CN102589803A - Portable multifunctional vacuum calibration system and method - Google Patents
Portable multifunctional vacuum calibration system and method Download PDFInfo
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- CN102589803A CN102589803A CN2012100248332A CN201210024833A CN102589803A CN 102589803 A CN102589803 A CN 102589803A CN 2012100248332 A CN2012100248332 A CN 2012100248332A CN 201210024833 A CN201210024833 A CN 201210024833A CN 102589803 A CN102589803 A CN 102589803A
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Abstract
The invention relates to a portable multifunctional vacuum calibration system and a method, belonging to the field of measurement technologies. The calibration system comprises a mechanical pump 1, a molecular pump 2, a first vacuum valve 3, a second vacuum valve 4, a third vacuum valve 8, a fourth vacuum valve 10, a fifth vacuum valve 11, a sixth vacuum valve 17, a seventh vacuum valve 19, an eighth vacuum valve 23, a ninth vacuum valve 15, a calibration chamber 5, a quadrupole mass spectrometer 6, a first small hole 9, a second small hole 20, a fine-adjustment valve 12, a gas source 13, a first vacuum gauge 14, a second vacuum gauge 18, a third vacuum gauge 21, a fifth vacuum gauge 24 and a pressure-stabilizing chamber 16; and the method comprises a vacuum leak calibration method and a vacuum gauge calibration method. According to the system, the vacuum gauges and a gas micro-flow calibration function are combined, and the vacuum gauges, vacuum leaks, leak detectors and gas micro-flowmeters can be calibrated in an on-site or on-line manner, so that the system has the characteristics of multifunction, high accuracy, little weight, small volume, portability and the like.
Description
Technical field
The present invention relates to a kind of portable multi-function vacuum calibration system and method, be specifically related to a kind of laboratory, scene and on-line calibration test macro and method that is used for vacuum gauge, vacuum leak, leak locator and gas micro-flowmeter, belong to field of measuring technique.
Background technology
The vacuum correction technology has great importance in research and production such as space flight, surface, microelectronics, sun power, photoelectron; For scientific research or enterprise production line; Need carry out scene or on-line calibration test to vacuum gauge vacuum leak, leak locator and gas micro-flowmeter, make calibration condition and service condition basic identical like this, not only improve calibration accuracy; And avoided because the system of quitting work is sent to the economic loss and the time waste of laboratory calibration; Therefore the urgent demand of on-the-spot or online vacuum correction has been proposed, because vacuum parameters is more, if multiple calibration function is integrated on the table apparatus in scientific research, the manufacturing; Not only make things convenient for calibration process, and reduce the cost of building calibrating installation.
Document " Ultra-Low Leak Rate with Constant Conductance Technique calibrating installation "; Be published in " vacuum science and technological journal " the 26th volume, the 5th phase in 2006, the 358th～362 page; Introduced the method for fixed flow inducing defecation by enema and suppository calibration vacuum leak, need many vacuum pumps and vacuum gauge etc., and system complex has been huge, cost is expensive; Only be adapted at laboratory calibration usefulness, can not satisfy the calibration requirements of on-the-spot vacuum leak, leak locator and gas micro-flowmeter.
Document " development of comparison method vacuumatic measuring standard set-up " is published in " aerospace instrumentation technology " the 66th volume, the 6th phase in 1992, the 70th～73 page, introduced calibration steps and the calibration system of comparing the method vacuum gauge, but its calibration range is 10
-4～10
5Pa, and 10
-4～10
-1Measure through magnetic suspension rotor gauge in the Pa pressure limit; The lower limit of this measuring method is limited by the magnetic suspension rotor gauge measurement lower limit; The magnetic suspension rotor gauge cost is relatively more expensive simultaneously; It is huge to add this systematic comparison, only is adapted at the laboratory and uses, and can't satisfy the calibration requirements of on-the-spot vacuum gauge.
This patent has proposed portable multi-function vacuum calibration system and method, and multiple vacuum instrument calibration function is integrated in the system, and overall dimension is less than 50mm * 30mm * 60mm, is 10 to the calibration range of gas micro
-7～1 * 10
-11Pam
3/ s, combined standard uncertainty are 3%; Calibration range to vacuum gauge is 10
-6～1 * 10
5Pa.Advantages such as system has light weight (less than 50 kilograms), function is many, calibration range is wide, portable, thus the calibration problem of on-the-spot various vacuum gauge, vacuum leak, leak locator solved.
Summary of the invention
The objective of the invention is to the demand of vacuum gauge, vacuum leak, leak locator and gas micro-flowmeter scene or on-line calibration, to propose a kind of portable multi-function vacuum calibration system and method in order to overcome the defective of above-mentioned prior art.
The objective of the invention is to realize through following technical scheme.
A kind of portable multi-function vacuum calibration system of the present invention; Comprise: mechanical pump 1, molecular pump 2, first vacuum valve 3, second vacuum valve 4, the 3rd vacuum valve 8, the 4th vacuum valve 10, the 5th vacuum valve 11, the 6th vacuum valve 17, the 7th vacuum valve 19, the 8th vacuum valve 23, the 9th vacuum valve 15, calibration chamber 5, quadrupole mass spectrometer 6, first aperture 9, second aperture 20, micrometering valve 12, source of the gas 13, first vacuum gauge 14, second vacuum gauge 18, the 3rd vacuum gauge 21, the 5th vacuum gauge 24 and pressure stabilizing chamber 16, equipment wherein to be calibrated is the 4th vacuum gauge 22 and vacuum leak 7;
Above-mentioned first vacuum gauge 14, the 3rd vacuum gauge 21, the 5th vacuum gauge 24 are electric capacity rule;
In this system; Mechanical pump 1 is connected with molecular pump 2, and the other end of molecular pump is connected with second vacuum valve 4 with first vacuum valve 3, and the other end of second vacuum valve 4 is connected with calibration chamber 5; The other end of first vacuum valve 3 is connected with pressure stabilizing chamber 16; Quadrupole mass spectrometer 6, the 7th vacuum valve 19, the 3rd vacuum gauge 21, the 8th vacuum valve 23 and the 4th vacuum gauge 22 to be calibrated have been installed on the equator flange of calibration chamber 5, and the bleeding point of calibration chamber 5 has current limliting with second aperture 20, and the top of calibration chamber 5 is connected with the 4th vacuum valve 10 with the 3rd vacuum valve 8, first aperture 9; The other end of the 3rd vacuum valve 8 be calibrated small opening 7 and be connected; The other end of the 4th vacuum valve 10 and first aperture 9 all is connected with the 5th vacuum valve 11, and the other end of the 5th vacuum valve 11 is connected with pressure stabilizing chamber 16 with micrometering valve 12, and the other end of micrometering valve 12 is connected with source of the gas 13; The 9th vacuum valve 15 and the 6th vacuum valve 17 are installed on the pressure stabilizing chamber 16; The 9th vacuum valve 15 is connected with first vacuum gauge 14, and the 6th vacuum valve 17 is connected with second vacuum gauge 18, and the other end of second vacuum gauge 18 is connected with the 7th vacuum valve 19; The 8th vacuum valve 23 is connected with the 5th vacuum gauge 24, and the small opening to be calibrated 7 of system is placed in the constant temperature oven that adopts foam thermal insulation;
Preferably, system can carry out scene or on-line calibration to vacuum gauge, vacuum leak, leak locator and gas micro-flowmeter, has characteristics such as function is many, precision is high, weight is little, volume is little, portable.The method that adopts normative reference directly to compare realizes 10
-2～10
5The internal calibration of Pa scope; Adopt flowmeter that normal flow Q is provided
S,, be P=Q through calculating acquisition calibration chamber normal pressure according to air inlet orifice conductance C
S/ C is implemented in 10
-6～10
-2The calibration of Pa scope, to the combined standard uncertainty of vacuum gauge calibration less than 3%.Calibration to gas micro (for example vacuum leak) is to adopt aperture sample introduction under the molecular flow condition to obtain the calibrating gas micrometeor; Adopt mass spectrograph as comparer, introduce standard probe gas flow Q in the calibration chamber through regulating
S, according to mass spectrograph to being calibrated the ion flow I of small opening
SThe ion flow I that causes with flow standard
L, consider background residual gas ion flow signal I again
0, calculate the leak rate that is calibrated small opening and do
Calibration range to gas micro is 10
-7～1 * 10
-11Pam
3/ s, combined standard uncertainty is less than 3%.
A kind of portable multi-function vacuum calibration system of the present invention, its calibration steps are divided into method of calibrating vacuum leak and the method for calibrating vacuum gauge;
The step of wherein calibrating the vacuum leak method is:
S11, vacuum leak 7 to be calibrated is installed on the 3rd vacuum valve 8, and sealing is installed in inspection;
S12, open mechanical pump 1, first vacuum valve 3, second vacuum valve 4, the 4th vacuum valve 10, the 5th vacuum valve 11, the 9th vacuum valve 15, the 6th vacuum valve 17, the 7th vacuum valve 19 successively; Calibration chamber 5, pressure stabilizing chamber 16 and each valve pipe are bled; Open second vacuum gauge 18; And keep ambient temperature range at 23 ± 3 ℃, when second vacuum gauge 18 measures that pressure is less than 20Pa in the pressure stabilizing chamber, start molecular pump 2;
S13, when vacuum tightness is less than 130Pa in the pressure stabilizing chamber 16, open the 9th vacuum valve 15 and first vacuum gauge 14, vacuum tightness is less than 1 * 10 in calibration chamber 5
-3During Pa, open quadrupole mass spectrometer 6;
S14, in pressure stabilizing chamber 16 vacuum tightness less than 1 * 10
-3During Pa, and electric capacity rule 14 stablize more than 4 hours, and electric capacity rule 14 are returned to zero;
S15, close first vacuum valve 3, the 4th vacuum valve 10, the 5th vacuum valve 11, the 7th vacuum valve 19, record calibration chamber 5 background probe gas ion flow I
0, open the 3rd vacuum valve 8 and introduce the small opening gas leakage to calibration chamber 5, after the small opening probe gas causes that the mass spectrograph ion flow is stable, record ion flow size I
L, close the 3rd vacuum valve 8 then and bleed, probe gas ion flow signal near or equal background ions stream I0 after; Close the 4th vacuum valve 10, the 6th vacuum valve 17; Open the 7th vacuum valve 19, in pressure stabilizing chamber 16, introduce gas through micrometering valve 12, the pressure of gas is no more than 133Pa; Calibrating gas flow in the pressure stabilizing chamber 16 is incorporated in the calibration chamber 5 through first aperture 9, after quadrupole mass spectrometer 6 detects the ion flow signal stabilizations and near or equal I
LDuring size, close micrometering valve 12, then calibrating gas flow Q
SAdvise 14 reading P through electric capacity
uWith first aperture, 9 conductance C
uCalculate Q
S=P
uC
u, then the stable back of ion flow its value of record is I
S, be calibrated vacuum leak 7 leak rates and do
S16, close quadrupole mass spectrometer 6, all vacuum gauges and all vacuum valves, closure molecule pump 2, mechanical pump 1 successively, the vacuum leak 7 that dismounting is calibrated;
Preferably, in calibration vacuum leak said step S11 by the leak rate of school vacuum leak 7 10
-7～10
-11Pam
3In/s the scope, source of the gas 13 is high-purity probe gas;
Preferably, be not less than 3 hours the stabilization time of quadrupole mass spectrometer 6 in the said step S13 of calibration vacuum leak;
Preferably, first vacuum gauge 14 is that full scale is the absolute pressure capacitor thin film rule of 1Torr in the said step S14 of calibration vacuum leak, and its measuring accuracy is less than 0.2% of full scale;
Preferably, in calibration vacuum leak said step S15 the conductance of first aperture 9 10
-9m
3/ s magnitude;
Preferably, Q in the said step S15 of calibration vacuum leak
L, Q
SBe taken to the mean value of few six measurements;
Preferably, Q in the said step S15 of calibration vacuum leak
LThe synthetic standards uncertainty of measurement is less than 3%;
The step of calibration vacuum gauge:
S21, vacuum gauge 22 to be calibrated is installed on the calibration chamber 5, and sealing is installed in inspection;
S22, open mechanical pump 1, first vacuum valve 3, second vacuum valve 4, the 4th vacuum valve 10, the 5th vacuum valve 11, the 9th vacuum valve 15, the 6th vacuum valve 17, the 7th vacuum valve 19, the 8th vacuum valve 23 successively; Calibration chamber 5, pressure stabilizing chamber 16 and each valve pipe are bled; Open second vacuum gauge 18; And to keep environment temperature be 23 ± 3 ℃, and pressure starts molecular pump 2 less than 20Pa in the pressure stabilizing chamber 16 when second vacuum gauge 18 measures;
S23, open the 3rd electric capacity rule 21, when vacuum tightness is less than 130Pa in the pressure stabilizing chamber 16, open the 9th vacuum valve 15 and first vacuum gauge 14, the vacuum tightness in calibration chamber 5 and pressure stabilizing chamber 16 is less than 1 * 10
-3During Pa, return to zero after stablizing more than 4 hours at first vacuum gauge 14, the 3rd vacuum gauge 21, the 5th vacuum gauge 24;
If the calibration range that S24 sets is 10
-6～10
-2Pa adopts continuous plavini calibration, is specially:
S241, close vacuum first vacuum valve 3, the 4th vacuum valve 10, the 5th vacuum valve 11, the 7th vacuum valve 19, open micrometering valve 12 and in pressure stabilizing chamber 16, introduce certain pressure P
uGas, gaseous tension is no more than 133Pa, if surpass 133Pa then close the 9th vacuum valve 15 to protect first vacuum gauge 14, closes fine tuning valve 12 then;
S242, close the 6th vacuum valve 17, open the 7th vacuum valve 19 and the 5th vacuum valve 11, the gas in the pressure stabilizing chamber 16 is introduced in the calibration chamber 5 through first aperture 9, after the gas in the calibration chamber 5 is stable, writes down the reading P of first vacuum gauge 14
u, then the gas flow through first aperture 9 is Q
S=P
uC
u, then normal pressure does in the calibration chamber 5
Realize 10 like this
-6～10
-2The interior calibration of Pa scope to vacuum gauge;
If the calibration range that S25 sets is 10
-2～10
5Pa adopts the direct comparison method calibration, is specially: close first vacuum valve 3, second vacuum valve 4, the 9th vacuum valve 15, the 6th vacuum valve 17; Open the 4th vacuum valve 10, the 5th vacuum valve 11, the 7th vacuum valve 19, in calibration chamber 5, introduce gas through micrometering valve 12, after gaseous tension in the calibration chamber 5 is stable; If pressure less than 133Pa, adopts first vacuum gauge 24 to measure, if pressure is greater than 133Pa; Behind the valve-off 23; Adopt the 3rd vacuum gauge 21 to measure, record measurement result P advances calibration with this as normal pressure;
Preferably, in calibration vacuum gauge said step S25 air inlet to use the conductance of first aperture 9 be 10
-5m
3/ s magnitude, the conductance that uses second aperture 20 of bleeding is 0.1m
3/ s;
Preferably, the mean value that P measures at least for six times in the said step S25 of calibration vacuum gauge, S26.
Beneficial effect
The present invention is a kind of portable multi-function vacuum calibration system and method; That system has is simple in structure, precision is high, weight is little, volume is little, characteristics such as integrated, portable; Be used for the on-the-spot perhaps calibration testing of line vacuum rule, vacuum leak, leak locator, gas micro-flowmeter; System not only reduced the cost of the system that sets up, and improved the efficient of calibration, and makes calibration environment and environment for use basic identical; Improved vacuum value transmitting accuracy, for scientific research, enterprise production, foreign trade have reduced cost.
Description of drawings
Fig. 1 is a kind of portable multi-function vacuum calibration system principle schematic of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
A kind of portable multi-function vacuum calibration system; As shown in Figure 1; Comprise: mechanical pump 1, molecular pump 2, first vacuum valve 3, second vacuum valve 4, the 3rd vacuum valve 8, the 4th vacuum valve 10, the 5th vacuum valve 11, the 6th vacuum valve 17, the 7th vacuum valve 19, the 8th vacuum valve 23, the 9th vacuum valve 15, calibration chamber 5, quadrupole mass spectrometer 6, first aperture 9, second aperture 20, micrometering valve 12, source of the gas 13, first vacuum gauge 14, second vacuum gauge 18, the 3rd vacuum gauge 21, the 5th vacuum gauge 24 and pressure stabilizing chamber 16, equipment wherein to be calibrated is the 4th vacuum gauge 22 and vacuum leak 7;
Above-mentioned first vacuum gauge 14, the 3rd vacuum gauge 21, the 5th vacuum gauge 24 are electric capacity rule;
In this system; Mechanical pump 1 is connected with molecular pump 2, and the other end of molecular pump is connected with second vacuum valve 4 with first vacuum valve 3, and the other end of second vacuum valve 4 is connected with calibration chamber 5; The other end of first vacuum valve 3 is connected with pressure stabilizing chamber 16; Quadrupole mass spectrometer 6, the 7th vacuum valve 19, the 3rd vacuum gauge 21, the 8th vacuum valve 23 and the 4th vacuum gauge 22 to be calibrated have been installed on the equator flange of calibration chamber 5, and the bleeding point of calibration chamber 5 has current limliting with second aperture 20, and the top of calibration chamber 5 is connected with the 4th vacuum valve 10 with the 3rd vacuum valve 8, first aperture 9; The other end of the 3rd vacuum valve 8 be calibrated small opening 7 and be connected; The other end of the 4th vacuum valve 10 and first aperture 9 all is connected with the 5th vacuum valve 11, and the other end of the 5th vacuum valve 11 is connected with pressure stabilizing chamber 16 with micrometering valve 12, and the other end of micrometering valve 12 is connected with source of the gas 13; The 9th vacuum valve 15 and the 6th vacuum valve 17 are installed on the pressure stabilizing chamber 16; The 9th vacuum valve 15 is connected with first vacuum gauge 14, and the 6th vacuum valve 17 is connected with second vacuum gauge 18, and the other end of second vacuum gauge 18 is connected with the 7th vacuum valve 19; The 8th vacuum valve 23 is connected with the 5th vacuum gauge 24, and the vacuum leak to be calibrated 7 of system is placed in the constant temperature oven that adopts foam thermal insulation.
Adopt said apparatus to be to the step that vacuum leak 7 to be calibrated carries out calibration steps:
S11, vacuum leak 7 to be calibrated is installed on the 3rd vacuum valve 8, and sealing is installed in inspection;
S12, open mechanical pump 1, first vacuum valve 3, second vacuum valve 4, the 4th vacuum valve 10, the 5th vacuum valve 11, the 9th vacuum valve 15, the 6th vacuum valve 17, the 7th vacuum valve 19 successively; Calibration chamber 5, pressure stabilizing chamber 16 and each valve pipe are bled; Open second vacuum gauge 18; And keep ambient temperature range at 23 ± 3 ℃, when second vacuum gauge 18 measures that pressure is less than 20Pa in the pressure stabilizing chamber, start molecular pump 2;
S13, when vacuum tightness is less than 130Pa in the pressure stabilizing chamber 16, open the 9th vacuum valve 15 and first vacuum gauge 14, vacuum tightness is less than 1 * 10 in calibration chamber 5
-3During Pa, open quadrupole mass spectrometer 6;
S14, in pressure stabilizing chamber 16 vacuum tightness less than 1 * 10
-3During Pa, and electric capacity rule 14 stablize more than 4 hours, and electric capacity rule 14 are returned to zero;
S15, close first vacuum valve 3, the 4th vacuum valve 10, the 5th vacuum valve 11, the 7th vacuum valve 19, record calibration chamber 5 background probe gas ion flow I
0, open the 3rd vacuum valve 8 and introduce the small opening gas leakage to calibration chamber 5, after the small opening probe gas causes that the mass spectrograph ion flow is stable, record ion flow size I
L, close the 3rd vacuum valve 8 then and bleed, probe gas ion flow signal near or equal background ions stream I
0After; Close the 4th vacuum valve 10, the 6th vacuum valve 17; Open the 7th vacuum valve 19, in pressure stabilizing chamber 16, introduce gas through micrometering valve 12, the pressure of gas is no more than 133Pa; Calibrating gas flow in the pressure stabilizing chamber 16 is incorporated in the calibration chamber 5 through first aperture 9, after quadrupole mass spectrometer 6 detects the ion flow signal stabilizations and near or equal I
LDuring size, close micrometering valve 12, then calibrating gas flow Q
SAdvise 14 reading P through electric capacity
uWith first aperture, 9 conductance C
uCalculate Q
S=P
uC
u, then the stable back of ion flow its value of record is I
S, be calibrated vacuum leak 7 leak rates and do
S16, close quadrupole mass spectrometer 6, all vacuum gauges and all vacuum valves, closure molecule pump 2, mechanical pump 1 successively, the vacuum leak 7 that dismounting is calibrated;
Preferably, in calibration vacuum leak said step S11 by the leak rate of school vacuum leak 7 10
-7～10
-11Pam
3In/s the scope, source of the gas 13 is chosen as high-purity probe gas;
Preferably, be not less than 3 hours the stabilization time of quadrupole mass spectrometer 6 in the said step S13 of calibration vacuum leak;
Preferably, first vacuum gauge 14 is that full scale is the absolute pressure capacitor thin film rule of 1Torr in the said step S14 of calibration vacuum leak, and its measuring accuracy is less than 0.2% of full scale;
Preferably, in calibration vacuum leak said step S15 the conductance of first aperture 9 10
-9m
3/ s magnitude;
Preferably, Q in the said step S15 of calibration vacuum leak
L, Q
SBe taken to the mean value of few six measurements;
Preferably, Q in the said step S15 of calibration vacuum leak
LThe synthetic standards uncertainty of measurement is less than 3%;
Adopt said apparatus to be to the step that vacuum gauge 22 to be calibrated carries out calibration steps:
S21, vacuum gauge 22 to be calibrated is installed on the calibration chamber 5, and sealing is installed in inspection;
S22, open mechanical pump 1, first vacuum valve 3, second vacuum valve 4, the 4th vacuum valve 10, the 5th vacuum valve 11, the 9th vacuum valve 15, the 6th vacuum valve 17, the 7th vacuum valve 19, the 8th vacuum valve 23 successively; Calibration chamber 5, pressure stabilizing chamber 16 and each valve pipe are bled; Open second vacuum gauge 18; And to keep environment temperature be 23 ± 3 ℃, and pressure starts molecular pump 2 less than 20Pa in the pressure stabilizing chamber 16 when second vacuum gauge 18 measures;
S23, open the 3rd electric capacity rule 21, when vacuum tightness is less than 130Pa in the pressure stabilizing chamber 16, open the 9th vacuum valve 15 and first vacuum gauge 14, the vacuum tightness in calibration chamber 5 and pressure stabilizing chamber 16 is less than 1 * 10
-3During Pa, return to zero after stablizing more than 4 hours at first vacuum gauge 14, the 3rd vacuum gauge 21, the 5th vacuum gauge 24;
If the calibration range that S24 sets is 10
-6～10
-2Pa adopts continuous plavini calibration, is specially:
S241, close vacuum first vacuum valve 3, the 4th vacuum valve 10, the 5th vacuum valve 11, the 7th vacuum valve 19, open micrometering valve 12 and in pressure stabilizing chamber 16, introduce certain pressure P
uGas, gaseous tension is no more than 133Pa, if surpass 133Pa then close the 9th vacuum valve 15 to protect first vacuum gauge 14, closes fine tuning valve 12 then;
S242, close the 6th vacuum valve 17, open the 7th vacuum valve 19 and the 5th vacuum valve 11, the gas in the pressure stabilizing chamber 16 is introduced in the calibration chamber 5 through first aperture 9, after the gas in the calibration chamber 5 is stable, writes down the reading P of first vacuum gauge 14
u, then the gas flow through first aperture 9 is Q
S=P
uC
u, then normal pressure does in the calibration chamber 5
Realize 10 like this
-6～10
-2The interior calibration of Pa scope to vacuum gauge;
If the calibration range that S25 sets is 10
-2～10
5Pa adopts the direct comparison method calibration, is specially: close first vacuum valve 3, second vacuum valve 4, the 9th vacuum valve 15, the 6th vacuum valve 17; Open the 4th vacuum valve 10, the 5th vacuum valve 11, the 7th vacuum valve 19, in calibration chamber 5, introduce gas through micrometering valve 12, after gaseous tension in the calibration chamber 5 is stable; If pressure less than 133Pa, adopts first vacuum gauge 24 to measure, if pressure is greater than 133Pa; Behind the valve-off 23; Adopt the 3rd vacuum gauge 21 to measure, record measurement result P advances calibration with this as normal pressure;
Preferably, in calibration vacuum gauge said step S25 air inlet to use the conductance of first aperture 9 be 10
-5m
3/ s magnitude, the conductance that uses second aperture 20 of bleeding is 0.1m
3/ s;
Preferably, the mean value that P measures at least for six times in the said step S24 of calibration vacuum gauge, S25.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.Everyly do not break away from the equivalence of accomplishing under the disclosed spirit of the present invention or revise, all fall into the scope of the present invention's protection.
Claims (8)
1. portable multi-function vacuum calibration system; Equipment to be calibrated is the 4th vacuum gauge (22) and vacuum leak (7); It is characterized in that; Comprise mechanical pump (1), molecular pump (2), first vacuum valve (3), second vacuum valve (4), the 3rd vacuum valve (8), the 4th vacuum valve (10), the 5th vacuum valve (11), the 6th vacuum valve (17), the 7th vacuum valve (19), the 8th vacuum valve (23), the 9th vacuum valve (15), calibration chamber (5), quadrupole mass spectrometer (6), first aperture (9), second aperture (20), micrometering valve (12), source of the gas (13), first vacuum gauge (14), second vacuum gauge (18), the 3rd vacuum gauge (21), the 5th vacuum gauge (24) and pressure stabilizing chamber (16), wherein first vacuum gauge (14), the 3rd vacuum gauge (21), the 5th vacuum gauge (24) are electric capacity rule;
Mechanical pump (1) is connected with molecular pump (2); The other end of molecular pump is connected with second vacuum valve (4) with first vacuum valve (3); The other end of second vacuum valve (4) is connected with calibration chamber (5); The other end of first vacuum valve (3) is connected with pressure stabilizing chamber (16); Quadrupole mass spectrometer (6), the 7th vacuum valve (19), the 3rd vacuum gauge (21), the 8th vacuum valve (23) and the 4th vacuum gauge (22) to be calibrated have been installed on the equator flange of calibration chamber (5), and the bleeding point of calibration chamber (5) has current limliting with second aperture (20), and the top of calibration chamber (5) is connected with the 3rd vacuum valve (8), first aperture (9) and the 4th vacuum valve (10); The other end of the 3rd vacuum valve (8) be calibrated small opening (7) and be connected; The other end of the 4th vacuum valve (10) and first aperture (9) all is connected with the 5th vacuum valve (11), and the other end of the 5th vacuum valve (11) is connected with pressure stabilizing chamber (16) with micrometering valve (12), and the other end of micrometering valve (12) is connected with source of the gas (13); Pressure stabilizing chamber (16) is gone up the 9th vacuum valve (15) and the 6th vacuum valve (17) is installed; The 9th vacuum valve (15) is connected with first vacuum gauge (14), and the 6th vacuum valve (17) is connected with second vacuum gauge (18), and the other end of second vacuum gauge (18) is connected with the 7th vacuum valve (19); The 8th vacuum valve (23) is connected with the 5th vacuum gauge (24), and the small opening to be calibrated (7) of system is placed in the constant temperature oven that adopts foam thermal insulation.
2. a kind of portable multi-function vacuum calibration system according to claim 1 is characterized in that the step of this system calibration vacuum leak method is:
S11, vacuum leak to be calibrated (7) is installed on the 3rd vacuum valve (8), and sealing is installed in inspection;
S12, open mechanical pump (1), first vacuum valve (3), second vacuum valve (4), the 4th vacuum valve (10), the 5th vacuum valve (11), the 9th vacuum valve (15), the 6th vacuum valve (17), the 7th vacuum valve (19) successively; Calibration chamber (5), pressure stabilizing chamber (16) and each valve pipe are bled; Open second vacuum gauge (18); And keep ambient temperature range at 23 ± 3 ℃, when second vacuum gauge (18) measures that pressure is less than 20Pa in the pressure stabilizing chamber, start molecular pump (2);
S13, when vacuum tightness is less than 130Pa in the pressure stabilizing chamber (16), open the 9th vacuum valve (15) and first vacuum gauge (14), vacuum tightness is less than 1 * 10 in calibration chamber (5)
-3During Pa, open quadrupole mass spectrometer (6);
S14, in pressure stabilizing chamber (16) vacuum tightness less than 1 * 10
-3During Pa, and electric capacity rule (14) stablize more than 4 hours, and electric capacity rule (14) are returned to zero;
S15, close first vacuum valve (3), the 4th vacuum valve (10), the 5th vacuum valve (11), the 7th vacuum valve (19); Record calibration chamber (5) background probe gas ion flow I0; Open the 3rd vacuum valve (8) and introduce the small opening gas leakage to calibration chamber (5); After the small opening probe gas causes that the mass spectrograph ion flow is stable, record ion flow size I
LClose the 3rd vacuum valve (8) then and bleed; Probe gas ion flow signal near or equal background ions stream I0 after, close the 4th vacuum valve (10), the 6th vacuum valve (17), open the 7th vacuum valve (19); In pressure stabilizing chamber (16), introduce gas through micrometering valve (12); The pressure of gas is no more than 133Pa, and the calibrating gas flow in the pressure stabilizing chamber (16) is incorporated in the calibration chamber (5) through first aperture (9), after quadrupole mass spectrometer (6) detects the ion flow signal stabilization and near or equal I
LDuring size, close micrometering valve (12), then calibrating gas flow Q
SThrough electric capacity rule (14) reading P
uWith first aperture (9) conductance C
uCalculate Q
S=P
uC
u, then the stable back of ion flow its value of record is I
S, be calibrated vacuum leak (7) leak rate and do
Said Q
L, Q
SFor being taken to the mean value of few six measurements;
S16, close quadrupole mass spectrometer (6), all vacuum gauges and all vacuum valves, closure molecule pump (2), mechanical pump (1) successively, the vacuum leak (7) that dismounting is calibrated.
3. according to a kind of portable multi-function vacuum calibration system according to claim 1, it is characterized in that the step of this system calibration vacuum gauge method is:
S21, vacuum gauge to be calibrated (22) is installed on the calibration chamber (5), and sealing is installed in inspection;
S22, open mechanical pump (1), first vacuum valve (3), second vacuum valve (4), the 4th vacuum valve (10), the 5th vacuum valve (11), the 9th vacuum valve (15), the 6th vacuum valve (17), the 7th vacuum valve (19), the 8th vacuum valve (23) successively; Calibration chamber (5), pressure stabilizing chamber (16) and each valve pipe are bled; Open second vacuum gauge (18); And the maintenance environment temperature is 23 ± 3 ℃; Pressure starts molecular pump (2) less than 20Pa in the pressure stabilizing chamber (16) when second vacuum gauge (18) measures;
S23, open the 3rd electric capacity rule (21), when vacuum tightness is less than 130Pa in the pressure stabilizing chamber (16), open the 9th vacuum valve (15) and first vacuum gauge (14), the vacuum tightness in calibration chamber (5) and pressure stabilizing chamber (16) is less than 1 * 10
-3During Pa, return to zero after stablizing more than 4 hours at first vacuum gauge (14), the 3rd vacuum gauge (21), the 5th vacuum gauge (24);
If the calibration range that S24 sets is 10
-6～10
-2Pa adopts continuous plavini calibration, is specially:
S241, close vacuum first vacuum valve (3), the 4th vacuum valve (10), the 5th vacuum valve (11), the 7th vacuum valve (19), open micrometering valve (12) and in pressure stabilizing chamber (16), introduce certain pressure P
uGas, gaseous tension is no more than 133Pa, if surpass 133Pa then close the 9th vacuum valve (15) to protect first vacuum gauge (14), closes fine tuning valve (12) then;
S242, close the 6th vacuum valve (17); Open the 7th vacuum valve (19) and the 5th vacuum valve (11); Gas in the pressure stabilizing chamber (16) is introduced in the calibration chamber (5) through first aperture (9), after the gas in the calibration chamber (5) is stable, writes down the reading P of first vacuum gauge (14)
u, then the gas flow through first aperture (9) is Q
S=P
uC
u, then normal pressure does in the calibration chamber (5)
Realize 10 like this
-6～10
-2The interior calibration of Pa scope to vacuum gauge;
If the calibration range that S25 sets is 10
-2～10
5Pa adopts the direct comparison method calibration, is specially: close first vacuum valve (3), second vacuum valve (4), the 9th vacuum valve (15), the 6th vacuum valve (17); Open the 4th vacuum valve (10), the 5th vacuum valve (11), the 7th vacuum valve (19), in calibration chamber (5), introduce gas, after gaseous tension in the calibration chamber (5) is stable through micrometering valve (12); If pressure is less than 133Pa; Adopt first vacuum gauge (24) to measure, if pressure is greater than 133Pa, behind the valve-off (23); Adopt the 3rd vacuum gauge (21) to measure; Record measurement result P advances calibration with this as normal pressure, and said measurement result P is at least six mean values of measuring.
4. according to a kind of portable multi-function vacuum calibration system according to claim 2, it is characterized in that, among the said step S11 by the leak rate of school vacuum leak (7) 10
-7～10
-11Pam
3In/s the scope, source of the gas (13) is high-purity probe gas.
5. according to a kind of portable multi-function vacuum calibration system according to claim 2, it is characterized in that be not less than 3 hours the stabilization time of quadrupole mass spectrometer among the said step S13 (6).
6. according to a kind of portable multi-function vacuum calibration system according to claim 2, it is characterized in that first vacuum gauge (14) is that full scale is the absolute pressure capacitor thin film rule of 1Torr among the said step S14, its measuring accuracy is less than 0.2% of full scale.
7. according to a kind of portable multi-function vacuum calibration system according to claim 2, it is characterized in that the conductance of first aperture (9) is 10 among the said step S15
-9m
3/ s magnitude.
8. according to a kind of portable multi-function vacuum calibration system according to claim 3, it is characterized in that air inlet is 10 with the conductance of first aperture (9) among the said step S25
-5m
3/ s magnitude, the conductance of bleeding with second aperture (20) is 0.1m
3/ s.
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| CN102944357A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | Device and method for calibrating vacuum gauge for work |
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| CN102967679A (en) * | 2012-11-05 | 2013-03-13 | 聚光科技(杭州)股份有限公司 | Calibrating device and calibrating method of portable instrument |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177235A (en) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | Calibrating device of vacuum gauge |
| KR100805926B1 (en) * | 2006-08-22 | 2008-02-21 | 한국표준과학연구원 | Integral calibration apparatus for low vacuum gauge and high vacuum gauge |
| CN202501952U (en) * | 2012-02-06 | 2012-10-24 | 江苏东方航天校准检测有限公司 | Portable multifunctional vacuum calibrating device |
-
2012
- 2012-02-06 CN CN2012100248332A patent/CN102589803A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177235A (en) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | Calibrating device of vacuum gauge |
| KR100805926B1 (en) * | 2006-08-22 | 2008-02-21 | 한국표준과학연구원 | Integral calibration apparatus for low vacuum gauge and high vacuum gauge |
| CN202501952U (en) * | 2012-02-06 | 2012-10-24 | 江苏东方航天校准检测有限公司 | Portable multifunctional vacuum calibrating device |
Non-Patent Citations (2)
| Title |
|---|
| 宋瑞海等: "《真空比对法校准装置的研究》", 《真空》 * |
| 李得天等: "《超高/极高真空校准研究进展》", 《真空科学与技术学报》 * |
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