CN106500910B - Dynamic contrast calibration device for vacuum gauge - Google Patents
Dynamic contrast calibration device for vacuum gauge Download PDFInfo
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- CN106500910B CN106500910B CN201611093790.8A CN201611093790A CN106500910B CN 106500910 B CN106500910 B CN 106500910B CN 201611093790 A CN201611093790 A CN 201611093790A CN 106500910 B CN106500910 B CN 106500910B
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
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Abstract
A dynamic contrast calibration device for a vacuum gauge comprises a vacuum measurement system and a control system; the vacuum measurement system comprises a vacuum calibration chamber 2, a fine adjustment balancer 1, a vacuum pump 7 and a standard vacuum sensor 3; the upper end of the vacuum calibration chamber 2 is provided with a fine tuning gas inlet, the equatorial position is provided with a calibrated vacuum gauge 10 interface and a standard vacuum sensor 3 interface, and the lower end is provided with a vacuumizing exhaust outlet and is connected with a vacuum pump 7; the control system comprises a control box 5 and a control cable 6; the control cable 6 is respectively connected with a vacuum pump 7, a fine adjustment balancer 1 and a standard vacuum sensor 3 of the vacuum measuring system. The vacuum calibration chamber of the calibration device has stable pressure, the fluctuation is less than 3%, and the quality of contrast calibration is ensured. The device can set the vacuum degree of a plurality of calibration points simultaneously, and the calibration of the next calibration point is automatically started after the calibration of the previous calibration point is finished, so that the working efficiency is improved.
Description
Technical Field
The invention relates to a dynamic comparison calibration device for a vacuum gauge, which is used for calibrating or testing a field or laboratory vacuum gauge in a wider measuring range and belongs to the technical field of measurement.
Background
The vacuum gauge is an instrument for measuring atmospheric pressure in an absolute pressure state, and is widely applied to various fields of war industry, electronics, medical food, electric power, metallurgy, chemical engineering and the like. With the development of science and technology, the requirements of the industry on vacuum gauges are continuously improved, and the precision is generally 10-2Pa or so. Because the vacuum measurement system is a complete set of test system including a vacuum gauge, a vacuum pump (roots pump, mechanical pump, molecular pump, etc.), various connecting pipelines and a vacuum baffle valve, the vacuum measurement system is large in size and fixed in the field installation position, laboratory calibration of the vacuum measurement system cannot be realized, and modern integrated production gradually requires field calibration of the vacuum measurement system. On-site calibration of vacuum systems is also a trend in future vacuum calibration.
The existing vacuum gauge calibration usually performs measurement calibration work by a static expansion method and a dynamic contrast method. The calibration device of the dynamic contrast method generally adopts the steps that firstly, a preposed vacuum pump and a molecular pump set are combined to evacuate a calibration chamber to the limit vacuum, then nitrogen is injected into the calibration chamber through a micro-adjustment device to obtain the target vacuum degree, and the comparison and calibration of a calibrated vacuum gauge and a standard vacuum gauge are realized.
The invention patent of CN200955987Y, China, discloses a portable vacuum gauge calibration device, after the calibration chamber reaches the limit vacuum, the calibration chamber obtains the target vacuum degree by adjusting a micro-regulating valve installed on a round calibration chamber to inject nitrogen. The calibration device has the defect that the operation flexibility is poor because each calibration vacuum degree can only be gradually performed from low to high. In addition, the manual micro-adjustment device injects nitrogen into the calibration chamber, so that the flow is difficult to accurately control, the flow is easy to deviate from the target vacuum degree, the stability of the vacuum degree of the calibration chamber is influenced, and meanwhile, a pointer type standard vacuum gauge is easy to generate reading errors.
CN102564696A discloses a portable vacuum gauge calibration system and method, which are used for calibration or test of a field or laboratory vacuum gauge in a wide range of measurement ranges. The device comprises a mechanical pump, a first vacuum valve, a molecular pump, a second vacuum valve, a first vacuum gauge, a second vacuum gauge, a third vacuum gauge, a valve, a fourth vacuum gauge, a small hole, a fine-tuning vacuum valve, an air source, a vacuum chamber and a fifth vacuum gauge; the whole system is connected by pipelines. The invention adopts a reference standard to directly compare and calibrate the vacuum gauge, and when the calibrated range is 10-1～105Pa, using a capacitance film gauge as a reference standard, and when the calibration range is 10-6～10-2And when Pa is needed, a B-A type secondary standard ionization gauge is used as a reference standard, and a proper reference standard is selected and the required vacuum degree of the vacuum chamber is determined according to the calibrated range in the calibration process.
Disclosure of Invention
In order to overcome the defects of low working efficiency, inflexible operation and easy generation of reading errors in the prior art. The invention provides a target vacuum degree automatic following technology, after the target vacuum degree of a vacuum calibration chamber is set, a system automatically adjusts the working frequency of a vacuum pump according to the deviation with the actual vacuum degree, and the system is linked with a fine adjustment balancer on the vacuum calibration chamber, so that the vacuum degree of the vacuum calibration chamber is stabilized within the target value range.
A dynamic contrast calibration device for a vacuum gauge comprises a vacuum measurement system and a control system; the vacuum measurement system comprises a vacuum calibration chamber 2, a fine adjustment balancer 1, a vacuum pump 7 and a standard vacuum sensor 3; the upper end of the vacuum calibration chamber 2 is provided with a fine tuning gas inlet, the equatorial position is provided with a calibrated vacuum gauge 10 interface and a standard vacuum sensor 3 interface, and the lower end is provided with a vacuumizing exhaust outlet and is connected with a vacuum pump 7; the control system comprises a control box 5 and a control cable 6; the control cable 6 is respectively connected with a vacuum pump 7, a fine adjustment balancer 1 and a standard vacuum sensor 3 of the vacuum measurement system; one end of the fine adjustment balancer 1 is communicated with the atmosphere, the other end of the fine adjustment balancer 1 is connected with the vacuum calibration chamber 2 through a collecting pipe 14, the calibrated vacuum gauge 10 is connected with the vacuum calibration chamber 2 through a vacuum valve b 9, the standard vacuum sensor 3 is connected with the vacuum calibration chamber 2 through a special vacuum valve c 4, and the vacuum pump 7 is connected with the vacuum calibration chamber 2 through a vacuum valve a 8.
The device can set 2-5 calibration point vacuum degrees simultaneously, and automatically enters the calibration of the next calibration point after the calibration of the previous calibration point is finished, so that the working efficiency is improved.
The equatorial position of the vacuum calibration chamber 2 can be provided with 1-5 openings, 1-5 calibrated vacuum gauges, preferably 2-3 calibrated vacuum gauges are connected, and the calibration is completed at the same time.
Three groups of capillaries and electromagnetic valve groups are arranged in the fine adjustment balancer 1 and packaged in the same box body, an air inlet is arranged at the upper end of the fine adjustment balancer 1, the lower end of the fine adjustment balancer 1 is connected with the same T-shaped collecting pipe 14, an air outlet is arranged at the lower end of the fine adjustment balancer 1 of the collecting pipe 14 and is connected with the vacuum calibration chamber 2, the three groups of capillaries and the electromagnetic valve groups have different flows, and the control system preselects the working capillaries and the electromagnetic valve groups according to the set target vacuum degree and controls the opening and closing of the capillaries and the electromagnetic valve groups according to the difference value between the vacuum calibration chamber vacuum degree and the set target vacuum degree. The dynamic adjustment of the air inlet flow is realized, so that the pressure of the vacuum calibration chamber 2 is kept stable.
The invention has the advantages that the dynamic comparison and calibration device of the vacuum gauge adjusts the working frequency of the vacuum pump in real time and controls the opening and closing of the capillary tube of the corresponding fine tuning balancer and the electromagnetic valve group by comparing the set target vacuum degree and the actual vacuum degree of the vacuum calibration chamber, so that the pressure of the vacuum calibration chamber is kept in a stable state, the fluctuation is less than 3 percent, and the quality of comparison and calibration is ensured. The system can set a plurality of calibration target vacuum degrees simultaneously, and automatically enters the calibration of the next vacuum degree after the calibration of the previous vacuum degree is completed, so that the flexible and efficient work is realized.
Drawings
The invention is further illustrated with reference to the figures and examples.
FIG. 1 is a schematic view of the working principle of the vacuum gauge calibrating apparatus;
FIG. 2 is a schematic diagram of a trim balancer;
FIG. 3 is a control system logic diagram.
In the figure, 1, a fine adjustment balancer, 2, a vacuum calibration chamber, 3, a standard vacuum sensor, 4, a vacuum valve c, 5, a control box, 6, a control cable, 7, a vacuum pump, 8, a vacuum valve a, 9, a vacuum valve b, 10, a calibrated vacuum gauge, 11, a capillary tube and electromagnetic valve group a, 12, a capillary tube and electromagnetic valve group b, 13, a capillary tube and electromagnetic valve group c, 14 and a confluence tube
Detailed Description
Example 1
This vacuum gauge developments contrast calibrating device divide into vacuum measurement system and control system, vacuum measurement system is connected with vacuum pump 7 through vacuum valve 9 to the lower extreme of vacuum calibration room 2, after vacuum pump 7 starts, the opening that sets up in 2 equator position one side of vacuum calibration room is connected with standard vacuum sensor 3 through vacuum valve c 4, the vacuum of real-time supervision vacuum calibration room 2, the vacuum value of surveying transmits control box 5 through control cable 6, control box 5 and the working power supply frequency of setting for behind the target vacuum degree comparison through control cable 6 adjustment vacuum pump 7. An opening is arranged on the other side of the equator of the vacuum calibration chamber 2 and is connected with a calibrated vacuum gauge 10 through a vacuum valve a 8, and the vacuum degree of the vacuum calibration chamber is displayed in real time.
The upper end of the vacuum calibration chamber 2 is provided with an opening which is connected with the fine adjustment balancer 1, the fine adjustment balancer 1 is internally provided with a capillary tube and an electromagnetic valve group a 11, a capillary tube and electromagnetic valve group b 12 and a capillary tube and electromagnetic valve group c 13, and the three capillary tubes and electromagnetic valve groups are all connected with a collecting pipe 14. And after the control box 5 sets the target vacuum degree, a group of capillary tubes and an electromagnetic valve group are automatically selected. When the difference value between the vacuum degree in the vacuum calibration chamber 2 and the set target vacuum degree is less than 50Pa, the control box 5 opens the selected capillary tube and the electromagnetic valve of the electromagnetic valve group through the control cable 6, external air enters the vacuum calibration chamber 2, and the pressure of the vacuum calibration chamber is stabilized together with the vacuum pump 7.
After the vacuum degree in the vacuum calibration chamber 2 is stabilized, the standard vacuum degree displayed by the calibrated vacuum gauge 10 and the control box 5 is compared, and one calibration of the calibrated vacuum gauge 10 is completed.
The control box 5 can set all calibration points at one time, and after the calibration of one point is completed, the control box 5 automatically starts the system to enter the calibration of the next calibration point until the calibration of all the calibration points of the calibrated vacuum gauge 10 is completed.
Claims (4)
1. A dynamic contrast calibration device for a vacuum gauge comprises a vacuum measurement system and a control system; the vacuum measurement system comprises a vacuum calibration chamber (2), a fine adjustment balancer (1), a vacuum pump (7) and a standard vacuum sensor (3); the upper end of the vacuum calibration chamber (2) is provided with a fine tuning gas inlet, the equatorial position is provided with a calibrated vacuum gauge (10) interface and a standard vacuum sensor (3) interface, and the lower end is provided with a vacuumizing exhaust outlet and is connected with a vacuum pump (7); the control system comprises a control box (5) and a control cable (6); the control cable (6) is respectively connected with a vacuum pump (7) of the vacuum measuring system, the fine adjustment balancer (1) and the standard vacuum sensor (3); one end of the fine adjustment balancer (1) is communicated with the atmosphere, the other end of the fine adjustment balancer (1) is connected with the vacuum calibration chamber (2) through a collecting pipe (14), a calibrated vacuum gauge (10) is connected with the vacuum calibration chamber (2) through a vacuum valve b (9), a standard vacuum sensor (3) is connected with the vacuum calibration chamber (2) through a special vacuum valve c (4), and a vacuum pump (7) is connected with the vacuum calibration chamber (2) through a vacuum valve a (8);
three groups of capillary tubes and electromagnetic valve groups in the fine adjustment balancer (1) correspond to a target vacuum degree set by the control box (5) respectively, and the capillary tubes and the electromagnetic valve groups are opened and then matched with the low-frequency work of the vacuum pump (7) to realize the stability of the pressure of the vacuum calibration chamber (2);
the fine adjustment balancer (1) is internally provided with three groups of capillary tubes and electromagnetic valve groups, the capillary tubes and the electromagnetic valve groups are packaged in the same box body, the upper end of the fine adjustment balancer (1) is provided with an air inlet, the lower end of the fine adjustment balancer (1) is connected with the same T-shaped collecting pipe (14), the collecting pipe (14) is provided with an air outlet at the lower end of the fine adjustment balancer (1) and is connected with the vacuum calibration chamber (2), the three groups of capillary tubes and the electromagnetic valve groups have different flows, and the control system preselects the working capillary tubes and the electromagnetic valve groups according to the set target vacuum degree and controls the opening and closing of the capillary tubes and the electromagnetic valve groups according to the difference value of the vacuum degree of the vacuum calibration chamber and the set target vacuum degree; the dynamic adjustment of the air inlet flow is realized, so that the pressure of the vacuum calibration chamber (2) is kept stable;
the working frequency of the vacuum pump (7) is linearly adjusted according to the difference value between the set vacuum degree and the actual vacuum degree of the vacuum calibration chamber;
1-5 openings are arranged at the equator position of the vacuum calibration chamber (2), and 1-5 calibrated vacuum gauges are connected to complete calibration at the same time.
2. Calibration device according to claim 1, characterized in that 2-3 openings are provided at the equatorial position of the vacuum calibration chamber (2) and 2-3 calibrated vacuum gauges are connected while the calibration is performed.
3. The method for calibrating the calibration device according to any one of claims 1-2, wherein the lower end of a vacuum calibration chamber (2) in the vacuum measurement system is connected with a vacuum pump (7) through a vacuum valve b (9), after the vacuum pump (7) is started, an opening arranged on one side of the equator position of the vacuum calibration chamber (2) is connected with a standard vacuum sensor (3) through a vacuum valve c (4), the vacuum degree of the vacuum calibration chamber (2) is monitored in real time, the measured vacuum value is transmitted to a control box (5) through a control cable (6), and the operating power supply frequency of the vacuum pump (7) is adjusted through the control cable (6) after the control box (5) is compared with a set target vacuum degree; an opening is arranged on the other side of the equator of the vacuum calibration chamber (2) and is connected with a calibrated vacuum gauge (10) through a vacuum valve a (8), and the vacuum degree of the vacuum calibration chamber (2) is displayed in real time; an opening is formed in the upper end of the vacuum calibration chamber (2) and connected with the fine adjustment balancer (1), a capillary tube and an electromagnetic valve group a (11), a capillary tube and electromagnetic valve group b (12) and a capillary tube and electromagnetic valve group c (13) are arranged in the fine adjustment balancer (1), and the three groups of capillary tubes and electromagnetic valve groups are all connected with a collecting pipe (14); the control box (5) automatically selects a group of capillary tubes and an electromagnetic valve group after setting a target vacuum degree; when the difference value between the vacuum degree in the vacuum calibration chamber (2) and the set target vacuum degree is less than 50Pa, the control box (5) opens the selected capillary tube and the electromagnetic valve of the electromagnetic valve group through the control cable (6), external air enters the vacuum calibration chamber (2), and the pressure of the vacuum calibration chamber is stabilized together with the vacuum pump (7); after the vacuum degree in the vacuum calibration chamber (2) is stable, the standard vacuum degrees displayed by the calibrated vacuum gauge (10) and the control box (5) are compared, and the primary calibration of the calibrated vacuum gauge (10) is completed.
4. The method of claim 3, wherein 2-5 vacuum degrees of the calibration points can be set simultaneously, and the calibration of the next calibration point is automatically performed after the calibration of the previous calibration point is completed, thereby improving the working efficiency.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611093790.8A CN106500910B (en) | 2016-12-02 | 2016-12-02 | Dynamic contrast calibration device for vacuum gauge |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201611093790.8A CN106500910B (en) | 2016-12-02 | 2016-12-02 | Dynamic contrast calibration device for vacuum gauge |
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| CN106500910A CN106500910A (en) | 2017-03-15 |
| CN106500910B true CN106500910B (en) | 2022-06-14 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108956007A (en) * | 2017-05-23 | 2018-12-07 | 成都飞机工业（集团）有限责任公司 | A kind of vacuum meter on-line calibration room |
| CN111306941B (en) * | 2020-03-12 | 2022-03-25 | 浙江吉成新材股份有限公司 | Vacuum gauge abnormity alarm device for monitoring vacuum degree of high-temperature pressureless sintering |
| CN112461446B (en) * | 2020-11-23 | 2022-04-19 | 阿米检测技术有限公司 | Rapid dynamic vacuum calibration method for vacuum gauge |
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| KR100724092B1 (en) * | 2005-10-27 | 2007-06-04 | 한국표준과학연구원 | An in-stu calibration apparatus of vacuum gauge by absolute and comparison method |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN203191151U (en) * | 2012-12-21 | 2013-09-11 | 黄鸣 | Vacuum gauge automatic calibrating device |
| CN204027887U (en) * | 2014-08-26 | 2014-12-17 | 天津市环境保护科学研究院 | A kind of adjustable extraction-type dilution sampling instrument |
| CN206269962U (en) * | 2016-12-02 | 2017-06-20 | 山东中检高科检测技术有限公司 | A kind of vacuum meter dynamic contrast calibrating installation |
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Address after: 266000 second floor, building 4, No.19 Hechuan Road, Licang District, Qingdao City, Shandong Province Applicant after: Shandong aoshengtai Testing Technology Co.,Ltd. Address before: 266000 second floor, building 4, No.19 Hechuan Road, Licang District, Qingdao City, Shandong Province Applicant before: SHANDONG ZHONGJIANGAOKE TESTING TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20230327 Address after: 266000 Building G, Industrial Park Road South, both sides of Yingjiu Road, Jiaodong Street Office, Jiaozhou City, Qingdao City, Shandong Province Patentee after: Aiyouxin (Shandong) Measurement and Testing Co.,Ltd. Address before: 266000 second floor, building 4, No.19 Hechuan Road, Licang District, Qingdao City, Shandong Province Patentee before: Shandong aoshengtai Testing Technology Co.,Ltd. |