CN107084822B - A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer - Google Patents
A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer Download PDFInfo
- Publication number
- CN107084822B CN107084822B CN201710448195.XA CN201710448195A CN107084822B CN 107084822 B CN107084822 B CN 107084822B CN 201710448195 A CN201710448195 A CN 201710448195A CN 107084822 B CN107084822 B CN 107084822B
- Authority
- CN
- China
- Prior art keywords
- vacuum
- vacuum chamber
- gate valve
- pump
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
- G01M3/2853—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipe joints or seals
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention discloses a kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer, including vacuum window, vacuum chamber, vacuum meter, pressure release angle valve, gate valve, molecular pump；The vacuum window is located at vacuum chamber one end；The gate valve is located at vacuum chamber the other end；Pipeline among the vacuum chamber is equipped with vacuum meter, pressure release angle valve and mechanical pump interface；The molecular pump is installed on gate valve；The machinery pump interface is connected with mechanical pump.Can the present invention provides the vacuum environment in transit pipeline using mechanical pump and molecular pump, meet requirement for testing accelerator transit vacuum window and fenestrated membrane thickness, to ensure that the design of accelerator transit vacuum window rationally selects reliably with fenestrated membrane thickness.
Description
Technical field
The invention belongs to superconduction proton precessional magnetometer transit pipeline sealing test field, and in particular to one kind is used to test and adds
The test device of fast device transit vacuum window and fenestrated membrane performance.
Background technology
In the Particle Delivery field of superconduction proton precessional magnetometer, in particular for the Particle Delivery skill of proton and heavy particle therapy
Art field.Existing market can only carry out rough vacuum test, applicable vacuum ranges reach there are vacuum sealing film test device
Less than superconduction proton precessional magnetometer transit pipeline vacuum level requirements.To ensure the rational design of accelerator transit vacuum window and window
The reasonable selection of film thickness.Therefore design a kind of for testing accelerator transit vacuum window test device.
The content of the invention
It is an object of the invention to provide a kind of test dress for being used to test accelerator transit vacuum window and fenestrated membrane performance
Put, which is combined using mechanical pump and molecular pump, is classified to vacuumize vacuum chamber and (is pumped into vacuum chamber slightly very using mechanical pump
Sky, is then pumped into high vacuum using molecular pump by vacuum chamber), until vacuum chamber reaches superconduction proton precessional magnetometer transit vacuum tube
Vacuum standard in road, the performance of transit vacuum window and fenestrated membrane is tested with this.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer, including vacuum window, vacuum chamber, vacuum
Meter, pressure release angle valve, gate valve, molecular pump；The vacuum window is located at vacuum chamber one end；It is another that the gate valve is located at vacuum chamber
End；Pipeline among the vacuum chamber is equipped with vacuum meter, pressure release angle valve and mechanical pump interface；The molecular pump is installed on
On gate valve；The machinery pump interface is connected with mechanical pump.
The vacuum chamber is positioned in the V-block groove of frame top, and is fixed by V-block pressure ring.
The quick release flange end of the vacuum window and vacuum chamber dock, to interface internal add inner seal ring one, to interface outside
Portion is fixed using chain type flange clip.
The pressure release angle valve is located at small flange horizontal level in the middle part of vacuum chamber；The vacuum meter is located at small method in the middle part of vacuum chamber
Blue vertical position；Pressure release angle valve is fixed on vacuum chamber with vacuum meter by clip one and inner seal ring two.
The gate valve is located at the CF flange ends of vacuum chamber, is fixed on by CF copper packings sealing ring and screw on vacuum chamber；
The molecular pump is close to gate valve, and positioned at the top of gate valve, gate valve is fixed on by CF copper packings sealing ring and screw
On.
Small flange horizontal position is equipped with blank flange in the middle part of the vacuum chamber, and blank flange passes through clip one and interior sealing
Circle two is fixed on vacuum chamber；It is mechanical pump interface at the blank flange, using vacuum corrugated pipe by this interface and mechanical pump
Connection, and fixed by inner seal ring three and clip two.
The vacuum chamber is L-shaped structure；The vacuum chamber adds air cylinder manifold close to molecular pump end.
The testing procedure of the vacuum sealing film test device is as follows：
(1) mechanical pump and molecular pump are in initial shutdown state, click on mechanical pump start button, treat that mechanical pump enters work
State, vacuum chamber vacuum environment reach setting value；
(2) molecule pump start button is clicked on, when molecular pump enters working status, clicks on mechanical pump stop button；
(3) molecular pump steady operation, vacuum meter monitor the situation of change of fenestrated membrane in vacuum window；If vacuum window fenestrated membrane is broken
Damage, then vacuum is fallen in vacuum chamber, and vacuum meter detects and feeds back to gate valve, gate valve is closed between molecular pump and vacuum chamber
Connection, while molecular pump is stopped；If vacuum window is normal, then molecular pump continuous firing, checks the stabilization of vacuum window fenestrated membrane
The working limit time.
Beneficial effects of the present invention：The present invention provides the vacuum ring in transit pipeline using mechanical pump and molecular pump
Can border, meet requirement, to ensure that accelerator transit is true for testing accelerator transit vacuum window and fenestrated membrane thickness
Empty window design is rationally and the selection of fenestrated membrane thickness is reliable；The configuration of the present invention is simple, convenient operating maintenance can be into vacuum high vacuum ring
Vacuum sealing film is tested under border, available for the performance of test accelerator transit vacuum window and the ultimate life of fenestrated membrane.
Brief description of the drawings
In order to facilitate the understanding of those skilled in the art, the present invention is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is the axis side structure figure of vacuum sealing film test device of the present invention；
Fig. 2 is the structural front view of vacuum sealing film test device of the present invention；
Fig. 3 is the structural side view of vacuum sealing film test device of the present invention；
Fig. 4 is vacuum chamber structure sectional view.
Embodiment
Technical scheme is clearly and completely described below in conjunction with embodiment, it is clear that described reality
It is only part of the embodiment of the present invention to apply example, instead of all the embodiments.Based on the embodiments of the present invention, this area is general
All other embodiment that logical technical staff is obtained without creative efforts, belongs to what the present invention protected
Scope.
A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer, as shown in Figs 1-4, including：Rack 1,
Chain type flange clip 2, vacuum window 3, vacuum chamber 4, inner seal ring 1, pressure release angle valve 6, clip 1, vacuum meter 8, gate valve 9,
Molecular pump 10, CF copper packings sealing ring 11, inner seal ring 2 12, inner seal ring 3 13, blank flange 14, clip 2 15；
Above-mentioned rack 1 is located at the bottom of test platform；Above-mentioned vacuum chamber 4 is positioned in the V-block groove at the top of rack 1, is made
Fixed with V-block pressure ring；The quick release flange end of above-mentioned vacuum window 3 and vacuum chamber 4 is docked, and inner seal ring one is added to interface internal
5, to being fixed outside interface using chain type flange clip 2；
The pressure release angle valve 6 is located at the small flange horizontal level in the middle part of vacuum chamber 4, passes through clip 1 and inner seal ring 2 12
It is fixed on vacuum chamber 4；Above-mentioned vacuum meter 8 is located at the small flange vertical position in the middle part of vacuum chamber 4, passes through clip 1 and interior sealing
2 12 are enclosed to be fixed on vacuum chamber 4；
Above-mentioned gate valve 9 is located at the CF flange ends of vacuum chamber 4, and vacuum chamber is fixed on by CF copper packings sealing ring 11 and screw
On 4；The molecular pump 10 is close to gate valve 9, and positioned at the top of gate valve 9, is consolidated by CF copper packings sealing ring 11 and screw
It is scheduled on gate valve 9；
The blank flange 14 is located at the small flange horizontal level in the middle part of vacuum chamber 4, passes through clip 1 and inner seal ring 2 12
It is fixed on vacuum chamber 4；It is mechanical pump interface at blank flange 14, is connected this interface with mechanical pump using vacuum corrugated pipe,
And fixed by inner seal ring 3 13 and clip 2 15；
Vacuum window 3, gate valve 9 and molecular pump 10 are located at 4 both ends of vacuum chamber respectively, and mechanical pump interface and vacuum meter are positioned at true
Cavity centre position；Vacuum chamber is L-shaped structure；Vacuum chamber 4 adds air cylinder manifold close to molecular pump end；
During work, mechanical pump and molecular pump are in initial shutdown state, click on mechanical pump start button, treat that mechanical pump enters
Working status, vacuum chamber vacuum environment reach setting value；Molecule pump start button is clicked on, when molecular pump enters working status,
Click on mechanical pump stop button；Molecular pump continuous work, monitors the situation of change of fenestrated membrane in vacuum window；If vacuum window fenestrated membrane is broken
Damage, then vacuum is fallen and (vacuum values fluctuation is produced after vacuum window breakage, monitored by vacuum meter) in vacuum chamber, and vacuum meter detects simultaneously
Gate valve is fed back to, gate valve is closed between molecular pump and vacuum chamber and connects, while molecular pump is stopped；If vacuum window
Normally, then molecular pump continuous firing, checks the steady operation limit time of vacuum window fenestrated membrane.
The present invention provides the vacuum environment in transit pipeline using mechanical pump and molecular pump, defeated for testing accelerator
Can transport line vacuum window and fenestrated membrane thickness meet requirement, to ensure that the design of accelerator transit vacuum window is reasonable and fenestrated membrane is thick
Degree selection is reliable.
Present invention disclosed above preferred embodiment is only intended to help and illustrates the present invention.Preferred embodiment is not detailed
All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification,
It can make many modifications and variations.This specification is chosen and specifically describes these embodiments, is in order to preferably explain the present invention
Principle and practical application so that skilled artisan can be best understood by and utilize the present invention.The present invention is only
Limited by claims and its four corner and equivalent.
Claims (4)
- A kind of 1. vacuum sealing film test device suitable for superconduction proton precessional magnetometer, it is characterised in that including vacuum window (3), Vacuum chamber (4), vacuum meter (8), pressure release angle valve (6), gate valve (9), molecular pump (10)；The vacuum window (3) is located at vacuum chamber (4) one end；The gate valve (9) is located at vacuum chamber (4) the other end；Pipeline among the vacuum chamber (4) is equipped with true Sky meter (8), pressure release angle valve (6) and mechanical pump interface；The molecular pump (10) is installed on gate valve (9)；The mechanical pump Interface is connected with mechanical pump；The pressure release angle valve (6) is located at small flange horizontal level in the middle part of vacuum chamber (4)；The vacuum meter (8) is located at vacuum chamber (4) The small flange vertical position in middle part；Pressure release angle valve (6) is fixed by clip one (7) and inner seal ring two (12) with vacuum meter (8) On vacuum chamber (4)；The gate valve (9) is located at the CF flange ends of vacuum chamber (4), and vacuum is fixed on by CF copper packings sealing ring (11) and screw On chamber (4)；The molecular pump (10) is close to gate valve (9), and positioned at the top of gate valve (9), passes through CF copper packing sealing rings (11) it is fixed on screw on gate valve (9)；Small flange horizontal position is equipped with blank flange (14) in the middle part of the vacuum chamber (4), and blank flange (14) passes through clip one (7) it is fixed on inner seal ring two (12) on vacuum chamber (4)；Blank flange (14) place is mechanical pump interface, uses vacuum This interface is connected by bellows with mechanical pump, and fixed by inner seal ring three (13) and clip two (15)；The testing procedure of the vacuum sealing film test device is as follows：(1) mechanical pump and molecular pump are in initial shutdown state, click on mechanical pump start button, treat that mechanical pump enters work shape State, vacuum chamber vacuum environment reach setting value；(2) molecule pump start button is clicked on, when molecular pump enters working status, clicks on mechanical pump stop button；(3) molecular pump steady operation, vacuum meter monitor the situation of change of fenestrated membrane in vacuum window；If vacuum window fenestrated membrane is damaged, then Vacuum is fallen in vacuum chamber, and vacuum meter detects and feeds back to gate valve, gate valve is closed between molecular pump and vacuum chamber and connects, Molecular pump is stopped at the same time；If vacuum window is normal, then molecular pump continuous firing, checks the steady operation pole of vacuum window fenestrated membrane Between in limited time.
- 2. vacuum sealing film test device according to claim 1, it is characterised in that the vacuum chamber (4) is positioned over machine In V-block groove at the top of frame (1), and fixed by V-block pressure ring.
- 3. vacuum sealing film test device according to claim 1, it is characterised in that the vacuum window (3) and vacuum chamber (4) quick release flange end docking, to interface internal addition inner seal ring one (5), to using chain type flange clip (2) outside interface It is fixed.
- 4. vacuum sealing film test device according to claim 1, it is characterised in that the vacuum chamber (4) is " L " type knot Structure；The vacuum chamber (4) adds air cylinder manifold close to molecular pump end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710448195.XA CN107084822B (en) | 2017-06-14 | 2017-06-14 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710448195.XA CN107084822B (en) | 2017-06-14 | 2017-06-14 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107084822A CN107084822A (en) | 2017-08-22 |
| CN107084822B true CN107084822B (en) | 2018-04-27 |
Family
ID=59606201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710448195.XA Active CN107084822B (en) | 2017-06-14 | 2017-06-14 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107084822B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114753991B (en) * | 2022-05-12 | 2022-10-04 | 之江实验室 | Telescopic getter pump vacuum pumping device and application method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5002464A (en) * | 1987-04-16 | 1991-03-26 | Lee Hyeong G | Double buffer vacuum system |
| CN202226914U (en) * | 2011-09-07 | 2012-05-23 | 江门市兆业科技有限公司 | Vacuum system |
| CN103079333A (en) * | 2012-12-26 | 2013-05-01 | 江苏达胜加速器制造有限公司 | Vacuum exhauster for electron irradiation accelerator |
| CN203443756U (en) * | 2013-07-19 | 2014-02-19 | 江苏海纳磁性纳米新材料科技有限公司 | Vacuum degree detecting system for magnetofluid sealing member |
| CN103693256A (en) * | 2013-12-17 | 2014-04-02 | 兰州空间技术物理研究所 | Device and method for unsealing sample sealing device |
| CN105673461A (en) * | 2016-03-31 | 2016-06-15 | 河北昌骅专用汽车有限公司 | Unit forevacuum and leak detector integration system for molecular pump |
| CN106802218A (en) * | 2017-03-28 | 2017-06-06 | 凯盛重工有限公司 | A kind of vacuum coating cavity leak detection system and leak hunting method |
| CN106823160A (en) * | 2017-01-19 | 2017-06-13 | 合肥中科离子医学技术装备有限公司 | Mechanism is blocked for the line in cyclotron proton heavy ion medical treatment device |
| CN206787781U (en) * | 2017-06-14 | 2017-12-22 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007010068B4 (en) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum apparatus with vacuum pump |
-
2017
- 2017-06-14 CN CN201710448195.XA patent/CN107084822B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5002464A (en) * | 1987-04-16 | 1991-03-26 | Lee Hyeong G | Double buffer vacuum system |
| CN202226914U (en) * | 2011-09-07 | 2012-05-23 | 江门市兆业科技有限公司 | Vacuum system |
| CN103079333A (en) * | 2012-12-26 | 2013-05-01 | 江苏达胜加速器制造有限公司 | Vacuum exhauster for electron irradiation accelerator |
| CN203443756U (en) * | 2013-07-19 | 2014-02-19 | 江苏海纳磁性纳米新材料科技有限公司 | Vacuum degree detecting system for magnetofluid sealing member |
| CN103693256A (en) * | 2013-12-17 | 2014-04-02 | 兰州空间技术物理研究所 | Device and method for unsealing sample sealing device |
| CN105673461A (en) * | 2016-03-31 | 2016-06-15 | 河北昌骅专用汽车有限公司 | Unit forevacuum and leak detector integration system for molecular pump |
| CN106823160A (en) * | 2017-01-19 | 2017-06-13 | 合肥中科离子医学技术装备有限公司 | Mechanism is blocked for the line in cyclotron proton heavy ion medical treatment device |
| CN106802218A (en) * | 2017-03-28 | 2017-06-06 | 凯盛重工有限公司 | A kind of vacuum coating cavity leak detection system and leak hunting method |
| CN206787781U (en) * | 2017-06-14 | 2017-12-22 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107084822A (en) | 2017-08-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204372396U (en) | A kind of doubly-closed tube pipeline connector | |
| CN202362120U (en) | Device for quickly detecting air tightness | |
| CN206787781U (en) | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer | |
| CN105675231A (en) | Negative pressure sealing detection device | |
| CN202203417U (en) | Novel stop valve for air-conditioner | |
| CN107084822B (en) | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer | |
| CN206038243U (en) | Aerosol canister seals detection device | |
| CN103629396A (en) | Positive and negative pressure gas distribution device | |
| CN203479472U (en) | Sealing clamp for detecting helium or hydrogen leakage at pipeline connecting nut | |
| CN208579882U (en) | A kind of vacuum tank helium detection device | |
| CN204922281U (en) | Gas seal for pipe joints structure | |
| CN202869750U (en) | Leak detection device for inner exhaust pipe welding points of refrigerator compressor | |
| CN103953574B (en) | The shaft seal structure of a kind of cryopump and axle are sealed gas control system | |
| CN209727026U (en) | Stop valve detection device | |
| CN206656049U (en) | With leakage failure automatic detection formula joint | |
| CN107654362A (en) | A kind of compressor test device and method of testing | |
| CN102967426A (en) | Pressurizing and leakage detection device for vacuum clamping sleeve of tank | |
| CN208505537U (en) | A kind of seat surface seal test device | |
| CN209262268U (en) | A kind of gas movable sealing structure | |
| CN206192581U (en) | Bellows detection device | |
| CN208058017U (en) | A kind of gas control threeway angle valve | |
| CN105241610A (en) | Leak detection method of air conditioner indoor unit | |
| CN104406748A (en) | Spacecraft leakage rate testing system performing parallel air extraction by molecular pumps and cryogenic pump | |
| CN206876355U (en) | A kind of low-emission coated production line rubber seal leak detection tool | |
| CN219809434U (en) | Valve body assembly and pipe system for fuel cell |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |