CN115808272A - Quick leak detection device and method for components of capacitance film vacuum gauge - Google Patents
Quick leak detection device and method for components of capacitance film vacuum gauge Download PDFInfo
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- CN115808272A CN115808272A CN202211533826.5A CN202211533826A CN115808272A CN 115808272 A CN115808272 A CN 115808272A CN 202211533826 A CN202211533826 A CN 202211533826A CN 115808272 A CN115808272 A CN 115808272A
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000001514 detection method Methods 0.000 title claims description 75
- 238000007789 sealing Methods 0.000 claims abstract description 105
- 239000001307 helium Substances 0.000 claims abstract description 71
- 229910052734 helium Inorganic materials 0.000 claims abstract description 71
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 71
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 239000007789 gas Substances 0.000 claims abstract description 8
- 239000012528 membrane Substances 0.000 claims abstract 2
- 239000010408 film Substances 0.000 claims description 33
- 230000005540 biological transmission Effects 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 description 14
- 238000001819 mass spectrum Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The utility model relates to a measuring instrument leak hunting technical field particularly, relates to a quick leak hunting device and method for capacitance membrane vacuum gauge spare part, the device includes servo mechanism, sealing jig, helium mass spectrometer leak hunting appearance and standard small opening, wherein: the sealing clamps are arranged in plurality, and each sealing clamp is internally provided with a part of the capacitance film vacuum gauge; one end of each sealing clamp is connected with the servo mechanism through a solenoid valve, and the other end of each sealing clamp is connected with the helium mass spectrometer leak detector through the solenoid valve and a corrugated pipe; and the standard leak hole is connected with the helium mass spectrometer leak detector through a first manual stop valve. This application servo mechanism is according to intelligent design, and each part has the self-adaptation function, and each settlement parameter all obtains through a lot of tests, and the reliability is higher, realizes through servo mechanism controlling that sealing fixture is to the locking and the sealing of spare part, has avoided sealed not tight and gas leakage phenomenon, has avoided the reworking phenomenon of the artifical installation leak hunting frock of leak hunting in-process, has greatly improved leak hunting efficiency.
Description
Technical Field
The application relates to the technical field of leakage detection of measuring instruments, in particular to a quick leakage detection device and method for parts of a capacitance film vacuum gauge.
Background
The thermal capacitance film vacuum gauge is used as a vacuum measuring instrument and is mainly used in civil industries such as semiconductors, film coating and new energy, and the advanced scientific research fields such as nuclear industry, high-energy physics and controllable thermonuclear fusion. In the using process, the capacitance film vacuum gauge with different measuring range ranges can be selected according to the pressure of the measured gas, the measurement precision requirement, the using environment characteristics and the like, and is used as a low-vacuum standard appliance which is a reference standard and a transmission standard in the transmission process of the vacuum parameter value.
In the semiconductor and nuclear industry with the largest market occupation of the capacitance film vacuum gauge in China, the requirements on the precision and the stability of the capacitance film vacuum gauge are high, and the capacitance film vacuum gauge is used as a consumable material in the semiconductor and nuclear industry and is replaced after being used for 2 to 3 years. At present, many national defense weaponry and advanced scientific research fields need to utilize the capacitance film vacuum gauge to carry out the accurate measurement of vacuum degree, the reliability and the accuracy of the measured data will directly influence the realization of the related scientific target in these fields, and subsequently, along with the rapid development of the semiconductor industry, the use amount of the capacitance film vacuum gauge will also increase rapidly, and the market prospect is wide.
The capacitive film vacuum gauge mainly comprises a physical unit and an electric control unit, the production process mainly relates to 12 main process links, and the existing leakage detection process depends on manual installation of a leakage detection tool to realize the test work of the leakage rate indexes of various parts. Because the process of manual installation and disassembly of the tool is very slow, and various parts and leak detection tools matched with the parts are more, the phenomena of poor sealing and air leakage caused by tool confusion and uneven stress in the tool installation process are easy to occur. The installation rework rate is high, the sealing effect is not ideal, the progress of the leak detection process is seriously lagged, and the requirement of small-batch production of the capacitive thin film vacuum gauge products cannot be met.
Disclosure of Invention
The application provides a quick leak detection device and a quick leak detection method for parts of a capacitance film vacuum gauge, which can realize quick sealing and leak detection of four parts of the capacitance film vacuum gauge and greatly improve the automatic leak detection efficiency.
In order to achieve the above object, the present application provides a quick leak detection device for components of a capacitance thin film vacuum gauge, which includes a servo mechanism, a sealing fixture, a helium mass spectrometer leak detector and a standard leak hole, wherein: the sealing clamps are arranged in plurality, and each sealing clamp is internally provided with a part of the capacitance film vacuum gauge; one end of each sealing clamp is connected with the servo mechanism through a solenoid valve, and the other end of each sealing clamp is connected with the helium mass spectrometer leak detector through the solenoid valve and a corrugated pipe; and the standard leak hole is connected with the helium mass spectrometer leak detector through a first manual stop valve.
Furthermore, a second manual stop valve is arranged on a corrugated pipe between the electromagnetic valves and the helium mass spectrometer leak detector.
Further, servo mechanism includes driving motor, transmission shaft, arm, hydraulic tong, manometer, control circuit and touch-sensitive screen, wherein: the touch screen is connected with the control circuit; the control circuit is connected with the driving motor; the driving motor is connected with the mechanical arm through a transmission shaft and correspondingly connected with the sealing clamps through a plurality of hydraulic clamps; the pressure gauge is connected with the control circuit.
Further, the structure of each sealing clamp is correspondingly matched with the structure of the part of each capacitance film vacuum gauge.
Furthermore, a communication connection is established between the helium mass spectrometer leak detector and the servo mechanism.
Further, still include the security fence, the security fence encircles the arm setting.
In addition, the application also provides a method for applying the quick leak detection device for the parts of the capacitance film vacuum gauge, which comprises the following steps: step 1: installing a quick leak detection device, opening an electromagnetic valve between a servo mechanism and each sealing clamp, controlling a servo motor to open the sealing clamps, and sequentially placing parts of the capacitance film vacuum gauge into the corresponding sealing clamps through a transmission shaft and a mechanical arm; and 2, step: operating a touch screen of the servo mechanism, and setting a pressure value of the pressure clamp through a pressure gauge to close all the sealing clamps and fix and clamp internal parts; and 3, step 3: each sealing clamp is connected with the helium mass spectrometer leak detector through an electromagnetic valve and a corrugated pipe, a second manual stop valve is arranged on the corrugated pipe, and the standard leak hole is connected with the helium mass spectrometer leak detector through the first manual stop valve; and 4, step 4: closing electromagnetic valves between the servo mechanism and all the sealing clamps, opening a second manual stop valve, sequentially opening the electromagnetic valves between the sealing clamps and the helium mass spectrometer leak detector, and vacuumizing a pipeline of the rapid leak detection device by using the helium mass spectrometer leak detector; and 5: opening a first manual stop valve, communicating a standard leak hole with a helium mass spectrometer leak detector, calibrating the minimum detectable leak rate of the rapid leak detection device, spraying helium gas at all pipeline joints of the rapid leak detection device and at the sealing positions of parts and sealing clamps, and checking whether the interior of the rapid leak detection device is leaked or not; step 6: if leakage exists, the joint connection part can be adjusted, and the detection is carried out again after the joint connection part is screwed down until no obvious signal rise exists in the helium mass spectrometer leak detector; and 7: closing the first manual stop valve, using a helium cover to cover the sealing clamp and the parts, introducing helium gas into the helium cover, observing the change of the display value of the helium mass spectrometer leak detector, and automatically and synchronously recording and storing the change in software in a servo mechanism to realize leak detection of the parts of the capacitance film vacuum gauges in all the sealing clamps; and 8: after the leakage detection is finished, the sealing clamps are controlled through the touch screen of the servo mechanism, all the sealing clamps are in an open state, parts are taken out, all valves are closed, the helium mass spectrometer leak detector is closed, the servo mechanism is closed after leakage rate data of all the parts are derived, the main power supply is closed, and qualified parts are selected according to leakage rate indexes of the parts.
The invention provides a quick leak detection device and a quick leak detection method for parts of a capacitance film vacuum gauge, which have the following beneficial effects:
this application servo mechanism is according to intelligent design, and each part has the self-adaptation function, and each settlement parameter all obtains through a lot of tests, and the reliability is higher, realizes through servo mechanism's controlling that sealing fixture is to the locking and the sealing of spare part, need not the installation and dismantle the screw, has avoided sealed not tight and gas leakage phenomenon, has avoided the phenomenon of doing over again of the artifical installation leak hunting frock of leak hunting in-process, has greatly improved leak hunting efficiency. The software of the servo mechanism can automatically acquire all data of the helium mass spectrometer leak detector in the leak detection process, and the final leak rate data of the parts is obtained after calculation and correction through a formula in the software, so that the integrity and the accuracy of the leak rate data are ensured. In addition, be provided with security fence around the device, avoid operating personnel to get into the arm swing range within range, ensured operating personnel's personal safety.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and the description of the exemplary embodiments of the present application are provided for explaining the present application and do not constitute an undue limitation on the present application. In the drawings:
FIG. 1 is a schematic structural diagram of a rapid leak detection device for components of a capacitance thin film vacuum gauge provided by an embodiment of the application;
in the figure: the leak detector comprises a servo mechanism 1, a first electromagnetic valve 2, a second electromagnetic valve 3, a third electromagnetic valve 4, a fourth electromagnetic valve 5, a first sealing clamp 6, a second sealing clamp 7, a third sealing clamp 8, a fourth sealing clamp 9, a fifth electromagnetic valve 10, a sixth electromagnetic valve 11, a seventh electromagnetic valve 12, an eighth electromagnetic valve 13, a first manual stop valve 14, a second manual stop valve 15, a standard leak hole 16 and a helium mass spectrometer 17.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used in other meanings besides orientation or positional relationship, for example, the term "upper" may also be used in some cases to indicate a certain attaching or connecting relationship. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as the case may be.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that, in the present application, the embodiments and features of the embodiments may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1, the present application provides a quick leak detection device for components of a capacitance thin film vacuum gauge, which comprises a servo mechanism 1, a sealing clamp, a helium mass spectrometer leak detector 17 and a standard leak hole 16, wherein: the sealing clamps are arranged in plurality, and each sealing clamp is internally provided with a part of the capacitance film vacuum gauge; one end of each sealing clamp is connected with the servo mechanism 1 through an electromagnetic valve, and the other end of each sealing clamp is connected with the helium mass spectrometer leak detector 17 through an electromagnetic valve and a corrugated pipe; the standard leak orifice 16 is connected to a helium mass spectrometer leak detector 17 through a first manual shut-off valve 14.
Specifically, the quick leak detection device for the parts of the capacitance film vacuum gauge provided by the embodiment of the application is simple in structure and easy to operate, can realize quick sealing and leak detection of the parts of the capacitance film vacuum gauge, greatly improves the automatic leak detection efficiency, improves the reliability of leak rate detection data, and can meet the progress requirement of a leak detection process link. The parts of a general capacitance thin film vacuum gauge include 4 types of parts, and therefore in the embodiment of the present application, preferably, 4 sealing clamps are provided, which are, in turn, a first sealing clamp 6, a second sealing clamp 7, a third sealing clamp 8, and a fourth sealing clamp 9, and a solenoid valve is correspondingly provided between each sealing clamp and the servo mechanism 1, and a first solenoid valve 2, a second solenoid valve 3, a third solenoid valve 4, and a fourth solenoid valve 5 are provided in turn, and a solenoid valve is also correspondingly provided between each sealing clamp and the helium mass spectrometer leak detector 17, and a fifth solenoid valve 10, a sixth solenoid valve 11, a seventh solenoid valve 12, and an eighth solenoid valve 13 are provided in turn, and each sealing clamp is provided with an evacuation interface, and can be quickly connected with a corrugated pipeline by using a quick-connection clamp. The first solenoid valve 2, the first sealing clamp 6 and the fifth solenoid valve 10 form a first detection pipeline, the second solenoid valve 3, the second sealing clamp 7 and the sixth solenoid valve 11 form a second detection pipeline, the third solenoid valve 4, the third sealing clamp 8 and the seventh solenoid valve 12 form a third detection pipeline, and the fourth solenoid valve 5, the fourth sealing clamp 9 and the eighth solenoid valve 13 form a fourth detection pipeline; when the leakage rate is detected, parts of the capacitance film vacuum gauge are placed into the corresponding sealing clamp, and then the parts sequentially pass through each detection pipeline, so that the leakage rate of the parts in each sealing clamp is detected. The servo motor is used for clamping the parts and controlling the opening and closing of the sealing clamp, so that the parts are fixed in the sealing clamp, and the fixing, locking and sealing of the parts are realized; the helium mass spectrometer leak detector 17 is used for vacuumizing each detection pipeline and detecting the leakage of parts in each sealing clamp; the electromagnetic valve is mainly used for switching the four-way sealing clamp, the servo mechanism 1 and the helium mass spectrometer leak detector 17; the standard leak hole 16 is connected with the helium mass spectrometer leak detector 17 through the first manual stop valve 14 and is used for providing a standard leak rate value and calibrating the measurement data of the leak rate of the components of the capacitance film vacuum gauge.
Further, a second manual stop valve 15 is arranged on the bellows between the connection of the plurality of electromagnetic valves and the helium mass spectrometer leak detector 17. The detection pipeline that first detection pipeline, the second detects the pipeline, third detection pipeline and fourth detection pipeline constitute is whole, one end is connected with servo mechanism 1, the other end is connected with helium mass spectrum leak detector 17 through second manual stop valve 15, second manual stop valve 15 mainly used helium mass spectrum leak detector 17 and the holistic break-make of detection pipeline, avoid the impact that the maloperation led to the fact helium mass spectrum leak detector, in the testing process, through the break-make of second manual stop valve 15 control pipeline, can prolong the life of helium mass spectrum leak detector.
Further, servo 1 includes driving motor, transmission shaft, arm, hydraulic tong, manometer, control circuit and touch-sensitive screen, wherein: the touch screen is connected with the control circuit; the control circuit is connected with the driving motor; the driving motor is connected with the mechanical arm through a transmission shaft and correspondingly connected with the plurality of sealing clamps through the plurality of hydraulic clamps; the pressure gauge is connected with the control circuit. Can carry out the settlement of procedure on the touch-sensitive screen, the program instruction of settlement transmits to control circuit in, control circuit passes through driving motor drive transmission shaft according to control instruction earlier, transmit the power for the arm after the transmission shaft atress, realize the lift of arm, rotate, each item operation such as gos forward, retreat, press from both sides the spare part of getting the electric capacity film vacuum gauge through the arm, place in the corresponding sealing clamp, then control circuit sets for according to the pressure of manometer, give driving motor with corresponding control instruction retransmission, driving motor drives corresponding hydraulic tong and presss from both sides tight sealing clamp, and transmit the power for giving inside spare part, reach and fix and sealed effect to spare part. Every sealing clamp can be controlled to servo mechanism 1, realizes opening and closing of all sealing clamps to on will doing all can transmitting spare part, realize fixed and sealed to spare part, need not manual operation at this in-process, need not the installation and dismantle screw etc. very big improvement the efficiency of leak hunting.
Further, the structure of each sealing clamp is correspondingly matched with the structure of the part of each capacitance film vacuum gauge. Each sealing clamp is designed according to the structure of each part, the structure of the sealing clamp is matched with that of the part, and according to actual conditions, each part is placed in the sealing clamp with the same structure.
Further, a communication connection is established between the helium mass spectrometer leak detector 17 and the servo mechanism 1. In the leak detection process, the data result acquired by the helium mass spectrometer leak detector 17 is transmitted to the servo mechanism 1 in a data communication mode and is embedded into corresponding software of the servo mechanism 1, so that the leak rate data does not need to be recorded manually in the leak detection process, and the data can be directly searched from the touch screen of the servo mechanism 1, so that the leak detection efficiency is improved, and the phenomena of error recording, leak recording and the like can be avoided.
Furthermore, the safety fence is arranged around the mechanical arm, the safety fence is arranged around the servo mechanism 1 and the whole device, so that an operator is prevented from entering the range of the swing amplitude of the mechanical arm, and the personal safety of the operator is ensured.
In addition, the implementation of the application also provides a method for applying the rapid leak detection device for the parts of the capacitive thin film vacuum gauge, and in the leak detection process, the leak rate of the parts of the capacitive thin film vacuum gauge in the sealing clamp in each detection pipeline is detected sequentially through the helium mass spectrometer leak detector 17 and the standard leak hole 16. Taking the first detection pipeline as an example, the steps of the detection method are specifically described as follows:
step 1: installing a first detection pipeline of the rapid leak detection device, opening the first electromagnetic valve 2, controlling a servo motor to open the first sealing clamp 6, and placing parts of the capacitance film vacuum gauge into the first sealing clamp 6 through a transmission shaft and a mechanical arm;
and 2, step: operating a touch screen of the servo mechanism 1, setting a pressure value of the pressure clamp through a pressure gauge, closing the first sealing clamp 6, and fixing and clamping internal parts;
and 3, step 3: connecting a first sealing clamp 6 with a helium mass spectrometer leak detector 17 through a fifth electromagnetic valve 10 and a corrugated pipe, arranging a second manual stop valve 15 on the corrugated pipe, and connecting a standard leak hole 16 with the helium mass spectrometer leak detector 17 through a first manual stop valve 14;
and 4, step 4: closing the first electromagnetic valve 2, opening the second manual stop valve 15, opening the fifth electromagnetic valve 10, and vacuumizing the first detection pipeline by using a helium mass spectrometer leak detector 17;
and 5: opening a first manual stop valve 14, communicating a standard leak hole 16 with a helium mass spectrometer leak detector 17, calibrating the minimum detectable leak rate of a first detection pipeline, spraying helium gas at all pipeline joints of the first detection pipeline and at the sealing positions of parts and a first sealing clamp 6, and checking whether leakage exists in the first detection pipeline;
in the leak detection process, a background signal value I is recorded first 01 And noise I n Q for calibration of standard leak 16 T Indicating, recording the standard leak 16 signal value I 1 Calculating the effective minimum detectable leakage rate of the system according to the following formula:
wherein γ is helium concentration, Q emin The effective minimum detectable leakage rate of the pipeline is at least greater than the leakage rate index of the components of the capacitance film vacuum gauge1 order of magnitude higher;
step 6: if leakage exists, the joint connection part can be adjusted, helium is sprayed again after screwing, and the signal of the helium mass spectrometer leak detector 17 does not rise obviously; for example, the first detection pipeline has a minimum detection leak rate of 10 -10 Pa·m 3 S, and the leakage rate index of the part design needs to be less than or equal to 1 multiplied by 10 -11 Pa·m 3 The leakage rate of the first detection pipeline is unqualified, and the joint connection part and each sealing part of the first detection pipeline need to be adjusted until the leakage rate meets the standard;
and 7: then the first manual stop valve 14 is closed, the standard leak hole 16 is disconnected with the helium mass spectrometer leak detector 17, then the first sealing clamp 6 and parts are covered by a helium cover, helium is introduced into the helium cover, the change of the display value of the helium mass spectrometer leak detector is observed, and the stable value I of the display value is recorded 2 The leak detection of the parts of the capacitance film vacuum gauge in the first sealing fixture 6 can be realized by automatically and synchronously recording and storing in software in the servo mechanism 1 in an Excel mode, and then the leak rate of the parts in the first fixture 6 can be calculated by the following formula:
in the formula I 02 For leak rate detection, the background signal value of the helium mass spectrometer leak detector 17; gamma is the concentration of helium gas in the helium hood; q is the leakage rate of the parts;
repeating the steps to perform leak detection on the parts of the capacitance film vacuum gauge in the second sealing clamp 7, the third sealing clamp 8 and the fourth sealing clamp 9 in sequence to obtain the leak rate of the corresponding parts;
and step 8: after leak detection is finished, the sealing clamps are controlled through a touch screen of the servo mechanism 1, all the sealing clamps are in an opening state, all parts are taken out, all valves are closed, the helium mass spectrometer leak detector 17 is closed, the servo mechanism 1 is closed after leak rate data of all the parts are derived, a main power supply is closed, and qualified parts are selected according to leak rate indexes of the parts.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (7)
1. The utility model provides a quick leak hunting device for electric capacity film vacuum gauge spare part which characterized in that, includes servo mechanism, sealing jig, helium mass spectrometer leak detector and standard small opening, wherein:
the sealing clamps are arranged in plurality, and each sealing clamp is internally provided with a part of a capacitance film vacuum gauge;
one end of each sealing clamp is connected with the servo mechanism through a solenoid valve, and the other end of each sealing clamp is connected with the helium mass spectrometer leak detector through a solenoid valve and a corrugated pipe;
and the standard leak hole is connected with the helium mass spectrometer leak detector through a first manual stop valve.
2. The apparatus of claim 1 wherein a second manual shut-off valve is provided on the bellows between the plurality of solenoid valves and the helium mass spectrometer leak detector.
3. The apparatus of claim 1, wherein the servo mechanism comprises a drive motor, a transmission shaft, a mechanical arm, a hydraulic clamp, a pressure gauge, a control circuit, and a touch screen, wherein:
the touch screen is connected with the control circuit;
the control circuit is connected with the driving motor;
the driving motor is connected with the mechanical arm through the transmission shaft and correspondingly connected with the sealing clamps through the hydraulic clamps;
the pressure gauge is connected with the control circuit.
4. The apparatus of claim 3, wherein the structure of each sealing fixture is correspondingly matched with the structure of each component of the capacitance thin film vacuum gauge.
5. The apparatus of claim 1 wherein said helium mass spectrometer leak detector is communicatively coupled to said servo mechanism.
6. The apparatus of claim 3 further comprising a safety fence disposed around said robotic arm.
7. A method of applying the apparatus for rapid leak detection of parts of a capacitive membrane vacuum gauge as claimed in any one of claims 1 to 6, comprising the steps of:
step 1: installing a quick leak detection device, opening an electromagnetic valve between a servo mechanism and each sealing clamp, controlling a servo motor to open the sealing clamps, and sequentially placing parts of the capacitance film vacuum gauge into the corresponding sealing clamps through a transmission shaft and a mechanical arm;
step 2: operating a touch screen of the servo mechanism, setting a pressure value of the pressure clamp through a pressure gauge, closing all the sealing clamps, and fixing and clamping internal parts;
and step 3: each sealing clamp is connected with the helium mass spectrometer leak detector through an electromagnetic valve and a corrugated pipe, a second manual stop valve is arranged on the corrugated pipe, and the standard leak hole is connected with the helium mass spectrometer leak detector through the first manual stop valve;
and 4, step 4: closing electromagnetic valves between the servo mechanism and all the sealing clamps, opening a second manual stop valve, sequentially opening the electromagnetic valves between the sealing clamps and the helium mass spectrometer leak detector, and vacuumizing a pipeline of the rapid leak detection device by using the helium mass spectrometer leak detector;
and 5: opening a first manual stop valve, communicating a standard leak hole with a helium mass spectrometer leak detector, calibrating the minimum detectable leak rate of the rapid leak detection device, spraying helium gas at all pipeline joints of the rapid leak detection device and at the sealing positions of parts and sealing clamps, and checking whether the interior of the rapid leak detection device is leaked or not;
and 6: if leakage exists, the joint connection part can be adjusted, and the detection is carried out again after the joint connection part is screwed down until no obvious signal rise exists in the helium mass spectrometer leak detector;
and 7: closing the first manual stop valve, using a helium cover to cover the sealing clamp and the parts, introducing helium into the helium cover, observing the change of the display value of the helium mass spectrometer leak detector, and automatically and synchronously recording and storing the change in software in a servo mechanism to realize leak detection of the parts of the capacitance film vacuum gauges in all the sealing clamps;
and 8: after leak detection is completed, the sealing clamps are controlled through the servo mechanism touch screen, all the sealing clamps are in an opening state, parts are taken out, all valves are closed, the helium mass spectrometer leak detector is closed, the servo mechanism is closed after leak rate data of all the parts are derived, a main power supply is closed, and qualified parts are selected according to leak rate indexes of the parts.
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| CN202211533826.5A CN115808272A (en) | 2022-12-01 | 2022-12-01 | Quick leak detection device and method for components of capacitance film vacuum gauge |
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| CN202211533826.5A CN115808272A (en) | 2022-12-01 | 2022-12-01 | Quick leak detection device and method for components of capacitance film vacuum gauge |
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