CN106802218A - A kind of vacuum coating cavity leak detection system and leak hunting method - Google Patents
A kind of vacuum coating cavity leak detection system and leak hunting method Download PDFInfo
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- CN106802218A CN106802218A CN201710191928.6A CN201710191928A CN106802218A CN 106802218 A CN106802218 A CN 106802218A CN 201710191928 A CN201710191928 A CN 201710191928A CN 106802218 A CN106802218 A CN 106802218A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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Abstract
The present invention provides a kind of vacuum coating cavity leak detection system and leak hunting method, including：Tested vacuum cavity, leakage detection apparatus, electric-control system, tested vacuum cavity downside is connected with leakage detection apparatus, electric-control system connection control leakage detection apparatus, equipped with broken sky device I and vacuum detection component I on the tested vacuum chamber body sidewall, the leakage detection apparatus include high-vacuum pump, prime pump group I, prime pump group II, vacuum detection component, broken sky device, helium mass spectrometer leak detector, spray helium system, high-vacuum pump is directly installed on the side wall of tested vacuum cavity by ring flange, prime pump group I, prime pump group II is connected by vacuum pipe, connected with high-vacuum pump by high vacuum butterfly valve I afterwards；The present invention uses automatic control system, has a key operation function to electric components；The present invention have leak detection sensitivities it is high, can be accurately positioned small opening position and can Quantitative evaluation leak source size the advantages of.Meanwhile, the present invention has simple structure, easy-operating advantage.
Description
Technical field
The present invention relates to vacuum cavity leak hunting technology field, specially a kind of vacuum coating cavity leak detection system and leak detection side
Method.
Background technology
Glass-modified technique refers mainly to the coating film on glass that a class needs to be carried out under higher vacuum with vacuum coating.Plated film
Glass production line vacuum equipped is the low drain of one of key equipment in Coated Glass Line, plated film section base vacuum high and cavity
Rate is to produce the precondition and guarantee of high-quality coated glass.Therefore, the vacuum coating cavity processed does not require nothing more than quickly evacuation,
And require base vacuum ＜ 8 × 10-6Mbar, cavity leak rate ＜ 1 × 10-7Mbar.l/s, to ensure base vacuum and leak rate,
Vacuum cavity must use air-tightness welding manner, extremely strict to weld seam quality requirement, only reach above critical process
Technology, could finally ensure the uniformity and stability of film on coated glass.
Traditional leak hunting method mainly has pressurization leakage detection method and vacuum testing.Pressurization leakage detection method is filled with tested container
The halogen gas of certain pressure, when there is small opening on container, gas is just escaped from small opening, during leak detection, with probe in outside
Find small opening.The method has that leak detection sensitivities are low and can not be pinpoint.Vacuum testing is by tested container
After portion evacuates, then substances are imposed on container appearance suspected locations.If any small opening, substances will pass through small opening and enter appearance
Device, is indicated by certain methods or instrument, so as to can determine whether out position and the size of small opening.Coating film on glass cavity manufactory
Family is general vacuumize leak detection using diffusion pump, but the method has that background vacuum is low and high pollution, and right
More small small opening is difficult to hunt leak.
The content of the invention
Technical problem solved by the invention is to provide a kind of vacuum coating cavity leak detection system and leak hunting method, to solve
Problem in certainly above-mentioned background technology.
Technical problem solved by the invention is realized using following technical scheme：A kind of vacuum coating cavity leak detection system
System, including：Tested vacuum cavity, leakage detection apparatus, electric-control system, tested vacuum cavity downside are connected with leakage detection apparatus, automatically controlled system
System connection control leakage detection apparatus, equipped with broken sky device I and vacuum detection component I, the inspection on the tested vacuum chamber body sidewall
Leakage device includes high-vacuum pump, prime pump group I, prime pump group II, high vacuum butterfly valve I, high vacuum butterfly valve II, vacuum detecting unit
Part, broken sky device, helium mass spectrometer leak detector, spray helium system, high-vacuum pump are directly installed on tested vacuum cavity by ring flange
On the wall of side, prime pump group I, prime pump group II are connected by vacuum pipe, are connected with high-vacuum pump by high vacuum butterfly valve I afterwards；
On main vacuum manifold between high vacuum butterfly valve I and prime pump group I, it is provided with by between three-way pipeline and tested vacuum cavity
One branch road vacuum pipe, the main vacuum manifold and branch road vacuum pipe are connected by bellows in position, the branch road
Vacuum pipe is connected with tested vacuum cavity by high vacuum butterfly valve II；Vacuum tube between high vacuum butterfly valve I and prime pump group I
Vacuum detection component II and broken sky device II, and reserved leak detection mouth valve are installed, helium mass spectrometer leak detector is by leak detection on road
Mouth valve is connected in vacuum pumping system；The high-vacuum pump, prime pump group I, prime pump group II, high vacuum butterfly valve I, Gao Zhen
Empty butterfly valve II, vacuum detection component I, vacuum detection component II are connected by cable with electric-control system.
The prime pump group I is lobe pump, and prime pump group II is sliding vane rotary pump or screw pump.
The high-vacuum pump is turbomolecular pump.
Manually angle valve and bellows are connected in main exhaust pipe the exhaust outlet of the high-vacuum pump.
The high-vacuum pump is water-cooled pump, and needs series connection water-carrying capacity to switch on circulating cooling pipeline.
The broken empty device I is connected on tested vacuum cavity and vacuum pipe by Pneumatic corner valve I, is broken sky device II and is led to
Pneumatic corner valve II is crossed to be connected on tested vacuum cavity and vacuum pipe, the Pneumatic corner valve I, Pneumatic corner valve II by cable with
Electric-control system is connected.
The vacuum detection component I is compound ionization gauge, can detect vacuum ranges 5x10-9~1000mbar；It is described true
Manually angle valve is connected empty detecting element I with tested vacuum cavity.
The vacuum detection component II is standard Pirani gauge, can detect vacuum ranges 5x10-4~1000mbar；It is described
Vacuum detection component II is connected by KF type flange-interfaces with main vacuum manifold.
A kind of vacuum coating cavity leak hunting method, comprises the following steps：
S101. electrical wiring and the connection of each pipeline are first checked for, it is ensured that each electric components wiring is correct and hardware pipe
Road connection is correct；
S102. cabinet external power is connected, cabinet inner breaker is closed；
S103. ON cycle cooling water system；
S104. sliding vane rotary pump and lobe pump start button are pressed successively on automatically controlled display screen；
S105. molecule pump conduit Manual angular valve is opened, to maximum opening；Open main vacuum manifold Pneumatic butterfly valve；
S106. treat that chamber vacuum degree reaches 8x10-2During mbar, molecular pump start button is pressed on automatically controlled display screen；
S107. vacuum cavity vacuum to be detected reaches 5x10-5During mbar, leak detector is opened, treated after the completion of self-inspection, opened
Leak detection mouth valve, now can carry out leak detection operation to tested vacuum cavity using helium system is sprayed.
S108. after the completion of waiting to hunt leak, molecular pump is closed；
S19. wait 15~20 minutes, treat that molecular pump closes main vacuum manifold Pneumatic butterfly valve after stopping；
S110. lobe pump and sliding vane rotary pump are closed successively on automatically controlled display screen；
S111. the broken sky angle valve of main vacuum manifold and the broken sky angle valve of cavity are opened successively, carry out brokenly sky；
S113. disconnect recirculated cooling water and disconnect cabinet inner breaker, disconnect cabinet external power, complete the inspection of vacuum coating cavity
Leakage.
Compared with disclosed technology, there is advantages below in the present invention：The present invention uses automatic control system, to electric unit's device
Part has a key operation function；The present invention have leak detection sensitivities it is high, can be accurately positioned small opening position and can Quantitative evaluation leak
The advantages of point size.Meanwhile, the present invention has simple structure, easy-operating advantage.
Brief description of the drawings
Fig. 1 is leak detection system structural representation of the invention.
Fig. 2 is leak hunting method schematic flow sheet of the invention.
Specific embodiment
In order that technological means of the invention, creation characteristic, workflow, application method reached purpose and effect are easy to bright
It is white to understand, below in conjunction with the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described,
Obviously, described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based in the present invention
Embodiment, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all
Belong to the scope of protection of the invention.
As shown in Figure 1 and Figure 2, a kind of vacuum coating cavity leak detection system, including：Tested vacuum cavity 1, leakage detection apparatus, electricity
Control system, the tested downside of vacuum cavity 1 is connected with leakage detection apparatus, electric-control system connection control leakage detection apparatus, the tested vacuum
Equipped with broken sky device I2 and vacuum detection component I3 on the side wall of cavity 1, the leakage detection apparatus include high-vacuum pump 4, prime pump group
I11, prime pump group II12, high vacuum butterfly valve I7, high vacuum butterfly valve II14, vacuum detection component II8, broken sky device II9, helium matter
Spectrum leak detector 15, spray helium system 16, high-vacuum pump 4 is directly installed on the side wall of tested vacuum cavity 1 by ring flange, prime
Pump group I11, prime pump group II12 are connected by vacuum pipe, are connected with high-vacuum pump 4 by high vacuum butterfly valve I7 afterwards；In Gao Zhen
On main vacuum manifold between empty butterfly valve I7 and prime pump group I11, one is provided with by between three-way pipeline and tested vacuum cavity 1
Branch road vacuum pipe, the main vacuum manifold and branch road vacuum pipe are connected by bellows in position, and the branch road is true
Vacant duct is connected with tested vacuum cavity 1 by high vacuum butterfly valve II14；It is true between high vacuum butterfly valve I7 and prime pump group I11
Vacuum detection component II8 and broken sky device II9, and reserved leak detection mouth valve 13, helium mass spectrometer leak detector are installed on vacant duct
15 are connected in vacuum pumping system by mouth valve 13 of hunting leak；The high-vacuum pump 4, prime pump group I11, prime pump group
II12, high vacuum butterfly valve I7, high vacuum butterfly valve II14, vacuum detection component I3, vacuum detection component II8 by cable with it is automatically controlled
System 17 is connected.
Specifically, the prime pump group I11 is lobe pump, prime pump group II12 is sliding vane rotary pump or screw pump.
Specifically, the high-vacuum pump 4 be turbomolecular pump, according to technological requirement can many it is used in parallel.
Specifically, the exhaust outlet of the high-vacuum pump 4 manually angle valve 501 and bellows are connected to main exhaust pipe
In.
Specifically, the high-vacuum pump 4 is water-cooled pump, and series connection water-carrying capacity switch 6 is needed on circulating cooling pipeline.
Specifically, the broken empty device I2 is connected on tested vacuum cavity 1 and vacuum pipe by Pneumatic corner valve I101,
Broken sky device II9 is connected on tested vacuum cavity 1 and vacuum pipe by Pneumatic corner valve II102, the Pneumatic corner valve I101,
Pneumatic corner valve II102 is connected by cable with electric-control system 17.
Specifically, the vacuum detection component I3 is compound ionization gauge, vacuum ranges 5x10 is can detect-9~
1000mbar；Manually angle valve 502 is connected the vacuum detection component I3 with tested vacuum cavity 1.
Specifically, the vacuum detection component II8 is standard Pirani gauge, vacuum ranges 5x10 is can detect-4~
1000mbar；The vacuum detection component II8 is connected by KF type flange-interfaces with main vacuum manifold.
Embodiment 1
A kind of vacuum coating cavity leak detection system, including：Tested vacuum cavity 1, leakage detection apparatus, electric-control system, are detected true
The downside of cavity body 1 is connected with leakage detection apparatus, and electric-control system connection control leakage detection apparatus are filled on the side wall of the tested vacuum cavity 1
There is broken sky device I2 and vacuum detection component I3, the leakage detection apparatus include high-vacuum pump 4, prime pump group I11, prime pump group
II12, high vacuum butterfly valve I7, vacuum detection component II8, broken sky device II9, helium mass spectrometer leak detector 15, spray helium system 16 and electricity
Control system 17, high-vacuum pump 4 is directly installed on the side wall of tested vacuum cavity 1 by ring flange, prime pump group I11, prime
Pump group II12 is connected by vacuum pipe, is connected with high-vacuum pump 4 by high vacuum butterfly valve I7 afterwards；High vacuum butterfly valve I7 and prime
Vacuum detection component II8 and broken sky device II9, and reserved leak detection mouth valve 13 are installed on the vacuum pipe between pump 11,
Helium mass spectrometer leak detector 15 is connected in vacuum pumping system by mouth valve 13 of hunting leak；Wherein, high-vacuum pump 4, prime pump group
I11, prime pump group II12, high vacuum butterfly valve I7, vacuum detection component I3, vacuum detection component II8 etc. by cable with it is automatically controlled
System 17 is connected.
In this embodiment, prime pump group I11, prime pump group II12 are the combination of lobe pump and sliding vane rotary pump, or Roots
The combination of pump and screw pump, by the Proper Match of vavuum pump, reaches the efficiency for improving and vacuumizing.High-vacuum pump 4 uses turbine
Molecular pump, and according to technological requirement can many it is used in parallel.The exhaust outlet of high-vacuum pump 4 manually angle valve 501 and ripple
Pipe is connected in main exhaust pipe, while convenient connection, according to technique manually angle valve 501 can be needed to keep apart certain in time
Platform molecular pump.High-vacuum pump 4 is water-cooled pump, and series connection water-carrying capacity switch 6 is needed on circulating cooling pipeline, to real-time monitoring point
Sub- pump cooling water flow, prevents the unexpected damage cut off the water supply to molecular pump.Broken sky device I2, broken sky device II9 pass through Pneumatic corner valve
I101, Pneumatic corner valve II102 are connected respectively on tested vacuum cavity 1 and main vacuum manifold, the Pneumatic corner valve I101, pneumatic
Angle valve II102 is connected by cable with electric-control system 17.Vacuum detection component I3 on tested vacuum cavity 1 is compound
Ionization gauge, can detect vacuum ranges 5x10-9~1000mbar, and manually angle valve 502 is connected with tested vacuum cavity 1.
Vacuum detection component II8 on main vacuum manifold is standard Pirani gauge, can detect vacuum ranges 5x10-4~
1000mbar, and be directly connected to by KF types flange-interface and main vacuum manifold.Main vacuum manifold can be set ripple in position
Line pipe is connected, to reduce influence of vibrations during vacuum pump work to whole system.
When carrying out vacuum leak hunting, S101 first checks for electrical wiring and the connection of each pipeline, it is ensured that each electric components wiring
The connection of correct and hardware pipeline is correct；S102 connects cabinet external power, closes cabinet inner breaker；S103 ON cycle cooling water systems
System；S104 presses sliding vane rotary pump or screw pump and lobe pump start button successively on automatically controlled display screen；S105 opens molecular pump 4 and manages
The manual angle valve in road, to maximum opening；Open main vacuum manifold Pneumatic butterfly valve 7；The S106 vacuums of vacuum cavity 1 to be detected reach
8x10-2During mbar, the start button of molecular pump 4 is pressed on automatically controlled display screen；The S107 vacuums of vacuum cavity 1 to be detected reach
5x10-5During mbar, leak detector 15 is opened, treated after the completion of self-inspection, open leak detection mouth valve 13, now can be to being detected vacuum cavity 1
Leak detection operation is carried out using helium system 16 is sprayed.Treat after the completion of S108 leak detections, S109 closes molecular pump 4；S110 waits 15~20 points
Clock, treats that molecular pump 4 closes main vacuum manifold Pneumatic butterfly valve I7 after stopping；S111 closes lobe pump successively on automatically controlled display screen
With sliding vane rotary pump or screw pump；S112 opens main vacuum manifold Pneumatic corner valve I101 and cavity Pneumatic corner valve II102 successively, is broken
It is empty；S113 disconnects recirculated cooling water；S114 disconnects cabinet inner breaker, disconnects cabinet external power, completes the leak detection of vacuum coating cavity.
The embodiment has background vacuum high, and precision of detecting leak gas is high, can detect more small leak source, and registration,
Strong adaptability.
Embodiment 2
A kind of vacuum coating cavity leak detection system, including：Tested vacuum cavity 1, leakage detection apparatus, electric-control system, are detected true
The downside of cavity body 1 is connected with leakage detection apparatus, and electric-control system connection control leakage detection apparatus are filled on the side wall of the tested vacuum cavity 1
There is broken sky device I2 and vacuum detection component I3, the leakage detection apparatus include lobe pump, sliding vane rotary pump or screw pump, high vacuum butterfly valve
II14, vacuum detection component II8, broken sky device II9, helium mass spectrometer leak detector 15, spray helium system 16 and electric-control system 17, Roots
Pump, sliding vane rotary pump or screw pump are connected by vacuum pipe, are connected with tested vacuum cavity 1 by high vacuum butterfly valve II14 afterwards；It is high
Vacuum detection component II8 and broken sky device II9 is installed on the vacuum pipe between vacuum butterfly valve II14 and lobe pump, empty dress is broken
Put I2, broken sky device I9 and tested vacuum cavity 1 and vacuum tube are connected respectively to by Pneumatic corner valve I101, Pneumatic corner valve II102
On road, the Pneumatic corner valve I101, Pneumatic corner valve II102 are connected by cable with electric-control system 17.Installed in tested vacuum chamber
Vacuum detection component I3 on body 1 is compound ionization gauge, can detect vacuum ranges 5x10-9~1000mbar, and manually
Angle valve 502 is connected with tested vacuum cavity 1.Vacuum detection component II8 on vacuum pipe is standard Pirani gauge, can
Detection vacuum ranges 5x10-4~1000mbar, and be directly connected to by KF types flange-interface and main vacuum manifold.Vacuum pipe
Reserved leak detection mouth valve 13, helium mass spectrometer leak detector 15 is connected in vacuum pumping system by mouth valve 13 of hunting leak.Vacuum pipe
Bellows connection can be set in position, to reduce influence of vibrations during vacuum pump work to whole system.Wherein, Roots
Pump, sliding vane rotary pump or screw pump, high vacuum butterfly valve II14, vacuum detection component I3, vacuum detection component I I8 etc. by cable with
Electric-control system 17 is connected.
When carrying out vacuum leak hunting, electrical wiring and the connection of each pipeline are first checked for, it is ensured that each electric components wiring is correct
And the connection of hardware pipeline is correct；Cabinet external power is connected, cabinet inner breaker is closed；As vavuum pump needs water-cooled, then ON cycle is cold
But water system, and the installation water-carrying capacity switch 6 on cooling line；Pressed successively on automatically controlled display screen sliding vane rotary pump or screw pump and
Lobe pump start button；Vacuum pipe Pneumatic butterfly valve II14 is opened, tested vacuum cavity 1 is vacuumized；Treat chamber vacuum
After degree stabilization, leak detector 15 is opened；Treat after the completion of self-inspection, open leak detection mouth valve 13, now can be to the tested profit of vacuum cavity 1
Leak detection operation is carried out with spray helium system 16.After the completion of waiting to hunt leak, vacuum pipe Pneumatic butterfly valve II14 is closed；On automatically controlled display screen
Lobe pump and sliding vane rotary pump or screw pump are closed successively；Vacuum pipe Pneumatic corner valve I101, Pneumatic corner valve II102 are opened successively, are entered
The broken sky of row；Disconnect recirculated cooling water；Cabinet inner breaker is disconnected, cabinet external power is disconnected, the leak detection of vacuum coating cavity is completed.
The example structure is simple, easy to operate, can detect general leak source, and sensitivity is higher.
General principle of the invention, principal character and advantages of the present invention has been shown and described above.The technology of the industry
Personnel it should be appreciated that the present invention is not limited to the above embodiments, simply explanation described in above-described embodiment and specification this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and modifications of the present invention are possible, these changes
Change and improvement all fall within the protetion scope of the claimed invention.Claimed scope of the invention by appending claims and
Its equivalent thereof.
Claims (8)
1. a kind of vacuum coating cavity leak detection system, including：Tested vacuum cavity, leakage detection apparatus, electric-control system, its feature exist
In：Tested vacuum cavity downside is connected with leakage detection apparatus, electric-control system connection control leakage detection apparatus, the tested vacuum chamber side
Equipped with broken sky device I and vacuum detection component I on wall, the leakage detection apparatus include high-vacuum pump, prime pump group I, prime pump group
II, high vacuum butterfly valve I, high vacuum butterfly valve II, vacuum detection component, broken sky device, helium mass spectrometer leak detector, spray helium system, Gao Zhen
Empty pump is directly installed on the side wall of tested vacuum cavity by ring flange, and prime pump group I, prime pump group II pass through vacuum pipe
Series connection, is connected by high vacuum butterfly valve I with high-vacuum pump afterwards；Main vacuum manifold between high vacuum butterfly valve I and prime pump group I
On, by being provided with a branch road vacuum pipe, the main vacuum manifold and branch road vacuum between three-way pipeline and tested vacuum cavity
Pipeline is connected by bellows in position, and the branch road vacuum pipe is connected with tested vacuum cavity by high vacuum butterfly valve II
Connect；Vacuum detection component II and broken sky device II is installed on the vacuum pipe between high vacuum butterfly valve I and prime pump group I, and
And leak detection mouth valve is reserved, helium mass spectrometer leak detector is connected in vacuum pumping system by mouth valve of hunting leak；The high-vacuum pump,
Prime pump group I, prime pump group II, high vacuum butterfly valve I, high vacuum butterfly valve II, vacuum detection component I, vacuum detection component II lead to
Cable is crossed to be connected with electric-control system.
2. a kind of vacuum coating cavity leak detection system according to claim 1, it is characterised in that：The prime pump group I is
Lobe pump, prime pump group II is sliding vane rotary pump or screw pump；The high-vacuum pump is turbomolecular pump.
3. a kind of vacuum coating cavity leak detection system according to claim 1, it is characterised in that：The row of the high-vacuum pump
Manually angle valve and bellows are connected in main exhaust pipe gas port.
4. a kind of vacuum coating cavity leak detection system according to claim 1, it is characterised in that：The high-vacuum pump is water
Cold pump, and need series connection water-carrying capacity to switch on circulating cooling pipeline.
5. a kind of vacuum coating cavity leak detection system according to claim 1, it is characterised in that：The broken empty device I leads to
Cross Pneumatic corner valve I to be connected on tested vacuum cavity and vacuum pipe, broken sky device II is connected to tested by Pneumatic corner valve II
On vacuum cavity and vacuum pipe, the Pneumatic corner valve I, Pneumatic corner valve II are connected by cable with electric-control system.
6. a kind of vacuum coating cavity leak detection system according to claim 1, it is characterised in that：The vacuum detection component
I is compound ionization gauge, can detect vacuum ranges 5x10-9~1000mbar；The vacuum detection component I manually angle valve with
Tested vacuum cavity connection.
7. a kind of vacuum coating cavity leak detection system according to claim 1, it is characterised in that：The vacuum detection component
II is standard Pirani gauge, can detect vacuum ranges 5x10-4~1000mbar；The vacuum detection component II passes through KF type methods
Blue interface is connected with main vacuum manifold.
8. a kind of vacuum coating cavity leak hunting method, comprises the following steps：
S101. electrical wiring and the connection of each pipeline are first checked for, it is ensured that each electric components wiring is correct and hardware pipeline connects
Connect correct；
S102. cabinet external power is connected, cabinet inner breaker is closed；
S103. ON cycle cooling water system；
S104. sliding vane rotary pump and lobe pump start button are pressed successively on automatically controlled display screen；
S105. molecule pump conduit Manual angular valve is opened, to maximum opening；Open main vacuum manifold Pneumatic butterfly valve；
S106. treat that chamber vacuum degree reaches 8x10-2During mbar, molecular pump start button is pressed on automatically controlled display screen；
S107. vacuum cavity vacuum to be detected reaches 5x10-5During mbar, leak detector is opened, treated after the completion of self-inspection, open leak detection
Mouth valve, now can carry out leak detection operation to tested vacuum cavity using helium system is sprayed；
S108. after the completion of waiting to hunt leak, molecular pump is closed；
S19. wait 15~20 minutes, treat that molecular pump closes main vacuum manifold Pneumatic butterfly valve after stopping；
S110. lobe pump and sliding vane rotary pump are closed successively on automatically controlled display screen；
S111. the broken sky angle valve of main vacuum manifold and the broken sky angle valve of cavity are opened successively, carry out brokenly sky；
S113. disconnect recirculated cooling water and disconnect cabinet inner breaker, disconnect cabinet external power, complete the leak detection of vacuum coating cavity.
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| CN109323819A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection method |
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| CN111458081A (en) * | 2019-01-22 | 2020-07-28 | 西安高压电器研究院有限责任公司 | Dynamic helium mass spectrum leak detection airtightness test method and device for GI L bus |
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| CN109115430A (en) * | 2018-07-02 | 2019-01-01 | 常州市乐萌压力容器有限公司 | A kind of vacuum simulation space capsule and its leak hunting method |
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| CN110954281A (en) * | 2018-09-27 | 2020-04-03 | 山西米亚索乐装备科技有限公司 | Chamber leak detection system |
| CN110954281B (en) * | 2018-09-27 | 2023-09-29 | 汉瓦技术有限公司 | Chamber leak hunting system |
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| CN111739663A (en) * | 2020-07-27 | 2020-10-02 | 核工业西南物理研究院 | Vacuum helium leak detection tool and method suitable for nuclear fusion reaction device |
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