CN202226914U

CN202226914U - Vacuum system

Info

Publication number: CN202226914U
Application number: CN2011203338308U
Authority: CN
Inventors: 张德强
Original assignee: JIANGMEN ZHAOYE TECHNOLOGY CO LTD
Current assignee: JIANGMEN ZHAOYE TECHNOLOGY CO LTD
Priority date: 2011-09-07
Filing date: 2011-09-07
Publication date: 2012-05-23
Anticipated expiration: 2021-09-07

Abstract

The utility model discloses a vacuum system. The vacuum system comprises an upper sealed chamber and a lower sealed chamber which are arranged side by side, wherein the upper sealed chamber is communicated with an upper chamber lobe pump and an upper chamber rotary vane pump in turn through pipelines, the pipeline between the upper chamber lobe pump and the upper sealed chamber is provided with an upper chamber fine pumping valve and an upper chamber resistance gauge, the upper sealed chamber is also communicated with a vent valve through a pipeline, the upper sealed chamber is connected with a cryogenic pump through another pipeline, and the output end of the cryogenic pump extends from the upper sealed chamber to the lower sealed chamber; and the lower sealed chamber is connected with a lower chamber rotary vane pump and a lower chamber lobe pump in turn through pipelines, the pipeline between the lower chamber lobe pump and the lower sealed chamber is provided with a diffusion pump, the pipeline between the diffusion pump and the lower chamber lobe pump is provided with a lower chamber forepump, a lower chamber fine pumping valve is arranged between the diffusion pump and the lower sealed chamber, and the pipeline between the lower chamber fine pumping valve and the lower sealed chamber is provided with a lower chamber resistance gauge and a lower chamber ionization gauge in turn.

Description

Vacuum system

Technical field

The utility model relates to a kind of technical field of vacuum plating, especially a kind of vacuum system that is used for the vacuum winding film coating machine.

Background technology

Vacuum coater, when vapor deposition, it is higher to vacuum requirements in the Vakuumkammer, and the vacuum degree control of Vakuumkammer directly influences the effect of plated film.

The utility model content

The purpose of the utility model provides a kind of vacuum system, its through Vakuumkammer is divided into two independently Vakuumkammer carry out vacuum degree control, better vacuum tightness in the watch-keeping cubicle, and also satisfy basement membrane to different vacuum requirements in the Vakuumkammer.

In order to reach above-mentioned purpose of design, the technical scheme that the utility model adopts is following:

A kind of vacuum system; Comprise the last sealing chamber and the lower seal chamber that are arranged side by side; The said sealing chamber of going up is connected chamber lobe pump and last chamber sliding vane rotary pump successively through pipeline, also is provided with the chamber essence on the said pipeline of going up between chamber lobe pump and the last sealing chamber and takes out valve and last chamber Pirani gauge, and the said sealing chamber of going up is also connected purging valve through pipeline; The said sealing chamber of going up inserts cryopump through pipeline, and the deep cooling delivery side of pump extends to the lower seal chamber from last sealing chamber; Said lower seal chamber is connected to down chamber sliding vane rotary pump and following chamber lobe pump successively through pipeline; Pipeline between said chamber lobe pump down and the lower seal chamber is provided with DP; Pipeline between DP and the following chamber lobe pump is provided with down step valve before the chamber; Be provided with down the chamber essence between DP and the lower seal chamber and take out valve, said chamber essence is down taken out and is provided with down chamber Pirani gauge and following chamber ionization gauge on the pipeline between valve and the lower seal chamber successively.

Between said down chamber Pirani gauge and the following chamber ionization gauge with pass through the pipeline connection before following chamber lobe pump and the following chamber between the step valve, and its pipeline is provided with down the chamber and slightly takes out valve.

Connect holding pump through pipeline between step valve and the DP before the said chamber down, the pipeline between holding pump and the DP is provided with keeps valve and DP Pirani gauge.

The beneficial effect of the described vacuum system of the utility model is: with Vakuumkammer be divided into two independently Vakuumkammer carry out vacuum degree control, better vacuum tightness in the watch-keeping cubicle, and satisfy basement membrane to different vacuum requirements in the Vakuumkammer.

Description of drawings

Fig. 1 is the synoptic diagram of the described vacuum system of the utility model embodiment.

Embodiment

Below in conjunction with accompanying drawing the optimum implementation of the utility model is done further detailed description.

As shown in Figure 1; The described vacuum system of the utility model embodiment; Comprise the last sealing chamber 18 and lower seal chamber 19 that are arranged side by side, the said sealing chamber 18 of going up is connected chamber lobe pump 2 and last chamber sliding vane rotary pump 1 successively through pipeline, also is provided with the chamber essence on the said pipeline of going up between chamber lobe pump 2 and the last sealing chamber 18 and takes out valve 3 and last chamber Pirani gauge 17; The said sealing chamber 18 of going up is also connected purging valve 12 through pipeline; Go up sealing chamber 18 through 1 pair of last chamber lobe pump 2 and last chamber sliding vane rotary pump during use and vacuumize, and detect the vacuum tightness that goes up sealing chamber 18, go up the chamber essence and take out valve 3 controls and go up the vacuum tightness in the sealing chamber 18, go up sealing chamber 18 through 12 pairs of purging valves and carry out exhaust through last chamber Pirani gauge 17; The said sealing chamber 18 of going up inserts cryopump 13 through pipeline, and the output terminal of cryopump 13 extends to lower seal chamber 19 from last sealing chamber 18.

Said lower seal chamber 19 is connected to down chamber sliding vane rotary pump 4 and following chamber lobe pump 5 successively through pipeline; Through chamber sliding vane rotary pump 4 and 5 pairs of lower seal chambers 19 of following chamber lobe pump vacuumize down; Pipeline between said chamber lobe pump 5 down and the lower seal chamber 19 is provided with DP 7; Pipeline between DP 7 and the following chamber lobe pump 5 is provided with down step valve 6 before the chamber; Be provided with down the chamber essence between DP 7 and the lower seal chamber 19 and take out valve 8; Said down chamber essence is taken out and is provided with down chamber Pirani gauge 15 and following chamber ionization gauge 16 on the pipeline between valve 8 and the lower seal chamber 19 successively, said under between chamber Pirani gauge 15 and the following chamber ionization gauge 16 and pass through the pipeline connection before following chamber lobe pump 5 and the following chamber between the step valve 6, and its pipeline is provided with down the chamber and slightly takes out valve 11; Connect holding pump 9 through pipeline between step valve 6 and the DP 7 before the said chamber down, the pipeline between holding pump 9 and the DP 7 is provided with keeps valve 10 and DP Pirani gauge 14.

The preferred embodiment of this embodiment the utility model can not limit the utility model, and concrete each item rights protection scope is defined by the claims.

Claims

1. vacuum system; It is characterized in that: comprise the last sealing chamber and the lower seal chamber that are arranged side by side; The said sealing chamber of going up is connected chamber lobe pump and last chamber sliding vane rotary pump successively through pipeline, also is provided with the chamber essence on the said pipeline of going up between chamber lobe pump and the last sealing chamber and takes out valve and last chamber Pirani gauge, and the said sealing chamber of going up is also connected purging valve through pipeline; The said sealing chamber of going up inserts cryopump through pipeline, and the deep cooling delivery side of pump extends to the lower seal chamber from last sealing chamber; Said lower seal chamber is connected to down chamber sliding vane rotary pump and following chamber lobe pump successively through pipeline; Pipeline between said chamber lobe pump down and the lower seal chamber is provided with DP; Pipeline between DP and the following chamber lobe pump is provided with down step valve before the chamber; Be provided with down the chamber essence between DP and the lower seal chamber and take out valve, said chamber essence is down taken out and is provided with down chamber Pirani gauge and following chamber ionization gauge on the pipeline between valve and the lower seal chamber successively.

2. vacuum system according to claim 1 is characterized in that: between said down chamber Pirani gauge and the following chamber ionization gauge with pass through the pipeline connection before following chamber lobe pump and the following chamber between the step valve, and its pipeline is provided with down the chamber and slightly takes out valve.

3. vacuum system according to claim 2 is characterized in that: connect holding pump through pipeline between step valve and the DP before the said chamber down, the pipeline between holding pump and the DP is provided with keeps valve and DP Pirani gauge.