CN103290388B - Plasma coating equipment and air aspiration process thereof - Google Patents
Plasma coating equipment and air aspiration process thereof Download PDFInfo
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- CN103290388B CN103290388B CN201310241939.2A CN201310241939A CN103290388B CN 103290388 B CN103290388 B CN 103290388B CN 201310241939 A CN201310241939 A CN 201310241939A CN 103290388 B CN103290388 B CN 103290388B
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- molecular drag
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- electric arc
- titanium
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Abstract
A kind of plasma coating equipment and air aspiration process thereof, its electric arc titanium pump+molecular drag pump+forepump unit adopting parallel connection to bleed, replaces prior art and to connect turbomolecular pump (or diffusion pump)+lobe pump unit of bleeding.Because electric arc titanium pump and molecular drag pump are all less energy-consumption pumps, add that electric arc titanium pump only need take out stage running in essence, working time is less than 1/3 of whole pumpdown time, molecular drag pump in plated film stage exhaust capacity significantly higher than turbomolecular pump (or diffusion pump), and molecular drag pump also can not the noticeable change with pressure change in the pumping speed in plated film stage, therefore, the present invention significantly reduces air exhaust energy consumption, improves coating process stability and coated product quality; Add that electric arc titanium pump+molecular drag pump+forepump unit pollutes without oil vapour, therefore present invention also eliminates tradition bleed unit oil vapour pollute, further ensure coated product quality.
Description
Technical field
The invention belongs to plasma coating technical field, particularly relate to a kind of plasma coating equipment and air aspiration process thereof.
Background technology
At present, plasma coating equipment generally adopts turbomolecular pump (or diffusion pump)+lobe pump series connection machine assembly air-exhausting, and it exists following shortcoming:
1, the plated film stage of plasma coating equipment, coating chamber need inject Ar (or other working gas), and coating chamber pressure is in middle vacuum section (0.2 ~ 0.6Pa).The turbomolecular pump (or diffusion pump) that traditional plasma filming equipment adopts is all high-vacuum pump, cannot, at plated film stage Effec-tive Function, cause pumping speed to be down to 1/2 ~ 1/5 of nominal value, and energy consumption significantly increase.
2, diffusion pump utilizes oil vapour jet gas extraction, causes oil vapour seriously polluted, and turbomolecular pump is slightly taking out the stage, also there is oil vapour and pollutes, affect coated product quality;
3, turbomolecular pump (or diffusion pump) is in pumping speed noticeable change with pressure change in plated film stage, affects the stability of coating process.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, provide a kind of plasma coating equipment, it can reduce air exhaust energy consumption, eliminates oil vapour pollution, improve coating process stability and coated product quality.
The present invention realizes like this, a kind of plasma coating equipment, comprise coating chamber, described coating chamber is connected to electric arc titanium pump, molecular drag pump and roughing vacuum pump, described molecular drag pump is connected with a forepump, be provided with one first vacuum valve between described coating chamber and molecular drag pump, between described molecular drag pump and forepump, be provided with one second vacuum valve, between described coating chamber and roughing vacuum pump, be provided with one the 3rd vacuum valve;
The cathode arc source pedestal that described electric arc titanium pump comprises titanium target and is connected with described titanium target, described titanium target is located within described coating chamber, described cathode arc source pedestal is located at outside described coating chamber, described cathode arc source pedestal is fixedly connected with described coating chamber by an insulating mat, described cathode arc source pedestal is provided with a permanent magnet, a cooling trough is provided with in described cathode arc source pedestal, described cathode arc source pedestal offers a water-in be communicated with described cooling trough and a water outlet be communicated with described cooling trough, described titanium target and/or cathode arc source pedestal offer the pore that at least one and described coating chamber is communicated with.
Further, the remaining void of described titanium target and cathode arc source pedestal junction is also provided with an elastic conducting thermosphere.
Particularly, described elastic conducting thermosphere is made up of metal heat-conducting material.
Particularly, described elastic conducting thermosphere is made up of nonmetallic heat conductive material.
Particularly, the internal diameter of described pore is 2 ~ 3mm, and the quantity of described pore is 1 ~ 3.
Present invention also offers a kind of air aspiration process of foregoing plasma coating equipment, comprise the steps:
(1) slightly take out the stage: bled by roughing vacuum pump, the pressure of coating chamber is evacuated to 50 ~ 200Pa from normal atmosphere;
(2) vacuum stages in: bled by molecular drag pump+forepump, coating chamber pressure is evacuated to 0.1Pa by 50 ~ 200Pa;
(3) essence takes out the stage: bled by electric arc titanium pump+molecular drag pump+forepump, coating chamber pressure is evacuated to 10 by 0.1Pa
-2~ 10
-3pa, wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump, and the rare gas element of high vacuum and middle vacuum gas are extracted out by molecular drag pump and forepump;
(4) the plated film stage: bled by molecular drag pump+forepump, or bled by electric arc titanium pump+molecular drag pump+forepump.
Particularly, in described step (3), after described electric arc titanium pump is bled and terminated, before being exposed to air, described titanium target is made to cool 3 ~ 15min.
Plasma coating equipment of the present invention and air aspiration process thereof, adopt electric arc titanium pump+molecular drag pump+forepump unit of bleeding in parallel, replace prior art to connect turbomolecular pump (or diffusion pump)+lobe pump unit of bleeding, electric arc titanium pump is used for the reactive gas extracting high vacuum fast, molecular drag pump+forepump is used for the rare gas element extracting middle vacuum gas and high vacuum fast, and the present invention has following remarkable advantage:
(1) electric arc titanium pump and molecular drag pump are all less energy-consumption pumps, add that electric arc titanium pump mainly takes out stage running in essence, working time, molecular drag pump was about 2 ~ 5 times of conventional vacuum pump in the pumping speed in plated film stage less than 1/3 of whole pumpdown time, and the present invention is energy-conservation reaches 70 ~ 90%;
(2) molecular drag pump can not the noticeable change with pressure change in the pumping speed in plated film stage, and coating process stability and coated product quality significantly improve;
(3) electric arc titanium pump and molecular drag pump are all the clean vacuum pumps polluted without oil vapour, and the oil vapour eliminating traditional plasma filming equipment pollutes, and further ensures coated product quality.
(4) electric arc titanium pump of the present invention is directly communicated with coating chamber, eliminates the vacuum valve between electric arc titanium pump and coating chamber, simplifies the structure of vacuum system, reduces the cost of vacuum system.
(5) roughing vacuum pump is only slightly taking out stage running, working time is less than 1/10, and the roughing vacuum pump of traditional air aspiration process need run always, therefore save considerably the energy consumption of slightly taking out the stage, and a set of roughing vacuum pump can also share for 3 ~ 10 plasma coating equipment, save equipment and fund, decrease and take up an area space.
Accompanying drawing explanation
In order to be illustrated more clearly in technical scheme of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of the plasma coating equipment that the embodiment of the present invention one provides;
Fig. 2 is the schematic diagram of the electric arc titanium pump that the embodiment of the present invention one provides.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described.
Embodiment one
As depicted in figs. 1 and 2, a kind of plasma coating equipment that the embodiment of the present invention one provides, can be used for workpiece surface plating to be plated and strengthens, decorate and increase the films such as New function.This plasma body filming equipment comprises coating chamber 11, coating chamber 11 is connected to electric arc titanium pump 12, molecular drag pump 13 and roughing vacuum pump 14, molecular drag pump 13 is connected with a forepump 15, one first vacuum valve 16 is provided with between coating chamber 11 and molecular drag pump 13, be provided with one second vacuum valve 17 between molecular drag pump 13 and forepump 15, between coating chamber 11 and roughing vacuum pump 14, be provided with one the 3rd vacuum valve 18; Wherein, roughing vacuum pump 14 is only for slightly taking out bleeding of stage, and electric arc titanium pump 12 is mainly used in essence and takes out bleeding of stage, and molecular drag pump 13 and forepump 15 are for middle vacuum stages, and the bleeding of base vacuum stage and plated film stage.
Further, described coating chamber is also connected with one first purging valve 19, intake valve 110 and a vacuum gauge 111 respectively, and wherein, after the first purging valve 19 terminates for plated film, coating chamber 11 injects air; Intake valve 110 is connected with a working gas container 112, and working gas container 112 injects working gas by intake valve 110 to coating chamber 11; Vacuum gauge 111 is for detecting the vacuum tightness of coating chamber 11.Described roughing vacuum pump 14 is connected with one second purging valve 113, and the second purging valve 113 is for roughing vacuum pump 14 rear injection air out of service.
Particularly, described electric arc titanium pump 12 comprises titanium target 121, and the cathode arc source pedestal 122 to be connected with titanium target 121, titanium target 121 is located within coating chamber 11, cathode arc source pedestal 122 is located at outside coating chamber 11, cathode arc source pedestal 122 is fixedly connected with coating chamber 11 by an insulating mat 123, and insulating mat 123 can make to insulate between cathode arc source pedestal 122 and coating chamber; Cathode arc source pedestal 122 is provided with a permanent magnet 124, and permanent magnet 124, for magnetic controlled plasma arc discharge, realizes plasma coating; A cooling trough 125 is provided with in cathode arc source pedestal 122, cathode arc source pedestal 122 offers the water-in be communicated with cooling trough 125 126 and the water outlet 127 be communicated with cooling trough 125, water coolant can enter in cooling trough 125 from water-in 123, after water coolant cools titanium target 121, discharge from water outlet 127, circulate and so forth, thus realize the cooling of water coolant to titanium target 121, solve the problem causing the loss of titanium target 121 surface oxidation because titanium target 121 temperature is too high; Further, titanium target 121 and/or cathode arc source pedestal 122 offer at least one pore 128 be communicated with coating chamber 11, the optimum value of pore 128 internal diameter is 2 ~ 3mm, the quantity optimum value of pore 128 is 2, by this pore 128, be convenient to the gas in the remaining void 129 of titanium target 121 and cathode arc source pedestal 122 junction to extract rapidly, thus improve the stability of cathode arc source when high-vacuum discharge.
The electric arc titanium pump 12 of the present embodiment one adopts cathode arc source, the cathode target of cathode arc source adopts titanium target 121 (or other active material), cathode arc source utilizes arc discharge that titanium target 121 is evapotranspired into titanium film, the harsh chemical absorption of recycling titanium film, realizes the object extracting the reactive gas of high vacuum fast.In addition, the molecular drag pump 13+ forepump 15 of the present embodiment one is for extracting the gas of middle vacuum, and the rare gas element of high vacuum.
The present embodiment one additionally provides a kind of air aspiration process of plasma coating equipment, comprises the steps:
(1) initial state: close coating chamber 11 and all vacuum valves, all vacuum pumps are in halted state, open all purging valves;
(2) preparatory stage: start forepump 15, open the second vacuum valve 17, molecular drag pump 13 is started;
(3) slightly the stage is taken out: first purging valve 19 of closing coating chamber 11, close the second purging valve 113, start roughing vacuum pump 14, open the 3rd vacuum valve 18, coating chamber 11 is bled by roughing vacuum pump 14, and the pressure of coating chamber 11 is evacuated to 50 ~ 200Pa from normal atmosphere, this is adopted slightly to take out technique, slightly take out pressure to significantly improve, and pressure improves the velocity of diffusion of oil vapour can be made significantly to reduce, the oil vapour of roughing vacuum pump 14 can be polluted that be down to can below detection limit;
(4) vacuum stages in: close the 3rd vacuum valve 18, stop roughing vacuum pump 14, open the first vacuum valve 16, coating chamber 11 is bled by molecular drag pump 13+ forepump 15, and coating chamber 11 pressure is evacuated to 0.1Pa by 50 ~ 200Pa;
(5) essence takes out the stage: start electric arc titanium pump 12, coating chamber 11 is bled by electric arc titanium pump 12 and the parallel connection of molecular drag pump 13+ forepump 15, coating chamber 11 pressure is evacuated to essence by 0.1Pa and takes out pressure and (be generally 10
-2~ 10
-3pa), wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump 12, and the rare gas element of high vacuum and middle vacuum gas are extracted out by molecular drag pump 13+ forepump 15;
(6) the plated film stage: close electric arc titanium pump 12, coating chamber 11 is still bled by molecular drag pump 13+ forepump 15, coating chamber 11 injects working gas by working gas container 112 by intake valve 110, the pressure of coating chamber 11 is determined by coating process, be generally 0.2 ~ 0.6Pa, carry out plasma coating.
Particularly, in above-mentioned steps (5), described electric arc titanium pump 12 before being exposed to air, makes titanium target 121 cool 3 ~ 15min after bleeding and terminating.
Particularly, in above-mentioned steps (5), described working gas is argon gas or other working gas.
In sum, the plasma coating equipment that the present embodiment one provides and air aspiration process thereof, adopt electric arc titanium pump 12+ molecular drag pump 13+ forepump 15 unit of bleeding in parallel, replace prior art to connect turbomolecular pump (or diffusion pump)+lobe pump unit of bleeding, electric arc titanium pump 12 is for extracting the reactive gas of high vacuum fast, molecular drag pump 13+ forepump 15 is for extracting the rare gas element of middle vacuum gas and high vacuum fast, and the present invention has following remarkable advantage:
(1) electric arc titanium pump 12 and molecular drag pump 13 are all less energy-consumption pumps, add that electric arc titanium pump 12 mainly takes out stage running in essence, working time is less than 1/3 of whole pumpdown time, molecular drag pump 13 is about 2 ~ 5 times of conventional vacuum pump in the pumping speed in plated film stage, and the present invention is energy-conservation reaches 70 ~ 90%;
(2) molecular drag pump 13 can not the noticeable change with pressure change in the pumping speed in plated film stage, and coating process stability and coated product quality significantly improve;
(3) electric arc titanium pump 12 and molecular drag pump 13 are all the clean vacuum pumps polluted without oil vapour, and the oil vapour eliminating traditional plasma filming equipment pollutes, and further ensures coated product quality.
(4) electric arc titanium pump 12 of the present invention is directly communicated with coating chamber 11, eliminates the vacuum valve between electric arc titanium pump 11 and coating chamber 12, simplifies the structure of vacuum system, reduces the cost of vacuum system.
(5) roughing vacuum pump 14 is only slightly taking out stage running, working time is less than 1/10, and the roughing vacuum pump of traditional air aspiration process need run always, therefore save considerably the energy consumption of slightly taking out the stage, and a set of roughing vacuum pump can also share for 3 ~ 10 plasma coating equipment, save equipment and fund, decrease and take up an area space.
Embodiment two
The present embodiment two is roughly the same with embodiment one, its difference is: the titanium target of the present embodiment two and the remaining void of cathode arc source pedestal junction are also provided with an elastic conducting thermosphere, this elastic conducting thermosphere preferred metal materials (as copper or copper alloy etc.), elastic conducting thermosphere also can be made up of nonmetallic heat conductive material (as graphite, carbon fiber etc.).When passing into water coolant to the cooling trough in cathode arc source pedestal and cooling titanium target, this elastic conducting thermosphere can improve the heat transfer speed between titanium target and cathode arc source pedestal, can further improve the cooling efficiency to titanium target.
The present embodiment two is especially suitable for plated film cycle shorter plasma coating equipment.
Embodiment three
The present embodiment three and embodiment one, two roughly the same, its difference is: in the plated film stage, is bled by electric arc titanium pump+molecular drag pump+forepump parallel connection.
The present embodiment three is especially suitable for the occasion of non-activity gas in working gas.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (7)
1. a plasma coating equipment, it is characterized in that, comprise coating chamber, described coating chamber is connected to electric arc titanium pump, molecular drag pump and roughing vacuum pump, described molecular drag pump is connected with a forepump, be provided with one first vacuum valve between described coating chamber and molecular drag pump, between described molecular drag pump and forepump, be provided with one second vacuum valve, between described coating chamber and roughing vacuum pump, be provided with one the 3rd vacuum valve;
The cathode arc source pedestal that described electric arc titanium pump comprises titanium target and is connected with described titanium target, described titanium target is located within described coating chamber, described cathode arc source pedestal is located at outside described coating chamber, described cathode arc source pedestal is fixedly connected with described coating chamber by an insulating mat, described cathode arc source pedestal is provided with a permanent magnet, a cooling trough is provided with in described cathode arc source pedestal, described cathode arc source pedestal offers a water-in be communicated with described cooling trough and a water outlet be communicated with described cooling trough, described titanium target and/or cathode arc source pedestal offer the pore that at least one and described coating chamber is communicated with.
2. plasma coating equipment according to claim 1, is characterized in that, the remaining void of described titanium target and cathode arc source pedestal junction is also provided with an elastic conducting thermosphere.
3. plasma coating equipment according to claim 2, is characterized in that, described elastic conducting thermosphere is made up of metal heat-conducting material.
4. plasma coating equipment according to claim 2, is characterized in that, described elastic conducting thermosphere is made up of nonmetallic heat conductive material.
5. plasma coating equipment according to claim 1, is characterized in that, the internal diameter of described pore is 2 ~ 3mm, and the quantity of described pore is 1 ~ 3.
6. an air aspiration process for the plasma coating equipment according to any one of Claims 1 to 5, is characterized in that comprising the steps:
(1) slightly take out the stage: bled by roughing vacuum pump, the pressure of coating chamber is evacuated to 50 ~ 200Pa from normal atmosphere;
(2) vacuum stages in: bled by molecular drag pump+forepump, coating chamber pressure is evacuated to 0.1Pa by 50 ~ 200Pa;
(3) essence takes out the stage: bled by electric arc titanium pump+molecular drag pump+forepump, coating chamber pressure is evacuated to 10 by 0.1Pa
-2~ 10
-3pa, wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump, and the rare gas element of high vacuum and middle vacuum gas are extracted out by molecular drag pump and forepump;
(4) the plated film stage: bled by molecular drag pump+forepump, or bled by electric arc titanium pump+molecular drag pump+forepump.
7. the air aspiration process of plasma coating equipment according to claim 6, is characterized in that, in described step (3), after described electric arc titanium pump is bled and terminated, before being exposed to air, makes described titanium target cool 3 ~ 15min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241939.2A CN103290388B (en) | 2013-06-19 | 2013-06-19 | Plasma coating equipment and air aspiration process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241939.2A CN103290388B (en) | 2013-06-19 | 2013-06-19 | Plasma coating equipment and air aspiration process thereof |
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| Publication Number | Publication Date |
|---|---|
| CN103290388A CN103290388A (en) | 2013-09-11 |
| CN103290388B true CN103290388B (en) | 2016-02-03 |
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| CN201310241939.2A Expired - Fee Related CN103290388B (en) | 2013-06-19 | 2013-06-19 | Plasma coating equipment and air aspiration process thereof |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103758733A (en) * | 2014-01-29 | 2014-04-30 | 储继国 | Large medium/high vacuum gas-bleeding unit and pumping process thereof |
| CN104100492B (en) * | 2014-07-17 | 2017-07-25 | 储继国 | High vacuum electric arc pump and its pumping unit |
| CN104806535B (en) * | 2015-03-26 | 2018-10-12 | 储继国 | Compound radial flow pump, combination radial flow pump and extract system |
| CN107489605B (en) * | 2017-09-18 | 2019-07-12 | 储昕 | Low-carbon, oil-free big pumping speed vacuum suction unit |
| CN107400857A (en) * | 2017-09-18 | 2017-11-28 | 储琦 | Low-carbon, oil-free evaporating and coating equipment |
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| CN101776063A (en) * | 2010-01-21 | 2010-07-14 | 储继国 | Large high-vacuum air pumping set |
| CN101936278A (en) * | 2010-09-13 | 2011-01-05 | 储继国 | Electric arc titanium pump and vacuum air pump group comprising same |
| CN201891569U (en) * | 2010-11-26 | 2011-07-06 | 黄瑞安 | Vacuum electric arc titanium pump |
| CN202193837U (en) * | 2011-09-02 | 2012-04-18 | 余鹏 | Double-layer composite structured titanium-aluminum target material for multi-arc ion plating |
| CN102691640A (en) * | 2012-05-29 | 2012-09-26 | 储琦 | Suction system and suction technology |
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2013
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Patent Citations (5)
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|---|---|---|---|---|
| CN101776063A (en) * | 2010-01-21 | 2010-07-14 | 储继国 | Large high-vacuum air pumping set |
| CN101936278A (en) * | 2010-09-13 | 2011-01-05 | 储继国 | Electric arc titanium pump and vacuum air pump group comprising same |
| CN201891569U (en) * | 2010-11-26 | 2011-07-06 | 黄瑞安 | Vacuum electric arc titanium pump |
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| CN102691640A (en) * | 2012-05-29 | 2012-09-26 | 储琦 | Suction system and suction technology |
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| CN103290388A (en) | 2013-09-11 |
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Effective date of registration: 20180910 Address after: 215400 38 Qingdao West Road, Taicang Economic Development Zone, Suzhou, Jiangsu Patentee after: SUZHOU MOXING VACUUM TECHNOLOGY Co.,Ltd. Address before: 518000 Room 502, 1 new deep Village, Huanggang Middle Road, Shenzhen, Guangdong, Futian District Patentee before: Chu Xin |
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