CN103290388A - Plasma coating equipment and air extraction process thereof - Google Patents
Plasma coating equipment and air extraction process thereof Download PDFInfo
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- CN103290388A CN103290388A CN2013102419392A CN201310241939A CN103290388A CN 103290388 A CN103290388 A CN 103290388A CN 2013102419392 A CN2013102419392 A CN 2013102419392A CN 201310241939 A CN201310241939 A CN 201310241939A CN 103290388 A CN103290388 A CN 103290388A
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Abstract
The invention discloses plasma coating equipment and an air extraction process thereof. An arc titanium pump, a molecular drag pump and a fore pump unit which are connected in series to extract air are adopted to substitute a turbo molecular pump (or diffusion pump) and a roots pump unit which are connected in series to extract air in the prior art. The arc titanium pump and the molecular drag pump are both pumps with low energy consumption, the arc titanium pump only needs to operate at a fine extraction stage, the operation time does not reach 1/3 of the whole air extraction time, the air extraction capability of the molecular drag pump at a coating stage is greatly higher than that of the turbo molecular pump (or diffusion pump), and the extraction speed of the molecular drag pump at the coating stage cannot be changed remarkably along with the change of pressure intensity, so that the air extraction energy consumption is greatly reduced, and the stability of a coating process and the quality of a coating product are improved; and in addition, the arc titanium pump, the molecular drag pump and the fore pump unit are free of oil vapor pollution, so that the oil vapor pollution caused by the traditional air extraction unit is also eliminated, and the quality of the coating product is further ensured.
Description
Technical field
The invention belongs to the plasma coating technical field, relate in particular to a kind of plasma coating equipment and air aspiration process thereof.
Background technology
At present, plasma coating equipment generally adopts turbomolecular pump (or diffusion pump)+lobe pump series connection machine assembly air-exhausting, and there is following shortcoming in it:
1, the plated film stage of plasma coating equipment, coating chamber need inject Ar(or other working gas), coating chamber pressure is in middle vacuum section (0.2 ~ 0.6 Pa).The turbomolecular pump (or diffusion pump) that the traditional plasma filming equipment adopts all is high-vacuum pump, can't efficiently move in the plated film stage, cause pumping speed to be down to 1/2 ~ 1/5 of nominal value, and energy consumption significantly increases.
2, diffusion pump utilizes the oil vapour jet to bleed, and causes oil vapour seriously polluted, and turbomolecular pump is slightly being taken out the stage, also exists oil vapour to pollute, and influences the plated film quality product;
3, turbomolecular pump (or diffusion pump) influences the stability of coating process in pumping speed noticeable change with pressure change in plated film stage.
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of plasma coating equipment is provided, it can reduce air exhaust energy consumption, eliminates the oil vapour pollution, improve coating process stability and plated film quality product.
The present invention realizes like this, a kind of plasma coating equipment, comprise coating chamber, described coating chamber is connected with electric arc titanium pump, molecular drag pump and roughing vacuum pump respectively, described molecular drag pump is connected with a forepump, be provided with one first vacuum valve between described coating chamber and the molecular drag pump, be provided with one second vacuum valve between described molecular drag pump and the forepump, be provided with one the 3rd vacuum valve between described coating chamber and the roughing vacuum pump;
Described electric arc titanium pump comprises titanium target and the cathode arc source pedestal that is connected with described titanium target, described titanium target is located within the described coating chamber, described cathode arc source pedestal is located at outside the described coating chamber, described cathode arc source pedestal is fixedlyed connected with described coating chamber by an insulating mat, described cathode arc source pedestal is provided with a permanent magnet, be provided with a cooling trough in the described cathode arc source pedestal, offer a water-in that is communicated with described cooling trough and a water outlet that is communicated with described cooling trough on the described cathode arc source pedestal, offer the pore that at least one and described coating chamber is communicated with on described titanium target and/or the cathode arc source pedestal.
Further, the residual space of described titanium target and cathode arc source pedestal junction also is provided with an elastic heat conducting layer.
Particularly, described elastic heat conducting layer is made by the metal heat-conducting material.
Particularly, described elastic heat conducting layer is made by nonmetal thermally conductive material.
Particularly, the internal diameter of described pore is 2 ~ 3mm, and the quantity of described pore is 1 ~ 3.
Further, be provided with one the 4th vacuum valve between described coating chamber and the electric arc titanium pump.
The present invention also provides a kind of air aspiration process of foregoing plasma coating equipment, comprises the steps:
(1) slightly takes out the stage: bled by roughing vacuum pump, the pressure of coating chamber is evacuated to 50 ~ 200 Pa from normal atmosphere;
(2) vacuum stages in: bled by molecular drag pump+forepump, coating chamber pressure is evacuated to 0.1Pa by 50 ~ 200 Pa;
(3) essence is taken out the stage: bled by electric arc titanium pump+molecular drag pump+forepump, coating chamber pressure is evacuated to 10 by 0.1 Pa
-2~ 10
-3Pa, wherein, the reactive gas of high vacuum is extracted out by the electric arc titanium pump, and the rare gas element of high vacuum and middle vacuum gas are extracted out by molecular drag pump and forepump;
(4) the plated film stage: bled by molecular drag pump+forepump, perhaps bled by electric arc titanium pump+molecular drag pump+forepump.
Particularly, in the described step (3), described electric arc titanium pump is exposed to before the atmosphere after bleeding and finishing, and makes described titanium target cooling 3 ~ 15min.
Plasma coating equipment of the present invention and air aspiration process thereof, adopt electric arc titanium pump+molecular drag pump+forepump unit of bleeding in parallel, replace turbomolecular pump (or diffusion pump)+lobe pump unit that the prior art series connection is bled, the electric arc titanium pump is used for extracting fast the reactive gas of high vacuum, molecular drag pump+forepump is used for extracting fast the rare gas element of vacuum gas and high vacuum, and the present invention has following remarkable advantage:
(1) electric arc titanium pump and molecular drag pump all are the less energy-consumption pumps, add that the electric arc titanium pump mainly moves in the essence stage of taking out, working time is less than 1/3 of the whole time of bleeding, and molecular drag pump is about 2 ~ 5 times of conventional vacuum pump in the pumping speed in plated film stage, and the present invention is energy-conservation to reach 70 ~ 90%;
(2) molecular drag pump can the noticeable change with pressure change in the pumping speed in plated film stage, and coating process stability and plated film quality product significantly improve;
(3) electric arc titanium pump and molecular drag pump all are the clean vacuum pumps that no oil vapour pollutes, and the oil vapour of having eliminated the traditional plasma filming equipment pollutes, and has further guaranteed the plated film quality product.
(4) electric arc titanium pump of the present invention directly is communicated with coating chamber, has save the vacuum valve between electric arc titanium pump and the coating chamber, has simplified the structure of vacuum system, has reduced the cost of vacuum system.
(5) roughing vacuum pump is only slightly being taken out the stage operation, working time is less than 1/10, and the roughing vacuum pump of traditional air aspiration process needs operation always, so energy consumption of significantly having saved the stage of slightly taking out, and one the cover roughing vacuum pump can also share for 3 ~ 10 plasma coating equipment, save equipment and fund, reduced the occupation of land space.
Description of drawings
In order to be illustrated more clearly in technical scheme of the present invention, to do to introduce simply to the accompanying drawing of required use among the embodiment below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the synoptic diagram of the plasma coating equipment that provides of the embodiment of the invention one;
Fig. 2 is the synoptic diagram of the electric arc titanium pump that provides of the embodiment of the invention one.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described.
Embodiment one
As depicted in figs. 1 and 2, a kind of plasma coating equipment that the embodiment of the invention one provides can be used for workpiece surface plating to be plated and strengthens, decorates and increase films such as new function.This plasma body filming equipment comprises coating chamber 11, coating chamber 11 is connected with electric arc titanium pump 12, molecular drag pump 13 and roughing vacuum pump 14 respectively, molecular drag pump 13 is connected with a forepump 15, be provided with one first vacuum valve 16 between coating chamber 11 and the molecular drag pump 13, be provided with one second vacuum valve 17 between molecular drag pump 13 and the forepump 15, be provided with one the 3rd vacuum valve 18 between coating chamber 11 and the roughing vacuum pump 14; Wherein, roughing vacuum pump 14 only is used for slightly taking out bleeding of stage, and electric arc titanium pump 12 is mainly used in essence and takes out bleeding of stage, and molecular drag pump 13 and forepump 15 are used for vacuum stages, and the bleeding of base vacuum stage and plated film stage.
Further, described coating chamber also is connected with one first purging valve 19, an intake valve 110 and a vacuum gauge 111 respectively, and wherein, after first purging valve 19 was used for the plated film end, coating chamber 11 injected atmosphere; Intake valve 110 is connected with a working gas container 112, and working gas container 112 can inject working gas to coating chamber 11 by intake valve 110; Vacuum gauge 111 is for detection of the vacuum tightness of coating chamber 11.Described roughing vacuum pump 14 is connected with one second purging valve 113, and second purging valve 113 is used for roughing vacuum pump 14 backs out of service and injects atmosphere.
Particularly, described electric arc titanium pump 12 comprises titanium target 121, and the cathode arc source pedestal 122 that is connected with titanium target 121, titanium target 121 is located within the coating chamber 11, cathode arc source pedestal 122 is located at outside the coating chamber 11, cathode arc source pedestal 122 is fixedlyed connected with coating chamber 11 by an insulating mat 123, and insulating mat 123 can make between cathode arc source pedestal 122 and the coating chamber and insulate; Cathode arc source pedestal 122 is provided with a permanent magnet 124, and permanent magnet 124 is used for the magnetic controlled plasma arc discharge, realizes plasma coating; Be provided with a cooling trough 125 in the cathode arc source pedestal 122, offer a water-in 126 that is communicated with cooling trough 125 and a water outlet 127 that is communicated with cooling trough 125 on the cathode arc source pedestal 122, water coolant can enter in the cooling trough 125 from water-in 123, after water coolant cools off titanium target 121, discharge from water outlet 127, circulation and so forth, thereby realize that water coolant to the cooling of titanium target 121, has solved because of the too high problem that causes the 121 surface oxidation losses of titanium target of titanium target 121 temperature; Further, offer at least one pore 128 that is communicated with coating chamber 11 on titanium target 121 and/or the cathode arc source pedestal 122, the optimum value of pore 128 internal diameters is 2 ~ 3mm, the quantity optimum value of pore 128 is 2, by this pore 128, be convenient to the gas in the residual space 129 of titanium target 121 and cathode arc source pedestal 122 junctions is extracted rapidly, thereby improve the stability of cathode arc source when high-vacuum discharge.
The electric arc titanium pump 12 of present embodiment one adopts cathode arc source, the negative electrode target of cathode arc source adopts titanium target 121(or other active material), cathode arc source utilizes arc discharge that titanium target 121 is evapotranspired into titanium film, the strong chemisorption of recycling titanium film, realization extracts the purpose of the reactive gas of high vacuum fast.In addition, the molecular drag pump 13+ forepump 15 of present embodiment one is used for extracting the gas of vacuum, and the rare gas element of high vacuum.
Present embodiment one also provides a kind of air aspiration process of plasma coating equipment, comprises the steps:
(1) initial state: close coating chamber 11 and all vacuum valves, all vacuum pumps are in halted state, open all purging valves;
(2) preparatory stage: start forepump 15, open second vacuum valve 17, start molecular drag pump 13;
(3) slightly take out the stage: first purging valve 19 of closing coating chamber 11, close second purging valve 113, start roughing vacuum pump 14, open the 3rd vacuum valve 18, coating chamber 11 is bled by roughing vacuum pump 14, and the pressure of coating chamber 11 is evacuated to 50 ~ 200 Pa from normal atmosphere, adopt this slightly to take out technology, slightly take out pressure and significantly improve, and the pressure raising can make the velocity of diffusion of oil vapour significantly reduce, be down to below the detection limit but the oil vapour of roughing vacuum pump 14 can be polluted;
(4) vacuum stages in: close the 3rd vacuum valve 18, stop roughing vacuum pump 14, open first vacuum valve 16, coating chamber 11 is bled by molecular drag pump 13+ forepump 15, and coating chamber 11 pressure are evacuated to 0.1Pa by 50 ~ 200Pa;
(5) essence is taken out the stage: start electric arc titanium pump 12, coating chamber 11 is bled by electric arc titanium pump 12 and 15 parallel connections of molecular drag pump 13+ forepump, coating chamber 11 pressure is evacuated to essence by 0.1Pa takes out pressure and (be generally 10
-2~ 10
-3Pa), wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump 12, and the rare gas element of high vacuum and middle vacuum gas are extracted out by molecular drag pump 13+ forepump 15;
(6) the plated film stage: close electric arc titanium pump 12, coating chamber 11 is still bled by molecular drag pump 13+ forepump 15, coating chamber 11 injects working gas by working gas container 112 by intake valve 110, the pressure of coating chamber 11 is determined by coating process, be generally 0.2 ~ 0.6Pa, carry out plasma coating.
Particularly, in the above-mentioned steps (5), described electric arc titanium pump 12 is exposed to before the atmosphere after bleeding and finishing, and makes titanium target 121 coolings 3 ~ 15min.
Particularly, in the above-mentioned steps (5), described working gas is argon gas or other working gas.
In sum, plasma coating equipment and air aspiration process thereof that present embodiment one provides, adopt electric arc titanium pump 12+ molecular drag pump 13+ forepump 15 units of bleeding in parallel, replace turbomolecular pump (or diffusion pump)+lobe pump unit that the prior art series connection is bled, electric arc titanium pump 12 is used for extracting fast the reactive gas of high vacuum, molecular drag pump 13+ forepump 15 is used for extracting fast the rare gas element of vacuum gas and high vacuum, and the present invention has following remarkable advantage:
(1) electric arc titanium pump 12 and molecular drag pump 13 all are the less energy-consumption pumps, add that electric arc titanium pump 12 mainly moves in the essence stage of taking out, working time is less than 1/3 of the whole time of bleeding, and molecular drag pump 13 is about 2 ~ 5 times of conventional vacuum pump in the pumping speed in plated film stage, and the present invention is energy-conservation to reach 70 ~ 90%;
(2) molecular drag pump 13 can the noticeable change with pressure change in the pumping speed in plated film stage, and coating process stability and plated film quality product significantly improve;
(3) electric arc titanium pump 12 and molecular drag pump 13 all are the clean vacuum pumps that no oil vapour pollutes, and the oil vapour of having eliminated the traditional plasma filming equipment pollutes, and has further guaranteed the plated film quality product.
(4) electric arc titanium pump 12 of the present invention directly is communicated with coating chamber 11, has save the vacuum valve between electric arc titanium pump 11 and the coating chamber 12, has simplified the structure of vacuum system, has reduced the cost of vacuum system.
(5) roughing vacuum pump 14 is only slightly being taken out the stage operation, working time is less than 1/10, and the roughing vacuum pump of traditional air aspiration process needs operation always, so energy consumption of significantly having saved the stage of slightly taking out, and one the cover roughing vacuum pump can also share for 3 ~ 10 plasma coating equipment, save equipment and fund, reduced the occupation of land space.
Embodiment two
Present embodiment two is roughly the same with embodiment one, its difference is: the residual space of the titanium target of present embodiment two and cathode arc source pedestal junction also is provided with an elastic heat conducting layer, this elastic heat conducting layer preferred metal materials (as copper or copper alloy etc.), elastic heat conducting layer also can be made by nonmetal thermally conductive material (as graphite, carbon fiber etc.).When the feeding of the cooling trough in cathode arc source pedestal water coolant cooled off the titanium target, this elastic heat conducting layer can improve the heat transfer speed between titanium target and the cathode arc source pedestal, can further improve the cooling efficiency to the titanium target.
Present embodiment two especially is suitable for short plasma coating equipment of plated film cycle.
Embodiment three
Present embodiment three and embodiment one, two roughly the same, its difference is: in the plated film stage, bled by electric arc titanium pump+molecular drag pump+forepump parallel connection.
Present embodiment three especially is suitable for the occasion of non-activity gas in the working gas.
Embodiment four
Present embodiment four and embodiment one, two, three roughly the same, its difference is: also be provided with one the 4th vacuum valve between the coating chamber of present embodiment four and the electric arc titanium pump, when the electric arc titanium pump is not worked, the 4th vacuum valve can cut off the passage between coating chamber and the electric arc titanium pump, when coating chamber injects atmosphere, the electric arc titanium pump can not be exposed to atmosphere, thereby avoids titanium target surface oxidation.
Present embodiment four especially is suitable for very short plasma coating equipment of plated film cycle.
The above is preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; can also make some improvements and modifications, these improvements and modifications also are considered as protection scope of the present invention.
Claims (8)
1. plasma coating equipment, it is characterized in that, comprise coating chamber, described coating chamber is connected with electric arc titanium pump, molecular drag pump and roughing vacuum pump respectively, described molecular drag pump is connected with a forepump, be provided with one first vacuum valve between described coating chamber and the molecular drag pump, be provided with one second vacuum valve between described molecular drag pump and the forepump, be provided with one the 3rd vacuum valve between described coating chamber and the roughing vacuum pump;
Described electric arc titanium pump comprises titanium target and the cathode arc source pedestal that is connected with described titanium target, described titanium target is located within the described coating chamber, described cathode arc source pedestal is located at outside the described coating chamber, described cathode arc source pedestal is fixedlyed connected with described coating chamber by an insulating mat, described cathode arc source pedestal is provided with a permanent magnet, be provided with a cooling trough in the described cathode arc source pedestal, offer a water-in that is communicated with described cooling trough and a water outlet that is communicated with described cooling trough on the described cathode arc source pedestal, offer the pore that at least one and described coating chamber is communicated with on described titanium target and/or the cathode arc source pedestal.
2. plasma coating equipment according to claim 1 is characterized in that, the residual space of described titanium target and cathode arc source pedestal junction also is provided with an elastic heat conducting layer.
3. plasma coating equipment according to claim 2 is characterized in that, described elastic heat conducting layer is made by the metal heat-conducting material.
4. plasma coating equipment according to claim 2 is characterized in that, described elastic heat conducting layer is made by nonmetal thermally conductive material.
5. plasma coating equipment according to claim 1 is characterized in that, the internal diameter of described pore is 2 ~ 3mm, and the quantity of described pore is 1 ~ 3.
6. plasma coating equipment according to claim 1 is characterized in that, is provided with one the 4th vacuum valve between described coating chamber and the electric arc titanium pump.
7. the air aspiration process as each described plasma coating equipment in the claim 1 ~ 6 is characterized in that comprising the steps:
(1) slightly takes out the stage: bled by roughing vacuum pump, the pressure of coating chamber is evacuated to 50 ~ 200 Pa from normal atmosphere;
(2) vacuum stages in: bled by molecular drag pump+forepump, coating chamber pressure is evacuated to 0.1Pa by 50 ~ 200 Pa;
(3) essence is taken out the stage: bled by electric arc titanium pump+molecular drag pump+forepump, coating chamber pressure is evacuated to 10 by 0.1 Pa
-2~ 10
-3Pa, wherein, the reactive gas of high vacuum is extracted out by the electric arc titanium pump, and the rare gas element of high vacuum and middle vacuum gas are extracted out by molecular drag pump and forepump;
(4) the plated film stage: bled by molecular drag pump+forepump, perhaps bled by electric arc titanium pump+molecular drag pump+forepump.
8. the air aspiration process of plasma coating equipment according to claim 7 is characterized in that, in the described step (3), described electric arc titanium pump is exposed to before the atmosphere after bleeding and finishing, and makes described titanium target cooling 3 ~ 15min.
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| CN201310241939.2A CN103290388B (en) | 2013-06-19 | 2013-06-19 | Plasma coating equipment and air aspiration process thereof |
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Cited By (5)
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| CN103758733A (en) * | 2014-01-29 | 2014-04-30 | 储继国 | Large medium/high vacuum gas-bleeding unit and pumping process thereof |
| CN104100492A (en) * | 2014-07-17 | 2014-10-15 | 储继国 | High vacuum arc pump and pumping unit thereof |
| CN104806535A (en) * | 2015-03-26 | 2015-07-29 | 储继国 | Complex radial flow pump, combined radial flow pump and air extraction system |
| CN107400857A (en) * | 2017-09-18 | 2017-11-28 | 储琦 | Low-carbon, oil-free evaporating and coating equipment |
| CN107489605A (en) * | 2017-09-18 | 2017-12-19 | 储昕 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
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| CN202193837U (en) * | 2011-09-02 | 2012-04-18 | 余鹏 | Double-layer composite structured titanium-aluminum target material for multi-arc ion plating |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107400857A (en) * | 2017-09-18 | 2017-11-28 | 储琦 | Low-carbon, oil-free evaporating and coating equipment |
| CN107489605A (en) * | 2017-09-18 | 2017-12-19 | 储昕 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
| WO2019052131A1 (en) * | 2017-09-18 | 2019-03-21 | 储昕 | Low-carbon oil-free vacuum air pump unit with high pumping speed |
| CN107489605B (en) * | 2017-09-18 | 2019-07-12 | 储昕 | Low-carbon, oil-free big pumping speed vacuum suction unit |
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Effective date of registration: 20180910 Address after: 215400 38 Qingdao West Road, Taicang Economic Development Zone, Suzhou, Jiangsu Patentee after: SUZHOU MOXING VACUUM TECHNOLOGY Co.,Ltd. Address before: 518000 Room 502, 1 new deep Village, Huanggang Middle Road, Shenzhen, Guangdong, Futian District Patentee before: Chu Xin |
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Granted publication date: 20160203 |