preferred embodiment of the present invention is provided. The coating apparatus 100 includes a bracket 110, a plurality of coating chambers 120, a plurality of independent conveyor belts 130, a plurality of turrets 140, and at least one carrier tray 150. The plurality of coating cavities 120 are spaced apart from the bracket 110, and each of the coating cavities 120 includes a hatch 122. The plurality of conveyor belts 130 are disposed on the bracket 110 and surround each of the coating chambers 120 and extend outside the hatch 122 of each coating chamber 120. The plurality of turntables 140 are disposed between each of two mutually independent conveyor belts 130, respectively. The at least one carrier disk 150 is carried on the conveyor belt 130, and sequentially enters the plurality of coating cavities 120 for coating under the driving of the conveyor belt 130.

所述支架110用以支撐鍍膜腔體120、傳送帶130、轉臺140、以及複數驅動所述傳送帶130及轉臺140轉動的驅動裝置(圖未示)。為了使所述承載盤150能在所述傳送帶130的帶動下在平穩地運動,在所述支架110的表面設置有複數內凹的軌道112,所述內凹的軌道112環繞所述鍍膜腔體120並延伸至鍍膜腔體120的艙門122外。所述支架110的軌道112內還可設置變軌感測器114,用以在有承載盤150通過時發出信號給轉臺140,所述轉臺140根據該信號旋轉從而與承載盤150當前所在的軌道112相接。 The bracket 110 is used to support the coating cavity 120, the conveyor belt 130, the turntable 140, and a plurality of driving devices (not shown) for driving the conveyor belt 130 and the turntable 140 to rotate. In order to enable the carrier tray 150 to move smoothly under the driving of the conveyor belt 130, a plurality of concave tracks 112 are disposed on the surface of the bracket 110, and the concave track 112 surrounds the coating cavity. 120 extends beyond the door 122 of the coating chamber 120. An orbital sensor 114 may be disposed in the track 112 of the bracket 110 for transmitting a signal to the turntable 140 when the carrier tray 150 passes, and the turntable 140 rotates according to the signal so as to be currently located with the carrier tray 150. The tracks 112 are connected.

所述鍍膜腔體120用以對待鍍膜工件進行鍍膜。所述複數鍍膜腔體120用以對產品鍍不同的膜層。所述複數鍍膜腔體120的艙門122的朝向相同。且在所述鍍膜腔體120內部設置有可裝卸所述承載盤150的裝卸裝置(圖未示)用以自動將承載盤150裝載至鍍膜腔體120內的預定位置處,並在鍍膜完成後將承載盤150卸下並重新放置在艙門122外的傳送帶130上。為了簡化鍍膜腔體120的結構,所述艙門122前的傳送帶130也可直接延伸至鍍膜腔體120內部,從而使承載盤150可直接由傳送帶傳裝載至鍍膜腔體120內部進行鍍膜。 The coating chamber 120 is used for coating a workpiece to be coated. The plurality of coating cavities 120 are used to plate different layers of the product. The orientation of the hatch 122 of the plurality of coating chambers 120 is the same. And a loading and unloading device (not shown) for loading and unloading the carrier tray 150 is disposed inside the coating cavity 120 for automatically loading the carrier disk 150 to a predetermined position in the coating cavity 120, and after the coating is completed. The carrier tray 150 is removed and repositioned on the conveyor belt 130 outside the door 122. In order to simplify the structure of the coating chamber 120, the conveyor belt 130 in front of the hatch 122 can also directly extend into the interior of the coating chamber 120, so that the carrier tray 150 can be directly loaded by the conveyor belt into the interior of the coating chamber 120 for coating.

請參閱圖3,所述複數傳送帶130分別鋪設在支架110的上方並容置在所述支架110的軌道112內。為了能夠使設置有待鍍膜工件的承載盤150可順利的按照預定的路徑進入鍍膜腔體120中進行鍍膜,並能在鍍膜完成後順利的進入到下一鍍膜腔體,所述複數傳送帶130彼此獨立,且可以正轉及反轉。本實施方式中,在所述鍍膜腔體120設置有艙門122的一側設置有兩條傳送帶130,在兩條傳送帶130的相對的一端設置有一條與所述兩條傳送帶130相互垂 直且延伸至所述艙門122位置處的傳送帶130。 Referring to FIG. 3, the plurality of conveyor belts 130 are respectively laid over the bracket 110 and housed in the rails 112 of the bracket 110. In order to enable the carrier 150 provided with the workpiece to be coated to smoothly enter the coating cavity 120 according to a predetermined path for coating, and to smoothly enter the next coating cavity after the coating is completed, the plurality of conveyors 130 are independent of each other. And can be forward and reverse. In this embodiment, two conveyor belts 130 are disposed on one side of the coating chamber 120 where the hatch 122 is disposed, and one opposite end of the two conveyor belts 130 is disposed to hang down with the two conveyor belts 130. The conveyor belt 130 extends straight to the position of the hatch 122.

所述複數轉臺140分別設置在所述複數傳送帶130之間的接頭位置處,用以使承載在所述傳送帶130上的承載盤150能夠改變軌道從而到達指定位置處。在所述轉臺140的表面上設置有與支架110的軌道112相對應且可匹配連接的導軌141。為了使所述轉臺140能夠精確的實現其功能,在所述轉臺140上設置有複數感測器142,一旋轉伺服機構144以及一傳送伺服機構146。所述旋轉伺服機構144可接受設置在支架110上的變軌感測器114的感測信號並使轉臺140與具有承載盤150的軌道112相對接,以使所述承載盤150可順利移動至轉臺140上。所述複數感測器142分別佈置在所述轉臺140的表面上用以感測承載盤150與傳送帶130接觸的表面是否完全進入轉臺140的導軌141內並與所述傳送伺服機構146相接觸,當所述承載盤150完全脫離軌道112及傳送帶130後,所述複數感測器142同時發出信號至所述旋轉伺服機構144。所述旋轉伺服機構144使轉臺140旋轉90度與下一傳送帶130及軌道112相對接。當所述旋轉伺服機構144旋轉完畢後發出信號給傳送伺服機構146,所述傳送伺服機構146帶動所述承載盤150進入下一軌道112並由傳送帶130運載至指定位置處。 The plurality of turrets 140 are respectively disposed at joint positions between the plurality of conveyor belts 130 to enable the carrier tray 150 carried on the conveyor belt 130 to change tracks to reach a designated position. Guide rails 141 corresponding to the rails 112 of the bracket 110 and matablely coupled are disposed on the surface of the turntable 140. In order to enable the turntable 140 to accurately perform its function, a plurality of sensors 142, a rotary servo mechanism 144 and a transfer servo mechanism 146 are disposed on the turntable 140. The rotation servo 144 can receive the sensing signal of the orbiting sensor 114 disposed on the bracket 110 and align the turntable 140 with the track 112 having the carrier 150 so that the carrier 150 can move smoothly. To the turntable 140. The plurality of sensors 142 are respectively disposed on the surface of the turntable 140 to sense whether the surface of the carrier 150 in contact with the conveyor belt 130 completely enters the guide rail 141 of the turntable 140 and is in contact with the transfer servo 146. In contact, when the carrier disk 150 is completely detached from the track 112 and the conveyor belt 130, the plurality of sensors 142 simultaneously send signals to the rotary servo mechanism 144. The rotary servo mechanism 144 rotates the turntable 140 by 90 degrees to interface with the next conveyor belt 130 and the track 112. When the rotary servo 144 is rotated, a signal is sent to the transfer servo 146, which drives the carrier 150 into the next track 112 and is carried by the conveyor 130 to a designated position.

請參閱圖4,所述承載盤150用以承載工件,為了增加在傳送帶130及軌道112內的穩定性,在其底部設置有兩個滾輪152,所述滾輪150在通常情況下與軌道112或導軌141的底面分離,在承載盤150由於改變方向而發生傾斜時,所述滾輪152可以支撐在所述軌道112或者軌道141的底面以防止承載盤150傾覆。 Referring to FIG. 4, the carrier tray 150 is used to carry a workpiece. In order to increase the stability in the conveyor belt 130 and the rail 112, two rollers 152 are disposed at the bottom thereof, and the roller 150 is normally combined with the rail 112 or The bottom surface of the guide rail 141 is separated, and when the carrier tray 150 is tilted due to the change of direction, the roller 152 may be supported on the bottom surface of the rail 112 or the rail 141 to prevent the carrier tray 150 from tipping over.

使用時,待鍍膜工件被設置在所述承載盤150內,所述承載盤150 在所述傳送帶130的帶動下在所述支架110的軌道112內移動,當承載盤150移動至兩個傳送帶130之間的轉臺140上並完全進入轉臺140的導軌141內時,所述轉臺140在旋轉伺服機構144的帶動下轉動90度,使導軌141與軌道112對接,接著傳送伺服機構146將所述承載盤150送入軌道112內並由傳送帶130傳送至鍍膜腔體120的艙門位置處。所述鍍膜腔體120通過其內部的上料裝置自動將所述承載盤150裝載至鍍膜腔體120內進行鍍膜,並在完成鍍膜後將所述承載盤150移出鍍膜腔體120放置在艙門122外的傳送帶130上,此時,艙門122外的傳送帶130反轉,將所述承載盤150運送至轉臺140上,轉臺140旋轉90度將與下一軌道112對接,並驅動承載盤150運動至下一軌道112內並由所述傳送帶130運送至下一作業環節中。 In use, a workpiece to be coated is disposed in the carrier tray 150, the carrier tray 150 Moving within the track 112 of the bracket 110 by the conveyor belt 130, when the carrier tray 150 is moved onto the turntable 140 between the two conveyor belts 130 and fully enters the guide rails 141 of the turntable 140, The turntable 140 is rotated 90 degrees by the rotation servo mechanism 144 to align the guide rail 141 with the rail 112, and then the transport servo mechanism 146 feeds the carrier tray 150 into the rail 112 and is conveyed by the conveyor belt 130 to the coating chamber 120. At the door position. The coating cavity 120 is automatically loaded into the coating cavity 120 by the loading device inside the coating cavity 120, and after the coating is completed, the carrier disk 150 is removed from the coating cavity 120 and placed in the door. At the outer conveyor belt 130, at this time, the conveyor belt 130 outside the hatch 122 is reversed, and the carrier tray 150 is transported to the turntable 140. The turntable 140 is rotated 90 degrees to interface with the next rail 112, and drives the load. The disk 150 is moved into the next track 112 and transported by the conveyor belt 130 to the next work session.

本發明鍍膜裝置100通過鋪設在鍍膜腔體120週邊並延伸至鍍膜腔體120的艙門122前的軌道112、傳送帶130配合轉臺140來實現承載盤150在複數鍍膜腔體120之間的自動轉換,如此,所述複數鍍膜腔體120便可獨立分開設置,避免了鍍膜氣體的污染從而提高了鍍膜的品質,此外,自動化的過程有效的提高了生產效率。 The coating device 100 of the present invention realizes the automatic loading of the carrier disk 150 between the plurality of coating cavities 120 by the rails 112 and the conveyor belt 130 which are laid around the coating chamber 120 and extend to the front of the door 122 of the coating chamber 120. In this way, the plurality of coating cavities 120 can be separately arranged separately, thereby avoiding the contamination of the coating gas and thereby improving the quality of the coating. In addition, the automated process effectively improves the production efficiency.

綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士爰依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。 In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

100‧‧‧鍍膜裝置 100‧‧‧ coating device

110‧‧‧支架 110‧‧‧ bracket

112‧‧‧軌道 112‧‧‧ Track

120‧‧‧鍍膜腔體 120‧‧‧coating cavity

130‧‧‧傳送帶 130‧‧‧Conveyor belt

140‧‧‧轉臺 140‧‧ Turntable

150‧‧‧承載盤 150‧‧‧carrier tray

Claims (5)

一種鍍膜裝置,其包括一支架,複數鍍膜腔體,複數獨立的傳送帶,複數轉臺,以及至少一承載盤,所述複數鍍膜腔體間隔設置在所述支架上,每一鍍膜腔體包括一艙門,所述支架的表面設置有複數內凹的軌道,所述軌道環繞所述鍍膜腔體並延伸至鍍膜腔體的艙門外,所述複數傳送帶設置在所述支架的上方且分別容置在所述軌道內,所述複數轉臺分別設置在每兩條相互獨立的傳送帶之間,所述複數轉檯用以使承載在所述傳送帶上的承載盤改變軌道從而到達指定位置處,所述至少一承載盤承載在所述傳送帶上,並在所述傳送帶的帶動下依次進入所述複數鍍膜腔體對承載在承載盤上的工件進行鍍膜。 A coating device comprising a bracket, a plurality of coating chambers, a plurality of independent conveyor belts, a plurality of turrets, and at least one carrier tray, wherein the plurality of coating chambers are spaced apart on the bracket, each coating chamber includes a a door, the surface of the bracket is provided with a plurality of concave tracks, the track surrounds the coating cavity and extends outside the door of the coating cavity, and the plurality of conveyor belts are disposed above the bracket and are respectively accommodated Within the track, the plurality of turrets are respectively disposed between each of two mutually independent conveyor belts for causing a carrier tray carried on the conveyor belt to change orbit to reach a designated position, At least one carrier disk is carried on the conveyor belt, and the plurality of coating chambers are sequentially driven by the conveyor belt to coat the workpieces carried on the carrier tray. 如申請專利範圍第1所述之鍍膜裝置,其中,在所述轉臺的表面上設置有與支架的軌道相對應且可匹配連接的導軌。 The coating apparatus according to claim 1, wherein a guide rail corresponding to the rail of the bracket and which is matablely coupled is provided on a surface of the turntable. 如申請專利範圍第2所述之鍍膜裝置,其中,在所述轉臺上設置有複數感測器、一旋轉伺服機構以及一傳送伺服機構,所述複數感測器分別佈置在所述轉臺的表面上用以感測承載盤與傳送帶接觸的表面是否完全進入,當所述承載盤完全脫離軌道及傳送帶後,所述複數感測器同時發出信號至所述旋轉伺服機構,所述旋轉伺服機構使轉臺旋轉度與下一傳送帶及軌道相對接,當所述旋轉伺服機構旋轉完畢後發出信號給傳送伺服機構,所述傳送伺服機構帶動所述承載盤進入下一軌道並由傳送帶運載至指定位置處。 The coating device of claim 2, wherein a plurality of sensors, a rotary servo mechanism, and a transfer servo are disposed on the turntable, and the plurality of sensors are respectively disposed on the turntable On the surface of the surface for sensing whether the surface of the carrier disk in contact with the conveyor belt is completely in. When the carrier disk is completely separated from the track and the conveyor belt, the plurality of sensors simultaneously send a signal to the rotary servo mechanism, the rotary servo The mechanism causes the turret rotation degree to be in contact with the next conveyor belt and the track. When the rotation servo mechanism is rotated, a signal is sent to the transmission servo mechanism, and the transmission servo mechanism drives the carrier tray into the next track and is carried by the conveyor belt to At the specified location. 如申請專利範圍第3所述之鍍膜裝置,其中,所述支架的軌道內設置有變軌感測器,所述變軌感測器在有承載盤通過該軌道時發出信號給轉臺,所述轉臺的旋轉伺服機構接受設置在支架上的變軌感測器的信號後驅動 轉臺與具有承載盤的軌道相對接。 The film coating device of claim 3, wherein the track of the bracket is provided with an orbit sensor, and the track sensor sends a signal to the turntable when the carrier plate passes the track. The rotary servo of the turntable receives the signal of the track sensor disposed on the bracket and drives The turntable is contiguous with the track having the carrier. 如申請專利範圍第4所述之鍍膜裝置,其中,所述承載盤的底部設置有兩個滾輪。 The coating device of claim 4, wherein the bottom of the carrier tray is provided with two rollers.
TW98127661A 2009-08-18 2009-08-18 Coating device TWI426557B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98127661A TWI426557B (en) 2009-08-18 2009-08-18 Coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98127661A TWI426557B (en) 2009-08-18 2009-08-18 Coating device

Publications (2)

Publication Number Publication Date
TW201108318A TW201108318A (en) 2011-03-01
TWI426557B true TWI426557B (en) 2014-02-11

Family

ID=44835589

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98127661A TWI426557B (en) 2009-08-18 2009-08-18 Coating device

Country Status (1)

Country Link
TW (1) TWI426557B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114453175A (en) * 2021-12-23 2022-05-10 凯盛信息显示材料(洛阳)有限公司 Continuous type filming equipment substrate frame

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515264A (en) * 1982-03-05 1985-05-07 Stiwa-Fertigungstechnik Sticht Gesellschaft M.B.H. Assembly line
US6854912B2 (en) * 2003-06-04 2005-02-15 3M Innovative Properties Company Mop assembly and cart
CN1594650A (en) * 2003-12-19 2005-03-16 储继国 Vacuum deposition equipment
TW200721357A (en) * 2005-09-08 2007-06-01 Jusung Eng Co Ltd Movable transfer chamber and substrate-treating apparatus including the same
TW200815617A (en) * 2006-06-22 2008-04-01 Shibaura Mechatronics Corp Film forming apparatus and film forming method
US20080220955A1 (en) * 2005-02-03 2008-09-11 Kuka Schweissanlagen Gmbh Manufacturing Method and Manufacturing Apparatus for Components

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515264A (en) * 1982-03-05 1985-05-07 Stiwa-Fertigungstechnik Sticht Gesellschaft M.B.H. Assembly line
US6854912B2 (en) * 2003-06-04 2005-02-15 3M Innovative Properties Company Mop assembly and cart
CN1594650A (en) * 2003-12-19 2005-03-16 储继国 Vacuum deposition equipment
US20080220955A1 (en) * 2005-02-03 2008-09-11 Kuka Schweissanlagen Gmbh Manufacturing Method and Manufacturing Apparatus for Components
TW200721357A (en) * 2005-09-08 2007-06-01 Jusung Eng Co Ltd Movable transfer chamber and substrate-treating apparatus including the same
TW200815617A (en) * 2006-06-22 2008-04-01 Shibaura Mechatronics Corp Film forming apparatus and film forming method

Also Published As

Publication number Publication date
TW201108318A (en) 2011-03-01

Similar Documents

Publication Publication Date Title
JP3212378B2 (en) Container inspection device
TWI485095B (en) Substrate transfer device and substrate tilt correction method
JP5495845B2 (en) LCD substrate bonding system
WO2007069701A1 (en) Vertical conveyance device
JP2014173915A (en) Conveyor for tire testing machine
CN208131339U (en) A kind of production line carrying out bearing surface spraying using robot
HUE033668T2 (en) Device for transferring vehicle wheels
US10300580B2 (en) Shot processing device
TWI426557B (en) Coating device
JPH03232621A (en) Conveying device for ampoule or the like
CN101962753B (en) Film coating device
JP5212899B2 (en) Work conveying apparatus and work conveying method
JP2009184422A (en) Unmanned conveying truck
TWI520891B (en) Conveying device for glass substrate
TW469254B (en) Device for conveying substrates from an initial station or feed station via several processing stations to a depositing station
TWM623380U (en) Article container conveying mechanism
KR20180077757A (en) Vacuum Robot
KR100975428B1 (en) Apparatus for treating substrate
JP2002370821A (en) Article conveyor
JP2013066811A (en) Conveyance facility for coating line
TW201934265A (en) Shot processing device and shot processing method
KR101812650B1 (en) Buffer chamber and method of transferring workpiece using the same
KR20100035518A (en) Substrate treatment apparatus
JP2001010723A (en) Container inspection device
CN210837694U (en) Substrate transfer mechanism and substrate processing apparatus

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees