CN203443756U - Vacuum degree detecting system for magnetofluid sealing member - Google Patents
Vacuum degree detecting system for magnetofluid sealing member Download PDFInfo
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- CN203443756U CN203443756U CN201320430671.2U CN201320430671U CN203443756U CN 203443756 U CN203443756 U CN 203443756U CN 201320430671 U CN201320430671 U CN 201320430671U CN 203443756 U CN203443756 U CN 203443756U
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- vacuum
- magnetic fluid
- fluid seal
- molecular pump
- vacuum chamber
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Abstract
The utility model discloses a vacuum degree detecting system for a magnetofluid sealing member. The detecting system comprises a vacuum cavity, a backing pump, a molecular pump, a vacuum gauge and a vacuum gauge display, wherein the backing pump, the molecular pump and the vacuum gauge are connected with the vacuum cavity, the vacuum gauge display is connected with the vacuum gauge, and the bottom of the vacuum cavity is fixed on a workbench; and a vacuum valve is arranged in the connecting position of the backing pump and the vacuum cavity, and another vacuum valve is arranged in the connecting position of the molecular pump and the vacuum cavity. The vacuum degree detecting system for the magnetofluid sealing member can more accurately detect the vacuum degree of the magnetofluid sealing member, can be better applied to a production line of the magnetofluid sealing member due to simple connection and operation methods, is helpful for regulating the vacuum degree index of the magnetofluid sealing members from the aspect of industry, and provides basis for detecting the vacuum degree index of the magnetofluid sealing members.
Description
Technical field
The utility model relates to a kind of pick-up unit of magnetic fluid seal vacuum tightness, relates in particular to the magnetic fluid seal vacuum tightness detection system that vacuum tightness requires magnetic fluid seal limit vacuum-resistant degree when high to detect.
Background technology
The normally vacuum seal industry of use field of magnetic fluid seal, under some operating modes, comparatively strict to the requirement of vacuum tightness, vacuum tightness is higher.In current magnetic fluid seal field, general test item is the seal leak detection that adopts helium mass spectrometer leak detector to carry out, and its precision can reach 1 * 10-10Pam3/sec.In helium mass spectrometer leak detector equipment, contain molecular pump and forepump, before leak detection, can take out in advance certain vacuum tightness to vacuum chamber, generally use helium mass spectrometer leak detector at most vacuum chamber to be extracted into the vacuum tightness of 1 * 10-3Pa, for the less demanding occasion of vacuum tightness.
And the occasion of having relatively high expectations for vacuum tightness, as vacuum tightness reaches 1 * 10-6Pa, use helium mass spectrometer leak detector just cannot meet the detection demand to magnetic fluid seal limit vacuum-resistant degree, more cannot measure the leak rate of magnetic fluid seal under high vacuum operating mode.
The service condition of molecular pump has certain restriction, abolishes in the process of vacuum, if the blade of equimolecular pump does not completely stop and just atmosphere entered to atmosphere via molecular pump, very likely the blade of molecular pump is broken.
Utility model content
Limitation for existing detection scheme, the purpose of this utility model is to provide a kind of magnetic fluid seal product vacuum tightness that can comparatively fast realize to detect, and is applicable to the magnetic fluid seal vacuum tightness detection system that laboratory or magnetic fluid seal production line are used.
The magnetic fluid seal vacuum tightness detection system that the utility model provides comprises: vacuum chamber, the forepump being connected with vacuum chamber, molecular pump, the vacuum meter display that vacuum is taken into account to be connected with vacuum meter, and vacuum chamber bottom is fixed on worktable; Forepump, molecular pump and vacuum chamber junction are provided with vacuum valve.
In some embodiments, vacuum chamber top is ring flange, and magnetic fluid seal is connected in ring flange, between vacuum chamber and magnetic fluid seal, by rubber "O"-ring, forms plane static seal, and magnetic fluid seal vacuum end is towards vacuum chamber cavity.
In some embodiments, forepump is connected with vacuum chamber separately with molecular pump, forms independently aspiration vacuum passage.
In some embodiments, between forepump and molecular pump and vacuum chamber, be equipped with vacuum valve, to vacuum system, exitting and abolishing in the process of vacuum, the vacuum valve between closure molecule pump and vacuum chamber, breaks with the large quantity of air of avoiding the blade of molecular pump to be entered suddenly.
In some embodiments, vacuum meter is connected with vacuum chamber cavity, and vacuum meter records, and the vacuum values showing by vacuum meter display is the limit vacuum-resistant degree of magnetic fluid seal.
Magnetic fluid seal vacuum tightness detection system of the present utility model, compared with prior art, has the following advantages:
1. magnetic fluid seal vacuum tightness detection system of the present utility model, repeatedly vacuumizing and abolishing in the process of vacuum, while having saved preferably vacuum breaker, wait for the time that molecular pump blade stops, meanwhile, avoid the large quantity of air that the blade of molecular pump is entered suddenly to break.
2. magnetic fluid seal vacuum tightness detection system of the present utility model, the structure of device is comparatively simple, only by controlled valve, just can reach the effect repeatedly detecting, and testing result is accurate, and efficiency is high.
3. magnetic fluid seal vacuum tightness detection system of the present utility model, the venting of magnetic fluid seal vacuum tightness detection system rapidly, picks and places workpiece convenient, simple to operate.
Magnetic fluid seal vacuum tightness detection system of the present utility model, better guaranteed the accuracy of detection of magnetic fluid seal in this index of limit vacuum-resistant degree, simple connection and method of operating can be used on the product line of magnetic fluid seal system preferably.More be conducive to this index of the respectful magnetic fluid seal vacuum-resistant of angle block gauge degree from industry, make the vacuum tightness index detection of magnetic fluid seal accomplish that mark can follow.
Accompanying drawing explanation
Fig. 1 is the structural representation of the magnetic fluid seal vacuum tightness detection system of a kind of embodiment of the utility model.
Embodiment
Below in conjunction with drawings and the specific embodiments, the utility model is described in further detail to explanation.
Fig. 1 has schematically shown the magnetic fluid seal vacuum tightness detection system according to a kind of embodiment of the utility model.
As shown in the figure, magnetic fluid seal vacuum tightness detection system of the present utility model, comprises molecular pump 1, forepump 2, vacuum meter 3, vacuum chamber 4, the first vacuum valve 5, the second vacuum valves 6 and and vacuum meter displays.Vacuum chamber 4 bottoms are fixed on worktable.
Molecular pump 1, the equal vacuum chamber 4 of forepump 2 connect, and belong to the mode of being connected in parallel.Between forepump 2 and molecular pump 1 and vacuum chamber 4, be equipped with vacuum valve, between forepump 2 and vacuum chamber 4 is the second vacuum valve 6, and between molecular pump 1 and vacuum chamber 4 is the first vacuum valve 5.
When device vacuumizes, first close the first vacuum valve 5, open the second vacuum valve 6, start forepump 2, start to vacuumize, when vacuum tightness reaches the minimum vacuum tightness value of molecular pump 1 work, start molecular pump 1, open the first vacuum valve 5, pumping high vacuum.While abolishing vacuum, first close the first vacuum valve 5, then closure molecule pump 1, keeps the second vacuum valve 6 to open, and closes forepump 2, and air can be passed in vacuum chamber 4 by the connecting tube of forepump 2.
In above-mentioned steps, to vacuum system, exitting and abolishing in the process of vacuum, the first vacuum valve 5 between closure molecule pump 1 and vacuum chamber 4, breaks with the large quantity of air of avoiding the blade of described molecular pump 1 to be entered suddenly.
Magnetic fluid seal vacuum tightness detection system of the present utility model, closes the first vacuum valve 5, opens the second vacuum valve 6, start forepump 2, start to vacuumize, when vacuum tightness reaches the minimum vacuum tightness value of molecular pump 1 work, start molecular pump 1, open the first vacuum valve 5, pumping high vacuum.In molecular pump 1 course of work, the vacuum tightness of vacuum chamber 4 can constantly rise, and vacuum tightness can be read by vacuum meter display, after vacuumizing the some time, installing whole vacuum tightness cannot improve again, remove magnetic fluid seal this possibility of vacuum tightness that reaches capacity, it is likely the final vacuum that chamber vacuum degree has reached molecular pump 1, can whether reach by differentiating the vacuum values of vacuum meter display demonstration the ultimate value of molecular pump 1, this situation can be greater than by choosing the final vacuum of molecular pump 1 the desired limits vacuum tightness of magnetic fluid seal and avoid.When vacuum system is after operation a period of time, when the limit vacuum-resistant that exceeds magnetic fluid seal when vacuum tightness is spent, can there is leakage to a certain degree in seal, directly cause molecular pump 1 further to vacuumize, when the numerical value of vacuum meter display no longer rises, illustrate that this vacuum tightness is the final vacuum that magnetic fluid seal can reach.
While abolishing vacuum, first close the first vacuum valve 5, follow closure molecule pump 1, keep the second vacuum valve 6 to open, close forepump 2, air can be passed into by the connecting tube of forepump 2 in vacuum chamber 4, now, cavity internal pressure value is gone up rapidly, when rising to an atmospheric pressure, can smoothly magnetic fluid seal be taken off.
So vacuumize with the process of abolishing vacuum and repeatedly carry out, can detect one by one the limit vacuum-resistant degree of magnetic fluid seal.Repeatedly vacuumizing and abolishing in the process of vacuum, when the utility model has saved vacuum breaker preferably, wait for a period of time that molecular pump blade stops, and the structure of device is comparatively simple, only by controlled valve, just can reach the effect repeatedly detecting.
The technical solution of the utility model is in the limit vacuum-resistant degree of magnetic fluid seal detects, and major embodiment goes out following effect:
1. result is accurate: the sealing property of only calculating rubber "O"-ring by theory judges the limit vacuum-resistant degree of magnetic fluid seal, cannot guarantee that magnetic fluid seal is when being connected with vacuum chamber 4, the maximum vacuum that can bear under actual condition.This device, by actual connected mode and the working environment of simulation magnetic fluid seal, obtains the limit vacuum-resistant number of degrees value of magnetic fluid seal accurately.
2. efficiency is higher: different with the direct-connected mode of molecular pump 1 from forepump 2 in the past.The utility model adopts molecular pump 1 mode in parallel with forepump 2, has well saved a period of time of waiting for that in abolishing vacuum process molecular pump 1 blade stops.Simple to operate understandable, the installation and removal of magnetic fluid seal all more for convenience.
The above; it is only the comparatively typical embodiment of the utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement, within all should being encompassed in protection domain of the present utility model.
Claims (5)
1. magnetic fluid seal vacuum tightness detection system, is characterized in that, comprising: vacuum chamber, the forepump, molecular pump, the vacuum that are connected with described vacuum chamber are taken into account the vacuum meter display being connected with described vacuum meter, and described vacuum chamber bottom is fixed on worktable; Described forepump, molecular pump and described vacuum chamber junction are provided with vacuum valve.
2. magnetic fluid seal vacuum tightness detection system according to claim 1, it is characterized in that, described vacuum chamber top is ring flange, described magnetic fluid seal is connected in described ring flange, between described vacuum chamber and magnetic fluid seal, by rubber "O"-ring, form plane static seal, magnetic fluid seal vacuum end is towards described vacuum chamber cavity.
3. magnetic fluid seal vacuum tightness detection system according to claim 2, is characterized in that, described forepump is connected with described vacuum chamber separately with described molecular pump, forms independently aspiration vacuum passage.
4. according to arbitrary described magnetic fluid seal vacuum tightness detection system in claims 1 to 3, it is characterized in that, between described forepump and described molecular pump and described vacuum chamber, be equipped with vacuum valve, to vacuum system, exitting and abolishing in the process of vacuum, close the vacuum valve between described molecular pump and described vacuum chamber, with the large quantity of air of avoiding the blade of described molecular pump to be entered suddenly, break.
5. magnetic fluid seal vacuum tightness detection system according to claim 4, it is characterized in that, described vacuum meter is connected with described vacuum chamber cavity, and described vacuum meter records, and the vacuum values showing by described vacuum meter display is the limit vacuum-resistant degree of magnetic fluid seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320430671.2U CN203443756U (en) | 2013-07-19 | 2013-07-19 | Vacuum degree detecting system for magnetofluid sealing member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320430671.2U CN203443756U (en) | 2013-07-19 | 2013-07-19 | Vacuum degree detecting system for magnetofluid sealing member |
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| Publication Number | Publication Date |
|---|---|
| CN203443756U true CN203443756U (en) | 2014-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320430671.2U Expired - Fee Related CN203443756U (en) | 2013-07-19 | 2013-07-19 | Vacuum degree detecting system for magnetofluid sealing member |
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| CN (1) | CN203443756U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107084822A (en) * | 2017-06-14 | 2017-08-22 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
| CN109742010A (en) * | 2018-11-23 | 2019-05-10 | 暨南大学 | Vacuum for vacuum instrument is into the method for varying |
-
2013
- 2013-07-19 CN CN201320430671.2U patent/CN203443756U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107084822A (en) * | 2017-06-14 | 2017-08-22 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
| CN107084822B (en) * | 2017-06-14 | 2018-04-27 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test device suitable for superconduction proton precessional magnetometer |
| CN109742010A (en) * | 2018-11-23 | 2019-05-10 | 暨南大学 | Vacuum for vacuum instrument is into the method for varying |
| CN109742010B (en) * | 2018-11-23 | 2021-03-23 | 暨南大学 | Vacuum sample feeding and changing method for vacuum instrument |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: JIANGSU HINANO PRECISION EQUIPMENT CO., LTD. Free format text: FORMER NAME: JIANGSU HINANO PRECISION ASSEMBLY + NANO MATERIALS CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 226009 Jiangsu city of Nantong Province, Nantong economic and Technological Development Zone, Road No. 1692 building 10 Yuan electric machine on the east side of the bottom Patentee after: JIANGSU HINANO PRECISION ASSEMBLY CO., LTD. Address before: 226000 Jiangsu city of Nantong province Nantong City Economic and Technological Development Zone Tongsheng Road No. 188 B block 4 layer Patentee before: Jiangsu Haina Magnetic Nano New Material Technology Co., Ltd. |
|
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yang Yang Inventor before: Yu Quelin Inventor before: Zhao Zhangyun Inventor before: Yang Yang |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140219 Termination date: 20170719 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |