CN102589809B - Portable leak detector calibration system and method - Google Patents
Portable leak detector calibration system and method Download PDFInfo
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- CN102589809B CN102589809B CN201210024834.7A CN201210024834A CN102589809B CN 102589809 B CN102589809 B CN 102589809B CN 201210024834 A CN201210024834 A CN 201210024834A CN 102589809 B CN102589809 B CN 102589809B
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Abstract
The invention relates to a portable leak detector calibration system and a method, belonging to the field of measurement technologies. The calibration system comprises a first valve 1, a second valve 3, a third valve 4, a fourth valve 6, a fifth valve 8, a sixth valve 10, a seventh valve 11, an eighth valve 12, a ninth valve 14, a tenth valve 15, an eleventh valve 17, a twelfth valve 19, a first vacuum gauge 2, a second vacuum gauge 18, a third vacuum gauge 22, a 1L pressure stabilizing chamber 5, a molecular pump 7, a mechanical pump 9, a 1L volume-metered chamber 13, a 0.1L volume-metered chamber 16, a positive pressure leak 20 and a thermostatic chamber 21. The system has the characteristics of simple structure, high accuracy, little weight, small volume, portability and the like, and is used for calibrating the operating mode of a suction gun of a leak detector on site or in a laboratory; and with the adoption of the system, the development cost is lowered, the calibration efficiency is increased, and the calibration can be achieved on site or on line, so that the calibration environment can be basically the same as a service environment, and the calibration accuracy is improved.
Description
Technical field
The present invention relates to a kind of Portable leak detector calibration system and method, be specifically related to a kind ofly for the laboratory for leak locator, scene and on-line calibration, test macro and method, belong to field of measuring technique.
Background technology
Leak detection technology is significant in the research and production such as space flight, surface, microelectronics, sun power, photoelectron, along with scientific-technical progress and development, not only need leak locator to carry out accurate calibration, and in many application, need scene or on-line calibration to test, make like this calibration condition and service condition basic identical, not only improve the precision of leaking calibration, and avoid, because the system of quitting work is sent to economic loss and the time waste of laboratory calibration, therefore in scientific research, the manufacturing, having proposed the urgent demand of on-the-spot or online leak locator calibration testing.
Document " Pressure Leak Calibration Apparatus ", " vacuum science and technology journal " the 21st volume, the 1st phase of calendar year 2001,55th～59 pages "; introduced PRESSURE LEAK CALIBRATION method; system is only for calibrating positive pressure leak hole; can not provide accurately known leak rate; and complicated huge, cost is expensive, be only suitable for, in laboratory calibration use, can not meeting the calibration requirements of on-the-spot leak locator.
Therefore, the features such as that the system of this patent development has is simple in structure, precision is high, weight is little, volume is little, portable, for on-the-spot or online leak locator calibration testing, system general assembly (TW) is less than 50 kilograms, overall dimension is less than 50mm × 30mm × 60mm, and calibration range is 10
-6～10
-2pam
3/ s, combined standard uncertainty is less than 10%, has met the on-the-spot or online accurate calibration demand of current most field to leak locator suction gun mode of operation.
Summary of the invention
The object of the invention is the defect in order to overcome above-mentioned prior art, for the field calibration demand of leak locator suction gun mode of operation, propose a kind of Portable leak detector calibration system and method.
The object of the invention is to be achieved through the following technical solutions.
A kind of Portable leak detector calibration system of the present invention, its external unit is leak locator to be measured, comprising: the first valve 1, the second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19, the first vacuum gauge 2, the second vacuum gauge 18, the 3rd vacuum gauge 22,1L pressure stabilizing chamber 5, molecular pump 7, mechanical pump 9,1L constant volume chamber 13,0.1L constant volume chamber 16, positive pressure leak hole 20 and constant temperature oven 21;
Above-mentioned the second vacuum gauge 18 and the 3rd vacuum gauge 22 are electric capacity rule, the second valve 3, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 are ball valve, the 4th valve 6 is angle valve, and the 3rd valve 4 is micrometering valve;
One end of the first valve 1 is connected with source of the gas, the other end and the second valve 3, the 3rd valve 4 is connected with pressure stabilizing chamber 5, and the other end of the second valve 3 is connected with the first vacuum gauge 2, and the other end of pressure stabilizing chamber 5 is connected with the 4th valve 6, the bleeding point of molecular pump 7 and the 4th valve 6, the 6th valve 10 connects, and the exhausr port of molecular pump 7 is connected with the 5th valve 8, and the other end of the 5th valve 8 is connected with mechanical pump 9, the other end of the other end of the 6th valve 10 and the 3rd valve 4, the 7th valve 11, the 8th valve 12, the tenth valve 15 connects, the other end of the 7th valve 11 and the second vacuum gauge 18, the 3rd vacuum gauge 22 connects, the other end of the 8th valve 12 is connected with one end of 1L constant volume chamber 13, the other end of 1L constant volume chamber 13 is connected with the 9th valve 14, the other end of the tenth valve 15 is connected with one end of 0.1L constant volume chamber 16, the other end the 11 valve 17 of 0.1L constant volume chamber 16 connects, the other end of the 9th valve 14, the other end of the 11 valve 17, second other end of vacuum gauge 18 and one end of the 12 valve 19 connect by four-way, and the other end of the 12 valve 19 is connected with the entrance of positive pressure leak hole 20, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve 15, the 11 valve 17, the 12 valve 19, the second vacuum gauge 18, the 3rd vacuum gauge 22, 1L constant volume chamber 13, 0.1L constant volume chamber 16, positive pressure leak hole 20 is placed in constant temperature oven 21, and leak locator to be measured is connected with the outlet of positive pressure leak hole 20,
Preferably, it is characterized in that the feature such as that system has is simple in structure, precision is high, measurement range is wide, weight little (being less than 50 kilograms), volume are little, portable can be used for on-the-spot and laboratory and calibrate leak locator under suction gun mode of operation.System adopts high precision differential pressure type Capacitance Diaphragm Gauge 18 (full scale is 100Torr) to measure the variation of constant volume chamber pressure, adopt constant temperature oven to reduce the impact of temperature fluctuation on measuring accuracy, by regulating small opening inlet pressure to change the leakage leak rate that provides known, can realize 10 like this
-6～10
-2pam
3the calibration of/s scope.
The step that a kind of Portable leak detector calibration system of the present invention carries out scene or laboratory calibration to leak locator is:
S1, the positive pressure leak hole 20 that standard leak rate is provided is arranged on the 12 valve 19, and checks and sealing is installed, the outlet of the suction gun of leak locator being aimed to positive pressure leak hole 20;
S2, open mechanical pump 9, the second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 successively, pressure stabilizing chamber 5 and valve pipe are bled, open the first vacuum gauge 2, in the time that the first vacuum gauge 2 gaging pressures are less than 20Pa, start molecular pump 7, start constant temperature oven 21, open leak locator;
S3, open the second vacuum gauge 18, the 3rd vacuum gauge 22, when vacuum tightness in pipeline is less than 1 × 10
-1when Pa, the second vacuum gauge 18, the 3rd vacuum gauge 22 are returned to zero;
S4, close the 3rd valve 4, the 4th valve 6, the 6th valve the 10, the 12 valve 19, open the first valve 1 and introduce the gas that air pressure is greater than a standard atmospheric pressure in pressure stabilizing chamber 5, in pressure stabilizing chamber, gaseous tension adopts the first vacuum gauge 2 to measure, then valve-off 1;
If the calibration range that S5 sets is 10
-4～10
-2pam
3/ s, choosing volume is the constant volume chamber 13 of 1L, close the tenth valve the 15, the 11 valve 17, introduce by the 3rd valve 4 gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve 4, in the time that the second vacuum gauge 18 pressure at two ends are identical and the second vacuum gauge 18 indicated values are zero, close the 7th valve 11, the 8th valve 12, then open the 12 valve 19, in the 8th valve 12 is long-pending to positive pressure leak hole 20 these segment bodies, when gaseous tension steady change, record current time t
1with the second vacuum gauge 18 indicated value P
1, wait until time t
2time, writing time t
2with the second vacuum gauge 18 indicated value P
2, the malleation leak rate of standard is
wherein V
0be the volume that the 8th valve 12 arrives between positive pressure leak hole 20, record during this period the indicated value Q of leak locator
l;
If S6 is calibrated scope 10
-6～10
-4pam
3/ s, choosing volume is the constant volume chamber 16 of 0.1L, close the 8th valve 12, the 9th valve 14, introduce by the 3rd valve 4 gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve 4, in the time that the second vacuum gauge 18 pressure at two ends are identical and the second vacuum gauge 18 indicated values are zero, close the 7th valve 11, the tenth valve 15, then open the 12 valve 19, in the tenth valve 15 is long-pending to positive pressure leak hole 20 these segment bodies, when gaseous tension steady change, record current time t
1with the second vacuum gauge 18 indicated value P
1, wait until time t
2time, writing time t
2with the second vacuum gauge 18 indicated value P
2, the malleation leak rate of standard is
wherein V
0be the volume that the tenth valve 15 arrives between positive pressure leak hole 20, record during this period the indicated value Q of leak locator
l;
S7, by standard malleation leak rate Q
swith leak locator indicated value Q
lradiometer calculate calibration factor
Preferably, the suction gun by leak locator in described step S1 is aimed in the operation of outlet of positive pressure leak hole 20, and the probe gas flowing out from small opening will all suck suction gun, ensures that positive pressure leak hole top hole pressure is a standard atmospheric pressure simultaneously;
Preferably, in described step S2, the first vacuum gauge 2 is the compound vacuum gauge of gamut, and its measurement range will cover 10
-3～2.5 × 10
5pa;
Preferably, in described step S3, before the second vacuum gauge 18, the 3rd vacuum gauge 22 zeroings, need to stablize more than 4 hours, wherein the second vacuum gauge 18 is that full scale is the differential pressure type Capacitance Diaphragm Gauge of 100Torr, its measuring accuracy is to be less than 0.2% of full scale, the 3rd vacuum gauge 22 is that full scale is the absolute pressure formula Capacitance Diaphragm Gauge of 5000Torr, and its measuring accuracy is to be less than 0.2% of full scale;
Preferably, in described step S4, adopt 99.999% high-purity gas to the gas of introducing in pressure stabilizing chamber 5;
Preferably, volume V in described step S5, S6
0known;
Preferably, Q in described step S5, S6
l, Q
sfor the mean value of at least six measurements;
Preferably, Q in described step S5, S6
scombined standard uncertainty is less than 10%.
Beneficial effect
The present invention is a kind of Portable leak detector calibration system and method, that system has is simple in structure, precision is high, weight is little, volume is little, the feature such as portable, for the calibration of scene or laboratory leak locator suction gun mode of operation, system not only reduces development cost, improve the efficiency of calibration, and can be on-the-spot or complete online calibration, this make calibration environment and environment for use basic identical, improve calibration accuracy, solved the demand to leak locator high precision, scene or laboratory calibration in scientific research, enterprise's production, foreign trade.
Brief description of the drawings
Fig. 1 is the principle schematic of a kind of Portable leak detector calibration system of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
A kind of Portable leak detector calibration system, its external unit is leak locator to be measured, as shown in Figure 1, comprising: the first valve 1, the second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19, the first vacuum gauge 2, the second vacuum gauge 18, the 3rd vacuum gauge 22,1L pressure stabilizing chamber 5, molecular pump 7, mechanical pump 9,1L constant volume chamber 13,0.1L constant volume chamber 16, positive pressure leak hole 20 and constant temperature oven 21;
Above-mentioned the second vacuum gauge 18 and the 3rd vacuum gauge 22 are electric capacity rule, the second valve 3, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 are ball valve, the 4th valve 6 is angle valve, and the 3rd valve 4 is micrometering valve;
One end of the first valve 1 is connected with source of the gas, the other end and the second valve 3, the 3rd valve 4 is connected with pressure stabilizing chamber 5, and the other end of the second valve 3 is connected with the first vacuum gauge 2, and the other end of pressure stabilizing chamber 5 is connected with the 4th valve 6, the bleeding point of molecular pump 7 and the 4th valve 6, the 6th valve 10 connects, and the exhausr port of molecular pump 7 is connected with the 5th valve 8, and the other end of the 5th valve 8 is connected with mechanical pump 9, the other end of the other end of the 6th valve 10 and the 3rd valve 4, the 7th valve 11, the 8th valve 12, the tenth valve 15 connects, the other end of the 7th valve 11 and the second vacuum gauge 18, the 3rd vacuum gauge 22 connects, the other end of the 8th valve 12 is connected with one end of 1L constant volume chamber 13, the other end of 1L constant volume chamber 13 is connected with the 9th valve 14, the other end of the tenth valve 15 is connected with one end of 0.1L constant volume chamber 16, the other end the 11 valve 17 of 0.1L constant volume chamber 16 connects, the other end of the 9th valve 14, the other end of the 11 valve 17, second other end of vacuum gauge 18 and one end of the 12 valve 19 connect by four-way, and the other end of the 12 valve 19 is connected with the entrance of positive pressure leak hole 20, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve 15, the 11 valve 17, the 12 valve 19, the second vacuum gauge 18, the 3rd vacuum gauge 22, 1L constant volume chamber 13, 0.1L constant volume chamber 16, positive pressure leak hole 20 is placed in constant temperature oven 21, and leak locator to be measured is connected with the outlet of positive pressure leak hole 20,
Preferably, it is characterized in that the feature such as that system has is simple in structure, precision is high, measurement range is wide, weight little (being less than 50 kilograms), volume are little, portable can be used for on-the-spot and laboratory and calibrate leak locator under suction gun mode of operation.System adopts high precision differential pressure type Capacitance Diaphragm Gauge 18 (full scale is 100Torr) to measure the variation of constant volume chamber pressure, adopt constant temperature oven to reduce the impact of temperature fluctuation on measuring accuracy, by regulating small opening inlet pressure to change the leakage leak rate that provides known, can realize 10 like this
-6～10
-2pam
3the calibration of/s scope.
The step that above-mentioned Portable leak detector calibration system is carried out to scene or laboratory calibration to leak locator is:
S1, the positive pressure leak hole 20 that standard leak rate is provided is arranged on the 12 valve 19, and checks and sealing is installed, the outlet of the suction gun of leak locator being aimed to positive pressure leak hole 20;
S2, open mechanical pump 9, the second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 successively, pressure stabilizing chamber 5 and valve pipe are bled, open the first vacuum gauge 2, in the time that the first vacuum gauge 2 gaging pressures are less than 20Pa, start molecular pump 7, start constant temperature oven 21, open leak locator;
S3, open the second vacuum gauge 18, the 3rd vacuum gauge 22, when vacuum tightness in pipeline is less than 1 × 10
-1when Pa, the second vacuum gauge 18, the 3rd vacuum gauge 22 are returned to zero;
S4, close the 3rd valve 4, the 4th valve 6, the 6th valve the 10, the 12 valve 19, open the first valve 1 and introduce the gas that air pressure is greater than a standard atmospheric pressure in pressure stabilizing chamber 5, in pressure stabilizing chamber, gaseous tension adopts the first vacuum gauge 2 to measure, then valve-off 1;
If the calibration range that S5 sets is 10
-4～10
-2pam
3/ s, choosing volume is the constant volume chamber 13 of 1L, close the tenth valve the 15, the 11 valve 17, introduce by the 3rd valve 4 gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve 4, in the time that the second vacuum gauge 18 pressure at two ends are identical and the second vacuum gauge 18 indicated values are zero, close the 7th valve 11, the 8th valve 12, then open the 12 valve 19, in the 8th valve 12 is long-pending to positive pressure leak hole 20 these segment bodies, when gaseous tension steady change, record current time t
1with the second vacuum gauge 18 indicated value P
1, wait until time t
2time, writing time t
2with the second vacuum gauge 18 indicated value P
2, the malleation leak rate of standard is
wherein V
0be the volume that the 8th valve 12 arrives between positive pressure leak hole 20, record during this period the indicated value Q of leak locator
l;
If S6 is calibrated scope 10
-6～10
-4pam
3/ s, choosing volume is the constant volume chamber 16 of 0.1L, close the 8th valve 12, the 9th valve 14, introduce by the 3rd valve 4 gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve 4, in the time that the second vacuum gauge 18 pressure at two ends are identical and the second vacuum gauge 18 indicated values are zero, close the 7th valve 11, the tenth valve 15, then open the 12 valve 19, in the tenth valve 15 is long-pending to positive pressure leak hole 20 these segment bodies, when gaseous tension steady change, record current time t
1with the second vacuum gauge 18 indicated value P
1, wait until time t
2time, writing time t
2with the second vacuum gauge 18 indicated value P
2, the malleation leak rate of standard is
wherein V
0be the volume that the tenth valve 15 arrives between positive pressure leak hole 20, record during this period the indicated value Q of leak locator
l;
S7, by standard malleation leak rate Q
swith leak locator indicated value Q
lradiometer calculate calibration factor
Preferably, the suction gun by leak locator in described step S1 is aimed in the operation of outlet of positive pressure leak hole 20, and the probe gas flowing out from small opening will all suck suction gun, and positive pressure leak hole top hole pressure is a standard atmospheric pressure simultaneously;
Preferably, in described step S2, the first vacuum gauge 2 is the compound vacuum gauge of gamut, and its measurement range will cover 10
-3～2.5 × 10
5pa;
Preferably, in described step S3, before the second vacuum gauge 18, the 3rd vacuum gauge 22 zeroings, need to stablize more than 4 hours, wherein the second vacuum gauge 18 is that full scale is the differential pressure type Capacitance Diaphragm Gauge of 100Torr, its measuring accuracy is to be less than 0.2% of full scale, the 3rd vacuum gauge 22 is that full scale is the absolute pressure formula Capacitance Diaphragm Gauge of 5000Torr, and its measuring accuracy is to be less than 0.2% of full scale;
Preferably, in described step S4, adopt 99.999% high-purity gas to the gas of introducing in pressure stabilizing chamber 5;
Preferably, volume V in described step S5, S6
0known;
Preferably, Q in described step S5, S6
l, Q
sfor the mean value of at least six measurements;
Preferably, Q in described step S5, S6
scombined standard uncertainty is less than 10%.
Embodiment
Above-mentioned Portable leak detector calibration system carries out scene or laboratory calibration to leak locator, the steps include:
S1, the positive pressure leak hole 20 that standard leak rate is provided is arranged on the 12 valve 19, and checks and sealing is installed, the outlet of the suction gun of leak locator being aimed to positive pressure leak hole 20;
S2, open mechanical pump 9, the second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 successively, pressure stabilizing chamber 5 and valve pipe are bled, open the first vacuum gauge 2, in the time that the first vacuum gauge 2 gaging pressures are less than 20Pa, start molecular pump 7, start constant temperature oven 21, open leak locator;
S3, open the second vacuum gauge 18, the 3rd vacuum gauge 22, when vacuum tightness in pipeline is less than 1 × 10
-1when Pa, the second vacuum gauge 18, the 3rd vacuum gauge 22 are returned to zero;
S4, close the 3rd valve 4, the 4th valve 6, the 6th valve the 10, the 12 valve 19, open the first valve 1 and introduce 3.5 × 10 in pressure stabilizing chamber 5
5high-purity helium (99.999%) of Pa pressure, in pressure stabilizing chamber, helium pressure adopts the first vacuum gauge 2 to measure, then valve-off 1;
If the calibration range that S5 sets is 10
-4～10
-2pam
3/ s, choosing volume is the constant volume chamber 13 of 1L, close the tenth valve the 15, the 11 valve 17, introduce by the 3rd valve 4 gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve 4, in the time that the second vacuum gauge 18 pressure at two ends are identical and the second vacuum gauge 18 indicated values are zero, close the 7th valve 11, the 8th valve 12, then open the 12 valve 19, in the 8th valve 12 is long-pending to positive pressure leak hole 20 these segment bodies, when gaseous tension steady change, record current time t
1be 0 second and the second vacuum gauge 18 indicated value P
1for 0Pa, after 120 seconds, writing time t
2be 120 seconds and the second vacuum gauge 18 indicated value P
2for (1450Pa), the malleation leak rate of standard is
wherein V
0be the 8th valve 12 to the volume between positive pressure leak hole 20 (measured value is 1.256L), record during this period the indicated value Q of leak locator
lbe 1.32 × 10
-2pam
3/ s,
If S6 is calibrated scope 10
-6～10
-4pam
3/ s, choosing volume is the constant volume chamber 16 of 0.1L, closes the 8th valve 12, the 9th valve 14, introducing air pressure by the 3rd valve 4 is 2.0 × 10
5the gas of Pa, then close the 3rd valve 4, in the time that the second vacuum gauge 18 pressure at two ends are identical and the second vacuum gauge 18 indicated values are zero, close the 7th valve 11, the tenth valve 15, then open the 12 valve 19, in the tenth valve 15 is long-pending to positive pressure leak hole 20 these segment bodies, when gaseous tension steady change, record current time t
1be 0 second and the second vacuum gauge 18 indicated value P
1for 0Pa, after 300 seconds, writing time t
2be 300 seconds and the second vacuum gauge 18 indicated value P
2for 56Pa, the malleation leak rate of standard is
wherein V
0be the tenth valve 15 to the volume between positive pressure leak hole 20 (measured value is 0.114L), record during this period the indicated value Q of leak locator
l=1.90 × 10
-2pam
3/ s,
S7, the last average calibration factor S=1.14 that calibrated within the specific limits.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.Every do not depart under spirit disclosed in this invention, complete equivalence or amendment, all fall into the scope of protection of the invention.
Claims (5)
1. a Portable leakage detector calibration steps, the external unit that the method is used is leak locator to be measured, the device that the method is used comprises: the first valve (1), the second valve (3), the 3rd valve (4), the 4th valve (6), the 5th valve (8), the 6th valve (10), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19), the first vacuum gauge (2), the second vacuum gauge (18), the 3rd vacuum gauge (22), 1L pressure stabilizing chamber (5), molecular pump (7), mechanical pump (9), 1L constant volume chamber (13), 0.1L constant volume chamber (16), positive pressure leak hole (20) and constant temperature oven (21),
Above-mentioned the second vacuum gauge (18) and the 3rd vacuum gauge (22) are electric capacity rule, the second valve (3), the 6th valve (10), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19) are ball valve, the 4th valve (6) is angle valve, and the 3rd valve (4) is micrometering valve;
One end of the first valve (1) is connected with source of the gas, the other end and the second valve (3), (5 are connected the 3rd valve (4) with pressure stabilizing chamber, the other end of the second valve (3) is connected with the first vacuum gauge (2), the other end of pressure stabilizing chamber (5) is connected with the 4th valve (6), the bleeding point of molecular pump (7) and the 4th valve (6), the 6th valve (10) connects, the exhausr port of molecular pump (7) is connected with the 5th valve (8), the other end of the 5th valve (8) is connected with mechanical pump (9), the other end of the other end of the 6th valve (10) and the 3rd valve (4), the 7th valve (11), the 8th valve (12), the tenth valve (15) connects, the other end of the 7th valve (11) and the second vacuum gauge (18), the 3rd vacuum gauge (22) connects, the other end of the 8th valve (12) is connected with one end of 1L constant volume chamber (13), the other end of 1L constant volume chamber (13) is connected with the 9th valve (14), the other end of the tenth valve (15) is connected with one end of 0.1L constant volume chamber (16), the other end the 11 valve (17) of 0.1L constant volume chamber (16) connects, the other end of the 9th valve (14), the other end of the 11 valve (17), the other end of the second vacuum gauge (18) and one end of the 12 valve (19) connect by four-way, the other end of the 12 valve (19) is connected with the entrance of positive pressure leak hole (20), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19), the second vacuum gauge (18), the 3rd vacuum gauge (22), 1L constant volume chamber (13), 0.1L constant volume chamber (16), positive pressure leak hole (20) is placed in constant temperature oven (21), leak locator to be measured is connected with the outlet of positive pressure leak hole (20),
It is characterized in that: the step that this device carries out scene or laboratory calibration to leak locator is:
S1, that the positive pressure leak hole (20) that standard leak rate is provided is arranged on to the 12 valve (19) is upper, and checks and sealing is installed, the outlet of the suction gun of leak locator being aimed to positive pressure leak hole (20);
S2, open successively mechanical pump (9), the second valve (3), the 3rd valve (4), the 4th valve (6), the 5th valve (8), the 6th valve (10), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19), pressure stabilizing chamber (5) and valve pipe are bled, open the first vacuum gauge (2), in the time that the first vacuum gauge (2) gaging pressure is less than 20Pa, start molecular pump (7), start constant temperature oven (21), open leak locator,
S3, open the second vacuum gauge (18), the 3rd vacuum gauge (22), when vacuum tightness in pipeline is less than 1 × 10
-1when Pa, the second vacuum gauge (18), the 3rd vacuum gauge (22) are returned to zero;
S4, close the 3rd valve (4), the 4th valve (6), the 6th valve (10), the 12 valve (19), open the first valve (1) and introduce the gas that air pressure is greater than a standard atmospheric pressure in pressure stabilizing chamber (5), in pressure stabilizing chamber, gaseous tension adopts the first vacuum gauge (2) to measure, and then closes the first valve (1);
If the calibration range that S5 sets is 10
-4～10
-2pam
3/ s, choosing volume is the constant volume chamber (13) of 1L, close the tenth valve (15), the 11 valve (17), introduce by the 3rd valve (4) gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve (4), in the time that the second vacuum gauge (18) pressure at two ends is identical and the second vacuum gauge (18) indicated value is zero, close the 7th valve (11), the 8th valve (12), then open the 12 valve (19), in the 8th valve (12) is long-pending to this segment body of positive pressure leak hole (20) when gaseous tension steady change, record current time t
1with the second vacuum gauge (18) indicated value P
1, wait until time t
2time, writing time t
2with the second vacuum gauge (18) indicated value P
2, the malleation leak rate of standard is
wherein V
0be that the 8th valve (12) arrives the volume between positive pressure leak hole (20), record during this period the indicated value Q of leak locator
l,
If S6 is calibrated scope 10
-6～10
-4pam
3/ s, choosing volume is the constant volume chamber (16) of 0.1L, close the 8th valve (12), the 9th valve (14), introduce by the 3rd valve (4) gas that air pressure is greater than a standard atmospheric pressure, then close the 3rd valve (4), in the time that the second vacuum gauge (18) pressure at two ends is identical and the second vacuum gauge (18) indicated value is zero, close the 7th valve (11), the tenth valve (15), then open the 12 valve (19), in the tenth valve (15) is long-pending to this segment body of positive pressure leak hole (20) when gaseous tension steady change, record current time t
1with the second vacuum gauge (18) indicated value P
1, wait until time t
2time, writing time t
2with the second vacuum gauge (18) indicated value P
2, the malleation leak rate of standard is
wherein V
0be that the tenth valve (15) arrives the volume between positive pressure leak hole (20), record during this period the indicated value Q of leak locator
l,
S7, by standard malleation leak rate Q
swith leak locator indicated value Q
lradiometer calculate calibration factor
2. a kind of Portable leakage detector calibration steps according to claim 1, it is characterized in that, the suction gun by leak locator in described step S1 is aimed in the operation of outlet of positive pressure leak hole (20), the probe gas flowing out from small opening will all suck suction gun, ensures that positive pressure leak hole top hole pressure is a standard atmospheric pressure simultaneously.
3. a kind of Portable leakage detector calibration steps according to claim 1, is characterized in that, in described step S2, the first vacuum gauge (2) is the compound vacuum gauge of gamut, and its measurement range will cover 10
-3～2.5 × 10
5pa.
4. a kind of Portable leakage detector calibration steps according to claim 1, it is characterized in that, in described step S3, before the second vacuum gauge (18), the 3rd vacuum gauge (22) zeroing, need to stablize more than 4 hours, wherein the second vacuum gauge (18) is that full scale is the differential pressure type Capacitance Diaphragm Gauge of 100Torr, its measuring accuracy is to be less than 0.2% of full scale, the 3rd vacuum gauge (22) is that full scale is the absolute pressure formula Capacitance Diaphragm Gauge of 5000Torr, and its measuring accuracy is to be less than 0.2% of full scale.
5. a kind of Portable leakage detector calibration steps according to claim 1, is characterized in that, in described step S4, adopts 99.999% high-purity gas to the middle gas of introducing of pressure stabilizing chamber (5).
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| CN103133869B (en) * | 2013-02-05 | 2015-06-03 | 核工业理化工程研究院 | Corrosion-resistant draining hole device capable of being adjusted continuously and calibrated on line in real time |
| CN104236813B (en) * | 2014-09-04 | 2016-07-20 | 兰州空间技术物理研究所 | A kind of Pressure Leak Calibration Apparatus based on static buildup decay relative method and method |
| CN105136389B (en) * | 2015-07-21 | 2017-12-12 | 兰州空间技术物理研究所 | 10‑9The vacuum partial pressure calibrating installation and calibration factor acquisition methods of Pa magnitudes |
| CN108593216B (en) * | 2018-03-27 | 2020-06-23 | 兰州空间技术物理研究所 | Portable dynamic comparison positive pressure leak hole calibration device and method |
| CN109443653B (en) * | 2018-11-28 | 2020-09-22 | 北京东方计量测试研究所 | Gas sampling system and method for micro leak rate positive pressure leak hole calibration |
| CN111896191B (en) * | 2020-06-15 | 2021-11-30 | 成都飞机工业（集团）有限责任公司 | On-site calibration method and auxiliary calibration equipment for integral oil tank leakage detection equipment |
| CN112557606B (en) * | 2021-02-28 | 2021-06-04 | 中国工程物理研究院核物理与化学研究所 | Auxiliary device special for measuring performance parameters of gas detector |
| CN114623979A (en) * | 2021-04-06 | 2022-06-14 | 上海东贝真空设备有限公司 | Constant-volume positive-pressure leak hole calibration device and test method thereof |
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