CN208333779U - A kind of leakage detection apparatus of non-cavity body structure part - Google Patents
A kind of leakage detection apparatus of non-cavity body structure part Download PDFInfo
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- CN208333779U CN208333779U CN201821068508.5U CN201821068508U CN208333779U CN 208333779 U CN208333779 U CN 208333779U CN 201821068508 U CN201821068508 U CN 201821068508U CN 208333779 U CN208333779 U CN 208333779U
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- workpiece clamping
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- pipeline
- mechanical pump
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- 238000001514 detection method Methods 0.000 title claims abstract description 43
- 239000001307 helium Substances 0.000 claims abstract description 58
- 229910052734 helium Inorganic materials 0.000 claims abstract description 58
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 55
- 239000007789 gas Substances 0.000 claims abstract description 33
- 238000007664 blowing Methods 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000002347 injection Methods 0.000 claims abstract description 7
- 239000007924 injection Substances 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 8
- 238000005086 pumping Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 238000004949 mass spectrometry Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- Examining Or Testing Airtightness (AREA)
Abstract
本实用新型属于氦质谱检漏技术领域，具体涉及一种非腔体结构件的检漏装置，包括：氦质谱检漏仪、工件夹持机构、喷吹管路、氦气源，以及排出管路和机械泵；所述喷吹管路的一端与所述工件夹持机构相连，另一端与所述氦气源相连；所述排出管路的一端与所述喷吹管路相连，另一端与所述机械泵相连；所述工件夹持机构包括工件夹持上部和工件夹持下部；所述工件夹持上部能够夹持所述结构件的一侧，形成气密性密封，并与所述喷吹管路的一端连通；所述工件夹持下部能够夹持所述结构件的另一侧，形成气密性密封，并且与所述氦质谱检漏仪连通。本实用新型能够实现非腔体结构的工件快速检漏，并且能够达到连续批量检漏的效果。
The utility model belongs to the technical field of helium mass spectrometry leak detection, and in particular relates to a leak detection device for a non-cavity structural part, comprising: a helium mass spectrometer leak detector, a workpiece clamping mechanism, a blowing pipeline, a helium gas source, and a discharge pipeline and a mechanical pump; one end of the blowing pipeline is connected to the workpiece clamping mechanism, and the other end is connected to the helium gas source; one end of the discharge pipeline is connected to the blowing pipeline, and the other end is connected to the The mechanical pump is connected; the workpiece clamping mechanism includes a workpiece clamping upper part and a workpiece clamping lower part; the workpiece clamping upper part can clamp one side of the structural member to form an airtight seal, and is connected with the injection pipe One end of the road is communicated; the workpiece clamping lower part can clamp the other side of the structural member to form an airtight seal and communicate with the helium mass spectrometer leak detector. The utility model can realize rapid leak detection of workpieces with non-cavity structure, and can achieve the effect of continuous batch leak detection.
Description
Technical field
The utility model belongs to helium mass spectrometer leak detecting technology field, and in particular to a kind of leakage detection apparatus of non-cavity body structure part.
Background technique
It is tens of that helium mass analyzer is widely used in aerospace, medical treatment, nuclear industry, electric power, refrigeration, precision instrumentation etc.
A industry.The mode of leak detection has back pressure method, blowing process etc..The examined workpiece of some cavity body structure forms be easy to using back pressure method or
The basic principle of blowing process improves leak detection, rather than the workpiece of cavity body structure form is then more complicated, and especially batch is hunted leak
Realize process-intensive.
Non- cavity body structure part usually makes corresponding tooling, and workpiece is assemblied in tooling, utilizes glue envelope or mechanical grip shape
It at seal cavity, is then placed into pressure helium tank, presses helium 1-4h at 0.2 mpa, then pressure release, stands 15 minutes or nitrogen is blown
Except absorption helium.This kind of mode process is various, and examined workpiece quantity is limited by tooling quantity, and examined workpiece needs gluing or machine
The mode and tooling of tool clamping, which are formed, to be tightly connected, workpiece subject to damage, and the tested leak rate of maximum is by gluing seal form and glue
The influence of sealing performance.
Therefore, designing a kind of batch leakage detection apparatus for being suitble to non-cavity body structure has realistic meaning, is able to solve engineering reality
Border problem.
Utility model content
In response to the above problems, the present invention proposes a kind of leakage detection apparatus of non-cavity body structure part.
A kind of leakage detection apparatus of non-cavity body structure part, comprising: helium mass spectrometer leak detector, workpiece grip mechanism, blowing pipeline, helium
Gas source and discharge line and mechanical pump；
One end of the blowing pipeline is connected with the workpiece grip mechanism, and the other end is connected with the helium gas source；It is described
One end of discharge line is connected with the blowing pipeline, and the other end is connected with the mechanical pump；
The workpiece grip mechanism includes piece-holder top and piece-holder lower part；The piece-holder top can press from both sides
The side of the structural member is held, forms airtight sealing, and be connected to one end of the blowing pipeline；The piece-holder lower part
The other side of the structural member can be clamped, forms airtight sealing, and be connected to the helium mass spectrometer leak detector.
Preferably, multiple workpiece grip mechanisms in parallel on one end of the blowing pipeline, realize that batch is hunted leak.
Preferably, the helium gas source is 3~5ml/min to the blowing amount for being blown helium in blowing pipeline.
Preferably, the helium mass spectrometer leak detector can execute detection program automatically, detect and leak from the tested structural member
The helium crossed.
Preferably, the mechanical pump pumping speed is 3~5L/S.
Preferably, the workpiece grip mechanism further includes piece-holder upper sealing gasket and piece-holder lower seal circle.
Preferably, the piece-holder upper sealing gasket and piece-holder lower seal circle are removably mounted on institute respectively
State piece-holder top and the piece-holder lower part.
Preferably, described device further includes gas control system, can control helium blowing, discharge.
Preferably, the gas control system includes the first control valve being connected with the helium gas source and the mechanical pump
The second connected control valve, and the third control valve being connected with the workpiece grip mechanism.
Preferably, when batch is hunted leak, the gas control system can be controlled and each workpiece grip mechanism point
Not Xiang Lian the third control valve independently successively work or work at the same time.
The utility model has the beneficial effects that
1, the utility model provides leakage detection apparatus and can be realized non-by the design of gas piping system and control system
The rapid batch of the workpiece of cavity body structure is hunted leak.
2, leakage detection apparatus provided by the utility model, smart structural design, whole device gas path pipe form close with workpiece
Envelope, the helium for leaking hunting will not be leaked in leak detector surrounding air, and leak detector work efficiency drop or helium is caused to be poisoned,
To achieve the effect that continuous batch is hunted leak.
3, leakage detection apparatus provided by the utility model, piece-holder part can be made into multiple-branching construction, it can be achieved that a branch
During leak detection, multiple workpiece installation sites can also be arranged in same branch, realize " more for another branch's workpiece assembly
Road more than one piece " leak detection, convenient for improving leak detection efficiency.
4, leakage detection apparatus provided by the utility model need to only change design piece-holder part-structure, can examine various energy
The non-tight part of upper-lower seal form is enough formed, it is applied widely, quick repetitive leakage detection may be implemented.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of the air-tightness leakage detection apparatus of the non-cavity body structure part of two branches；
Fig. 2A specific embodiment is a kind of structural schematic diagram that can examine workpiece；
Fig. 2 B, Fig. 2 C are suitable for the clamp structure schematic diagram of Fig. 2A embodiment workpiece.
In figure, 1- helium mass spectrometer leak detector, 2- workpiece grip mechanism, 3- blowing pipeline, 4- solenoid valve, 5- mechanical pump, 6- row
Gas outlet, 7- helium gas source, 8- gas exhaust piping, 10- be detected structural member, 11- conducting wire, 12- insulator, 13- flange, 14- conducting wire and
Insulator connection gap, 15- insulator and flanged joint gap, 20- piece-holder top, 21- piece-holder upper sealing gasket,
22- piece-holder lower seal circle, 23- jet pipe interface, 24- helium mass spectrometer leak detector interface, 25- piece-holder lower part.
Specific embodiment
With reference to the accompanying drawing, it elaborates to embodiment.
The leakage detection apparatus of a kind of non-cavity body structure part according to the present utility model, comprising: helium mass spectrometer leak detector, piece-holder
Mechanism, blowing pipeline, helium gas source and discharge line and mechanical pump.
One end of the blowing pipeline is connected with the workpiece grip mechanism, and the other end is connected with the helium gas source；It is described
One end of discharge line is connected with the blowing pipeline, and the other end is connected with the mechanical pump.
The workpiece grip mechanism includes piece-holder top and piece-holder lower part；The piece-holder top can press from both sides
The side of the structural member is held, forms airtight sealing, and be connected to one end of the blowing pipeline；The piece-holder lower part
The other side of the structural member can be clamped, forms airtight sealing, and be connected to the helium mass spectrometer leak detector.
Injection tube road two or more workpiece grip mechanisms in parallel, realize that examined workpiece batch is stopped leakage in the roof.The helium
Gas source is used to be blown helium in blowing pipeline.The helium mass spectrometer leak detector is detected after vacuumizing to cavity and is leaked through from examined workpiece
Helium.Residual helium after the completion of the mechanical pump is used to will test is extracted out.It is disposed with multiple control valves in the pipeline, controls
Helium processed is blown, is discharged.
It is cooperated by integrated control system, can be realized key leak detection, a key stops.The utility model by pair
The improvement of helium mass spectrometer leak detector, the design of piece-holder part can be realized the quick essence of the encapsulating structure part of non-cavity form
Really leak detection, for example, electric connector.The quick repetitive leakage detection of the utility model air-tightness leakage detection apparatus energy, does not almost have examined workpiece
It has damage, hunts leak high-efficient, especially suitable in, the workpiece of small size batch leak detection.
When leak detection work, Gas injection pipeline carries out blowing helium to the survey, and blowing amount is 3~5ml/min.Leak detection work
When, helium mass analyzer vacuumizes the survey, measures leak case.
Mechanical pump pumping speed is 3~5L/S, and when workpiece leak detection is completed, remaining helium is extracted into outdoor by mechanical pump, prevents from examining
Leak the poisoning of instrument helium.
The workpiece grip mechanism is made of upper and lower two parts, and upper and lower two parts all have for forming sealing with workpiece
Sealing ring.When work, wherein by piece-holder, upper part connects blowing pipeline jet, and lower part connects leak detector, pumping
Leak detection.The workpiece grip mechanism can be one, it is two or more, form branch, can independent control, reach it is primary simultaneously or
It hunts leak respectively multiple workpiece.
Sealing ring is made by being molded, and material is silicon rubber, is also possible to other high molecular materials for being not easy to adsorb helium.Institute
The sealing ring for stating clamp structure regularly replaces during use, prevents helium from remaining, and reduces precision of detecting leak gas.
Fig. 1 gives a kind of schematic diagram of the air-tightness leakage detection apparatus of non-cavity body structure part.The leakage detection apparatus includes: helium matter
Spectrum leak detector 1, Gas injection pipeline 3, solenoid valve 4 (DV1, DV2, DV3, DV4), mechanical pump 5, is vented out workpiece grip mechanism 2
Mouth 6, helium gas source 7, gas exhaust piping 8, helium mass spectrometer leak detector 1, adscititious gases blowing pipeline 3 cooperate with work by integrated control system
Make.This air-tightness leakage detection apparatus can be realized key leak detection, and a key stops, and meet batch leak detection demand.
Fig. 2A gives a kind of schematic diagram of non-cavity body structure electric connector workpiece 10 that need to be hunted leak, mainly by conducting wire
11, insulator 12, flange 13 form, and need to detect conducting wire 11 and 12 connection gap 14 of insulator, and insulator 12 and flange 13 connect
The airtight implementations of seam gap 15.
Fig. 2 B, Fig. 2 C give the corresponding tooling retained part structure design diagram of examined workpiece 10, mainly by
Piece-holder top 20, piece-holder upper sealing gasket 21, piece-holder lower seal circle 22, jet pipe interface 23, helium matter
Leak detector interface 24 is composed to form.
When being hunted leak using this leakage detection apparatus to the workpiece, specific works action process is as follows:
Gas source is opened manually, adjusts the pressure value exported to needs.Mass spectrograph working power is opened manually.Two quilts are installed
Survey part.Workpiece 10 is installed, 10 side of workpiece clamped by piece-holder top 20, form airtight sealing, and with jet pipeline
Connection.The other side of examined workpiece 10 forms airtight sealing by the clamping of piece-holder lower part 25, and with helium mass spectrometer leak detector 1
It is connected to by helium mass spectrometer leak detector interface 24.Leakage detection apparatus start key is clicked, solenoid valve DV1 is opened, the inspection of 1 automatic running of leak detector
Program is leaked, (time can set 3-99S) solenoid valve DV3 opens (solenoid valve DV3 when starting first via tooling clamping device after X second
Open, solenoid valve DV4 is opened when starting the second tunnel tooling clamping device), after obtaining result, click leakage detection apparatus stop key, inspection
Leakage instrument 1 stops working, and solenoid valve DV1 is closed.Mechanical pump 5 is opened, and solenoid valve DV2 is opened, after X seconds (time can set 3-99S), electricity
Magnet valve DV3 closes (solenoid valve DV3 closing when starting first via tooling clamping device, electricity when starting the second tunnel tooling clamping device
Magnet valve DV4 is closed).Subsequent solenoid valve DV2 is closed, and mechanical pump 5 is closed.
This embodiment is only the preferable specific embodiment of the utility model, but the protection scope of the utility model not office
It is limited to this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in
Change or replacement should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with
Subject to scope of protection of the claims.
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821068508.5U CN208333779U (en) | 2018-07-06 | 2018-07-06 | A kind of leakage detection apparatus of non-cavity body structure part |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821068508.5U CN208333779U (en) | 2018-07-06 | 2018-07-06 | A kind of leakage detection apparatus of non-cavity body structure part |
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| CN208333779U true CN208333779U (en) | 2019-01-04 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111747758A (en) * | 2019-03-28 | 2020-10-09 | 日本碍子株式会社 | Method for manufacturing ceramic product containing silicon carbide |
| CN111982414A (en) * | 2020-08-10 | 2020-11-24 | 安徽富乐德科技发展股份有限公司 | Method for detecting air tightness of ceramic vacuum connector of physical vapor deposition equipment |
| CN113471018A (en) * | 2021-05-24 | 2021-10-01 | 深圳林硕科技有限公司 | Novel production and processing technology for high-voltage direct-current relay |
| CN115808272A (en) * | 2022-12-01 | 2023-03-17 | 兰州空间技术物理研究所 | Quick leak detection device and method for components of capacitance film vacuum gauge |
| CN117419864A (en) * | 2023-12-19 | 2024-01-19 | 广东启新汽车零部件有限公司 | Frock clamp of gas tightness of helium detection water course with adjustable |
-
2018
- 2018-07-06 CN CN201821068508.5U patent/CN208333779U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111747758A (en) * | 2019-03-28 | 2020-10-09 | 日本碍子株式会社 | Method for manufacturing ceramic product containing silicon carbide |
| CN111982414A (en) * | 2020-08-10 | 2020-11-24 | 安徽富乐德科技发展股份有限公司 | Method for detecting air tightness of ceramic vacuum connector of physical vapor deposition equipment |
| CN113471018A (en) * | 2021-05-24 | 2021-10-01 | 深圳林硕科技有限公司 | Novel production and processing technology for high-voltage direct-current relay |
| CN115808272A (en) * | 2022-12-01 | 2023-03-17 | 兰州空间技术物理研究所 | Quick leak detection device and method for components of capacitance film vacuum gauge |
| CN117419864A (en) * | 2023-12-19 | 2024-01-19 | 广东启新汽车零部件有限公司 | Frock clamp of gas tightness of helium detection water course with adjustable |
| CN117419864B (en) * | 2023-12-19 | 2024-03-01 | 广东启新汽车零部件有限公司 | Frock clamp of gas tightness of helium detection water course with adjustable |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Building 1, No.1 Xingchang Road, Changping Science and Technology Park, Changping District, Beijing 102200 Patentee after: Beijing Pinchi Medical Equipment Co.,Ltd. Country or region after: China Patentee after: TSINGHUA University Address before: Building 1, No.1 Xingchang Road, Changping Science and Technology Park, Changping District, Beijing 102200 Patentee before: BEIJING PINS MEDICAL Co.,Ltd. Country or region before: China Patentee before: TSINGHUA University |
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| CP03 | Change of name, title or address |