CN106802218B - Vacuum coating cavity leak detection system and leak detection method - Google Patents
Vacuum coating cavity leak detection system and leak detection method Download PDFInfo
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- CN106802218B CN106802218B CN201710191928.6A CN201710191928A CN106802218B CN 106802218 B CN106802218 B CN 106802218B CN 201710191928 A CN201710191928 A CN 201710191928A CN 106802218 B CN106802218 B CN 106802218B
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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Abstract
The invention provides a vacuum coating cavity leak detection system and a leak detection method, comprising the following steps: the device comprises a vacuum cavity to be detected, a leak detection device and an electric control system, wherein the leak detection device is connected to the lower side of the vacuum cavity to be detected, the electric control system is connected to control the leak detection device, a vacuum breaking device I and a vacuum detection element I are arranged on the side wall of the vacuum cavity to be detected, the leak detection device comprises a high vacuum pump, a forepump group I, a forepump group II, a vacuum detection element, a vacuum breaking device, a helium mass spectrum leak detector and a helium spraying system, the high vacuum pump is directly arranged on the side wall of the vacuum cavity to be detected through a flange plate, the forepump group I and the forepump group II are connected in series through a vacuum pipeline, and then are connected in series with the high vacuum pump through a high vacuum butterfly valve I; the invention adopts an automatic control system and has a one-key operation function for the electric components; the invention has the advantages of high leakage detection sensitivity, accurate positioning of the position of the leakage hole, quantitative judgment of the size of the leakage point and the like. Meanwhile, the invention has the advantages of simple structure and easy operation.
Description
Technical Field
The invention relates to the technical field of vacuum cavity leakage detection, in particular to a vacuum coating cavity leakage detection system and a leakage detection method.
Background
The vacuum coating for the glass modification process mainly refers to glass coating which needs to be carried out under a higher vacuum degree. The vacuum equipment of the coated glass production line is one of key equipment in the coated glass production line, and the vacuum of the coated section Gao Bende and the low leakage rate of the cavity are the precondition and guarantee of producing high-quality coated glass. Thus, the vacuum coating cavities processed not only require rapid evacuation, but also require a background vacuum < 8×10 -6 mbar, cavity leak rate < 1×10 -7 In order to ensure background vacuum and leak rate, the vacuum cavity has to adopt an airtight welding mode, the welding quality requirement is very strict, and only the key point is reachedThe uniformity and stability of the film layer of the coated glass can be finally ensured by the process technology.
The traditional leak detection method mainly comprises a pressurizing leak detection method and a vacuum leak detection method. The pressurized leak detection method is to fill halogen gas with certain pressure into the detected container, and when leakage holes exist in the container, the gas escapes from the leakage holes, and when leakage is detected, a probe is used to search the leakage holes from outside. The method has the problems of low leakage detection sensitivity and incapability of accurately positioning. The vacuum leak detection method is to evacuate the inside of the container to be detected and then apply the test substance to the suspicious position on the outside of the container. If a leak exists, the test substance enters the container through the leak and is indicated by some method or instrument, so that the position and the size of the leak can be judged. The manufacturing manufacturers of glass coating cavities generally use diffusion pumps to carry out vacuum pumping leakage detection, but the method has the problems of low background vacuum degree and high pollution, and is difficult to detect leakage for tiny leakage holes.
Disclosure of Invention
The invention aims to provide a vacuum coating cavity leak detection system and a leak detection method, which are used for solving the problems in the background technology.
The technical problems solved by the invention are realized by adopting the following technical scheme: a vacuum coating cavity leak detection system comprising: the device comprises a detected vacuum cavity, a leak detection device and an electric control system, wherein the leak detection device is connected to the lower side of the detected vacuum cavity, the electric control system is connected to control the leak detection device, a vacuum breaking device I and a vacuum detection element I are arranged on the side wall of the detected vacuum cavity, the leak detection device comprises a high-vacuum pump, a forepump group I, a forepump group II, a high-vacuum butterfly valve I, a high-vacuum butterfly valve II, a vacuum detection element, a vacuum breaking device, a helium mass spectrum leak detector and a helium spraying system, the high-vacuum pump is directly arranged on the side wall of the detected vacuum cavity through a flange plate, and the forepump group I and the forepump group II are connected in series through vacuum pipelines and then connected in series with the high-vacuum pump through the high-vacuum butterfly valve I; a branch vacuum pipeline is arranged on a main vacuum pipeline between the high vacuum butterfly valve I and the front-stage pump group I and between the main vacuum pipeline and the vacuum cavity to be detected through a tee joint pipeline, the main vacuum pipeline and the branch vacuum pipeline are connected at proper positions through corrugated pipes, and the branch vacuum pipeline is connected with the vacuum cavity to be detected through a high vacuum butterfly valve II; a vacuum detection element II and a vacuum breaking device II are arranged on a vacuum pipeline between the high vacuum butterfly valve I and the front-stage pump group I, a leak detection port valve is reserved, and the helium mass spectrometer leak detector is connected into a vacuum pumping system through the leak detection port valve; the high vacuum pump, the forepump group I, the forepump group II, the high vacuum butterfly valve I, the high vacuum butterfly valve II, the vacuum detection element I and the vacuum detection element II are connected with the electric control system through cables.
The front-stage pump set I is a Roots pump, and the front-stage pump set II is a rotary vane pump or a screw pump.
The high vacuum pump is a turbo molecular pump.
The exhaust port of the high vacuum pump is connected to the main exhaust pipeline through a manual angle valve and a corrugated pipe.
The high vacuum pump is a water-cooled pump, and a water flow switch is required to be connected in series on the circulating cooling pipeline.
The air breaking device I is connected to the vacuum cavity and the vacuum pipeline to be detected through the pneumatic angle valve I, the air breaking device II is connected to the vacuum cavity and the vacuum pipeline to be detected through the pneumatic angle valve II, and the pneumatic angle valve I and the pneumatic angle valve II are connected with the electric control system through cables.
The vacuum detection element I is a composite ionization gauge, and the detectable vacuum degree range is 5x10 -9 About 1000mbar; the vacuum detection element I is connected with the vacuum cavity to be detected through a manual angle valve.
The vacuum detection element II is a standard Pirani gauge, and the detectable vacuum degree range is 5x10 -4 About 1000mbar; and the vacuum detection element II is connected with the main vacuum pipeline through a KF type flange interface.
A vacuum coating cavity leak detection method comprises the following steps:
s101, firstly checking electric connection and connection of all pipelines, and ensuring that all electric components are correctly connected and hardware pipelines are correctly connected;
s102, switching on an external power supply of the cabinet and closing a circuit breaker in the cabinet;
s103, starting a circulating cooling water system;
s104, sequentially pressing a rotary vane pump and a Roots pump starting button on an electric control display screen;
s105, opening a manual angle valve of a molecular pump pipeline to the maximum opening; opening a main vacuum pipeline pneumatic butterfly valve;
s106, when the vacuum degree of the cavity reaches 8x10 -2 When mbar, a molecular pump starting button is pressed on the electric control display screen;
s107, the vacuum degree of the vacuum cavity to be detected reaches 5x10 -5 And when the pressure is mbar, the leak detector is started, after the self-detection is finished, a leak detection port valve is opened, and at the moment, the leak detection operation can be carried out on the detected vacuum cavity by utilizing a helium spraying system.
S108, after the leak detection is completed, closing the molecular pump;
s19, waiting for 15-20 minutes, and closing a pneumatic butterfly valve of the main vacuum pipeline after the molecular pump is stopped;
s110, sequentially closing the Roots pump and the rotary vane pump on the electric control display screen;
s111, sequentially opening a main vacuum pipe channel hollow breaking angle valve and a cavity hollow breaking angle valve to break the hollow;
s113, disconnecting the circulating cooling water, disconnecting the circuit breaker in the cabinet, disconnecting the power supply outside the cabinet, and completing the leak detection of the vacuum coating cavity.
Compared with the prior art, the invention has the following advantages: the invention adopts an automatic control system and has a one-key operation function for the electric components; the invention has the advantages of high leakage detection sensitivity, accurate positioning of the position of the leakage hole, quantitative judgment of the size of the leakage point and the like. Meanwhile, the invention has the advantages of simple structure and easy operation.
Drawings
FIG. 1 is a schematic diagram of a leak detection system of the present invention.
FIG. 2 is a schematic flow chart of a leak detection method of the present invention.
Detailed Description
In order to make the technical means, creation features, workflow, and usage method of the present invention achieve the objects and effects of the present invention easy to understand, the technical solutions of the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1 and 2, a vacuum coating cavity leak detection system includes: the leak detection device comprises a high-vacuum pump 4, a forepump group I11, a forepump group II12, a high-vacuum butterfly valve I7, a high-vacuum butterfly valve II14, a vacuum detection element II8, a vacuum breaking device II9, a mass spectrometer leak detector 15 and a helium spraying system 16, wherein the leak detection device is connected to the lower side of the vacuum cavity 1 to be detected, the electrical control system is connected with the leak detection device to be controlled, the side wall of the vacuum cavity 1 to be detected is provided with the vacuum breaking device I2 and a vacuum detection element I3, the leak detection device comprises the high-vacuum pump 4, the forepump group I11, the forepump group II12 and the high-vacuum pump 4 are connected in series through vacuum pipelines, and then the high-vacuum pump 4 is connected in series through the high-vacuum butterfly valve I7; a branch vacuum pipeline is arranged between a main vacuum pipeline between the high vacuum butterfly valve I7 and the front-stage pump group I11 and the vacuum cavity 1 to be detected through a three-way pipeline, the main vacuum pipeline and the branch vacuum pipeline are connected at proper positions through corrugated pipes, and the branch vacuum pipeline is connected with the vacuum cavity 1 to be detected through a high vacuum butterfly valve II 14; a vacuum detection element II8 and a vacuum breaking device II9 are arranged on a vacuum pipeline between the high vacuum butterfly valve I7 and the front-stage pump group I11, a leak detection port valve 13 is reserved, and a helium mass spectrometer leak detector 15 is connected into a vacuum pumping system through the leak detection port valve 13; the high vacuum pump 4, the forepump group I11, the forepump group II12, the high vacuum butterfly valve I7, the high vacuum butterfly valve II14, the vacuum detection element I3 and the vacuum detection element II8 are connected with the electric control system 17 through cables.
Specifically, the preceding pump group I11 is a Roots pump, and the preceding pump group II12 is a rotary vane pump or a screw pump.
Specifically, the high vacuum pump 4 is a turbo molecular pump, and a plurality of high vacuum pumps can be used in parallel according to the process requirements.
Specifically, the exhaust port of the high vacuum pump 4 is connected to the main pumping line through a manual angle valve 501 and a bellows.
Specifically, the high vacuum pump 4 is a water-cooled pump, and a water flow switch 6 is required to be connected in series on the circulating cooling pipeline.
Specifically, the air breaking device I2 is connected to the detected vacuum cavity 1 and the vacuum pipeline through the pneumatic angle valve I101, the air breaking device II9 is connected to the detected vacuum cavity 1 and the vacuum pipeline through the pneumatic angle valve II102, and the pneumatic angle valve I101 and the pneumatic angle valve II102 are connected with the electric control system 17 through cables.
Specifically, the vacuum detection element I3 is a composite ionization gauge, and the detectable vacuum degree range is 5x10 -9 About 1000mbar; the vacuum detection element I3 is connected to the vacuum chamber 1 to be detected through a manual angle valve 502.
Specifically, the vacuum detection element II8 is a standard Pirani gauge, and the detectable vacuum degree range is 5x10 -4 About 1000mbar; the vacuum detection element II8 is connected with the main vacuum pipeline through a KF type flange interface.
Example 1
A vacuum coating cavity leak detection system comprising: the leak detection device comprises a high-vacuum pump 4, a forepump group I11, a forepump group II12, a high-vacuum butterfly valve I7, a vacuum detection element II8, a vacuum breaking device II9, a helium mass spectrometer leak detector 15, a helium spraying system 16 and an electric control system 17, wherein the leak detection device is connected to the lower side of the vacuum cavity 1 to be detected, the electric control system is connected to control the leak detection device, the side wall of the vacuum cavity 1 to be detected is provided with the vacuum breaking device I2 and the vacuum detection element I3, the leak detection device comprises the high-vacuum pump 4, the forepump group I11, the forepump group II12, the high-vacuum butterfly valve I7, the vacuum detection element II8, the vacuum breaking device II9, the helium mass spectrometer leak detector 15, the helium spraying system 16 and the electric control system 17, the high-vacuum pump 4 is directly arranged on the side wall of the vacuum cavity 1 to be detected through a flange plate, and the forepump group I11 and the forepump II12 are connected in series through a vacuum pipeline; a vacuum detection element II8 and a vacuum breaking device II9 are arranged on a vacuum pipeline between the high vacuum butterfly valve I7 and the backing pump 11, a leak detection port valve 13 is reserved, and a helium mass spectrometer leak detector 15 is connected into a vacuum pumping system through the leak detection port valve 13; the high vacuum pump 4, the backing pump group I11, the backing pump group II12, the high vacuum butterfly valve I7, the vacuum detection element I3, the vacuum detection element II8 and the like are connected with the electric control system 17 through cables.
In this embodimentThe front-stage pump group I11 and the front-stage pump group II12 are the combination of a Roots pump and a rotary vane pump, or the combination of the Roots pump and a screw pump, and the vacuumizing efficiency is improved through reasonable matching of the vacuum pumps. The high vacuum pump 4 adopts a turbo molecular pump, and a plurality of high vacuum pumps can be used in parallel according to the process requirements. The exhaust port of the high vacuum pump 4 is connected to the main exhaust pipeline through the manual angle valve 501 and the corrugated pipe, so that the connection is convenient, and meanwhile, a certain molecular pump can be timely isolated through the manual angle valve 501 according to the process requirement. The high vacuum pump 4 is a water-cooled pump, and a water flow switch 6 is required to be connected in series on the circulating cooling pipeline for monitoring the cooling water flow of the molecular pump in real time, so as to prevent the damage of unexpected water cut to the molecular pump. The air breaking device I2 and the air breaking device II9 are respectively connected to the detected vacuum cavity 1 and the main vacuum pipeline through the pneumatic angle valve I101 and the pneumatic angle valve II102, and the pneumatic angle valve I101 and the pneumatic angle valve II102 are connected with the electric control system 17 through cables. The vacuum detection element I3 arranged on the detected vacuum cavity 1 is a compound ionization gauge, and the detectable vacuum degree range is 5x10 -9 1000mbar and is connected to the vacuum chamber 1 under test via a manual angle valve 502. The vacuum detection element II8 arranged on the main vacuum pipeline is a standard Pirani gauge, and the detectable vacuum degree range is 5x10 -4 1000mbar and is directly connected to the main vacuum pipe via a KF type flange interface. The main vacuum pipe can be provided with a bellows connection at a proper position to reduce the influence of vibration on the whole system when the vacuum pump works.
When vacuum leak detection is carried out, S101 firstly, electric connection and connection of all pipelines are checked, and the wiring of all electric components and the connection of hardware pipelines are ensured to be correct; s102, switching on an external power supply of the cabinet and closing a circuit breaker in the cabinet; s103, starting a circulating cooling water system; s104, sequentially pressing a rotary vane pump or screw pump and a Roots pump starting button on an electric control display screen; s105, opening a manual angle valve of a pipeline of the molecular pump 4 to the maximum opening; opening a main vacuum pipeline pneumatic butterfly valve; s106, the vacuum degree of the vacuum cavity 1 to be detected reaches 8x10 -2 When mbar, a starting button of the molecular pump 4 is pressed on the electric control display screen; s107 the vacuum degree of the vacuum cavity 1 to be detected reaches 5x10 -5 At mbar, the leak detector 15 is opened, after self-test is completed, the leak detection port valve 13 is opened, and the vacuum cavity to be tested can be subjected to the testThe body 1 is subjected to a leak detection operation using a helium spray system 16. After the leak detection of S108 is completed, S109 turns off the molecular pump 4; s110, waiting for 15-20 minutes, and closing a pneumatic butterfly valve of the main vacuum pipeline after the molecular pump 4 stops; s111, sequentially closing the Roots pump and the rotary vane pump or the screw pump on an electric control display screen; s112, sequentially opening a main vacuum pipeline pneumatic angle valve I101 and a cavity pneumatic angle valve II102 to break the air; s113, cutting off circulating cooling water; s114, disconnecting the circuit breaker in the cabinet, disconnecting the power supply outside the cabinet, and completing the leak detection of the vacuum coating cavity.
The embodiment has the advantages of high background vacuum degree, high leak detection precision, accurate positioning and strong adaptability, and can detect more tiny leakage points.
Example 2
A vacuum coating cavity leak detection system comprising: the device comprises a detected vacuum cavity 1, a leak detection device and an electric control system, wherein the leak detection device is connected to the lower side of the detected vacuum cavity 1, the electric control system is connected with the leak detection device, a vacuum breaking device I2 and a vacuum detection element I3 are arranged on the side wall of the detected vacuum cavity 1, the leak detection device comprises a Roots pump, a rotary vane pump or a screw pump, a high vacuum butterfly valve II14, a vacuum detection element II8, a vacuum breaking device II9, a helium mass spectrometer leak detector 15, a helium spraying system 16 and an electric control system 17, and the Roots pump, the rotary vane pump or the screw pump are connected in series through a vacuum pipeline and then are connected with the detected vacuum cavity 1 through the high vacuum butterfly valve II 14; the vacuum pipeline between the high vacuum butterfly valve II14 and the Roots pump is provided with a vacuum detection element II8 and a vacuum breaking device II9, the vacuum breaking device I2 and the vacuum breaking device I9 are respectively connected to the detected vacuum cavity 1 and the vacuum pipeline through a pneumatic angle valve I101 and a pneumatic angle valve II102, and the pneumatic angle valve I101 and the pneumatic angle valve II102 are connected with the electric control system 17 through cables. The vacuum detection element I3 arranged on the detected vacuum cavity 1 is a compound ionization gauge, and the detectable vacuum degree range is 5x10 -9 1000mbar and is connected to the vacuum chamber 1 under test via a manual angle valve 502. The vacuum detection element II8 arranged on the vacuum pipeline is a standard Pirani gauge, and the detectable vacuum degree range is 5x10 -4 1000mbar and is directly connected to the main vacuum pipe via a KF type flange interface. The vacuum line is reserved with a leak valve 13, and a helium mass spectrometer leak detector 15 is connected to the vacuum through the leak valve 13In a pumping system. The vacuum pipe can be provided with a bellows connection at a proper position to reduce the influence of vibration on the whole system when the vacuum pump works. The Roots pump, the rotary vane pump or the screw pump, the high vacuum butterfly valve II14, the vacuum detection element I3, the vacuum detection element II8 and the like are connected with the electric control system 17 through cables.
When vacuum leak detection is carried out, firstly, electric connection and connection of all pipelines are checked, so that the wiring of all electric components is ensured to be correct and the connection of hardware pipelines is ensured to be correct; switching on an external power supply of the cabinet and closing a circuit breaker in the cabinet; if the vacuum pump needs water cooling, a circulating cooling water system is started, and a water flow switch 6 is arranged on a cooling pipeline; sequentially pressing a rotary vane pump or screw pump and a Roots pump starting button on an electric control display screen; opening a pneumatic butterfly valve II of the vacuum pipeline, and vacuumizing the detected vacuum cavity 1; after the cavity vacuum degree is stable, starting the leak detector 15; after the self-test is completed, the leak detection port valve 13 is opened, and at the moment, the leak detection operation can be performed on the vacuum cavity 1 to be tested by utilizing the helium spraying system 16. After the leak detection is completed, closing the pneumatic butterfly valve II of the vacuum pipeline; sequentially closing the Roots pump and the rotary vane pump or the screw pump on the electric control display screen; sequentially opening a pneumatic angle valve I101 and a pneumatic angle valve II102 of the vacuum pipeline to break the air; disconnecting the circulating cooling water; and (5) disconnecting the circuit breaker in the cabinet, disconnecting the power supply outside the cabinet, and completing the leak detection of the vacuum coating cavity.
The embodiment has simple structure, convenient operation, high sensitivity and capability of detecting common leakage points.
The foregoing has shown and described the basic principles, main features and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (8)
1. A vacuum coating cavity leak detection system comprising: vacuum cavity, leak hunting device, electrical system of being examined, its characterized in that: the leak detection device comprises a high vacuum pump, a forepump group I, a forepump group II, a high vacuum butterfly valve I, a high vacuum butterfly valve II, a vacuum detection element, a vacuum breaking device, a helium mass spectrometer leak detector and a helium spraying system, wherein the high vacuum pump is directly arranged on the side wall of the vacuum cavity to be detected through a flange plate, and the forepump group I and the forepump group II are connected in series through a vacuum pipeline and then connected in series with the high vacuum pump through the high vacuum butterfly valve I; a branch vacuum pipeline is arranged on a main vacuum pipeline between the high vacuum butterfly valve I and the front-stage pump group I and between the main vacuum pipeline and the vacuum cavity to be detected through a tee joint pipeline, the main vacuum pipeline and the branch vacuum pipeline are connected at proper positions through corrugated pipes, and the branch vacuum pipeline is connected with the vacuum cavity to be detected through a high vacuum butterfly valve II; a vacuum detection element II and a vacuum breaking device II are arranged on a vacuum pipeline between the high vacuum butterfly valve I and the front-stage pump group I, a leak detection port valve is reserved, and the helium mass spectrometer leak detector is connected into a vacuum pumping system through the leak detection port valve; the high vacuum pump, the forepump group I, the forepump group II, the high vacuum butterfly valve I, the high vacuum butterfly valve II, the vacuum detection element I and the vacuum detection element II are connected with the electric control system through cables.
2. The vacuum coating cavity leak detection system of claim 1, wherein: the front-stage pump set I is a Roots pump, and the front-stage pump set II is a rotary vane pump or a screw pump; the high vacuum pump is a turbo molecular pump.
3. The vacuum coating cavity leak detection system of claim 1, wherein: the exhaust port of the high vacuum pump is connected to the main exhaust pipeline through a manual angle valve and a corrugated pipe.
4. The vacuum coating cavity leak detection system of claim 1, wherein: the high vacuum pump is a water-cooled pump, and a water flow switch is required to be connected in series on the circulating cooling pipeline.
5. The vacuum coating cavity leak detection system of claim 1, wherein: the air breaking device I is connected to the vacuum cavity and the vacuum pipeline to be detected through the pneumatic angle valve I, the air breaking device II is connected to the vacuum cavity and the vacuum pipeline to be detected through the pneumatic angle valve II, and the pneumatic angle valve I and the pneumatic angle valve II are connected with the electric control system through cables.
6. The vacuum coating cavity leak detection system of claim 1, wherein: the vacuum detection element I is a composite ionization gauge, and the detectable vacuum degree range is 5x10 -9 About 1000mbar; the vacuum detection element I is connected with the vacuum cavity to be detected through a manual angle valve.
7. The vacuum coating cavity leak detection system of claim 1, wherein: the vacuum detection element II is a standard Pirani gauge, and the detectable vacuum degree range is 5x10 -4 About 1000mbar; and the vacuum detection element II is connected with the main vacuum pipeline through a KF type flange interface.
8. A vacuum coating cavity leak detection method comprises the following steps:
s101, firstly checking electric connection and connection of all pipelines, and ensuring that all electric components are correctly connected and hardware pipelines are correctly connected;
s102, switching on an external power supply of the cabinet and closing a circuit breaker in the cabinet;
s103, starting a circulating cooling water system;
s104, sequentially pressing a rotary vane pump and a Roots pump starting button on an electric control display screen;
s105, opening a manual angle valve of a molecular pump pipeline to the maximum opening; opening a main vacuum pipeline pneumatic butterfly valve;
s106, when the vacuum degree of the cavity reaches 8x10 -2 When mbar, a molecular pump starting button is pressed on the electric control display screen;
s107, the vacuum degree of the vacuum cavity to be detected reaches 5x10 -5 When mbar, the leak detector is started, after self-checking is finished, a leak detection port valve is opened, and leak detection operation can be performed on the detected vacuum cavity by using a helium spraying system;
s108, after the leak detection is completed, closing the molecular pump;
s19, waiting for 15-20 minutes, and closing a pneumatic butterfly valve of the main vacuum pipeline after the molecular pump is stopped;
s110, sequentially closing the Roots pump and the rotary vane pump on the electric control display screen;
s111, sequentially opening a main vacuum pipe channel hollow breaking angle valve and a cavity hollow breaking angle valve to break the hollow;
s113, disconnecting the circulating cooling water, disconnecting the circuit breaker in the cabinet, disconnecting the power supply outside the cabinet, and completing the leak detection of the vacuum coating cavity.
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