CN101936278A - Electric arc titanium pump and vacuum air pump group comprising same - Google Patents
Electric arc titanium pump and vacuum air pump group comprising same Download PDFInfo
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- CN101936278A CN101936278A CN 201010279635 CN201010279635A CN101936278A CN 101936278 A CN101936278 A CN 101936278A CN 201010279635 CN201010279635 CN 201010279635 CN 201010279635 A CN201010279635 A CN 201010279635A CN 101936278 A CN101936278 A CN 101936278A
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Abstract
The invention is applies to the technical field of vacuum acquisition and discloses an electric arc titanium pump and a vacuum air pumping group comprising the same. The electric arc titanium pump comprises a pump shell, a trapping plate, a cathode arc source member and a power supply, wherein the trapping plate is arranged on the inside wall of the pump shell, the cathode arc source member is fixedly arranged in the pump shell, and the pump shell and the cathode arc source member are in cylindrical shapes and are coaxially arranged; and the vacuum air pumping group comprises a vacuum chamber, wherein a molecular pump, a prepump, a roughing pump and the electric arc titanium pump are connected to the vacuum chamber. The electric arc titanium pump can be used for leading atoms steamed by the cathode arc source member to form an active film with even thickness and increasing the utilization rate of the cathode arc source member, thereby increasing pumping speed and air-pumping flow rate and reducing energy consumption and operation cost. The vacuum air pumping group can be used for replacing the current large-size diffusion pump with high energy consumption and high oil-vapor pollution and a Lobed pump air-pumping group in order to clean vacuum, save pumping energy consumption and reduce operation cost.
Description
Technical field
The invention belongs to vacuum and obtain technical field, relate in particular to a kind of electric arc titanium pump and comprise the vacuum suction unit of this electric arc titanium pump.
Background technique
At present, the electric arc titanium pump forms the active atomic thin layer by the cathode targets on the cathode arc source member that evapotranspires to entrapment plate, and active atomic thin layer and gas molecule produce chemical reaction and the effect that realizes bleeding.The electric arc titanium pump adopts the cathode arc source structure on plane in the prior art, and distance is inhomogeneous between entrapment plate and the cathode arc source, and like this, entrapment plate is thicker from the titanium film at the nearer position of cathode arc source member, and is thinner than the titanium film of distal part position from the cathode arc source member, causes:
Than low pressure (≤5 * 10
-3When Pa) moving, rete thicker part, titanium atom are just covered by the follow-up titanium atom that evapotranspires without abundant reaction, cause the waste of titanium material, increase operating cost.Move under higher pressure, the requirement of bleeding can not be satisfied in the thin position of titanium film, and pumping speed significantly reduces, and measured result shows: 5 * 10
-2The pumping speed of Pa only is 5 * 10
-320% of Pa pumping speed has reduced the pumping speed and the extraction flow of electric arc titanium pump.
Additionally, the gas trapping plate weak heat-dissipating of electric arc titanium pump of the prior art, temperature rise cause the probability of active atomic thin layer adsorption gas molecule to descend, and have further reduced the pumping speed and the extraction flow of this pump.
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of electric arc titanium pump and a kind of unit of bleeding that comprises this electric arc titanium pump are provided, improve its working efficiency, reduce operating cost.
Technological scheme of the present invention is: a kind of electric arc titanium pump, comprise pump case, entrapment plate, cathode arc source member and power supply, described entrapment plate is located at the madial wall of described pump case, described cathode arc source member is fixedly arranged in the described pump case, described cathode arc source member comprises cathode targets that is positioned at the outside and the magnetic component that is positioned at described cathode targets inside, the positive pole of described power supply is connected in described pump case, the negative pole of described power supply is connected in described cathode targets, described pump case is cylindric, described cathode arc source member is cylindric, described cathode arc source member and the coaxial setting of described pump case.
Further, the top of described cathode arc source member is provided with baffle plate, and described baffle plate detachably is fixedly connected on the described pump case.
Further, be provided with the heat conduction interlayer of the thermal resistance that can reduce between described pump case and the entrapment plate between described pump case and the described entrapment plate, described entrapment plate detachably is fixedly arranged on described inside pump casing wall.
Particularly, be provided with first cooling water channel in the described cathode targets.
Preferably, described cathode targets adopts the active metallic element manufacturing of chemical property.
Preferably, described cathode targets adopts the titanium-aluminium alloy manufacturing, and the titanium of described titanium-aluminium alloy: mass ratio is between 100: 0 to 70: 30 between the aluminium.
Particularly, the outside of described pump case is provided with second cooling water channel.
The present invention also provides a kind of vacuum suction unit, comprises vacuum chamber, also is connected with above-mentioned electric arc titanium pump on the described vacuum chamber.
Particularly, also be connected with molecular pump, fore pump, roughing vacuum pump and vacuum gauge on the described vacuum chamber, described roughing vacuum pump is connected with described vacuum chamber by first vacuum valve, described molecular pump is connected with described vacuum chamber by second vacuum valve, described pump electric arc titanium pump is connected with described vacuum chamber by the 3rd vacuum valve, and described fore pump connects by the relief opening of the described molecular pump of the 4th vacuum valve.
Preferably, described molecular pump is molecular drag pump or composite molecular pump.
Preferably, described roughing vacuum pump is sliding vane rotary pump or slide valve pump, and described fore pump is a sliding vane rotary pump.
The present invention utilizes the energy of arc discharge that cylinder cathode targets atom is evapotranspired to entrapment plate, forms fresh active atomic thin layer, thereby, realize the effect of bleeding.Cylindrical cathode arc of the present invention source member places the position coaxial with pump case, and therefore, the atom that evapotranspires out from the negative electrode target forms the uniform active thin layer of thickness at entrapment plate, thereby, overcome the irregular shortcoming of the active thickness of thin layer of existing electric arc titanium pump.In addition, entrapment plate has added the heat conduction interlayer, has reduced operating temperature effectively, has improved the probability of active atomic thin layer adsorbed gas, thereby, the cylinder cathode arc source is developed into the high vacuum pump of a kind of cleaning, energy-conservation, low operating cost, big pumping speed.
The present invention compares with the high vacuum pump of prior art, and advantage is as follows:
1. energy consumption is low, and air exhaust energy consumption is saved 30～90% (degree of vacuum is high more, and energy consumption is low more);
2. do not have oil vapor and pollute, thereby can obtain clean vacuum environment, improve the quality of vacuum product;
3. operating cost is low.The cost of bleeding can reduce by 20～80% (degree of vacuum is high more, and cost is low more).
Therefore, the present invention has great application prospect.
Description of drawings
Fig. 1 is the generalized section of a kind of electric arc titanium pump of providing of the embodiment of the invention;
Fig. 2 is the schematic representation of a kind of vacuum suction unit of providing of the embodiment of the invention.
Embodiment
In order to make purpose of the present invention, technological scheme and advantage clearer,, the present invention is described in further detail below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
As shown in Figure 1, the embodiment of the invention provides a kind of electric arc titanium pump, comprise pump case 110, entrapment plate 120, cathode arc source member 210 and power supply 230, described entrapment plate 120 is located at the madial wall of described pump case 110, and described cathode arc source member 210 is fixedly arranged in the described pump case 110; Described cathode arc source member 210 comprises cathode targets that is positioned at the outside and the magnetic component that is positioned at described cathode targets inside, and magnetic component can be electromagnet or permanent magnet.The positive pole of described power supply 230 is connected in described pump case 110, the negative pole of described power supply 230 is connected in described cathode targets, described pump case 110 is cylindric, and described cathode arc source member 210 is cylindric, described cathode arc source member 210 and described pump case 110 coaxial settings.The energy that the embodiment of the invention is utilized arc discharge evapotranspires the cathode targets of cylinder cathode arc source member 210 to entrapment plate 120, and to form fresh active atomic thin layer, fresh active atomic thin layer and gas molecule produce chemical reaction, thereby realizes bleeding.The embodiment of the invention is by being set to cathode arc source member 210 cylindric and coaxial being arranged in the pump case 110, make the distance between cathode arc source member 210 and the entrapment plate 120 impartial, the atom that evapotranspires out from cathode targets can form the uniform active thin layer of thickness on entrapment plate 120.
Further, as shown in Figure 1, the top of described cathode arc source member 210 is provided with baffle plate 220, and described baffle plate 220 detachably is fixedly connected on the described pump case 110.Baffle plate 220 can stop the atomic deposition that evapotranspires out from cathode targets all the other positions outside the entrapment plate 120, for example is connected in sensitive parts such as vacuum valve on the electric arc titanium pump or vacuum chamber.
Further, as shown in Figure 1, be provided with the heat conduction interlayer 130 that can reduce the thermal resistance between described pump case 110 and the entrapment plate 120 between described pump case 110 and the described entrapment plate 120, particularly, described heat conduction interlayer 130 adopts and the vacuum compatibility, the material of good heat conduction effect, preferably, described heat conduction interlayer 130 adopts graphite or copper material to make, make the heat of entrapment plate 120 can conduct to pump case 110 fast and be distributed in the external environment condition, reduced the temperature of entrapment plate 120 effectively, improved the probability of active atomic thin layer adsorbed gas, improved the extraction flow of pumping speed, thereby post electric arc titanium pump has been developed into a kind of cleaning, energy-conservation, low operating cost, the high vacuum pump of big pumping speed.Described entrapment plate 120 detachably is fixedly arranged in the described pump case 110, is convenient to regularly remove capture thing, and is easy to maintenance.
Particularly, as shown in Figure 1, be provided with first cooling water channel 140 in the described cathode targets, be used to reduce the temperature of cathode arc source member 210.
Preferably, described cathode targets adopts the active metallic element of chemical property, or alloy manufacturing, to utilize the low-tension arc light discharge to be rapidly evaporated to fresh air-breathing rete, realization is to the reactive gas fast pumpdown, can obtain vacuum that no oil vapor pollutes, that very clean, help improving the quality of vacuum product.
Preferably, described cathode targets adopts the titanium-aluminium alloy manufacturing, and the titanium of described titanium-aluminium alloy: mass ratio is between 100: 0 to 70: 30 between the aluminium, to improve the working efficiency of electric arc titanium pump.
Particularly, the outside of described pump case 110 is provided with second cooling water channel, reducing the temperature of pump case 110, thereby has further reduced the temperature of entrapment plate 120.
As depicted in figs. 1 and 2, the present invention also provides a kind of vacuum suction unit, comprise vacuum chamber 310, be connected with molecular pump 330, fore pump 340, roughing vacuum pump 320 and vacuum gauge 510 on the described vacuum chamber 310, also be connected with above-mentioned electric arc titanium pump on the described vacuum chamber 310.Like this, the large-scale diffusion pump that can replace the high energy consumption of present extensive application, the pollution of high oil vapor adds the unit of bleeding of Roots pump, eliminates oil vapor and pollutes, and saves air exhaust energy consumption significantly, and air exhaust energy consumption saves 30～90%, reduces operating cost.
Particularly, as shown in Figure 2, described roughing vacuum pump 320 is connected with described vacuum chamber 310 by first vacuum valve 410, described molecular pump 330 is connected with described vacuum chamber 310 by second vacuum valve 420, described electric arc titanium pump is connected with described vacuum chamber 310 by the 3rd vacuum valve 430, and described fore pump 340 is connected by the relief opening that the 4th vacuum valve 440 connects described molecular pump 330.
Preferably, described molecular pump 330 is molecular drag pump or composite molecular pump.In the present embodiment, molecular pump 330 is selected molecular drag pump for use.
Preferably, described roughing vacuum pump 320 is sliding vane rotary pump or slide valve pump, and described fore pump 340 is a sliding vane rotary pump, to improve pumping efficiency.
The embodiment of the invention be designed to described cathode arc source member 210 cylindric and with columned pump case 110 coaxial settings, therefore, the atom that evapotranspires out from cathode targets forms the uniform active thin layer of thickness at entrapment plate 120, thereby, overcome the irregular shortcoming of active atomic thickness of thin layer in the existing electric arc titanium pump.In addition, entrapment plate 120 has added heat conduction interlayer 130, has reduced the temperature of entrapment plate 120 effectively, has improved the probability of active atomic thin layer adsorbed gas, thereby, the cylinder cathode arc source is developed into the high vacuum pump of a kind of cleaning, energy-conservation, low operating cost, big pumping speed.
The present invention compares with the product of prior art, and advantage is as follows:
1. energy consumption is low, and air exhaust energy consumption saves 30～90%;
2. do not have oil vapor and pollute, thereby can obtain clean vacuum environment, improve the quality of vacuum product;
3. operating cost is low.The cost of bleeding can reduce by 20～80%.
The vacuum suction unit that present embodiment provides is recommended following air aspiration process:
1. slightly take out the stage (barometric pressure～50Pa):
Bleed by roughing vacuum pump 320.Tradition is slightly taken out pressure rise to 50Pa by 1～3Pa, the time of bleeding shortens significantly, and roughing vacuum pump 320 only moves a few minutes, does not rerun afterwards, thereby saves a large amount of energy consumptions.In addition, the pressure of slightly taking out of vacuum chamber 310 raises, and has reduced the oil vapor diffusion velocity of roughing vacuum pump 320 significantly, thereby the oil vapor that reduces the stage of slightly taking out significantly pollutes, and reaches the level that can compare favourably with expensive dry pump;
Essence take out Phase I (50～0.1Pa):
Bleed by molecular pump 330 and fore pump 340 thereof.In this pressure range, the pumping speed of molecular pump 330 has reached even has surpassed the level (degree of vacuum is high more, and pumping speed is big more) of Roots pump, and the time of bleeding also only needs a few minutes.In addition, the energy consumption of molecular pump 330 is very low, only is 5～20% of Roots pump, can also obtain the very vacuum of cleaning;
3. essence is taken out Phase (0.1～10
-4Pa):
Bled jointly by described electric arc titanium pump and molecular pump 330, wherein reactive gas (accounting for 99%) is extracted out jointly by electric arc titanium pump and molecular pump 330, and inert gas (accounting for 1%) is extracted out by molecular pump 330.
The described roughing vacuum pump of present embodiment is very short 320 working times, thus can be shared for a plurality of vacuum suction units, save the large number quipments expense and take up an area of the space;
Additionally, described molecular pump 330 can be used turbomolecular pump or composite molecular pump instead, but air aspiration process will be adjusted accordingly, and performance also can descend to some extent.
The vacuum suction unit that present embodiment provided can be used for replacing the large-scale diffusion pump and the Roots pump unit of the high energy consumption of present extensive application, the pollution of high oil vapor, eliminates oil vapor and pollutes, and saves air exhaust energy consumption significantly, reduces operating cost.
When the vacuum suction unit that the embodiment of the invention provided is used for magnetron sputtering, ion plating etc. and is the vacuum application occasion of as received basis with the inert gas, also have following special benefits: present embodiment is very high to reactive gas (accounting for gas load 10%) pumping speed, but working gas (is generally Ar, account for gas load 90%) pumping speed be zero, therefore, the real gas load is very little, thereby, the energy consumption of vacuum suction unit, operating cost are very low, and vacuum quality is higher, and economic benefit is better.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention.All any modifications of being done within the spirit and principles in the present invention, be equal to and replace and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. electric arc titanium pump, comprise pump case, entrapment plate, cathode arc source member and power supply, described entrapment plate is located at the madial wall of described pump case, described cathode arc source member is fixedly arranged in the described pump case, described cathode arc source member comprises cathode targets that is positioned at the outside and the magnetic component that is positioned at described cathode targets inside, the positive pole of described power supply is connected in described pump case, the negative pole of described power supply is connected in described cathode targets, it is characterized in that: described pump case is cylindric, described cathode arc source member is cylindric, described cathode arc source member and the coaxial setting of described pump case.
2. a kind of electric arc titanium pump as claimed in claim 1, it is characterized in that: the top of described cathode arc source member is provided with baffle plate, and described baffle plate detachably is fixedly connected on the described pump case.
3. a kind of electric arc titanium pump as claimed in claim 1 is characterized in that: be provided with the heat conduction interlayer of the thermal resistance that can reduce between described pump case and the entrapment plate between described pump case and the described entrapment plate, described entrapment plate detachably is fixedly arranged in the described pump case.
4. a kind of electric arc titanium pump as claimed in claim 1 is characterized in that: be provided with first cooling water channel in the described cathode targets.
5. a kind of electric arc titanium pump as claimed in claim 1 is characterized in that: described cathode targets adopts the active metallic element of chemical property, or the alloy manufacturing.
6. a kind of electric arc titanium pump as claimed in claim 5 is characterized in that: described cathode targets adopts the titanium-aluminium alloy manufacturing, and the titanium of described titanium-aluminium alloy: mass ratio is between 100: 0 to 70: 30 between the aluminium.
7. a kind of electric arc titanium pump as claimed in claim 1, it is characterized in that: the outside of described pump case is provided with second cooling water channel.
8. a vacuum suction unit comprises vacuum chamber, it is characterized in that: be connected with each described a kind of electric arc titanium pump in molecular pump and the claim 1 to 7 on the described vacuum chamber.
9. a kind of vacuum suction unit as claimed in claim 8, it is characterized in that: also be connected with molecular pump, fore pump, roughing vacuum pump and vacuum gauge on the described vacuum chamber, described roughing vacuum pump is connected with described vacuum chamber by first vacuum valve, described molecular pump is connected with described vacuum chamber by second vacuum valve, described pump case is connected with described vacuum chamber by the 3rd vacuum valve, and described fore pump connects the relief opening of described molecular pump by the 4th vacuum valve.
10. described vacuum suction unit of claim 9, it is characterized in that: described molecular pump is molecular drag pump or composite molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010279635 CN101936278A (en) | 2010-09-13 | 2010-09-13 | Electric arc titanium pump and vacuum air pump group comprising same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010279635 CN101936278A (en) | 2010-09-13 | 2010-09-13 | Electric arc titanium pump and vacuum air pump group comprising same |
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| CN101936278A true CN101936278A (en) | 2011-01-05 |
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| CN 201010279635 Pending CN101936278A (en) | 2010-09-13 | 2010-09-13 | Electric arc titanium pump and vacuum air pump group comprising same |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102691640A (en) * | 2012-05-29 | 2012-09-26 | 储琦 | Suction system and suction technology |
| CN103290388A (en) * | 2013-06-19 | 2013-09-11 | 储昕 | Plasma coating equipment and air extraction process thereof |
| CN103291586A (en) * | 2013-06-19 | 2013-09-11 | 储继国 | Vacuum furnace air-pumping system and air-pumping technology thereof |
| CN103320752A (en) * | 2013-06-19 | 2013-09-25 | 储琦 | Evaporation coating device and air extracting process thereof |
| CN104751902A (en) * | 2013-12-25 | 2015-07-01 | 核工业西南物理研究院 | Forceful inspiratory mixed wire for nuclear fusion vacuum system |
| WO2016008367A1 (en) * | 2014-07-17 | 2016-01-21 | 储继国 | High vacuum electric arc pump and air extraction unit thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103290388A (en) * | 2013-06-19 | 2013-09-11 | 储昕 | Plasma coating equipment and air extraction process thereof |
| CN103291586A (en) * | 2013-06-19 | 2013-09-11 | 储继国 | Vacuum furnace air-pumping system and air-pumping technology thereof |
| CN103320752A (en) * | 2013-06-19 | 2013-09-25 | 储琦 | Evaporation coating device and air extracting process thereof |
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| CN104751902A (en) * | 2013-12-25 | 2015-07-01 | 核工业西南物理研究院 | Forceful inspiratory mixed wire for nuclear fusion vacuum system |
| WO2016008367A1 (en) * | 2014-07-17 | 2016-01-21 | 储继国 | High vacuum electric arc pump and air extraction unit thereof |
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Application publication date: 20110105 |