CN202853862U - System for extending lower limit of gas micro-flow calibration to 10<-14>Pam<3>/s - Google Patents
System for extending lower limit of gas micro-flow calibration to 10<-14>Pam<3>/s Download PDFInfo
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- CN202853862U CN202853862U CN 201220518181 CN201220518181U CN202853862U CN 202853862 U CN202853862 U CN 202853862U CN 201220518181 CN201220518181 CN 201220518181 CN 201220518181 U CN201220518181 U CN 201220518181U CN 202853862 U CN202853862 U CN 202853862U
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- vacuum valve
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Abstract
The utility model relates to a system for extending the lower limit of gas micro-flow calibration to 10<-14>Pam<3>/s and the system is used in calibration and test of vacuum leaks, leak detectors and gas micro-flowmeters. The system comprises mechanical pumps, two electromagnetic valves, six vacuum valves, two molecular pumps, a mass spectrometry analysis room, a small hole, two getter pumps, a pressure stabilizing chamber, three vacuum gauges, a gas storage cylinder, a fine adjustment valve and a quadrupole mass spectrometer. The getter pumps are used to exhaust air from the pressure stabilizing chamber, the influence of non inert gas released by the wall of the pressure stabilizing chamber on the pressure measurement is eliminated. A magnetic suspension rotor gauge is used to accurately measure the pressure P of gas in the pressure stabilizing chamber, the gas in the pressure stabilizing chamber expands continuously and is led to the mass spectrometry analysis room through a known small flow guide hole, calibration is implemented by using the cumulative method, and the problem of measurement and calibration on tiny gas micro-flow in the range from 10<-11> to 10<-14> Pam<3>/s.
Description
Technical field
The utility model belongs to field of measuring technique, is specifically related to a kind of minimum gas flow calibration system and method, is used for calibration and the measurement of vacuum leak, leak locator and gas micro-flowmeter.
Background technology
Leak Detection is the gordian technique in the applications such as aerospace engineering, semi-conductor industry, solar industry, especially in aerospace engineering minimum gas flow has been proposed eager demand.Document " TT﹠C system of Constant Pressure Flowmeter development " aerospace instrumentation technology " the 24th volume, the 6th phase in 2004, the 14th～16 page " is introduced the method that has proposed to adopt constant-voltage method measurement gas micrometeor, and its measurement range is 3.9 * 10
-4～3.6 * 10
-8Pa m
3/ s; Document " design of portable gas micro-flowmeter, " vacuum " the 47th volume, the 2nd phase in 2010, the 60th～63 page " is introduced the method that has proposed to adopt constant volume method and flow conductance method measurement gas micrometeor, and its measurement range is 5 * 10
-2～5 * 10
-11Pam
3/ s; Document " APRECISION GAS FLOWMETER FOR VACUUM METROLOGY "
VACUUM44 (2): (1993) .135-141. has proposed the constant conductance method flowmeter can extend to 5 * 10 with the gas flow lower limit
-12Pam
3/ s, the reason that this flowmeter lower limit can not continue to extend mainly contains two, and the one, the firm discharge method adopts magnetic suspension rotor gauge to measure the aperture inlet pressure, is limited to 10 because mass spectrometric analysis chamber and pipeline venting impact make under the aperture inlet pressure that can accurately measure
-3Pa; The 2nd, even obtained less than 10
-12Pam
3/ s gas flow, because what adopt that the expand continuously method sets up at mass spectrometric analysis chamber is the partial pressure of probe gas dynamic stability, this partial pressure has exceeded the detection lower limit of mass spectrograph.And the minimum detectable leak rate of present commercial leak locator reaches 10
-16Pam
3/ s, for this to gas flow less than 10
-12Pam
3The calibration of/s is a present unsolved difficult problem still.
The utility model content
The purpose of this utility model is for less than 10
-12Pam
3The calibration requirements of/s gas micro has proposed a kind of the gas micro-flow measurement lower limit to be extended to 10
-14Pa m
3The system of/s.
The purpose of this utility model is achieved through the following technical solutions
A kind of the gas micro calibration lower limit is extended to 10
-14Pam
3The system of/s comprises:
The first mechanical pump, the second mechanical pump, the first solenoid valve, the second solenoid valve, the first vacuum valve, the second vacuum valve, the 3rd vacuum valve, the 4th vacuum valve, the 5th vacuum valve, the 6th vacuum valve, the first molecular pump, the second molecular pump, mass spectrometric analysis chamber, aperture, the first getter pump, the second getter pump, pressure stabilizing chamber, the first vacuum gauge, the second vacuum gauge, the 3rd vacuum gauge, gas bomb, micrometering valve, quadrupole mass spectrometer and vacuum are blank;
In this system, the first mechanical pump is connected with the first solenoid valve, and the first molecular pump one end is connected with the first solenoid valve, and the other end is connected with the first vacuum valve; The second vacuum gauge, quadrupole mass spectrometer are installed on the mass spectrometric analysis chamber, the second getter pump is connected with mass spectrometric analysis chamber by the 6th vacuum valve, the lower end bleeding point of mass spectrometric analysis chamber is connected with the first vacuum valve, and the upper end of mass spectrometric analysis chamber is connected with aperture, the 4th vacuum valve respectively; The other end of the 4th vacuum valve is connected with vacuum leak; One end of the second vacuum valve is connected with aperture, and the other end is connected with micrometering valve, pressure stabilizing chamber and the 3rd vacuum gauge, and gas bomb is connected with micrometering valve; Six interfaces are arranged on the pressure stabilizing chamber, be connected with the first vacuum gauge, micrometering valve, the 5th vacuum valve, the 3rd vacuum gauge, the 3rd vacuum valve and the second vacuum valve respectively, the first getter pump is connected with the 5th vacuum valve; The second molecular pump two ends are connected with the 3rd vacuum valve, the second solenoid valve respectively, and the other end of the second solenoid valve and second connects mechanical pump and is connected.
Preferably, calibration range is 10
-11～10
-14Pa m
3/ s.
Preferably, described the first vacuum gauge adopts magnetic suspension rotor gauge (SRG), and hole diameter is less than 2u, and SRG stablized more than 3 hours before measuring.
Preferably, described first cool down pump, second cool down pump to inert gas without pumping speed.
Preferably, the probe gas of described vacuum leak and gas bomb is inert gas.
Preferably, work was more than 3 hours before described quadrupole mass spectrometer was measured.
The utility model also provides a kind of the gas micro calibration lower limit is extended to 10
-14Pam
3The method of the system of/s comprises step:
S1, will be calibrated vacuum leak and be connected with the 4th vacuum valve, and check sealing, then close the 4th vacuum valve;
S2, open the first mechanical pump, the second mechanical pump is bled, then opening the first solenoid valve, the first vacuum valve, the second vacuum valve, the 3rd vacuum valve, the second solenoid valve bleeds to mass spectrometric analysis chamber and valve pipe, open the second vacuum gauge, the 3rd vacuum gauge, when the second vacuum gauge, the 3rd vacuum gauge measured value during less than 10Pa, open the first molecular pump, the second molecular pump vacuumizes, keeping environment temperature on every side is 23 ± 3 ℃;
S3, open the first vacuum gauge when gaseous tension is less than 1Pa in the pressure stabilizing chamber 10, vacuum tightness is less than 1 * 10 in mass spectrometric analysis chamber
-3Open quadrupole mass spectrometer during Pa, vacuum tightness is less than 1 * 10 in pressure stabilizing chamber and mass spectrometric analysis chamber
-4Open true the 5th vacuum valve, the 6th vacuum valve during Pa, in the indicated value of the 3rd vacuum gauge less than 5 * 10
-6Pa, and in the first vacuum gauge work after 3 hours, set the background of magnetic suspension rotor gauge;
S4, in quadrupole mass spectrometer work more than 3 hours, and the indicated value of the second vacuum gauge is less than 1 * 10
-6During Pa, close behind the first vacuum valve and measure probe gas background ions stream I along with the variation of time r by quadrupole mass spectrometer, behind Δ t after a while, the slope that increases along with the time according to ion current
S5, open the first vacuum valve mass spectrometric analysis chamber is bled, when the probe gas ion current drops to initial background ions stream, slowly opening the 4th vacuum valve will be calibrated in the vacuum leak probe gas introducing mass spectrometric analysis chamber, after quadrupole mass spectrometer detection ion current is stable, close behind the first vacuum valve and writing time, behind Δ t after a while, the slope that increases along with the time of small opening ion current
S6, opening the first vacuum valve bleeds to mass spectrometric analysis chamber, close the second vacuum valve, the 3rd vacuum valve, the 4th vacuum valve, introduce the gas of certain pressure in the pressure stabilizing chamber by fine tuning valve, in the time of after the ion current of probe gas in mass spectrometric analysis chamber is reduced to background ions stream and the first vacuum gauge pressure stability, opening the second vacuum valve introduces gas in the mass spectrometric analysis chamber by aperture, after the probe gas ion current is stable, close writing time the first vacuum valve while, record the indicated value P of the first vacuum gauge, behind Δ t after a while, according to the slope of the growth of ion current
S7, close all vacuum valves, close quadrupole mass spectrometer, vacuum gauge, molecular pump, mechanical pump all working instrument, then be calibrated leak hole leak rate and be
The small opening 18 that is calibrated in described step S1 is placed in the constant temperature system, and its temperature variation is no more than 0.5 degree in the experimentation.
Magnetic suspension rotor gauge measures 10 in described step S3
-1～10
-3During Pa pressure, the sampling time is set as 10 seconds, when measuring 10
-4During Pa pressure, the sampling time is set as 30 seconds.
In described step S6, get
The mean value of measuring more than at least six times is as measurement result.
C is known in described step S7, and its combined standard uncertainty is less than 2%.
Beneficial effect
The gas micro calibration system that the utility model is set up is compared with above technology has following characteristics: the one, and adopt getter pump that pressure stabilizing chamber and vacuum chamber mass spectrometric analysis chamber are bled, the characteristics of bleeding of getter pump are without pumping speed to inert gas, being calibrated object generally adopts helium as probe gas, therefore adopt and avoided behind this pump non-indifferent gas that aperture entrance pressure stabilizing chamber and pipeline material emit on the impact of measurement result, the accurate measurement lower limit of aperture inlet pressure can be extended to 10
-4Pa; After closing the first vacuum valve, the second getter pump is bled to the non-inert gas in the mass spectrometric analysis chamber simultaneously, not only makes mass spectrometric analysis chamber keep good high vacuum state, and has avoided non-inert gas on the impact of probe gas measurement result; The 2nd, adopt the method for accumulation to improve the quadrupole mass spectrometer measurement less than 10
-12Pam
3The sensitivity of/s gas; The 3rd, adopt the aperture of diameter 2u as leakage component, can obtain 10
-14Pa m
3The calibrating gas flow of/s, and the combined standard uncertainty of system is less than 10%.
Adopt magnetic suspension rotor gauge accurately to measure gaseous tension P in the pressure stabilizing chamber, gas in the pressure stabilizing chamber is introduced in the mass spectrometric analysis chamber by known conductance aperture (conductance is C) expand continuously, calibration adopts accumulative to realize, at first measures the probe gas background signal with quadrupole mass spectrometer
Then measure and be calibrated the signal that minimum gas flow causes
Measure at last the signal that the known gas micrometeor causes
Measured minimum gas micro then
Solved 10
-11～10
-14Pam
3The testing and calibration technology of minimum gas micro in the/s scope.
Description of drawings
Fig. 1 is structural principle synoptic diagram of the present utility model;
Wherein, 1-the first mechanical pump, 2-the first solenoid valve, 3-the first molecular pump, 4-the first vacuum valve, the 5-mass spectrometric analysis chamber, the 6-aperture, 7-the second vacuum valve, 8-the first getter pump, 9-the first vacuum gauge, the 10-pressure stabilizing chamber, 11-the 3rd vacuum valve, 12-the second molecular pump, 13-the second solenoid valve, 14-the second mechanical pump, 15-the second vacuum gauge, the 16-quadrupole mass spectrometer, 17-the 4th vacuum valve, the 18-vacuum leak, the 19-gas bomb, the 20-micrometering valve, 21-the 5th vacuum valve, 22-the 3rd vacuum gauge, 23-the second getter pump, 24-the 6th vacuum valve.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not restriction scopes of the present utility model.
As shown in Figure 1, a kind of the gas micro calibration lower limit is extended to 10
-14Pam
3The system of/s comprises: the first mechanical pump 1, the second mechanical pump 14, the first solenoid valve 2, the second solenoid valve 13, the first vacuum valve 4, the second vacuum valve 7, the 3rd vacuum valve 11, the 4th vacuum valve 17, the 5th vacuum valve 21, the 6th vacuum valve 24, the first molecular pump 3, the second molecular pump 12, mass spectrometric analysis chamber 5, aperture 6, the first getter pump 8, the second getter pump 23, pressure stabilizing chamber 10, the first vacuum gauge 9, the second vacuum gauge 15, the 3rd vacuum gauge 22, gas bomb 19, micrometering valve 20, quadrupole mass spectrometer 16 and vacuum blank 18;
In this system, the first mechanical pump 1 is connected with the first solenoid valve 2, and the first molecular pump 3 one ends are connected with the first solenoid valve 2, and the other end is connected with the first vacuum valve 4; The second vacuum gauge 15, quadrupole mass spectrometer 16 are installed on the mass spectrometric analysis chamber 5, the second getter pump 23 is connected with mass spectrometric analysis chamber 5 by the 6th vacuum valve 24, the lower end bleeding point of mass spectrometric analysis chamber 5 is connected with the first vacuum valve 4, and the upper end of mass spectrometric analysis chamber 5 is connected with aperture 6, the 4th vacuum valve 17 respectively; The other end of the 4th vacuum valve 17 is connected with vacuum leak 18; One end of the second vacuum valve 7 is connected with aperture 6, and the other end is connected with micrometering valve 20, pressure stabilizing chamber 10 and the 3rd vacuum gauge 22, and gas bomb 19 is connected with micrometering valve 20; Six interfaces are arranged on the pressure stabilizing chamber 10, be connected with the first vacuum gauge 9, micrometering valve 20, the 5th vacuum valve 21, the 3rd vacuum gauge 22, the 3rd vacuum valve 11 and the second vacuum valve 7 respectively, the first getter pump 8 is connected with the 5th vacuum valve 21; The second molecular pump 12 two ends are connected with the 3rd vacuum valve 11, the second solenoid valve 13 respectively, and the other end of the second solenoid valve 13 and second connects mechanical pump 14 and is connected.
Calibration range is 10
-11～10
-14Pam
3/ s, the first vacuum gauge 9 adopts magnetic suspension rotor gauge (SRG), the diameter 2u of aperture 6, and SRG stablized more than 3 hours before measuring; Described the first getter pump 8,23 pairs of inert gases of the second getter pump are without pumping speed; Source of the gas in the gas bomb 19 is inert gas; Work was more than 3 hours before quadrupole mass spectrometer 16 was measured.
A kind of the gas micro calibration lower limit is extended to 10
-14Pam
3The method of the system of/s comprises step:
S1, will be calibrated vacuum leak 18 and be connected with the 4th vacuum valve 17, and check sealing, then close the 4th vacuum valve 17;
S2, open the first mechanical pump 1, the second mechanical pump 14 is bled, then opening the first solenoid valve 2, the first vacuum valve 4, the second vacuum valve 7, the 3rd vacuum valve 11,13 pairs of mass spectrometric analysis chambers 5 of the second solenoid valve and valve pipe bleeds, open the second vacuum gauge 15, the 3rd vacuum gauge 22, when the second vacuum gauge 15, the 3rd vacuum gauge 22 measured values during less than 10Pa, open the first molecular pump 3, the second molecular pump 12 vacuumizes, keeping environment temperature on every side is 23 ± 3 ℃;
S3, open the first vacuum gauge 9 when gaseous tension is less than 1Pa in the pressure stabilizing chamber 10, vacuum tightness is less than 1 * 10 in mass spectrometric analysis chamber 5
-3Open quadrupole mass spectrometer 16 during Pa, vacuum tightness is less than 1 * 10 in pressure stabilizing chamber 10 and mass spectrometric analysis chamber 5
-4Open true the 5th vacuum valve 21, the 6th vacuum valve 24 during Pa, in the indicated value of the 3rd vacuum gauge 22 less than 5 * 10
-6Pa, and after the first vacuum gauge 9 was worked 3 hours, set the background of magnetic suspension rotor gauge;
S4, in quadrupole mass spectrometer 16 work more than 3 hours, and the indicated value of the second vacuum gauge 15 is less than 1 * 10
-6During Pa, measure probe gas background ions stream I along with the variation of time r by quadrupole mass spectrometer after closing the first vacuum valve 4, behind Δ t after a while, the slope that increases along with the time according to ion current
S5, open 4 pairs of mass spectrometric analysis chambers 5 of the first vacuum valve and bleed, when the probe gas ion current drops to initial background ions stream, slowly opening the 4th vacuum valve 17 will be calibrated in the vacuum leak probe gas introducing mass spectrometric analysis chamber 5, after quadrupole mass spectrometer 16 detection ion currents are stable, close behind the first vacuum valve 4 and writing time, behind Δ t after a while, the slope that increases along with the time of small opening ion current
S6, opening 4 pairs of mass spectrometric analysis chambers 5 of the first vacuum valve bleeds, close the second vacuum valve 7, the 3rd vacuum valve 11, the 4th vacuum valve 17, introduce the gas of certain pressure in the pressure stabilizing chamber 10 by fine tuning valve 20, in the time of after the ion current of probe gas in mass spectrometric analysis chamber 5 is reduced to background ions stream and the first vacuum gauge 9 pressure stabilitys, opening the second vacuum valve 7 introduces gas in the mass spectrometric analysis chamber 5 by aperture 6, after the probe gas ion current is stable, close the first vacuum valve 4 writing times simultaneously, record the indicated value P of the first vacuum gauge 9, behind Δ t after a while, according to the slope of the growth of ion current
S7, close all vacuum valves, close quadrupole mass spectrometer, vacuum gauge, molecular pump, mechanical pump all working instrument, then be calibrated leak hole leak rate and be
The small opening 18 that is calibrated among the step S1 is placed in the constant temperature system, and its temperature variation is no more than 0.5 degree in the experimentation.
Magnetic suspension rotor gauge measures 10 among the step S3
-1～10
-3During Pa pressure, the sampling time is set as 10 seconds, when measuring 10
-4During Pa pressure, the sampling time is set as 30 seconds.
Get among the step S5
The mean value of measuring more than at least six times is as measurement result.
Get among the step S6
The mean value of measuring more than at least six times is as measurement result.
C is known among the step S7, and its combined standard uncertainty is less than 2%.
Embodiment 1
(1) measured gas micro (vacuum leak) is connected with the 4th vacuum valve 17, and checks sealing, then close the 4th vacuum valve 17;
(2) open machine the first mechanical pump 1, the second mechanical pump 14, then opening the first electric valve valve 2, the first vacuum valve 4, the second vacuum valve 7, the 3rd vacuum valve 11,13 pairs of mass spectrometric analysis chambers 5 of the second solenoid valve and valve pipe bleeds, open the second vacuum gauge 15, when the second vacuum gauge 15 measured values during less than 10pa (1.2Pa), open the first molecular pump 3 and the second molecular pump 12 vacuumizes, keeping environment temperature is 23 ± 3 ℃ (23 ± 0.5 ℃);
(3) open the first vacuum gauge 9 when gaseous tension in the pressure stabilizing chamber 10 during less than 1Pa (0.1Pa), vacuum tightness is less than 1 * 10 in pressure stabilizing chamber 10
-4Pa (6.2 * 10
-5Pa) open the 5th vacuum valve 21 time, vacuum tightness is less than 1 * 10 in mass spectrometric analysis chamber 5
-3Pa (8.5 * 10
-5Pa) open quadrupole mass spectrometer 16 time, in the indicated value of the 3rd vacuum gauge 22 less than 5 * 10
-6Pa (1.2 * 10
-6Pa), and in 9 work of the first vacuum gauge after 3 hours (3.4 hours), set the background (1.1231 * 10 of magnetic suspension rotor gauge
-5Pa);
(4) in quadrupole mass spectrometer work more than 3 hours (3.8 hours), and the indicated value of the second vacuum gauge 15 is less than 1 * 10
-6During Pa (2.3 * 10
-7Pa), by the variation that quadrupole mass spectrometer is measured probe gas background ions stream, close the first vacuum valve 4 writing times simultaneously, behind Δ t after a while (300 seconds), according to the slope of the growth of ion current
(1.1 * 10
-15A/min).
(5) opening 4 pairs of mass spectrometric analysis chambers 5 of the first vacuum valve bleeds, when the probe gas ion current drops to background ions stream, slowly open the 4th vacuum valve 17, after quadrupole mass spectrometer 16 detection ion currents are stable, close the first vacuum valve 4 writing times simultaneously, behind Δ t after a while (300 seconds), according to the slope of the growth of ion current
(9.3 * 10
-13A/min).
(6) open 4 pairs of mass spectrometric analysis chambers 5 of the first vacuum valve and bleed, close the second vacuum valve 7, the 3rd vacuum valve 11, the 4th vacuum valve 17, open the gas that micrometering valve 20 is introduced certain pressure in the pressure stabilizing chamber 10.In the time of after the ion current of probe gas in mass spectrometric analysis chamber 5 is reduced to background ions stream and the first vacuum gauge 9 pressure stabilitys, opening the second vacuum valve 7 introduces gas in the mass spectrometric analysis chamber 5 by aperture 6, after the probe gas ion current is stable, close the first vacuum valve 4 writing times simultaneously, record the indicated value P (2.3151 * 10 of the first vacuum gauge 9
-4Pa), behind Δ t after a while (300 seconds), according to the slope of the growth of ion current
(4.7 * 10
-13A/min).
(7), close all vacuum valves, close quadrupole mass spectrometer, vacuum gauge, molecular pump, mechanical pump all working instrument, then be calibrated leak hole leak rate and be
(C=9.2 * 10
-10m
3/ s, Q
L=4.2 * 10
-13Pam
3/ s).
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection domain of the present utility model.
Claims (3)
1. one kind extends to 10 with the gas micro calibration lower limit
-14Pam
3The system of/s, it is characterized in that this system comprises: the first mechanical pump (1), the second mechanical pump (14), the first solenoid valve (2), the second solenoid valve (13), the first vacuum valve (4), the second vacuum valve (7), the 3rd vacuum valve (11), the 4th vacuum valve (17), the 5th vacuum valve (21), the 6th vacuum valve (24), the first molecular pump (3), the second molecular pump (12), mass spectrometric analysis chamber (5), aperture (6), the first getter pump (8), the second getter pump (23), pressure stabilizing chamber (10), the first vacuum gauge (9), the second vacuum gauge (15), the 3rd vacuum gauge (22), gas bomb (19), micrometering valve (20), quadrupole mass spectrometer (16) and vacuum blank (18);
In this system, the first mechanical pump (1) is connected with the first solenoid valve (2), and the first molecular pump (3) one ends are connected with the first solenoid valve (2), and the other end is connected with the first vacuum valve (4); The second vacuum gauge (15), quadrupole mass spectrometer (16) are installed on the mass spectrometric analysis chamber (5), the second getter pump (23) is connected with mass spectrometric analysis chamber (5) by the 6th vacuum valve (24), the lower end bleeding point of mass spectrometric analysis chamber (5) is connected with the first vacuum valve (4), and the upper end of mass spectrometric analysis chamber (5) is connected with aperture (6), the 4th vacuum valve (17) respectively; The other end of the 4th vacuum valve (17) is connected with vacuum leak (18); One end of the second vacuum valve (7) is connected with aperture (6), and the other end is connected with micrometering valve (20), pressure stabilizing chamber (10) and the 3rd vacuum gauge (22), and gas bomb (19) is connected with micrometering valve (20); Six interfaces are arranged on the pressure stabilizing chamber (10), be connected with the first vacuum gauge (9), micrometering valve (20), the 5th vacuum valve (21), the 3rd vacuum gauge (22), the 3rd vacuum valve (11) and the second vacuum valve (7) respectively, the first getter pump (8) is connected with the 5th vacuum valve (21); The second molecular pump (12) two ends are connected with the 3rd vacuum valve (11), the second solenoid valve (13) respectively, and the other end of the second solenoid valve (13) and second connects mechanical pump (14) and is connected.
2. as claimed in claim 1ly a kind of the gas micro calibration lower limit is extended to 10
-14Pam
3The system of/s is characterized in that, the first vacuum gauge (9) adopts magnetic suspension rotor gauge, the diameter 2u of aperture (6).
3. as claimed in claim 1ly a kind of the gas micro calibration lower limit is extended to 10
-14Pam
3The system of/s is characterized in that, the source of the gas in the gas bomb (19) is inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220518181 CN202853862U (en) | 2012-10-11 | 2012-10-11 | System for extending lower limit of gas micro-flow calibration to 10<-14>Pam<3>/s |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220518181 CN202853862U (en) | 2012-10-11 | 2012-10-11 | System for extending lower limit of gas micro-flow calibration to 10<-14>Pam<3>/s |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202853862U true CN202853862U (en) | 2013-04-03 |
Family
ID=47985046
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220518181 Withdrawn - After Issue CN202853862U (en) | 2012-10-11 | 2012-10-11 | System for extending lower limit of gas micro-flow calibration to 10<-14>Pam<3>/s |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928172A (en) * | 2012-10-11 | 2013-02-13 | 卢耀文 | System and method capable of extending lower limit of gas micro-flow calibration to 10<-14> Pam<3>/s |
| CN104296938A (en) * | 2014-10-17 | 2015-01-21 | 青岛海之晨工业装备有限公司 | Valve pipe fitting gas tightness and machine vision comprehensive examination machine |
| CN107643110A (en) * | 2017-08-30 | 2018-01-30 | 兰州空间技术物理研究所 | A kind of gas micro-flow measurement device and method based on laser interferance method |
| CN115060782A (en) * | 2022-08-11 | 2022-09-16 | 中国科学院合肥物质科学研究院 | Residual gas analysis device and method for semiconductor industrial tail gas |
-
2012
- 2012-10-11 CN CN 201220518181 patent/CN202853862U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928172A (en) * | 2012-10-11 | 2013-02-13 | 卢耀文 | System and method capable of extending lower limit of gas micro-flow calibration to 10<-14> Pam<3>/s |
| CN102928172B (en) * | 2012-10-11 | 2015-09-30 | 卢耀文 | Gas micro calibration lower limit is extended to 10 by one -14pam 3the system and method of/s |
| CN104296938A (en) * | 2014-10-17 | 2015-01-21 | 青岛海之晨工业装备有限公司 | Valve pipe fitting gas tightness and machine vision comprehensive examination machine |
| CN104296938B (en) * | 2014-10-17 | 2017-01-11 | 青岛海之晨工业装备有限公司 | Valve pipe fitting gas tightness and machine vision comprehensive examination machine |
| CN107643110A (en) * | 2017-08-30 | 2018-01-30 | 兰州空间技术物理研究所 | A kind of gas micro-flow measurement device and method based on laser interferance method |
| CN115060782A (en) * | 2022-08-11 | 2022-09-16 | 中国科学院合肥物质科学研究院 | Residual gas analysis device and method for semiconductor industrial tail gas |
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