CN106289666A - The calibrating installation of a kind of vacuum leak under ambient temperature and method - Google Patents
The calibrating installation of a kind of vacuum leak under ambient temperature and method Download PDFInfo
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- CN106289666A CN106289666A CN201610794556.1A CN201610794556A CN106289666A CN 106289666 A CN106289666 A CN 106289666A CN 201610794556 A CN201610794556 A CN 201610794556A CN 106289666 A CN106289666 A CN 106289666A
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- vacuum
- leak
- school
- small opening
- temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements
Abstract
The present invention relates to a kind of calibrating installation and the method for vacuum leak under ambient temperature, belong to fields of measurement.Described device includes mainly being formed reference vacuum small opening system by reference vacuum small opening, reference vacuum small opening temperature sensor and reference vacuum small opening system valve, mainly by treating school vacuum leak, treating school vacuum leak temperature sensor and treat that school vacuum leak system valve forms school vacuum leak system for the treatment of, mainly formed mass spectrometry system and extract system by calibration chamber, vacuometer and mass spectrograph.Measured in real time by temperature sensor, utilization index or linear temperature revised law, leak rate under reference vacuum small opening laboratory temperature is modified to the leak rate under ambient temperature, avoid the different temperatures impact on reference vacuum leak hole leak rate, on this basis, reference vacuum small opening with treat under the vacuum leak ambient temperature of school, use relative method can obtain the branched leak rate treated under the vacuum leak ambient temperature of school, improve accuracy and the calibration efficiency of described leak rate.
Description
Technical field
The present invention relates to a kind of calibrating installation and the method for vacuum leak under ambient temperature, belong to fields of measurement.
Background technology
At present, the calibration of vacuum leak is carried out the most in the lab, and usual laboratory investment environmental requirement is: a) environment
Temperature is (23 ± 3) DEG C, and in calibration process, temperature fluctuation is not more than 1 DEG C/h；B) relative humidity is not more than 80%；C) week during calibration
Must not there be additional heating source, strong-electromagnetic field, strong vibration etc. in collarette border, and the calibration temperature that final laboratory is given is to treat that school is true at 23 DEG C
Empty leak hole leak rate.And be mostly in hall or the workshop of spaciousness during the use of practical vacuum small opening, due to season change and
The difference of southern and northern region, ambient temperature range is typically 15 DEG C～40 DEG C changes, and now the actual leak rate of vacuum leak should be and works as
Leak rate at front temperature, and the commonly provided leak rate of laboratory is the leak rate at temperature 23 DEG C, the deviation scope of ambient temperature is-8
DEG C～+17 DEG C, ambient temperature is about 8%～180% to the impact of vacuum leak leak rate, owing to ambient temperature can not meet calibration
Environmental requirement, the leak rate of vacuum leak itself will change.Ambient temperature is different from laboratory investment temperature to be caused very
The deviation that empty leak hole leak rate produces can have a strong impact on the use result of vacuum leak, it is therefore desirable to leaks vacuum at ambient temperature
Hole is calibrated, thus fundamentally improves the reliability that vacuum leak uses.
Summary of the invention
Cannot realize the defect of calibration under ambient temperature for existing vacuum correction device, an object of the present invention is
A kind of calibrating installation of vacuum leak under ambient temperature is provided；The two of the purpose of the present invention are to provide a kind of for environment
At a temperature of the calibration steps of vacuum leak；Described device and method achieves the accurate calibration of vacuum leak under ambient temperature.
For realizing the purpose of the present invention, it is provided that techniques below scheme.
A kind of calibrating installation of vacuum leak under ambient temperature, described device mainly by reference vacuum small opening system,
Treat school vacuum leak system, mass spectrometry system and extract system composition.
Reference vacuum small opening system is mainly leaked by reference vacuum small opening, reference vacuum small opening temperature sensor and reference vacuum
Hole system valve composition；Wherein, reference vacuum small opening temperature sensor is connected with reference vacuum small opening, is used for measuring reference vacuum
The temperature of small opening, reference vacuum small opening is connected with calibration chamber by the reference vacuum small opening system valve on pipeline and pipeline, ginseng
Examine vacuum leak system valve for connecting or block the interface channel between reference vacuum small opening and calibration chamber.
Treat that school vacuum leak system is mainly by treating school vacuum leak, treating school vacuum leak temperature sensor and treat school vacuum leakage
Hole system valve composition, treats that school vacuum leak system is more than one group, and often group treats that school vacuum leak system composition is identical；Wherein,
Treat school vacuum leak temperature sensor and treat that school vacuum leak is connected, for measuring the temperature treating school vacuum leak, treat school vacuum
Small opening, by treating that school vacuum leak system valve is connected with calibration chamber on pipeline and pipeline, treats school vacuum leak system valve use
The interface channel between school vacuum leak and calibration chamber is treated in connection or blocking-up.
Mass spectrometry system is mainly made up of calibration chamber, vacuometer and mass spectrograph；Wherein, calibration chamber is true for comparison reference
Empty small opening and the calibration gas amount treating that school vacuum leak flows out, vacuometer is connected with calibration chamber, for monitoring the vacuum of calibration chamber
Degree, mass spectrograph is connected with calibration chamber, for measuring the signal of calibration gas.
Extract system is the device reaching vacuum described in state of the art for bleeding, and can be mechanical pump and molecule
The combination etc. of pump or mechanical pump and bimolecular pump；Extract system is by the extract system valve on pipeline and pipeline with calibration chamber even
Connect, for calibration chamber is bled, maintain the vacuum in calibration chamber, extract system valve be used for connecting or block extract system with
Interface channel between calibration chamber.
The most described reference vacuum small opening system valve and treat that the school vacuum leak respective pipeline of system valve merges into one
It is connected with calibration chamber after bar pipeline.
In described device, reference vacuum small opening leak rate (Q under laboratory temperaturecal), the laboratory of reference vacuum small opening
Temperature (Tcal), the temperature coefficient (α) of the constant (c) of reference vacuum small opening and reference vacuum small opening be known；Described reference
The constant (c) of vacuum leak can pass through document " " temperature adjustmemt of helium permeation leak leak rate ", vacuum and low temperature, 2007.6 "
In method obtain.
Reference vacuum small opening and treat that school vacuum leak all can be connected, to flow out calibration gas with having air source or with source of the gas.
Calibration gas is commonly used calibration gas in state of the art, such as helium (He), nitrogen (N2) or
Hydrogen (H2)。
Mass spectrograph is preferably four-stage mass spectrometer.
The most described valve is all-metal ultrahigh vacuum valve.
When calibration gas is helium, mass spectrometry system, extract system and extract system valve also can be examined by helium mass spectrum
Leakage instrument substitutes, reference vacuum small opening system valve and after the school vacuum leak respective pipeline of system valve merges into a pipeline
It is connected with helium mass spectrometer leak detector.
A kind of calibration steps of vacuum leak under ambient temperature, the one described in described method the application of the invention
Under ambient temperature, the calibrating installation of vacuum leak is carried out, and reference vacuum small opening system valve, treats school vacuum leak system valve
Door, mass spectrograph, extract system valve and extract system are in closed mode before calibration, and described method step is as follows:
(1) open extract system valve, start extract system, gas bleeding from calibration chamber, and in following steps
Continuing gas bleeding, to reach required vacuum, until completing in steps, using the pressure in vacuometer monitoring calibration chamber,
After the startup pressure that pressure reaches mass spectrograph, open mass spectrograph and calibration chamber is measured；
(2) reach capacity in room to be calibrated pressure, and i.e. the force value one decimal place in vacuometer monitoring calibration chamber is not
When changing, the measured value of mass spectrograph is the background signal (I of calibration chamber alignment gas0)；
(3) opening reference vacuum small opening system valve, the calibration gas flowed out by reference vacuum small opening introduces calibration chamber, when
After calibration gas reaches to stablize, the measured value of mass spectrograph is the calibration gas signal that reference vacuum small opening produces in calibration chamber
(IS), reference vacuum small opening temperature sensor measurement obtains the ambient temperature (T) residing for reference vacuum small opening, by index temperature
Revised law or linear temperature revised law are by reference vacuum small opening leak rate (Q under laboratory temperaturecal) it is modified to reference vacuum leakage
Hole leak rate (Q at ambient temperatureT)；Owing to index temperature adjustmemt method is than the Q of linear temperature revised law correctionTDeviation less,
Therefore as the Q that index temperature adjustmemt method and linear temperature revised law obtainTWhen concrete numerical value is inconsistent, prioritizing selection index temperature
Revised law；
Wherein, shown in described index temperature adjustmemt method such as formula (1):
In formula (1):
QTReference vacuum small opening leak rate at ambient temperature, unit is: Pam3/s；
QcalReference vacuum small opening leak rate under laboratory temperature, unit is: Pam3/s；
Ambient temperature residing for T reference vacuum small opening, unit is: K；
TcalThe laboratory temperature of reference vacuum small opening, unit is: K.
The constant of c reference vacuum small opening.
Described formula (1) can pass through document " " temperature adjustmemt of helium permeation leak leak rate ", vacuum and low temperature,
2007.6 " method in obtains；
Shown in described linear temperature revised law such as formula (2):
QT=Qcal·[1+α×(T-Tcal)] (2)
In formula (2):
QTReference vacuum small opening leak rate at ambient temperature, unit is: Pam3/s；
QcalReference vacuum small opening leak rate under laboratory temperature, unit is: Pam3/s；
Ambient temperature residing for T reference vacuum small opening, unit is: K；
TcalThe laboratory temperature of reference vacuum small opening, unit is: K；
The temperature coefficient of α reference vacuum small opening, unit is: %/K.
Described formula (2) can pass through document " " temperature adjustmemt of helium permeation leak leak rate ", vacuum and low temperature,
2007.6 " method in obtains.
(4) close reference vacuum small opening system valve, open and treat school vacuum leak system valve, school vacuum leak stream will be treated
The calibration gas gone out introduces calibration chamber, and after calibration gas reaches to stablize, the measured value of mass spectrograph is for treating that school vacuum leak is in school
Calibration gas signal (the I produced in quasi-roomL), treat that school vacuum leak temperature sensor measurement obtains treating residing for the vacuum leak of school
Ambient temperature (TL), the leak rate (Q treating school vacuum leak at ambient temperature it is calculated by formula (3)L):
In formula (3):
QLTreating school vacuum leak leak rate at ambient temperature, unit is: Pam3/ s,
ILTreating the calibration gas signal that school vacuum leak produces in calibration chamber, unit is: A；
ISThe calibration gas signal that reference vacuum small opening produces in calibration chamber, unit is: A；
I0The background signal of calibration chamber alignment gas, unit is: A.
When school vacuum leak system has more than two, the leak rate that step (4) records is first group and treats school vacuum leak
System is treated school vacuum leak leak rate at ambient temperature；Treat for second group school vacuum leak system being treated, school vacuum leak is at ring
Leak rate at a temperature of border is adopted and is obtained with the following method:
Closedown reference vacuum small opening system valve in step (4) is replaced with closedown first group and treats school vacuum leak system
Valve, opens second group and treats school vacuum leak system valve, and remaining same step (4) i.e. can get second group and treats school vacuum leak
System treats school vacuum leak leak rate at ambient temperature；By that analogy, many groups can be obtained and treat school vacuum leak system
In treat school vacuum leak leak rate at ambient temperature.
Pressure one decimal place in gauge monitoring calibration chamber is constant, and the measured value of mass spectrograph stably fluctuates little
In 5% time, described calibration gas reaches stable.
Beneficial effect
1. the invention provides a kind of calibrating installation and the method for vacuum leak under ambient temperature, pass through temperature sensing
The real-time measurement of device, utilization index temperature adjustmemt method and linear temperature revised law, by reference vacuum small opening under laboratory temperature
Leak rate (Qcal) it is modified to reference vacuum small opening leak rate (Q at ambient temperatureT), it is to avoid different temperatures is to reference vacuum
The impact of leak hole leak rate, on this basis, at reference vacuum small opening with when school vacuum leak local environment temperature is identical, uses
Relative method can obtain the branched leak rate treating school vacuum leak at ambient temperature, had both improve the accuracy of described leak rate, and had also carried
High calibration efficiency.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the calibrating installation of vacuum leak under ambient temperature in embodiment.
In figure: 1 reference vacuum small opening, 2 reference vacuum small opening temperature sensors, 3 reference vacuum small opening system valves
Door, 4 treat school vacuum leak, and 5 treat school vacuum leak temperature sensor, and 6 treat school vacuum leak system valve, 7 calibrations
Room, 8 vacuometers, 9 mass spectrographs, 10 extract system valves, 11 extract systems, 12 helium mass spectrometer leak detectors, 13
Two treat school vacuum leak, and 14 second treat school vacuum leak temperature sensor, and 15 second treat school vacuum leak system valve
Detailed description of the invention
Embodiment 1
As it is shown in figure 1, a kind of calibrating installation of vacuum leak under ambient temperature, described device main by with reference to true
Empty small opening system, treat that school vacuum leak system, mass spectrometry system and extract system 11 form.
Described reference vacuum small opening system is mainly by reference vacuum small opening 1, reference vacuum small opening temperature sensor 2 and reference
Vacuum leak system valve 3 forms；Wherein, reference vacuum small opening temperature sensor 2 is connected with reference vacuum small opening 1, is used for surveying
The temperature of amount reference vacuum small opening 1, reference vacuum small opening 1 by the reference vacuum small opening system valve 3 on pipeline and pipeline with
Calibration chamber 7 connects, and reference vacuum small opening system valve 3 is for connecting or block the company between reference vacuum small opening 1 and calibration chamber 7
Connect road.
Treating that school vacuum leak system is two groups, often group treats that school vacuum leak system composition is identical: first group mainly by treating school
Vacuum leak 4, treat school vacuum leak temperature sensor 5 and treat that school vacuum leak system valve 6 forms, wherein: treating school vacuum leakage
Hole temperature sensor 5 with treat that school vacuum leak 4 is connected, treat the temperature of school vacuum leak 4 for measuring, treat that school vacuum leak 4 leads to
Cross and treat that school vacuum leak system valve 6 is connected with calibration chamber 7 on pipeline and pipeline, treat school vacuum leak system valve 6 for
The interface channel between school vacuum leak 4 and calibration chamber 7 is treated in connection or blocking-up；Mainly treated school vacuum leak by second for second group
13, second treat that school vacuum leak temperature sensor 14 and second treats that school vacuum leak system valve 15 forms, wherein: second treats school
With second, vacuum leak temperature sensor 14 treats that school vacuum leak 13 is connected, for measuring the second temperature treating school vacuum leak 13
Degree, second treats by second on pipeline and pipeline, school vacuum leak 13 treats that school vacuum leak system valve 15 is with calibration chamber 7 even
Connecing, second treats that school vacuum leak system valve 15 is treated between school vacuum leak 13 and calibration chamber 7 for connecting or block second
Interface channel.
Mass spectrometry system is mainly made up of calibration chamber 7, vacuometer 8 and mass spectrograph 9；Wherein: calibration chamber 7 is used for comparing ginseng
Examine vacuum leak 1, treat that school vacuum leak 4 and second treats the calibration gas amount that school vacuum leak 13 flows out, vacuometer 8 and calibration chamber
7 connect, and for monitoring the vacuum of calibration chamber 7, mass spectrograph 9 is connected with calibration chamber 7, for measuring the signal of calibration gas.
Extract system 11 is the combination of mechanical pump and molecular pump；Extract system 11 is by the extract system on pipeline and pipeline
Valve 10 is connected with calibration chamber 7, for bleeding calibration chamber 7, maintains the vacuum in calibration chamber 7, and extract system valve 10 is used
Interface channel between connection or blocking-up extract system 11 and calibration chamber 7.
Reference vacuum small opening system valve 3, treat that school vacuum leak system valve 6 and second treats school vacuum leak system valve
15 respective pipelines are connected with calibration chamber 7 after merging into a pipeline.
In described device, the reference vacuum small opening 1 leak rate (Q under laboratory temperaturecal) it is 1.28 × 10-9Pam3/ s, ginseng
Examine the laboratory temperature (T of vacuum leak 1cal) be 296K, the constant (c) of reference vacuum small opening 1 be-2635.5 and with reference to true
The temperature coefficient (α) of empty small opening 1 is 3.63% the most known；The constant (c) of described reference vacuum small opening 1 " " can ooze helium by document
The temperature adjustmemt of type vacuum leak leak rate ", vacuum and low temperature, 2007.6 " in method obtain.
Reference vacuum small opening 1, treat that school vacuum leak 4 and second treats the equal having air source of school vacuum leak 13, to flow out calibration
Gas.
Calibration gas is helium (He).
Mass spectrograph 9 is four-stage mass spectrometer.
Described valve is all-metal ultrahigh vacuum valve.
Mass spectrometry system, extract system 11 and extract system valve 10 also can be substituted by helium mass spectrometer leak detector 12, reference
Vacuum leak system valve 3, treat that school vacuum leak system valve 6 and second treats the school respective pipeline of vacuum leak system valve 15
It is connected with helium mass spectrometer leak detector 12 after merging into a pipeline.
A kind of calibration steps of vacuum leak under ambient temperature, the one described in described method the application of the invention
Under ambient temperature, the calibrating installation of vacuum leak is carried out, reference vacuum small opening system valve 3, treats school vacuum leak system valve
Door 6, second treats that school vacuum leak system valve 15, mass spectrograph 9, extract system valve 10 and extract system 11 are all located before calibration
In closed mode, described method step is as follows:
(1) open extract system valve 10, start the mechanical pump in extract system 11, gas bleeding from calibration chamber 7, directly
Record the pressure in calibration chamber 7 to vacuometer 8 and reach 1Pa, start the molecular pump in extract system 11, and in following steps
Continuing gas bleeding, to reach required vacuum, until completing in steps, using vacuometer 8 to monitor the pressure in calibration chamber 7
Power, after the startup pressure that pressure reaches mass spectrograph 9, opens mass spectrograph 9 and measures calibration chamber 7；
(2) reach capacity in room 7 to be calibrated pressure, the force value one decimal place during i.e. calibration chamber 7 monitored by vacuometer 8
When not changing, the measured value of mass spectrograph 9 is the background signal (I of calibration chamber 7 alignment gas0) it is 1.63 × 10-13A；
(3) opening reference vacuum small opening system valve 3, the calibration gas flowed out by reference vacuum small opening 1 introduces calibration chamber
7, after calibration gas reaches to stablize, the measured value of mass spectrograph 9 is the calibration gas that reference vacuum small opening 1 produces in calibration chamber 7
Body signal (IS) it is 1.72 × 10-10A, the ring obtained residing for reference vacuum small opening 1 is measured in reference vacuum small opening temperature sensor 2
Border temperature (T) is 298K, by index temperature adjustmemt method or linear temperature revised law by reference vacuum small opening 1 at laboratory temperature
Under leak rate (Qcal) it is modified to reference vacuum small opening 1 leak rate (Q at ambient temperatureT)；
Wherein, shown in described index temperature adjustmemt method such as formula (1):
In formula:
QTReference vacuum small opening 1 leak rate at ambient temperature, unit is: Pam3/s；
QcalThe reference vacuum small opening 1 leak rate under laboratory temperature, unit is: Pam3/s；
Ambient temperature residing for T reference vacuum small opening 1, unit is: K；
TcalThe laboratory temperature of reference vacuum small opening 1, unit is: K；
The constant of c reference vacuum small opening 1,
The e nature truth of a matter；
It is calculated QTIt is 1.37 × 10-9Pam3/s。
Described formula (1) can pass through document " " temperature adjustmemt of helium permeation leak leak rate ", vacuum and low temperature,
2007.6 " method in obtains；
Shown in described linear temperature revised law formula (2):
QT=Qcal·[1+α×(T-Tcal)] (2)
In formula:
QTReference vacuum small opening 1 leak rate at ambient temperature, unit is: Pam3/s；
QcalThe reference vacuum small opening 1 leak rate under laboratory temperature, unit is: Pam3/s；
Ambient temperature residing for T reference vacuum small opening 1, unit is: K；
TcalThe laboratory temperature of reference vacuum small opening 1, unit is: K；
The temperature coefficient of α reference vacuum small opening 1, unit is: %/K；
It is calculated QTIt is 1.37 × 10-9Pam3/s。
Described formula (2) can pass through document " " temperature adjustmemt of helium permeation leak leak rate ", vacuum and low temperature,
2007.6 " method in obtains；
In the present embodiment, Q under the 298K ambient temperature that index temperature adjustmemt method and linear temperature revised law obtainTSpecifically
Numerical value is consistent；But variation with temperature, the Q that index temperature adjustmemt method and linear temperature revised law obtainTConcrete numerical value can
Can be inconsistent, now prioritizing selection index temperature adjustmemt method, index temperature adjustmemt method is than the Q of linear temperature revised law correctionT
Deviation less；
(4) close reference vacuum small opening system valve 3, open and treat school vacuum leak system valve 6, school vacuum leak will be treated
4 calibration gas flowed out introduce calibration chamber 7, and after calibration gas reaches to stablize, the measured value of mass spectrograph 9 is for treating school vacuum leak
The 4 calibration gas signal (I produced in calibration chamber 7L) it is 1.85 × 10-10A；Treat that school vacuum leak temperature sensor 5 is measured
To the ambient temperature (T treated residing for school vacuum leak 4L) it is 298K；By formula (3), it is calculated and treats that school vacuum leak 4 is at ring
Leak rate (Q at a temperature of borderL):
In formula:
QLTreating school vacuum leak 4 leak rate at ambient temperature, unit is: Pam3/ s,
ILTreating the calibration gas signal that school vacuum leak 4 produces in calibration chamber 7, unit is: A；
ISThe calibration gas signal that reference vacuum small opening 1 produces in calibration chamber 7, unit is: A；
I0The background signal of calibration chamber 7 alignment gas, unit is: A.
It is calculated QLIt is 1.47 × 10-9Pam3/s。
(5) school vacuum leak system valve 6 is treated in closedown, opens second and treats school vacuum leak system valve 15, treats second
The calibration gas that school vacuum leak 13 flows out introduces calibration chamber 7, and after calibration gas reaches to stablize, the measured value of mass spectrograph 9 is
Second treats the calibration gas signal (I that school vacuum leak 13 produces in calibration chamber 7L’) it is 2.75 × 10-10A；Second treats school vacuum
Small opening temperature sensor 14 is measured and is obtained the second ambient temperature (T treating residing for school vacuum leak 13L’) it is 298K；Pass through formula
(4), it is calculated second and treats school vacuum leak 13 leak rate (Q at ambient temperatureL’):
In formula:
QL’Second treats school vacuum leak 13 leak rate at ambient temperature, and unit is: Pam3/ s,
IL’Second treats the calibration gas signal that school vacuum leak 13 produces in calibration chamber 7, and unit is: A；
ISThe calibration gas signal that reference vacuum small opening 1 produces in calibration chamber 7, unit is: A；
I0The background signal of calibration chamber 7 alignment gas, unit is: A；
It is calculated QL’It is 2.20 × 10-9Pam3/s。
The pressure one decimal place that gauge 8 is monitored in calibration chamber 7 is constant, and the measured value neutral wave of mass spectrograph 9
When moving less than 5%, described calibration gas reaches stable.
Claims (7)
1. the calibrating installation of vacuum leak under ambient temperature, it is characterised in that: described device includes that reference vacuum is leaked
Hole system, treat school vacuum leak system, mass spectrometry system and extract system (11)；
Reference vacuum small opening system is mainly by reference vacuum small opening (1), reference vacuum small opening temperature sensor (2) with reference to true
Empty small opening system valve (3) composition；Wherein, reference vacuum small opening temperature sensor (2) is connected with reference vacuum small opening (1), ginseng
Examine vacuum leak (1) to be connected with calibration chamber (7) by reference vacuum small opening system valve (3) on pipeline and pipeline；
Treat that school vacuum leak system is mainly by treating school vacuum leak (4), treating school vacuum leak temperature sensor (5) and treat school vacuum
Small opening system valve (6) forms, and treats that school vacuum leak system is more than one group, and often group treats that school vacuum leak system composition is identical；
Wherein, treat school vacuum leak temperature sensor (5) and treat that school vacuum leak (4) is connected, treat school vacuum leak (4) by pipeline and
Treat that school vacuum leak system valve (6) is connected with calibration chamber (7) on pipeline；
Mass spectrometry system is mainly made up of calibration chamber (7), vacuometer (8) and mass spectrograph (9)；Wherein, vacuometer (8) and mass spectrum
Meter (9) is connected with calibration chamber (7) respectively；
Extract system (11) is connected with calibration chamber (7) by the extract system valve (10) on pipeline and pipeline；
In described device, the reference vacuum small opening (1) leak rate, laboratory temperature, constant and temperature system under laboratory temperature
Number is known；
Reference vacuum small opening (1) and treat school vacuum leak (4) having air source or be connected with source of the gas.
A kind of calibrating installation of vacuum leak under ambient temperature the most according to claim 1, it is characterised in that: calibration
Gas is helium, nitrogen or hydrogen；When calibration gas is helium, mass spectrometry system, extract system (11) and extract system
Valve (10) is substituted by helium mass spectrometer leak detector (12), reference vacuum small opening system valve (3) and treat school vacuum leak system valve
(6) it is connected with helium mass spectrometer leak detector (12) after respective pipeline merges into a pipeline.
A kind of calibrating installation of vacuum leak under ambient temperature the most according to claim 1, it is characterised in that: described
Valve is all-metal ultrahigh vacuum valve.
A kind of calibrating installation of vacuum leak under ambient temperature the most according to claim 1, it is characterised in that: mass spectrum
Meter (9) is four-stage mass spectrometer.
5. the calibration steps of vacuum leak under ambient temperature, it is characterised in that: described reference vacuum small opening system valve
Door (3) and be connected with calibration chamber (7) after school vacuum leak system valve (6) respective pipeline merges into a pipeline.
A kind of calibrating installation of vacuum leak under ambient temperature the most according to claim 1, it is characterised in that: calibration
Gas is helium, nitrogen or hydrogen；Described valve is all-metal ultrahigh vacuum valve；Mass spectrograph (9) is four-stage mass spectrometer；Described ginseng
Examine vacuum leak system valve (3) and after school vacuum leak system valve (6) respective pipeline merges into a pipeline with school
Quasi-room (7) connects.
7. the calibration steps of vacuum leak under ambient temperature, it is characterised in that: described method is by using such as right
Require that a kind of described in 1～5 any one calibrating installation of vacuum leak under ambient temperature completes, reference vacuum small opening system
Valve (3), treat that school vacuum leak system valve (6), mass spectrograph (9), extract system valve (10) and extract system (11) are in school
Being in closed mode before standard, described method step is as follows:
(1) open extract system valve (10), start extract system (11), gas bleeding from calibration chamber (7), and following
Step continues gas bleeding, to reach required vacuum, until completing in steps, in vacuometer (8) monitoring calibration chamber (7)
Pressure reach the startup pressure of mass spectrograph (9) after, open mass spectrograph (9) and calibration chamber (7) measured；
(2) reach capacity in room to be calibrated (7) pressure, and the measured value of mass spectrograph (9) is the background of calibration chamber (7) alignment gas
Signal；
(3) opening reference vacuum small opening system valve (3), the calibration gas flowed out by reference vacuum small opening (1) introduces calibration chamber
(7), after calibration gas reaches to stablize, the measured value of mass spectrograph (9) is that reference vacuum small opening (1) produces in calibration chamber (7)
Calibration gas signal, reference vacuum small opening temperature sensor (2) measures the environment temperature obtaining residing for reference vacuum small opening (1)
Degree, is repaiied the reference vacuum small opening (1) leak rate under laboratory temperature by index temperature adjustmemt method or linear temperature revised law
It it is being just reference vacuum small opening (1) leak rate at ambient temperature；Owing to index temperature adjustmemt method is than linear temperature revised law correction
QTDeviation less, therefore as the Q that index temperature adjustmemt method and linear temperature revised law obtainTWhen concrete numerical value is inconsistent, choosing
Select index temperature adjustmemt method；
Wherein, shown in described index temperature adjustmemt method such as formula (1):
In formula (1):
The constant of c reference vacuum small opening (1)；
Shown in described linear temperature revised law such as formula (2):
QT=Qcal·[1+α×(T-Tcal)] (2)
In formula (2):
The temperature coefficient of α reference vacuum small opening (1)；
In formula (1) and formula (2):
QTReference vacuum small opening (1) leak rate at ambient temperature；
QcalThe reference vacuum small opening (1) leak rate under laboratory temperature；
Ambient temperature residing for T reference vacuum small opening (1)；
TcalThe laboratory temperature of reference vacuum small opening (1)；
(4) close reference vacuum small opening system valve (3), open and treat school vacuum leak system valve (6), school vacuum leak will be treated
(4) calibration gas flowed out introduces calibration chamber (7), and after calibration gas reaches to stablize, the measured value of mass spectrograph (9) is for treating that school is true
The calibration gas signal that empty small opening (4) produces in calibration chamber (7), treats that school vacuum leak (4) temperature sensor measurement is treated
Ambient temperature residing for school vacuum leak (4), is calculated by formula (3) and to treat that school vacuum leak (4) is at ambient temperature
Leak rate:
In formula (3):
QLTreat school vacuum leak (4) leak rate at ambient temperature,
ILTreat the calibration gas signal that school vacuum leak (4) produces in calibration chamber (7),
ISThe calibration gas signal that reference vacuum small opening (1) produces in calibration chamber (7),
I0The background signal of calibration chamber (7) alignment gas,
When school vacuum leak system has more than two, the leak rate that step (4) records is first group and treats school vacuum leak system
In treat school vacuum leak (4) leak rate at ambient temperature；Treat in the vacuum leak system of school that second treats school vacuum leak for second group
(13) leak rate at ambient temperature is adopted and is obtained with the following method:
What closedown reference vacuum small opening system valve (3) in step (4) replaced with closedown first group treats school vacuum leak system
System valve (6), opens second group and treats school vacuum leak system valve, remaining same step (4), i.e. obtains second group and treats school vacuum leakage
In the system of hole second treats school vacuum leak (13) leak rate at ambient temperature；By that analogy, i.e. obtain many groups and treat school vacuum
Small opening system treats school vacuum leak leak rate at ambient temperature；
Pressure one decimal place in gauge (8) monitoring calibration chamber (7) is constant, and the measured value of mass spectrograph (9) is stable
When fluctuation is less than 5%, described calibration gas reaches stable.
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