CN202793702U - Evacuating and pressurizing device for helium mass spectrometer leak detection - Google Patents
Evacuating and pressurizing device for helium mass spectrometer leak detection Download PDFInfo
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- CN202793702U CN202793702U CN 201220379679 CN201220379679U CN202793702U CN 202793702 U CN202793702 U CN 202793702U CN 201220379679 CN201220379679 CN 201220379679 CN 201220379679 U CN201220379679 U CN 201220379679U CN 202793702 U CN202793702 U CN 202793702U
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- helium mass
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- 239000001307 helium Substances 0.000 title claims abstract description 23
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 23
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium(0) Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 239000007789 gases Substances 0.000 claims abstract description 32
- 230000001702 transmitter Effects 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 11
- 238000001819 mass spectrum Methods 0.000 claims description 8
- 239000000463 materials Substances 0.000 abstract description 5
- 239000003570 air Substances 0.000 abstract 12
- 239000003638 reducing agents Substances 0.000 abstract 2
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
The utility model discloses an evacuating and pressurizing device for helium mass spectrometer leak detection. The evacuating and pressurizing device comprises a vacuum air pump, wherein the vacuum air pump is connected with an air outlet of a vacuum reducer value; an air inlet of the vacuum reducer valve is connected with the air outlet of a pump-out valve; the air inlet of the pump-out valve is connected with the air outlet of an inflation valve and the air inlet of a micrometering valve; the air outlet of the micrometering valve is connected with one end of a pressure retaining valve; the other end of the pressure retaining valve is connected with an absolute pressure transmitter and a work-piece through an interface of a seal box; the work-piece is formed inside the seal box; the interface at the other end of the seal box is connected with the air inlet of a leakage detection valve; the air outlet of the leakage detection valve is connected with a suction gun mouth sleeve; a suction gun mouth of a suction gun is connected with the suction gun mouth sleeve, and the air outlet of the suction gun is connected with a helium mass spectrometer leak detector. The evacuating and pressurizing device is simple in structure; and the used material is a common material. Therefore, the cost is low, and the detection requirements that a few of special work-pieces need to detect the leakage rate and total leaking gas is detected within a certain period of time are solved.
Description
Technical field:
The utility model relates generally to the helium mass spectrum leak detection field, specifically a kind of pressue device of finding time for helium mass spectrum leak detection.
Background technology:
When some special workpieces need to detect slip with gas leakage total amount within a certain period of time, conventional detection method can't satisfy accuracy requirement or functional requirement at present, and the precision of detection methods such as water inspection and pressurize method does not satisfy requirement.Detect in the market the slip precision the highest be exactly helium mass spectrometer leak detector, but usually helium mass spectrometer leak detector does not possess again the function that detects the gas leakage total amount.So also do not have equipment and device can satisfy simultaneously the Leak Detection requirement of some special workpieces at present.
The utility model content:
The utility model purpose is exactly in order to remedy the defective of prior art, a kind of pressue device of finding time for helium mass spectrum leak detection to be provided, having realized that some special workpieces need to detect slip and the testing requirement that detects within a certain period of time the gas leakage total amount.
The utility model is achieved through the following technical solutions:
A kind of pressue device of finding time for helium mass spectrum leak detection, include vacuum air pump, vacuum air pump links to each other with the gas outlet of VRV, the air intake opening of VRV links to each other with the gas outlet of evacuation valve, the air intake opening of evacuation valve links to each other with the gas outlet of gas filling valve and the air intake opening of micrometering valve again, the gas outlet of micrometering valve links to each other with an end of pressure retaining valve, the other end of pressure retaining valve and absolute pressure transmitter link to each other with workpiece with interface by seal box, workpiece is inner at seal box, the other end interface of seal box links to each other with the air intake opening of leak detector valve, the gas outlet of leak detector valve links to each other with the suction gun muzzle, the suction gun mouth of suction gun links to each other with the suction gun muzzle, and the gas outlet of suction gun links to each other with helium mass spectrometer leak detector.
Described vacuum air pump and VRV are realized the controllable adjustable to vacuum tightness; By the direct display device internal pressure of absolute pressure transmitter; Can effectively control by micrometering valve and to find time and pressing speed; Leak detector valve is two-position three-way valve, and generally the gas outlet of leak detector valve is communicated with atmosphere; Helium mass spectrometer leak detector has increased the function that detects leakage helium total amount.
Principle of work of the present utility model is:
Pass through vacuum air pump, VRV, with evacuation valve, micrometering valve and pressure retaining valve etc. vacuumize workpiece, close evacuation valve after reaching the certain vacuum degree, then workpiece is filled with helium opening gas filling valve, after reaching setting value, the helium that is filled with closes pressure retaining valve and gas filling valve, at this moment the helium that is filled with inside workpiece is stored in seal box inside by the leakage of small opening and the helium that leaks out of material itself, behind certain hour, open leak detector valve, by suction gun the seal box internal gas is drawn in the helium mass spectrometer leak detector, thereby detects slip and the gas leakage total amount of workpiece.
The utility model has the advantages that:
The utility model is simple in structure, and material therefor is conventional material, and cost is low, has solved some special workpieces and need to detect slip and the testing requirement that detects within a certain period of time the gas leakage total amount.
Description of drawings:
Fig. 1 is structural representation of the present utility model.
Embodiment:
A kind of pressue device of finding time for helium mass spectrum leak detection, include vacuum air pump 1, vacuum air pump 1 links to each other with the gas outlet of VRV 2, the air intake opening of VRV 2 links to each other with the gas outlet of evacuation valve 3, the air intake opening of evacuation valve 3 links to each other with the gas outlet of gas filling valve 4 and the air intake opening of micrometering valve 5 again, the gas outlet of micrometering valve 5 links to each other with an end of pressure retaining valve 6, the other end of pressure retaining valve 6 and absolute pressure transmitter 7 link to each other with workpiece 9 with interface by seal box 8, workpiece 9 is in seal box 8 inside, the other end interface of seal box 8 links to each other with the air intake opening of leak detector valve 10, the gas outlet of leak detector valve 10 links to each other with suction gun muzzle 11, the suction gun mouth of suction gun 12 links to each other with suction gun muzzle 11, and the gas outlet of suction gun 12 links to each other with helium mass spectrometer leak detector 13.
Claims (2)
1. pressue device of finding time that is used for helium mass spectrum leak detection, it is characterized in that: include vacuum air pump, vacuum air pump links to each other with the gas outlet of VRV, the air intake opening of VRV links to each other with the gas outlet of evacuation valve, the air intake opening of evacuation valve links to each other with the gas outlet of gas filling valve and the air intake opening of micrometering valve again, the gas outlet of micrometering valve links to each other with an end of pressure retaining valve, the other end of pressure retaining valve and absolute pressure transmitter link to each other with workpiece with interface by seal box, workpiece is inner at seal box, the other end interface of seal box links to each other with the air intake opening of leak detector valve, the gas outlet of leak detector valve links to each other with the suction gun muzzle, the suction gun mouth of suction gun links to each other with the suction gun muzzle, and the gas outlet of suction gun links to each other with helium mass spectrometer leak detector.
2. a kind of pressue device of finding time for helium mass spectrum leak detection according to claim 1, it is characterized in that: described leak detector valve is two-position three-way valve, and the gas outlet of leak detector valve is communicated with atmosphere.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220379679 CN202793702U (en) | 2012-07-31 | 2012-07-31 | Evacuating and pressurizing device for helium mass spectrometer leak detection |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220379679 CN202793702U (en) | 2012-07-31 | 2012-07-31 | Evacuating and pressurizing device for helium mass spectrometer leak detection |
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| CN202793702U true CN202793702U (en) | 2013-03-13 |
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| CN 201220379679 Active CN202793702U (en) | 2012-07-31 | 2012-07-31 | Evacuating and pressurizing device for helium mass spectrometer leak detection |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103454051A (en) * | 2013-09-11 | 2013-12-18 | 博益(天津)气动技术研究所有限公司 | Device making diffusion type nitrogen-hydrogen leak detector be not affected by environmental background |
| CN103471782A (en) * | 2013-09-11 | 2013-12-25 | 博益(天津)气动技术研究所有限公司 | Device enabling suction type nitrogen and hydrogen leakage detection instrument to be free of influences by environmental background |
| CN104006930A (en) * | 2014-06-11 | 2014-08-27 | 沈阳航天新光集团有限公司 | Leak detection test bed |
| CN104296943A (en) * | 2014-09-25 | 2015-01-21 | 展测真空技术（上海）有限公司 | Vacuum type helium detecting equipment and method thereof |
| CN104596706A (en) * | 2015-02-10 | 2015-05-06 | 天津博益气动股份有限公司 | Additional device for nitrogen hydrogen leak detector application occasion expansion |
| CN105784297A (en) * | 2014-12-26 | 2016-07-20 | 北京有色金属研究总院 | Hydrogen storage device hydrogen leakage rate testing gas collection device and method thereof |
| CN105987796A (en) * | 2015-02-12 | 2016-10-05 | 广州市和晋自动化控制技术有限公司 | Method and device for detecting gas concentration |
| CN109489914A (en) * | 2018-12-20 | 2019-03-19 | 中国石油集团川庆钻探工程有限公司 | Downhole tool experimental provision pneumatic sealing test method |
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2012
- 2012-07-31 CN CN 201220379679 patent/CN202793702U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103454051A (en) * | 2013-09-11 | 2013-12-18 | 博益(天津)气动技术研究所有限公司 | Device making diffusion type nitrogen-hydrogen leak detector be not affected by environmental background |
| CN103471782A (en) * | 2013-09-11 | 2013-12-25 | 博益(天津)气动技术研究所有限公司 | Device enabling suction type nitrogen and hydrogen leakage detection instrument to be free of influences by environmental background |
| CN104006930A (en) * | 2014-06-11 | 2014-08-27 | 沈阳航天新光集团有限公司 | Leak detection test bed |
| CN104296943A (en) * | 2014-09-25 | 2015-01-21 | 展测真空技术（上海）有限公司 | Vacuum type helium detecting equipment and method thereof |
| CN105784297A (en) * | 2014-12-26 | 2016-07-20 | 北京有色金属研究总院 | Hydrogen storage device hydrogen leakage rate testing gas collection device and method thereof |
| CN104596706A (en) * | 2015-02-10 | 2015-05-06 | 天津博益气动股份有限公司 | Additional device for nitrogen hydrogen leak detector application occasion expansion |
| CN105987796A (en) * | 2015-02-12 | 2016-10-05 | 广州市和晋自动化控制技术有限公司 | Method and device for detecting gas concentration |
| CN109489914A (en) * | 2018-12-20 | 2019-03-19 | 中国石油集团川庆钻探工程有限公司 | Downhole tool experimental provision pneumatic sealing test method |
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