CN203191151U - Vacuum gauge automatic calibrating device - Google Patents
Vacuum gauge automatic calibrating device Download PDFInfo
- Publication number
- CN203191151U CN203191151U CN 201320115264 CN201320115264U CN203191151U CN 203191151 U CN203191151 U CN 203191151U CN 201320115264 CN201320115264 CN 201320115264 CN 201320115264 U CN201320115264 U CN 201320115264U CN 203191151 U CN203191151 U CN 203191151U
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- Prior art keywords
- vacuum
- calibration
- checking device
- vacuum gauge
- calibrated
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- Testing Or Calibration Of Command Recording Devices (AREA)
Abstract
The utility model discloses a vacuum gauge automatic calibrating device, comprising a calibration vacuum chamber, a standard vacuum gauge, a vacuum-pumping system, and at least one vacuum gauge to be calibrated, wherein the standard vacuum gauge and the vacuum gauge to be calibrated are respectively connected with the calibration vacuum chamber through pipelines, and the calibration vacuum chamber is connected with the vacuum-pumping system. The vacuum gauge automatic calibrating device further comprises an automatic controlling, and data acquiring and processing system which is respectively connected with the standard vacuum gauge, the vacuum gauge to be calibrated, and the calibration vacuum chamber. The vacuum gauge automatic calibrating device is wide in calibration scope, high in precision, high in efficiency, and convenient in operation; the vacuum gauge automatic calibrating device conducts tests fully automatically; and the vacuum gauge automatic calibrating device is designed in a portable manner and is suitable for on-site tests.
Description
Technical field
The utility model relates to the vacuum measurement technical field, relates in particular to a kind of vacuum meter self-checking device.
Background technology
Vacuum meter is used for testing apparatus vacuum tightness, and vacuum meter need use the vacuum gauge calibration device that its measuring accuracy is proofreaied and correct.
Present vacuum gauge calibration device comprises the micrometering valve of a calibration chamber, and calibration chamber UNICOM, and the standard vacuum gauge that is connected with calibration chamber by pipeline and interface and several are calibrated vacuum meter, and vacuumizes unit by what molecular pump and mechanical pump were formed.Chinese patent CN200955987Y " portable vacuum gauge calibration device " and CN202216802N " the on-the-spot vacuum gauge calibration device of a kind of wide-range " all adopt above-mentioned building block and connected mode.More than two patents all need the manual adjustments micrometering valve, set air inflow to reach default vacuum tightness by the manual adjustments micrometering valve.Chinese patent CN201697751N " a kind of vacuum gauge calibration device " is to set vacuum tightness at compound pressure controller, regulates air inflow to reach predetermined vacuum level by flow control system.
Existing vacuum gauge calibration device all can't be realized vacuum meter calibration continuously automatically, does not also possess automatic data collection and processing capacity, complicated operation, and testing efficiency is lower.
The utility model content
The purpose of this utility model is exactly in order to solve the problem that prior art exists, to provide a kind of testing efficiency height, vacuum meter self-checking device easy and simple to handle.
To achieve these goals, the utility model adopts following technical scheme:
A kind of vacuum meter self-checking device, comprise that calibration vacuum chamber, standard vacuum gauge, pumped vacuum systems and at least one are calibrated vacuum meter, described standard vacuum gauge is connected with the calibration vacuum chamber respectively by pipeline with the described vacuum meter that is calibrated, and described calibration vacuum chamber is connected with described pumped vacuum systems; Also comprise automatic control and data acquisition processing system, described automatic control and data acquisition processing system connect described standard vacuum gauge, described vacuum meter and the described calibration vacuum chamber of being calibrated respectively.
Further, described automatic control and data acquisition processing system comprise embedded computer, analog to digital converter, flow controller and communication controller; Described standard vacuum gauge is connected with described communication controller by lead respectively with the described vacuum meter that is calibrated, described communication controller is connected with described embedded computer, described embedded computer is connected with described analog to digital converter, described analog to digital converter is connected with flow controller by lead, the inlet end of described flow controller connects gas cylinder by reduction valve, and the outlet side of described flow controller connects described calibration vacuum chamber.
Further, described communication controller is that USB changes the RS485/232 controller.
Further, described flow controller is piezoelectric ceramic valve.
Further, described calibration vacuum chamber is the right cylinder of 1-3 for height with the ratio of internal diameter, and described cylindrical bottom is provided with flange.
Further, 1/2nd of described calibration vacuum chamber is highly located, 7 pipelines that evenly distribute all around of described calibration vacuum chamber, and described 7 pipelines connect described flow controller, described standard vacuum gauge and 5 described vacuum meters that are calibrated respectively.
Further, described standard vacuum is counted the high precision compound vacuum gauge.
Further, described pumped vacuum systems comprises molecular pump and mechanical pump, is connected by pipeline between described molecular pump and described mechanical pump, and described pipeline is provided with solenoid valve, and described molecular pump connects described vacuum correction chamber.
Further, described molecular pump is by the import of pipeline connection solenoid valve, and the outlet of described solenoid valve connects an end of another pipeline, and the other end of described pipeline connects mechanical pump.
Further, the bottom of described calibration vacuum chamber is connected with the flange of described molecular pump by flange.
Compared with prior art, the beneficial effects of the utility model are:
1. calibration range is wide, and accuracy and stability are high;
2. can set the vacuum tightness calibration point at the computer measurement and control interface, need not manual shift;
3. can under the multiple gases environment, calibrate;
4. each test data is gathered and handled to the vacuum gauge calibration process automatically by the omnidistance control of the auto-control software on the embedded computer, and output Excel form Calibration Report, and is simple to operate, the testing efficiency height;
5. this apparatus structure modular portable design, system stability is reliable, is convenient to on-the-spot test.
Description of drawings
Fig. 1 is the structural representation of the utility model vacuum meter self-checking device.
Among the figure:
1 calibration vacuum chamber;
2 standard vacuum gauges;
3 pumped vacuum systems, 30 molecular pumps, 31 mechanical pumps, 32 solenoid valves;
4 are calibrated vacuum meter;
5 gas cylinders;
6 control and data acquisition processing system 60 embedded computers, 61 analog to digital converters, 62 flow controllers, 63 communication controllers automatically;
7 pipelines;
8 reduction valve.
Embodiment
Be described further below in conjunction with accompanying drawing and the utility model of embodiment.
Referring to Fig. 1, a kind of vacuum meter self-checking device, comprise that calibration vacuum chamber 1, standard vacuum gauge 2, pumped vacuum systems 3 and at least one are calibrated vacuum meter 4, standard vacuum gauge 2 be calibrated vacuum meter 4 and be connected with calibration vacuum chamber 1 respectively by pipeline 7, calibrate vacuum chamber 1 and be connected with pumped vacuum systems 3; Also comprise automatic control and data acquisition processing system 6, control and data acquisition processing system 6 connect standard vacuum gauge 2 respectively, are calibrated vacuum meter 4 and calibration vacuum chamber 1 automatically.
The utlity model has that calibration range is wide, precision is high, portable design, be suitable for the advantage of on-the-spot test, have computer controlled automatic and data acquisition process function simultaneously, the testing efficiency height.
Present embodiment is on the basis of above-described embodiment, and control and data acquisition processing system 6 comprise embedded computer 60, analog to digital converter 61, flow controller 62 and communication controller 63 automatically; Standard vacuum gauge 1 be calibrated vacuum meter 4 and be connected with communication controller 63 by lead respectively, communication controller 63 is connected with embedded computer 60, embedded computer 60 is connected with analog to digital converter 61, analog to digital converter 61 is connected with flow controller 62 by lead, the inlet end of flow controller 62 connects gas cylinder 5 by reduction valve 8, and the outlet side of flow controller 62 connects calibration vacuum chamber 1.
As preferably, communication controller 63 has a plurality of communication interfaces for USB changes the RS485/232 controller.
As preferably, flow controller 62 is piezoelectric ceramic valve.
As preferably, calibration vacuum chamber 1 is the right cylinder of 1-3 for the ratio of height and internal diameter, and described cylindrical bottom is provided with flange.
As preferably, calibration vacuum chamber 2 1/2nd highly place, calibration vacuum chamber 1 around evenly 7,7 pipelines 7 of 7 same size pipelines of distribution connection traffic controller 62, standard vacuum gauge 2 and 5 are calibrated vacuum meter 4 respectively.
As preferably, standard vacuum gauge 2 is the high precision compound vacuum gauge, measurement range 10
-8-1.5 * 10
5Pa.
As preferably, pumped vacuum systems 3 comprises molecular pump 30 and mechanical pump 31, is connected by pipeline 7 between molecular pump 30 and the mechanical pump 31, and pipeline 7 is provided with solenoid valve 32, and molecular pump 30 connects vacuum correction chambers 1.
As preferably, molecular pump 30 connects the import of solenoid valves 32 by pipeline 7, and the outlet of solenoid valve 32 connects an end of another pipeline 7, and the other end of pipeline 7 connects mechanical pump 31.Pipeline 7 in the present embodiment is preferably corrugated tube.
As preferably, for the ease of connection, the bottom of calibration vacuum chamber 1 is connected by the flange of flange with molecular pump 30 inlet ends.
The outlet side of the utility model gas cylinder 5 connects an end of reduction valve 8, and the other end of reduction valve 8 is connected by the inlet end of pipeline with flow controller 62, and the outlet side of flow controller 15 is communicated with calibration vacuum chamber 1 by pipeline and interface.Flow controller 62 also is electrically connected with analog to digital converter 61 simultaneously, and analog to digital converter 61 is electrically connected with embedded computer 60. Standard vacuum gauge 2 and 5 are calibrated vacuum meter 4 and all are electrically connected with communication controller 12, the vacuum tightness signal of test transfers to communication controller 12 with analog signaling, communication controller 63 is connected with embedded computer 13, and communication controller 63 is to transfer to embedded computer 60 after the digital signal with analog signal conversion.Write automatic control program at embedded computer 60, the vacuum tightness that standard vacuum gauge 2 is measured with set vacuum tightness and compare after, the output digital signal is to analog to digital converter 61, analog to digital converter 61 is converted to analog signal transmission to flow controller 62 with digital signal, after flow controller 62 receives simulating signal, automatically regulate the gas flow that flow controller 62 inputs to calibration vacuum chamber 1, make the vacustat in the calibration vacuum chamber 1 set vacuum tightness.Behind the vacustat, embedded computer 60 automatic record standard vacuum meters 2 and the vacuum values that is calibrated vacuum meter 4, the calibration that enters next vacuum tightness calibration point then.After the end of test (EOT), auto-control software output test report and control device on the embedded computer 60 are out of service.
Vacuum meter self-checking device calibration steps of the present utility model is as follows:
1) will be calibrated vacuum meter and be installed on the calibration vacuum chamber, and check sealing;
2) at the auto-control software of embedded computer operation vacuum meter self-checking device, mechanical pump, solenoid valve, standard vacuum gauge are opened successively automatically, and when measured value during less than 10Pa, molecular pump is opened;
3) data acquisition module in the auto-control software is gathered the vacuum tightness that standard vacuum gauge is measured in real time, when the reading of standard vacuum gauge reaches 2 * 10
-7During Pa, and in 1min, fluctuate less than ± 0.1 * 10
-7Pa, the turn-on flow rate that transmits control signal controller is to the inflation of calibration vacuum chamber.Computer real-time acquisition vacuum tightness data in the gas replenishment process are regulated the flow controller gas flow through sending instruction behind the sequential operation, reach 2 * 10 until the calibration vacuum degree in vacuum chamber
-5Pa, and the interior fluctuation vacuum of 1min is less than ± 0.01 * 10
-5During Pa, computing machine records the standard vacuum gauge of this moment automatically and is calibrated the vacuum tightness that vacuum meter is measured, and enters next vacuum tightness calibration point then.The vacuum tightness calibration is from 10
-5The Pa magnitude begins to end to the 105Pa magnitude, and each order of magnitude is chosen 2,3,5,9 totally four calibration points.For example 10
-5During the calibration of Pa magnitude, calibration point chooses 2 * 10
-5Pa, 3 * 10
-5Pa, 5 * 10
-5Pa, 9 * 10
-5 Pa 4 points.
4) calibration finishes, and the data processing module in the auto-control software is handled calibration data automatically, the output test report.
5) auto-control software transmission instruction is closed each valve, standard vacuum gauge, is calibrated vacuum meter, molecular pump and mechanical pump.
The utility model principle of work: a kind of vacuum meter self-checking device, based on the gas continuity principle, inject the gas of a constant rate to device, pumping speed balance when gas flow and pump, when in the calibration vacuum chamber, forming uniform and stable transient equilibrium pressure, examine and determine being calibrated vacuum meter with standard vacuum gauge.Highly locate at calibration vacuum chamber 1/2nd, 7 connecting tubes that evenly distribute all around, connection traffic controller, 1 standard vacuum gauge and 5 are calibrated vacuum meter respectively.The calibration vacuum chamber is connected with molecular pump by the bottom welding flange, and molecular pump connects solenoid valve by corrugated tube, and electromagnetic valve outlet connects corrugated tube, and the other end of corrugated tube connects mechanical pump.The USB port of communication controller connects the USB port of embedded computer.The PORT COM of embedded computer (RS485) is connected with the input port of analog to digital converter, the input end of analog to digital converter output terminal connection traffic controller, and the outlet of flow controller is by pipeline and interface and calibration vacuum chamber.Standard vacuum gauge is transferred to embedded computer with the measured value that is calibrated vacuum meter in the digital communication mode, write the data acquisition process program at embedded computer, gather standard vacuum gauge and respectively be calibrated the vacuum tightness that vacuum meter is measured, the vacuum tightness that program is measured standard vacuum gauge compares with setting vacuum tightness, send digital signal to analog to digital converter, analog to digital converter is converted to simulating signal with digital signal and drives flow controller, the adjustments of gas flow, thereby regulate the vacuum tightness in the calibration vacuum chamber, make the interior vacuum tightness of calibration vacuum chamber reach setting value.The vacuum tightness calibration is from 10
-5The Pa magnitude begins to end to the 105Pa magnitude, and each order of magnitude is chosen 2,3,5,9 totally four calibration points.For example 10
-5During the calibration of Pa magnitude, calibration point chooses 2 * 10
-5Pa, 3 * 10
-5Pa, 5 * 10
-5Pa, 9 * 10
-5 Pa 4 points.When vacustat was in a certain setting value in the calibration vacuum chamber, computer recording standard vacuum gauge and the vacuum values that is calibrated vacuum meter entered next vacuum tightness calibration point and calibrate.After each vacuum tightness calibration point was calibrated successively and finished, computing machine was exported test report automatically.
The auto-control software that the utility model embedded computer is installed all can be realized by prior art.
The utility model calibration process is by the omnidistance control of auto-control software and output Calibration Report.Calibration range 10
-5-10
5Pa, degree of stability is less than 1%, and uncertainty is less than 5%.Calibration range is wide, the precision height, and test is full-automatic, and portable design is suitable for on-the-spot test.
Though above-mentionedly by reference to the accompanying drawings the embodiment of utility model is described; but be not the restriction to the utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various modifications that creative work can make or distortion still in protection domain of the present utility model.
Claims (10)
1. vacuum meter self-checking device, comprise that calibration vacuum chamber, standard vacuum gauge, pumped vacuum systems and at least one are calibrated vacuum meter, described standard vacuum gauge is connected with the calibration vacuum chamber respectively by pipeline with the described vacuum meter that is calibrated, and described calibration vacuum chamber is connected with described pumped vacuum systems; It is characterized in that, also comprise automatic control and data acquisition processing system, described automatic control and data acquisition processing system connect described standard vacuum gauge, described vacuum meter and the described calibration vacuum chamber of being calibrated respectively.
2. vacuum meter self-checking device according to claim 1 is characterized in that, described automatic control and data acquisition processing system comprise embedded computer, analog to digital converter, flow controller and communication controller; Described standard vacuum gauge is connected with described communication controller by lead respectively with the described vacuum meter that is calibrated, described communication controller is connected with described embedded computer, described embedded computer is connected with described analog to digital converter, described analog to digital converter is connected with flow controller by lead, the inlet end of described flow controller connects gas cylinder by reduction valve, and the outlet side of described flow controller connects described calibration vacuum chamber.
3. vacuum meter self-checking device according to claim 2 is characterized in that, described communication controller is that USB changes the RS485/232 controller.
4. vacuum meter self-checking device according to claim 2 is characterized in that, described flow controller is piezoelectric ceramic valve.
5. vacuum meter self-checking device according to claim 2 is characterized in that, described calibration vacuum chamber is the right cylinder of 1-3 for height with the ratio of internal diameter, and described cylindrical bottom is provided with flange.
6. vacuum meter self-checking device according to claim 5, it is characterized in that, / 2nd of a described calibration vacuum chamber is highly located, 7 pipelines that evenly distribute all around of described calibration vacuum chamber, and described 7 pipelines connect described flow controller, described standard vacuum gauge and 5 described vacuum meters that are calibrated respectively.
7. vacuum meter self-checking device according to claim 1 is characterized in that, described standard vacuum is counted the high precision compound vacuum gauge.
8. according to each described vacuum meter self-checking device of claim 1-7, it is characterized in that, described pumped vacuum systems comprises molecular pump and mechanical pump, be connected by pipeline between described molecular pump and described mechanical pump, described pipeline is provided with solenoid valve, and described molecular pump connects described vacuum correction chamber.
9. vacuum meter self-checking device according to claim 8 is characterized in that, described molecular pump is by the import of pipeline connection solenoid valve, and the outlet of described solenoid valve connects an end of another pipeline, and the other end of described pipeline connects mechanical pump.
10. vacuum meter self-checking device according to claim 8 is characterized in that, the bottom of described calibration vacuum chamber is connected with the flange of described molecular pump by flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320115264 CN203191151U (en) | 2012-12-21 | 2013-03-14 | Vacuum gauge automatic calibrating device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220715657.2 | 2012-12-21 | ||
| CN201220715657 | 2012-12-21 | ||
| CN 201320115264 CN203191151U (en) | 2012-12-21 | 2013-03-14 | Vacuum gauge automatic calibrating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203191151U true CN203191151U (en) | 2013-09-11 |
Family
ID=49108004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320115264 Expired - Fee Related CN203191151U (en) | 2012-12-21 | 2013-03-14 | Vacuum gauge automatic calibrating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203191151U (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557991A (en) * | 2013-11-11 | 2014-02-05 | 姚文利 | Method and device for calibrating vacuum gauge for measuring pressure |
| CN104198115A (en) * | 2014-09-23 | 2014-12-10 | 湘潭电机股份有限公司 | Calibration device for detecting vacuum gauges with relative errors of indicating values no less than 30% |
| CN106500910A (en) * | 2016-12-02 | 2017-03-15 | 山东中检高科检测技术有限公司 | A kind of vacuometer dynamic contrast calibrating installation |
| CN107894301A (en) * | 2017-12-15 | 2018-04-10 | 芜湖致通汽车电子有限公司 | A kind of vacuum pressure sensor experimental rig and method |
| CN108061619A (en) * | 2018-01-17 | 2018-05-22 | 深圳世格赛思医疗科技有限公司 | A kind of method that new Medical Devices pressure calibration system and the system are calibrated |
| CN108896241A (en) * | 2018-03-22 | 2018-11-27 | 东莞市鼎力自动化科技有限公司 | A kind of vacuum degree measurement system and method |
| CN109682535A (en) * | 2018-12-25 | 2019-04-26 | 中国电子科技集团公司第四十九研究所 | A kind of vacuum correction device and method for sensor accelerated life test |
| CN110220116A (en) * | 2019-06-04 | 2019-09-10 | 凯盛光伏材料有限公司 | A kind of exhaust gas constant current processing system |
| CN111351517A (en) * | 2020-03-16 | 2020-06-30 | 中国科学院国家空间科学中心 | Device and method for simulating space atmospheric environment |
| CN111562050A (en) * | 2020-05-13 | 2020-08-21 | 湖北三江航天红林探控有限公司 | Pressure sensor linearity calibrating device and method |
| CN114354062A (en) * | 2021-12-17 | 2022-04-15 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by using rising rate method |
-
2013
- 2013-03-14 CN CN 201320115264 patent/CN203191151U/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557991A (en) * | 2013-11-11 | 2014-02-05 | 姚文利 | Method and device for calibrating vacuum gauge for measuring pressure |
| CN103557991B (en) * | 2013-11-11 | 2015-12-30 | 姚文利 | A kind of for tonometric vacuum gauge calibration method and device thereof |
| CN104198115A (en) * | 2014-09-23 | 2014-12-10 | 湘潭电机股份有限公司 | Calibration device for detecting vacuum gauges with relative errors of indicating values no less than 30% |
| CN106500910A (en) * | 2016-12-02 | 2017-03-15 | 山东中检高科检测技术有限公司 | A kind of vacuometer dynamic contrast calibrating installation |
| CN107894301A (en) * | 2017-12-15 | 2018-04-10 | 芜湖致通汽车电子有限公司 | A kind of vacuum pressure sensor experimental rig and method |
| CN108061619A (en) * | 2018-01-17 | 2018-05-22 | 深圳世格赛思医疗科技有限公司 | A kind of method that new Medical Devices pressure calibration system and the system are calibrated |
| CN108896241A (en) * | 2018-03-22 | 2018-11-27 | 东莞市鼎力自动化科技有限公司 | A kind of vacuum degree measurement system and method |
| CN108896241B (en) * | 2018-03-22 | 2021-07-06 | 东莞市鼎力自动化科技有限公司 | Vacuum degree detection system and method |
| CN109682535A (en) * | 2018-12-25 | 2019-04-26 | 中国电子科技集团公司第四十九研究所 | A kind of vacuum correction device and method for sensor accelerated life test |
| CN110220116A (en) * | 2019-06-04 | 2019-09-10 | 凯盛光伏材料有限公司 | A kind of exhaust gas constant current processing system |
| CN111351517A (en) * | 2020-03-16 | 2020-06-30 | 中国科学院国家空间科学中心 | Device and method for simulating space atmospheric environment |
| CN111562050A (en) * | 2020-05-13 | 2020-08-21 | 湖北三江航天红林探控有限公司 | Pressure sensor linearity calibrating device and method |
| CN111562050B (en) * | 2020-05-13 | 2021-07-23 | 湖北三江航天红林探控有限公司 | Pressure sensor linearity calibrating device and method |
| CN114354062A (en) * | 2021-12-17 | 2022-04-15 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by using rising rate method |
| CN114354062B (en) * | 2021-12-17 | 2024-04-09 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by ascending rate method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130911 Termination date: 20170314 |