CN109682535A - A kind of vacuum correction device and method for sensor accelerated life test - Google Patents
A kind of vacuum correction device and method for sensor accelerated life test Download PDFInfo
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- CN109682535A CN109682535A CN201811592448.1A CN201811592448A CN109682535A CN 109682535 A CN109682535 A CN 109682535A CN 201811592448 A CN201811592448 A CN 201811592448A CN 109682535 A CN109682535 A CN 109682535A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
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Abstract
A kind of vacuum correction device and method for sensor accelerated life test, it is related to vacuum pressure sensor field of measuring technique, it includes vacuum pump group, vacuum chamber, vacuum meter, gas bottle, pressure reducing valve and regulating valve；It is disposed with the vacuum chamber three being connected to the two between vacuum chamber two and vacuum chamber four, is separately installed with a vacuum meter on vacuum chamber one, vacuum chamber two and vacuum chamber three；Vacuum chamber three connect with gas bottle and is equipped with pressure reducing valve, regulating valve eight and regulating valve nine on the pipeline of the two connection；Between vacuum pump group and vacuum chamber one, between vacuum chamber one and vacuum chamber two, between vacuum chamber two and vacuum chamber three, regulating valve one, regulating valve four, regulating valve six and regulating valve seven are respectively arranged between vacuum chamber three and vacuum chamber four.Calibration method includes: one, vacuumizes；Two, it is tested the test of sensor pressurized circulation.The present invention is able to achieve the purpose for improving sensor reliability and stability to carry out accelerated life test to sensor.
Description
Technical field
The present invention relates to vacuum pressure sensor field of measuring technique, in particular to a kind of to try for sensor accelerated aging
The vacuum correction device and method tested.
Background technique
With the development of vacuum technique, vacuum system is all applied in many fields, Aeronautics and Astronautics, microelectronics,
Huge effect is played in the high and new technologies such as metallurgical information and biology, and vacuum technique is seeped into scientific research, production field
In daily life.
Vacuum technique mainly includes the acquisition of vacuum and two aspects of measurement of vacuum degree.The acquisition of vacuum, i.e. vacuum
It generates and keeps, it is generally realized by mechanical equipments such as vacuum pumps.And accurate measurement of vacuum, control vacuum degree are to production, life
Living, scientific research has an important influence, and the quality of success or failure and vacuum products to experiment all plays crucial effect.Vacuum degree
Measurement is mainly completed by the vacuum measurement equipment that sensor and its corresponding component form, and vacuum pressure sensor is test equipment
In key components, decide the precision and accuracy of measuring system.
But reliability, stability and consistency of domestic vacuum pressure sensor product etc. and developed country exist compared with
Big gap lacks systematic reliability consideration work.The technical level of high reliability sensor, sensor reliability research and
Experiment work is opposite to lag behind external process, and high reliability product category is single, less varieties, and there is also very big for volume production ability
Gap.So grasping as early as possible, exploitation has highly reliable sensor technology and product is a vital task with practical significance.
Summary of the invention
The present invention is to overcome the shortcomings of the existing technology, provide a kind of vacuum correction device for sensor accelerated life test
And method, to carry out accelerated life test to sensor, which may be implemented accelerated stress and two kinds of accelerated failure-time
Accelerated method is realized to reach the prediction to reliability indexs such as the service lifes of vacuum pressure sensor and improves sensor
The purpose of reliability, stability etc..
The technical scheme is that
According to an aspect of the present invention, providing a kind of vacuum correction device for sensor accelerated life test includes
Vacuum pump group, vacuum chamber, vacuum meter, gas bottle, pressure reducing valve and regulating valve；
The vacuum chamber is respectively vacuum chamber two, vacuum chamber three, vacuum chamber four and the vacuum chamber one for calibration；
Vacuum pump group is connect with vacuum chamber one and vacuum chamber two respectively, is disposed between vacuum chamber two and vacuum chamber four and two
The vacuum chamber three of person's connection, vacuum chamber one, vacuum chamber two, vacuum chamber three and vacuum chamber four are serially connected, vacuum chamber one, vacuum
A vacuum meter is separately installed on cabin two and vacuum chamber three；Regulating valve be respectively regulating valve one, regulating valve two, regulating valve three,
Regulating valve four, regulating valve five, regulating valve six, regulating valve seven, regulating valve eight, regulating valve nine and regulating valve ten；
Vacuum chamber three connect with gas bottle and is equipped with pressure reducing valve, regulating valve eight and regulating valve on the pipeline of the two connection
Nine；Vacuum chamber three and gas bottle are identical as atmosphere through regulating valve eight；Regulating valve two is provided on vacuum chamber one；Vacuum pump group and true
Between empty cabin one, between vacuum chamber one and vacuum chamber two, between vacuum chamber two and vacuum chamber three, vacuum chamber three and vacuum chamber four it
Between be respectively arranged with regulating valve one, regulating valve four, regulating valve six and regulating valve seven；It is provided between vacuum chamber one and vacuum chamber two
Regulating valve three and regulating valve ten are provided with regulating valve five between tested sensor and vacuum chamber two；It is tested sensor and three true
The signal output end of sky meter is connect with the signal input part of display panel respectively.
Further, the vacuum is calculated as capacitive films vacuum meter.
Further, the regulating valve is metal regulating valve.
According to another aspect of the present invention, a kind of vacuum correction device for sensor accelerated life test is provided
Calibration method；
The following steps are included:
Step 1: the regulating valve nine before closing gas bottle, and the regulating valve two that is communicated with atmosphere in blinding off a line and adjust
Valve eight, remaining regulating valve are in the state opened；
Step 2: opening vacuum pump group, vacuumize to closed system, make vacuum degree absolute vacuum in device or
The pressure of person's test requirements document；
Step 3: after the registration of three vacuum meters is consistent and stablizes, vacuum pump group, regulating valve four and regulating valve one are closed
K1；Regulating valve three between vacuum chamber two and vacuum chamber one；
Step 4: the regulating valve between vacuum chamber three and vacuum chamber two is closed and between vacuum chamber three and vacuum chamber four
Regulating valve seven opens the regulating valve eight communicated in pipeline with atmosphere or adjusts the regulating valve nine on gas bottle pipeline, makes vacuum
Cabin three reaches the pressure of setting；
Step 5: to the vacuum meter between vacuum chamber three and display panel registration stablize exist, blind off a line in atmosphere
The regulating valve nine in regulating valve eight or adjusting gas bottle and pipeline communicated, opens the tune between vacuum chamber three and vacuum chamber four
Valve seven is saved, then pressure in the subsystem that vacuum chamber three and vacuum chamber four form are as follows:
P3=(P1V1+P2V2)/(V1+V2)
Wherein: V1 is the volume of vacuum chamber three, and V2 is the volume of vacuum chamber four；
Step 6: the registration to the vacuum meter between vacuum chamber three and display panel, which is stablized, to exist, and opens vacuum chamber three and true
Regulating valve six between empty cabin two, then the pressure P4 in subsystem being made of vacuum chamber two, vacuum chamber three and vacuum chamber four are as follows:
P4=(P3V1+P3V2+P1V4)/(V1+V2+V4)
Wherein: V4 is the volume of vacuum chamber two, and V1 is the volume of vacuum chamber three, and V2 is the volume of vacuum chamber four；
The P4 is the vacuum pressure being applied on tested sensor.
The beneficial effect of the present invention compared with prior art is: vacuum correction device of the present invention can achieve the essence of ± 5%FS
Degree realizes maximum leak rate 1 × 10-6Pa·m3/ s, so as to tested sensor carry out accelerated life test, it is especially suitable just
Normal working stress condition and the accelerated failure-time method for accelerating the realization Annual distribution between working stress condition.
Detailed description of the invention
Fig. 1 is a kind of structure chart of the vacuum correction device for sensor accelerated life test of the present invention；
Fig. 2 is the workflow schematic diagram of embodiment.
Specific embodiment
Invention is further explained with reference to the accompanying drawings and examples.
It participates in shown in Fig. 1, a kind of vacuum correction device for sensor accelerated life test of present embodiment,
It includes vacuum pump group 1, vacuum chamber 2, vacuum meter 3, gas bottle 4, pressure reducing valve 5 and regulating valve；
The vacuum chamber is respectively vacuum chamber 2 22, vacuum chamber 3 23, vacuum chamber 4 24 and the vacuum chamber one for calibration
21；
Vacuum pump group 1 is connect with vacuum chamber 1 and vacuum chamber 2 22 respectively, between vacuum chamber 2 22 and vacuum chamber 4 24
It is disposed with the vacuum chamber 3 23 being connected to the two, vacuum chamber 1, vacuum chamber 2 22, vacuum chamber 3 23 and vacuum chamber 4 24 concatenate
Together, a vacuum meter 3 is connected separately on vacuum chamber 1, vacuum chamber 2 22 and vacuum chamber 3 23；
Regulating valve is respectively one K1 of regulating valve, two K2 of regulating valve, three K3 of regulating valve, four K4 of regulating valve, five K5 of regulating valve, adjusts
Save six K6 of valve, seven K7 of regulating valve, ten K10 of eight K8 of regulating valve, nine K9 of regulating valve and regulating valve；
Vacuum chamber 3 23 connect with gas bottle 4 and is equipped with pressure reducing valve 5, eight K8 of regulating valve and tune on the pipeline of the two connection
Save nine K9 of valve；Vacuum chamber 3 23 and gas bottle 4 are identical as atmosphere through eight K8 of regulating valve；Regulating valve two is provided on vacuum chamber 1
K2；
Between vacuum pump group 1 and vacuum chamber 1, between vacuum chamber 1 and vacuum chamber 2 22, vacuum chamber 2 22 and vacuum
One K1 of regulating valve, four K4 of regulating valve, regulating valve six are respectively arranged between cabin 3 23, between vacuum chamber 3 23 and vacuum chamber 4 24
Seven K7 of K6 and regulating valve；It is provided with ten K10 of three K3 of regulating valve and regulating valve between vacuum chamber 1 and vacuum chamber 2 22, is tested and passes
Five K5 of regulating valve is provided between sensor 8 and vacuum chamber 2 22；The signal output end of tested sensor 8 and three vacuum meters 3 point
It is not connect with the signal input part of display panel.
Present embodiment vacuum correction device is based on Robert Boyle-boyle's law working principle, the i.e. gas of certain mass
Body, if temperature remains unchanged, the pressure of gas and the product of volume are constant, and each section is connected by pipeline in above scheme
It connects, nine regulating valves are distributed between each building block, and can be carried out controlling each regulating valve by computer control system
Switch and opening degree.Or the opening and closing degree by manually controlling each regulating valve.
The application method of vacuum chamber 1 in the device are as follows: open between tested sensor 8 and the vacuum chamber 2 22, very
Regulating valve between empty pump group 1 and the vacuum chamber 2 22 is closed and other regulating valves, calibration of the realization to tested sensor；Together
Reason realizes the calibration to the sensor accelerated life test subsystem of vacuum correction device.Gas bottle 4 passes through pressure reducing valve 5
It is connect with nine K9 of regulating valve with other component；Gas bottle 4 is for realizing different vacuum pressures.Display panel 7 is used for real-time monitoring
Vacuum degree in vacuum chamber.
It participates in shown in Fig. 1, in general, vacuum meter 3 uses capacitive films vacuum meter, measurement accuracy is high, high sensitivity, reaction
Speed is fast, and pressure reading is not by gas composition influence.Precision for measuring the vacuum meter of vacuum chamber 1 will be much higher than remaining
The precision of two vacuum meters, one 21 selection standard vacuum chamber of vacuum chamber.
In general, regulating valve uses metal regulating valve.So set, resistance to big overload impact, it is ensured that device is reliable for operation.
In general, the volume summation of vacuum chamber 2 22, vacuum chamber 3 23 and vacuum chamber 4 24 is at least gas circuit pipe total volume
20 times.The volume of 4 different vacuum chambers is designed according to the case where being tested product sensor.
In general, vacuum pump group 1 is mainly composed in series by several molecular pumps and lobe pump.The vacuum pump group 1 is existing skill
Art.
In another embodiment, a kind of calibration side of vacuum correction device for sensor accelerated life test is also provided
Method, comprising the following steps:
Step 1: nine K9 of regulating valve before closing gas bottle 4, and two K2 of regulating valve that is communicated with atmosphere in blinding off a line and
Eight K8 of regulating valve, remaining regulating valve are in the state opened；
Step 2: vacuum pump group 1 is opened, closed system is vacuumized, the vacuum degree absolute vacuum in device is made
Or the pressure P1 of test requirements document；
Step 3: after the registration of three vacuum meters 3 is consistent and stablizes, vacuum pump group 1, four K4 of regulating valve and adjusting are closed
One K1 of valve；Three K3 of regulating valve between vacuum chamber 2 22 and vacuum chamber 1；
Step 4: regulating valve K6 and vacuum chamber 3 23 and vacuum chamber between closing vacuum chamber 3 23 and vacuum chamber 2 22
Seven K7 of regulating valve between 4 24 opens eight K8 of regulating valve communicated in pipeline with atmosphere or adjusts on 4 pipeline of gas bottle
Nine K9 of regulating valve makes vacuum chamber 3 23 reach the pressure P2 of setting；
Step 5: the registration to vacuum meter 3 between vacuum chamber 3 23 and display panel 7 is stablized in P2, blinds off a line
Eight K8 of regulating valve that communicates with atmosphere adjusts nine K9 of regulating valve on gas bottle 4 and pipeline, opens vacuum chamber 3 23 and true
Seven K7 of regulating valve between empty cabin 4 24, then pressure P3 in the subsystem that vacuum chamber 3 23 and vacuum chamber 4 24 form are as follows:
P3=(P1V1+P2V2)/(V1+V2)
Wherein: V1 is the volume of vacuum chamber 3 23, and V2 is the volume of vacuum chamber 4 24；
Step 6: the registration to the vacuum meter 3 between vacuum chamber 3 23 and display panel 7 is stablized in P3, and vacuum chamber is opened
Six K6 of regulating valve between 3 23 and vacuum chamber 2 22, then be made of vacuum chamber 2 22, vacuum chamber 3 23 and vacuum chamber 4 24
Pressure P4 in subsystem are as follows:
P4=(P3V1+P3V2+P1V4)/(V1+V2+V4)
Wherein: V4 is the volume of vacuum chamber two, and V1 is the volume of vacuum chamber 3 23, and V2 is the volume of vacuum chamber 4 24；
The P4 is the vacuum pressure being applied on tested sensor 8.Change vacuum chamber 2 22, vacuum chamber three in step 4
23 and vacuum chamber 4 24 volume and initial pressure P1 to realize that different pressures P4 is applied on tested sensor 8.
The application method of vacuum chamber 1 in the device are as follows: open between tested sensor 8 and the vacuum chamber 2 22, very
Regulating valve between empty pump group 1 and the vacuum chamber 2 22 is closed and other regulating valves, calibration of the realization to tested sensor；Together
Reason realizes the calibration to the sensor accelerated life test subsystem of vacuum correction device.Gas bottle 4 passes through pressure reducing valve 5
It is connect with nine K9 of regulating valve with other component；Gas bottle 4 is for realizing different vacuum pressures.Display panel 7 is used for real-time monitoring
Vacuum degree in vacuum chamber.
As a kind of concrete application of above embodiment, by taking atmospheric pressure as an example.
The vacuum correction device for being used for sensor accelerated life test is placed in steady temperature space, be room temperature (20~
50)℃。
Selecting volume is 50 liters of vacuum chamber 1, the vacuum chamber 2 22 that volume is 99 liters, the vacuum chamber three that volume is 1 liter
23, the vacuum chamber 4 24 that volume is 9 liters.
A kind of calibration method of the vacuum correction device for sensor accelerated life test,
Step 1: as shown in Figure 1, closing two K2 of regulating valve, eight K8 of regulating valve, nine K9 of regulating valve, remaining regulating valve is in
Opening state forms closed seal chamber, then opens vacuum pump group 1, vacuumizes to the seal chamber, the pole in seal chamber
Pressure limiting force value depends on the ability of vacuum pump group 1, here, suppose that be perfect condition, after vacuum pump group 1 vacuumizes, sealing
Intracavitary pressure is 0Pa；
Step 2: judge whether the pressure in seal chamber is 0Pa, while three vacuum meters 3 of test stone, it is ensured that this three
The registration of the vacuum meter 3 of standard is consistent and stablizes；When not up to expecting pressure, continue to be vacuumized with vacuum pump group 1, directly
To meeting the requirements；
Step 3: after previous step is met the requirements, one K1 of regulating valve, four K4 of three K3 of regulating valve and regulating valve, inspection are closed
Test the registration of tested sensor 8, if meet the performance indicator of product；When being unsatisfactory for, exclude whether to be tested sensing first
The problem of device 8 itself, restarts step 1, until the tested biography in this step when not being the tested problem of sensor 8 itself
Sensor 8 meets the requirement of its performance indicator；
Step 4: closing six K6 of regulating valve and seven K7 of regulating valve, opens eight K8 of regulating valve, makes in vacuum chamber 3 23 full of big
Gas, pressure value are atmospheric pressure 101350Pa, and whether the registration of the vacuum meter 3 for the standard that inspection is connect with the vacuum chamber 3 23
For local atmospheric pressure；
Step 5: when the vacuum meter 3 of step 4 Plays registration stablize in local atmospheric pressure, close regulating valve eight
K8 opens seven K7 of regulating valve, then vacuum chamber four 24 of the 1 liter of gas full of 1 liter of vacuum chamber 3 23 and 9 liter；According to Robert Boyle-horse
Lve Tedinglv, then the pressure value in subsystem being made of the vacuum chamber 4 24 of 1 liter of vacuum chamber 3 23 and 9 liter is local atmosphere
The 1/10 of pressure；Examine the registration of the vacuum meter 3 of the standard connected at this time, if be 1/10 of registration in step 4；
Step 6: after the registration of the vacuum meter 3 of above-mentioned standard is stablized, opening six K6 of regulating valve, close seven K7 of regulating valve,
Gas in 1 liter is full of vacuum chamber 3 23 and vacuum chamber 2 22；At this point, the subsystem being made of vacuum chamber 3 23 and vacuum chamber 2 22
Pressure value in system is the 1/1000 of local atmospheric pressure, i.e. 101.350Pa；Examine at this time the vacuum meters 3 of two standards show
Number, if be 1/1000 of registration in step 4；
Step 7: after the registration of the vacuum meter 3 of two standards is stablized, the registration of tested sensor 8 is acquired, and judgement is
It is no to fail.
So far, a pressurized circulation for being tested sensor 8 is completed, and then in addition to 50 liters of vacuum chamber 1, will entirely be filled
It sets and carries out logical atmosphere, carry out pressurized circulation next time.The switch of regulating valve in above each step is by having display surface
The computer control system of plate is controlled or is manually controlled；Wherein, control valve K2 can be manually controlled, it is ensured that vacuum chamber
Pressure is accurate in one 21.
The present invention is disclosed as above with preferable case study on implementation, and however, it is not intended to limit the invention, any to be familiar with this profession
Technical staff, without departing from the scope of the present invention, according to the technical essence of the invention to the above case study on implementation institute
Any simple modification, equivalent change and modification done still belong to technical solution of the present invention range.
Claims (7)
1. a kind of vacuum correction device for sensor accelerated life test, it is characterised in that: it include vacuum pump group (1),
Vacuum chamber, vacuum meter (3), gas bottle (4), pressure reducing valve (5) and regulating valve；
The vacuum chamber is respectively vacuum chamber two (22), vacuum chamber three (23), vacuum chamber four (24) and the vacuum chamber for calibration
One (21)；
Vacuum pump group (1) is connect with vacuum chamber one (21) and vacuum chamber two (22) respectively, vacuum chamber two (22) and vacuum chamber four
(24) vacuum chamber three (23) being connected to the two, vacuum chamber one (21), vacuum chamber two (22), vacuum chamber three (23) are disposed between
It is serially connected with vacuum chamber four (24), is separately installed on vacuum chamber one (21), vacuum chamber two (22) and vacuum chamber three (23)
One vacuum meter (3)；
The regulating valve is respectively regulating valve one (K1), regulating valve two (K2), regulating valve three (K3), regulating valve four (K4), adjusts
Valve five (K5), regulating valve six (K6), regulating valve seven (K7), regulating valve eight (K8), regulating valve nine (K9) and regulating valve ten (K10)；
Vacuum chamber three (23) connect with gas bottle (4) and is equipped with pressure reducing valve (5), regulating valve eight (K8) on the pipeline of the two connection
With regulating valve nine (K9)；Vacuum chamber three (23) and gas bottle (4) are identical as atmosphere through regulating valve eight (K8)；On vacuum chamber one (21)
It is provided with regulating valve two (K2)；
Between vacuum pump group (1) and vacuum chamber one (21), between vacuum chamber one (21) and vacuum chamber two (22), vacuum chamber two (22)
It is respectively arranged with regulating valve one (K1) between vacuum chamber three (23), between vacuum chamber three (23) and vacuum chamber four (24), adjusts
Valve four (K4), regulating valve six (K6) and regulating valve seven (K7)；Adjusting is provided between vacuum chamber one (21) and vacuum chamber two (22)
Valve three (K3) and regulating valve ten (K10) are provided with regulating valve five (K5) between tested sensor (8) and vacuum chamber two (22)；
The signal output end of tested sensor (8) and three vacuum meters (3) is connect with the signal input part of display panel respectively.
2. a kind of vacuum correction device for sensor accelerated life test according to claim 1, it is characterised in that: institute
Stating vacuum meter (3) is capacitive films vacuum meter.
3. a kind of vacuum correction device for sensor accelerated life test according to claim 2, it is characterised in that: institute
Stating regulating valve is metal regulating valve.
4. a kind of vacuum correction device for sensor accelerated life test according to claim 3, it is characterised in that: institute
The volume summation for stating vacuum chamber two (22), vacuum chamber three (23) and vacuum chamber four (24) is at least 20 times of gas circuit pipe total volume.
5. a kind of vacuum correction device for sensor accelerated life test according to claim 4, it is characterised in that: institute
Vacuum pump group (1) is stated mainly to be composed in series by several molecular pumps and lobe pump.
6. a kind of vacuum correction for sensor accelerated life test as described in any claim in claim 1 to 5
The calibration method of device, it is characterised in that: the following steps are included:
Step 1: the regulating valve nine (K9) before closing gas bottle (4), and the regulating valve two (K2) communicated with atmosphere in blinding off a line
With regulating valve eight (K8), remaining regulating valve is in the state opened；
Step 2: opening vacuum pump group (1), vacuumize to closed system, make vacuum degree absolute vacuum in device or
The pressure P1 of person's test requirements document；
Step 3: after the registration of three vacuum meters (3) is consistent and stablizes, vacuum pump group (1), regulating valve four (K4) is closed and is adjusted
It saves valve one (K1)；Regulating valve three (K3) between vacuum chamber two (22) and vacuum chamber one (21)；
Step 4: close regulating valve (K6) between vacuum chamber three (23) and vacuum chamber two (22) and vacuum chamber three (23) with very
Regulating valve seven (K7) between empty cabin four (24) opens the regulating valve eight (K8) communicated in pipeline with atmosphere or adjusts gas bottle
(4) regulating valve nine (K9) on pipeline makes vacuum chamber three (23) reach the pressure P2 of setting；
Step 5: the registration to the vacuum meter (3) between vacuum chamber three (23) and display panel (7) is stablized in P2, blinds off a line
In the regulating valve eight (K8) that communicates with atmosphere or adjust regulating valve nine (K9) on gas bottle (4) and pipeline, open vacuum chamber
Regulating valve seven (K7) between three (23) and vacuum chamber four (24), the then subsystem that vacuum chamber three (23) and vacuum chamber four (24) form
Pressure P3 in system are as follows:
P3=(P1V1+P2V2)/(V1+V2)
Wherein: V1 is the volume of vacuum chamber three (23), and V2 is the volume of vacuum chamber four (24)；
Step 6: the registration to the vacuum meter (3) between vacuum chamber three (23) and display panel (7) is stablized in P3, and vacuum is opened
Regulating valve six (K6) between cabin three (23) and vacuum chamber two (22), then by vacuum chamber two (22), vacuum chamber three (23) and vacuum
Pressure P4 in the subsystem of cabin four (24) composition are as follows:
P4=(P3V1+P3V2+P1V4)/(V1+V2+V4)
Wherein: V4 is the volume of vacuum chamber two (22), and V1 is the volume of vacuum chamber three (23), and V2 is the body of vacuum chamber four (24)
Product；
The P4 is the vacuum pressure being applied on tested sensor (8).
7. a kind of calibration method of the vacuum correction device for sensor accelerated life test according to claim 6,
It is characterized in that: changing the volume and initial pressure of vacuum chamber two (22), vacuum chamber three (23) and vacuum chamber four (24) in step 4
Power P1 is to realize that different pressures P4 is applied on tested sensor (8).
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110260907A (en) * | 2019-07-11 | 2019-09-20 | 中国电子科技集团公司第四十九研究所 | A kind of temperature stress no-failure acceleration service life test method for sensor |
| CN111413027A (en) * | 2020-04-22 | 2020-07-14 | 太原航空仪表有限公司 | Accelerated degradation test method for pressure annunciator |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070108671A1 (en) * | 2005-10-27 | 2007-05-17 | Korea Research Institute Of Standards And Science | Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison method |
| CN102393275A (en) * | 2011-09-27 | 2012-03-28 | 江苏东方航天校准检测有限公司 | Calibration apparatus of on-site wide-range vacuum gauge and method thereof |
| CN102607768A (en) * | 2012-04-01 | 2012-07-25 | 常熟市虞华真空设备科技有限公司 | Calibration device used for experiment |
| CN202442842U (en) * | 2012-02-09 | 2012-09-19 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibrating device |
| CN102749170A (en) * | 2012-07-16 | 2012-10-24 | 卢耀文 | Compound vacuum gauge calibration system and method |
| CN102944357A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | Device and method for calibrating vacuum gauge for work |
| CN203191151U (en) * | 2012-12-21 | 2013-09-11 | 黄鸣 | Vacuum gauge automatic calibrating device |
| CN204142418U (en) * | 2014-10-27 | 2015-02-04 | 北京麦克思拓测控科技有限公司 | Relative method high vacuum, relative method low vacuum and plavini integral type calibrating installation |
-
2018
- 2018-12-25 CN CN201811592448.1A patent/CN109682535B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070108671A1 (en) * | 2005-10-27 | 2007-05-17 | Korea Research Institute Of Standards And Science | Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison method |
| CN102393275A (en) * | 2011-09-27 | 2012-03-28 | 江苏东方航天校准检测有限公司 | Calibration apparatus of on-site wide-range vacuum gauge and method thereof |
| CN202442842U (en) * | 2012-02-09 | 2012-09-19 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibrating device |
| CN102607768A (en) * | 2012-04-01 | 2012-07-25 | 常熟市虞华真空设备科技有限公司 | Calibration device used for experiment |
| CN102749170A (en) * | 2012-07-16 | 2012-10-24 | 卢耀文 | Compound vacuum gauge calibration system and method |
| CN102944357A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | Device and method for calibrating vacuum gauge for work |
| CN203191151U (en) * | 2012-12-21 | 2013-09-11 | 黄鸣 | Vacuum gauge automatic calibrating device |
| CN204142418U (en) * | 2014-10-27 | 2015-02-04 | 北京麦克思拓测控科技有限公司 | Relative method high vacuum, relative method low vacuum and plavini integral type calibrating installation |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110260907A (en) * | 2019-07-11 | 2019-09-20 | 中国电子科技集团公司第四十九研究所 | A kind of temperature stress no-failure acceleration service life test method for sensor |
| CN110260907B (en) * | 2019-07-11 | 2021-07-16 | 中国电子科技集团公司第四十九研究所 | Temperature stress failure-free accelerated life test method for sensor |
| CN111413027A (en) * | 2020-04-22 | 2020-07-14 | 太原航空仪表有限公司 | Accelerated degradation test method for pressure annunciator |
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