CN105738037A - Plasma reaction cavity seepage detection method - Google Patents
Plasma reaction cavity seepage detection method Download PDFInfo
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- CN105738037A CN105738037A CN201610071538.0A CN201610071538A CN105738037A CN 105738037 A CN105738037 A CN 105738037A CN 201610071538 A CN201610071538 A CN 201610071538A CN 105738037 A CN105738037 A CN 105738037A
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
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Abstract
The invention relates to a plasma reaction cavity seepage detection method. The seepage situation of a plasma reaction cavity under detection is obtained according to the content of each type of gas in a normal plasma reaction cavity corresponding to a matched spectrum curve so that detection is accurate, the causes of seepage of the plasma reaction cavity under detection can be speculated according to the content of each type of gas in the plasma reaction cavity under detection, and thus seepage can be timely eliminated.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly to the leakage detection method of a kind of plasma reaction cavity.
Background technology
The plasma reaction cavity used in semiconductor manufacturing industry is both needed to carry out leak detection test, for ensureing that plasma reaction cavity is in stable working environment.Existing leak hunting method, for utilizing pressure vacuum ga(u)ge as survey tool, measures the force value before and after plasma reaction cavity certain period of time, and using leak rate as this plasma reaction cavity of the difference of the two of front and back force value and the ratio of time period.But, measurement must assure that, pressure vacuum ga(u)ge does not have any problem；If the force value before and after plasma reaction cavity certain period of time varies less, when the precision of pressure vacuum ga(u)ge is not enough to distinguish, can there is leakage rate measurement error；And, when in use procedure, plasma reaction cavity has leakage, its material leak into can pass through the outlet of plasma reaction cavity and discharge in time, causes that before and after pressure vacuum ga(u)ge, readings is constant, it is impossible to detect seepage.
Summary of the invention
It is an object of the present invention to provide the leakage detection method of a kind of plasma reaction cavity, solve the above-mentioned problems in the prior art.
The technical scheme is that
The leakage detection method of a kind of plasma reaction cavity, comprises the steps:
Step 1, the fluoroalkyl gas of default content and the fluoroalkyl gas of the known content different from described default content is passed into respectively in normal plasma reaction cavity, access and preset excitation energy and make gas ionization, and gather the spectral line launched in ionization process respectively and generate first curve of spectrum；
Step 2, the fluoroalkyl gas of described default content and the combination gas of other gas of different known content is passed into respectively in normal plasma reaction cavity, access described default excitation energy and make gas ionization, and gather the spectral line launched in ionization process respectively and generate second curve of spectrum；Wherein, other gas described includes the gas that easily leaks in plasma reaction cavity to be detected work；
Step 3, passes into the fluoroalkyl gas of described default content in described plasma reaction cavity to be detected, accesses described default excitation energy and makes gas ionization, and gathers spectral line generation the 3rd curve of spectrum launched in ionization process；
Step 4, contrasts described 3rd curve of spectrum with described first curve of spectrum and described second curve of spectrum, obtains the match spectrum curve matched with described 3rd curve of spectrum；And the content of each gas in the normal plasma reaction cavity corresponding to described match spectrum curve, know the leakage scenarios of described plasma reaction cavity to be detected.
The invention has the beneficial effects as follows: the curve of spectrum can the content of each gas in Efficient Characterization plasma reaction cavity, therefore the content of each gas in the 3rd curve of spectrum plasma reaction cavity corresponding with match spectrum curve is basically identical, and the content of each gas in plasma reaction cavity corresponding to match spectrum curve is known, and then would know that the plasma reaction cavity that the 3rd curve of spectrum is corresponding, the i.e. content of each gas in plasma reaction cavity to be detected, and then know the leakage scenarios of plasma reaction cavity to be detected；Detection is accurate, and can according to the content of each gas in plasma reaction cavity to be detected, thus it is speculated that the leakage cause of plasma reaction cavity to be detected, it is simple to get rid of seepage in time.
On the basis of technique scheme, the present invention can also do following improvement.
Further, described default excitation energy is the radio frequency electromagnetic of known strength.
Adopt above-mentioned further scheme to provide the benefit that, make gas be adequately ionized, improve detection accuracy.
Further, other gas described includes nitrogen, oxygen, carbon dioxide and air.
Above-mentioned further scheme is adopted to provide the benefit that, nitrogen, oxygen, carbon dioxide and air are the gas easily leak in plasma reaction cavity to be detected work, therefore, other gas includes nitrogen, oxygen, carbon dioxide and air, it is beneficial to the similarity improving match spectrum curve and the 3rd curve of spectrum, thus the content of each gas known more accurately in plasma reaction cavity to be detected, improve detection accuracy.
Further, described air is the air in working environment residing for described plasma reaction cavity to be detected.
Adopt above-mentioned further scheme to provide the benefit that, improve the similarity of match spectrum curve and the 3rd curve of spectrum further, thus the content of each gas known more accurately in plasma reaction cavity to be detected, improve detection accuracy.
Further, the content of required fluoroalkyl gas when described default content is the work of described plasma reaction cavity to be detected.
Above-mentioned further scheme is adopted to provide the benefit that, it is achieved the real-time detection of leakage scenarios during plasma reaction cavity to be detected work.
Further, being generated as of described first curve of spectrum, second curve of spectrum and the 3rd curve of spectrum gathers, respectively through spectroanalysis instrument, the spectral line launched in the ionization process that described first curve of spectrum, second curve of spectrum and the 3rd curve of spectrum are corresponding and generates.
Further, described normal plasma reaction cavity is identical with the model of plasma reaction cavity to be detected.
Adopt above-mentioned further scheme to provide the benefit that, improve detection accuracy.
Accompanying drawing explanation
Fig. 1 is the method flow diagram of the leakage detection method of a kind of plasma reaction cavity of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, principles of the invention and feature being described, example is served only for explaining the present invention, is not intended to limit the scope of the present invention.
As it is shown in figure 1, the leakage detection method of a kind of plasma reaction cavity, comprise the steps:
Step 1, the fluoroalkyl gas of default content and the fluoroalkyl gas of the known content different from described default content is passed into respectively in normal plasma reaction cavity, access and preset excitation energy and make gas ionization, and gather the spectral line launched in ionization process respectively and generate first curve of spectrum；
Step 2, the fluoroalkyl gas of described default content and the combination gas of other gas of different known content is passed into respectively in normal plasma reaction cavity, access described default excitation energy and make gas ionization, and gather the spectral line launched in ionization process respectively and generate second curve of spectrum；Wherein, other gas described includes the gas that easily leaks in plasma reaction cavity to be detected work；
Step 3, passes into the fluoroalkyl gas of described default content in described plasma reaction cavity to be detected, accesses described default excitation energy and makes gas ionization, and gathers spectral line generation the 3rd curve of spectrum launched in ionization process；
Step 4, contrasts described 3rd curve of spectrum with described first curve of spectrum and described second curve of spectrum, obtains the match spectrum curve matched with described 3rd curve of spectrum；And the content of each gas in the normal plasma reaction cavity corresponding to described match spectrum curve, know the leakage scenarios of described plasma reaction cavity to be detected.
Described default excitation energy is the radio frequency electromagnetic of known strength.
Other gas described includes nitrogen, oxygen, carbon dioxide and air.
Described air is the air in working environment residing for described plasma reaction cavity to be detected.
The content of required fluoroalkyl gas when described default content is the work of described plasma reaction cavity to be detected.
Being generated as of described first curve of spectrum, second curve of spectrum and the 3rd curve of spectrum gathers, respectively through spectroanalysis instrument, the spectral line launched in the ionization process that described first curve of spectrum, second curve of spectrum and the 3rd curve of spectrum are corresponding and generates.
The plasma reaction cavity of described normal plasma reaction cavity and ne-leakage, and described normal plasma reaction cavity is identical with the model of plasma reaction cavity to be detected.
The curve of spectrum can the content of each gas in Efficient Characterization plasma reaction cavity, therefore the content of each gas in the 3rd curve of spectrum plasma reaction cavity corresponding with match spectrum curve is basically identical, and the content of each gas in plasma reaction cavity corresponding to match spectrum curve is known, and then would know that the plasma reaction cavity that the 3rd curve of spectrum is corresponding, the i.e. content of each gas in plasma reaction cavity to be detected, the content of the fluoroalkyl gas of the default content passed in the content of each gas in the plasma reaction cavity to be detected know detection and plasma reaction cavity to be detected contrasts, if any other gas, then represent that plasma reaction cavity to be detected exists outer seepage, namely there is gas permeation in the external world in plasma reaction cavity to be detected；Content such as fluoroalkyl gas reduces, then it represents that plasma reaction cavity to be detected exists interior seepage, and namely the gas permeation in plasma reaction cavity to be detected is to extraneous.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all within the spirit and principles in the present invention, any amendment of making, equivalent replacement, improvement etc., should be included within protection scope of the present invention.
Claims (7)
1. the leakage detection method of a plasma reaction cavity, it is characterised in that comprise the steps:
Step 1, the fluoroalkyl gas of default content and the fluoroalkyl gas of the known content different from described default content is passed into respectively in normal plasma reaction cavity, access and preset excitation energy and make gas ionization, and gather the spectral line launched in ionization process respectively and generate first curve of spectrum；
Step 2, the fluoroalkyl gas of described default content and the combination gas of other gas of different known content is passed into respectively in normal plasma reaction cavity, access described default excitation energy and make gas ionization, and gather the spectral line launched in ionization process respectively and generate second curve of spectrum；Wherein, other gas described includes the gas that easily leaks in plasma reaction cavity to be detected work；
Step 3, passes into the fluoroalkyl gas of described default content in described plasma reaction cavity to be detected, accesses described default excitation energy and makes gas ionization, and gathers spectral line generation the 3rd curve of spectrum launched in ionization process；
Step 4, contrasts described 3rd curve of spectrum with described first curve of spectrum and described second curve of spectrum, obtains the match spectrum curve matched with described 3rd curve of spectrum；And the content of each gas in the normal plasma reaction cavity corresponding to described match spectrum curve, know the leakage scenarios of described plasma reaction cavity to be detected.
2. the leakage detection method of a kind of plasma reaction cavity according to claim 1, it is characterised in that described default excitation energy is the radio frequency electromagnetic of known strength.
3. the leakage detection method of a kind of plasma reaction cavity according to claim 1, it is characterised in that other gas described includes nitrogen, oxygen, carbon dioxide and air.
4. the leakage detection method of a kind of plasma reaction cavity according to claim 3, it is characterised in that described air is the air in working environment residing for described plasma reaction cavity to be detected.
5. the leakage detection method of a kind of plasma reaction cavity according to claim 1, it is characterised in that the content of required fluoroalkyl gas when described default content is the work of described plasma reaction cavity to be detected.
6. the leakage detection method of a kind of plasma reaction cavity according to claim 1, it is characterized in that, being generated as of described first curve of spectrum, second curve of spectrum and the 3rd curve of spectrum gathers, respectively through spectroanalysis instrument, the spectral line launched in the ionization process that described first curve of spectrum, second curve of spectrum and the 3rd curve of spectrum are corresponding and generates.
7. the leakage detection method according to the arbitrary described a kind of plasma reaction cavity of claim 1 to 6, it is characterised in that described normal plasma reaction cavity is identical with the model of plasma reaction cavity to be detected.
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Cited By (3)
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| CN110017955A (en) * | 2019-03-29 | 2019-07-16 | 上海华力集成电路制造有限公司 | Vacuum cavity leak rate monitoring method |
| CN111397810A (en) * | 2020-04-28 | 2020-07-10 | 江苏神州半导体科技有限公司 | Gas leakage detection method for RPS gas dissociation |
| CN113029460A (en) * | 2021-02-03 | 2021-06-25 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
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Application publication date: 20160706 |