CN102944358B - High and low temperature vacuum calibrating device and method - Google Patents
High and low temperature vacuum calibrating device and method Download PDFInfo
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- CN102944358B CN102944358B CN201210451251.2A CN201210451251A CN102944358B CN 102944358 B CN102944358 B CN 102944358B CN 201210451251 A CN201210451251 A CN 201210451251A CN 102944358 B CN102944358 B CN 102944358B
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Abstract
The invention discloses a high and low temperature vacuum calibrating device and a high and low temperature vacuum calibrating method and belongs to the field of measurement. The device comprises a standard vacuum gauge, a three-way connecting piece, a calibrated vacuum gauge, a high and low temperature vacuum calibrating chamber, a monitoring vacuum gauge, a temperature control board, a refrigerating system, an air-bleed set, a valve, a gas supply system and a micrometering valve. According to the device and the method, the accurate calibration of the vacuum gauge at different temperature points in a temperature range of minus 140 DEG C to 100 DEG C in a range of 1*10<-4>Pa to 1*10<5>Pa can be implemented.
Description
Technical field
The present invention relates to a kind of high low temperature vacuum correction device and method, particularly realize vacuum tightness 1 × 10
-4pa～1 × 10
5within the scope of Pa, the device and method of temperature accurate calibration of vacuum meter within the scope of-140 ℃～+ 100 ℃, belong to fields of measurement.
Background technology
Vacuum meter is widely used in industrial every field, and the Research on Calibration Technology of vacuum meter is an important research direction in vacuumatic measuring field.Document " Li Zhenghai. the method for compound type vacuum standard calibration vacuum meter. vacuum and low temperature 3(2), 1997. " and the one typical case's calibrating installation and the method that adopt while having introduced current vacuum gauge calibration.The method that complex vacuum standard device has adopted the dynamic and stalic state to combine, is compounded in the method for dynamic comparison, static comparison, three kinds of calibration vacuum meters of static expanding on a vacuum standard, and the calibration range of this device is 10
-4pa～10
5pa, uncertainty is less than 10%.
The weak point of this system is that device does not consider that operating ambient temperature changes the impact on vacuum meter indicating value, can only realize the calibration of vacuum meter under the normal temperature of laboratory, cannot meet 1 × 10
-4pa～1 × 10
5the accurate calibration of vacuum meter different temperature points in-140 ℃～+ 100 ℃ temperature ranges within the scope of Pa.In the time that the vacuum meter being calibrated uses in different working environments, can cause larger uncertainty of measurement.
Summary of the invention
The object of the present invention is to provide a kind of high low temperature vacuum correction device and method, described device and method can realize 1 × 10
-4pa～1 × 10
5the accurate calibration of vacuum meter different temperature points in-140 ℃～+ 100 ℃ temperature ranges within the scope of Pa.
Object of the present invention is realized by following technical scheme:
A kind of high low temperature vacuum correction device, described device comprises: standard vacuum gauge, three-way connector, by school vacuum meter, high low temperature vacuum correction chamber, monitoring vacuum meter, temperature control panel, refrigeration system, the unit of bleeding, valve, air supply system, micrometering valve;
Three-way connector comprises A, B, tri-openends of C, wherein, C end is inlet end, C holds the centre of the straight tube between side a and b, vertical with straight tube, and C holds A, the distance at B two ends equates, A, the internal diameter at B two ends equates, can guarantee that gas enters three-way connector from C end, flow to A, the pressure at B two ends equates, A end is connected with standard vacuum gauge, B holds and is connected by school vacuum meter, be fixed on temperature control panel by school vacuum meter, temperature control panel is connected with refrigeration system, three-way connector, be placed in high low temperature vacuum correction by school vacuum meter and temperature control panel indoor, monitoring vacuum meter is connected with high low temperature vacuum correction chamber, the unit of bleeding is connected with high low temperature vacuum correction chamber by valve, air supply system is connected with high low temperature vacuum correction chamber by micrometering valve,
Wherein, described air supply system is gas cylinder or airbag, and high low temperature vacuum correction chamber is reflection multilayer heat-insulation material, and temperature control panel is the copper plate that is tied with resistive heater, and valve is ultrahigh vacuum all-metal push-pull valve; Micrometering valve is ultrahigh vacuum all-metal micrometering valve, the 0.05% capacitor thin film type vacuum meter that it is full scale that standard vacuum gauge comprises three accuracies of measurement, and full scale is respectively 0.02Torr, 10Torr, 1000Torr; Refrigeration system adopts the solutions for refrigeration of cryopump one-level cold head and compressor combination; The unit of bleeding adopts the scheme of bleeding of turbomolecular pump and mechanical pump combination.
The calibration steps of high low temperature vacuum correction device of the present invention, described method step is as follows:
1. open standard vacuum gauge and monitoring vacuum meter, standard vacuum gauge is stablized 24 hours;
2. start the unit of bleeding, open valve, bled in high low temperature vacuum correction chamber and pipeline; When monitoring vacuum meter reading shows that the vacuum tightness of high low temperature vacuum correction chamber is less than 1 × 10
-6when the final vacuum of Pa, keep the state of calibration chamber to wait for subsequent operation;
3. open micrometering valve, the calibration gas in air supply system is incorporated in high low temperature vacuum correction chamber, when the gaseous tension in high low temperature vacuum correction chamber reaches balance, and standard vacuum gauge reading is while reaching required base measuring pressure, closes micrometering valve; Start refrigeration system and temperature control panel, when high low temperature vacuum correction indoor temperature balance and while reaching required base measuring temperature, close refrigeration system and temperature control panel, keep the state of temperature in high low temperature calibration chamber; In chamber to be calibrated, gaseous tension reaches after balance, respectively the pressure reading p of record standard vacuum meter
1with by the shown pressure reading p of school vacuum meter
2;
Calculate the normal pressure of high low temperature vacuum correction chamber according to formula (I),
In formula: the normal pressure of the high low temperature vacuum correction of p-chamber, unit: Pa;
T
1the residing ambient temperature of-standard vacuum gauge, unit: K;
The high low temperature vacuum correction of T-indoor temperature, unit: K;
Calculate calibration factor according to formula (II),
In formula, c-is calibration factor, dimensionless;
Wherein, step 3. described in base measuring pressure with relevant by the measurement range of school vacuum meter, base measuring temperature scope is-140 ℃～+ 100 ℃;
Preferably 3. repeating step, chooses different base measuring pressures and base measuring temperature at every turn, takes multiple measurements, then averages measuring each time the calibration factor calculating.
Beneficial effect
Device of the present invention has utilized well behaved molecular pump and the mechanical pump unit of bleeding, and can make the final vacuum of calibrating installation reach 1 × 10
-6pa; Adopt the refrigeration system by cryopump one-level cold head and compressor combination, can make the temperature range of calibrating installation be controlled at-140 ℃～+ 100 ℃; Meanwhile, due to the normal pressure reading that to use accuracy of measurement be full scale when 0.05% standard vacuum gauge provides calibration, reduce uncertainty of measurement, improved calibration accuracy.
Accompanying drawing explanation
Fig. 1 is high low temperature vacuum correction apparatus structure schematic diagram figure of the present invention;
Wherein, 1-standard vacuum gauge; 2-three-way connector; 3-by school vacuum meter; 4-high low temperature vacuum correction chamber; 5-monitoring vacuum meter; 6-temperature control panel; 7-refrigeration system; 8-the unit of bleeding; 9-valve; 10-air supply system; 11-micrometering valve.
Embodiment
Below in conjunction with the drawings and specific embodiments in detail the present invention is described in detail, but is not limited to this.
Embodiment 1
As shown in Figure 1, a kind of high low temperature vacuum correction device, described device comprises: standard vacuum gauge 1, three-way connector 2, by school vacuum meter 3, high low temperature vacuum correction chamber 4, monitoring vacuum meter 5, temperature control panel 6, refrigeration system 7, the unit 8 of bleeding, valve 9, air supply system 10, micrometering valve 11;
Three-way connector 2 comprises A, B, tri-openends of C, wherein, C end is inlet end, C holds the centre of the straight tube between side a and b, vertical with straight tube, and C holds A, the distance at B two ends equates, A, the internal diameter at B two ends equates, can guarantee that gas enters three-way connector 2 from C end, flow to A, the pressure at B two ends equates, A end is connected with standard vacuum gauge 1, B holds and is connected by school vacuum meter 3, be fixed on temperature control panel 6 by school vacuum meter 3, temperature control panel 6 is connected with refrigeration system 7, three-way connector 2, be placed in high low temperature vacuum correction chamber 4 by school vacuum meter 3 and temperature control panel 6, monitoring vacuum meter 5 is connected with high low temperature vacuum correction chamber 4, the unit 8 of bleeding is connected with high low temperature vacuum correction chamber 4 by valve 9, air supply system 10 is connected with high low temperature vacuum correction chamber 4 by micrometering valve 11,
Wherein, described air supply system 10 is gas cylinder or airbag, and high low temperature vacuum correction chamber 4 is reflection multilayer heat-insulation material, and temperature control panel 6 is for being tied with the copper plate of resistive heater, and valve 9 is ultrahigh vacuum all-metal push-pull valve; Micrometering valve 11 is ultrahigh vacuum all-metal micrometering valve 11, the 0.05% capacitor thin film type vacuum meter that it is full scale that standard vacuum gauge 1 comprises three accuracies of measurement, and full scale is respectively 0.02Torr, 10Torr, 1000Torr; Refrigeration system 7 adopts the solutions for refrigeration of cryopump one-level cold head and compressor combination; The unit 8 of bleeding adopts the scheme of bleeding of turbomolecular pump and mechanical pump combination.
The calibration steps of high low temperature vacuum correction device of the present invention, described method step is as follows:
1. open standard vacuum gauge 1 and monitoring vacuum meter 5, standard vacuum gauge 1 is stablized 24 hours;
2. start the unit 8 of bleeding, open valve 9, bled in high low temperature vacuum correction chamber 4 and pipeline; When monitoring vacuum meter 5 readings show that the vacuum tightness of high low temperature vacuum correction chamber 4 is less than 1 × 10
-6when the final vacuum of Pa, keep the state of calibration chamber to wait for subsequent operation;
3. open micrometering valve 11, the calibration gas in air supply system 10 is incorporated in high low temperature vacuum correction chamber 4, when the gaseous tension in high low temperature vacuum correction chamber 4 reaches balance, and standard vacuum gauge 1 reading reaches 10
-3when the base measuring pressure of the Pa order of magnitude, close micrometering valve 11; Start refrigeration system 7 and temperature control panel 6, when high low temperature vacuum correction chamber 4 interior equalized temperatures and while reaching the base measuring temperature of-50 ℃, close refrigeration system 7 and temperature control panel 6, keep the state of temperature in high low temperature calibration chamber; In chamber to be calibrated, gaseous tension reaches after balance, now the pressure reading p of standard vacuum gauge 1
1be 3.25 × 10
-3pa, by the shown pressure reading p of school vacuum meter 3
2be 2.65 × 10
-3pa; The residing ambient temperature of standard vacuum gauge 1 is+23 ℃;
Calculate the normal pressure of high low temperature vacuum correction chamber 4 according to formula (I),
In formula: the normal pressure of the high low temperature vacuum correction of p-chamber 4, unit: Pa;
T
1the residing ambient temperature of-standard vacuum gauge 1, unit: K;
The high low temperature vacuum correction of T-chamber 4 interior temperature, unit: K;
By p
1=3.25 × 10
-3pa, T
1=296K, T=223K substitution formula (I), calculate normal pressure p=2.82 × 10
-3pa.
Calculate calibration factor according to formula (II),
In formula, c-is calibration factor, dimensionless;
By p
2=2.65 × 10
-3pa, p=2.82 × 10
-3pa substitution formula (II), calculating by the calibration factor of school vacuum meter 3 is c=1.064.
Wherein, step 3. described in base measuring pressure with relevant by the measurement range of school vacuum meter 3, base measuring temperature scope is-140 ℃～+ 100 ℃;
Preferably 3. repeating step, chooses different base measuring pressures and base measuring temperature at every turn, takes multiple measurements, then averages measuring each time the calibration factor calculating.
The present invention includes but be not limited to above embodiment, every any being equal to of carrying out under the principle of spirit of the present invention, replaces or local improvement, all will be considered as within protection scope of the present invention.
Claims (3)
1. a high low temperature vacuum correction method, the device that described calibration steps adopts comprises: standard vacuum gauge (1), three-way connector (2), by school vacuum meter (3), high low temperature vacuum correction chamber (4), monitoring vacuum meter (5), temperature control panel (6), refrigeration system (7), the unit of bleeding (8), valve (9), air supply system (10), micrometering valve (11);
Three-way connector (2) comprises A, B, tri-openends of C, wherein, C end is inlet end, C holds the centre of the straight tube between side a and b, vertical with straight tube, and C holds A, the distance at B two ends equates, A, the internal diameter at B two ends equates, A end is connected with standard vacuum gauge (1), B holds and is connected by school vacuum meter (3), be fixed on temperature control panel (6) by school vacuum meter (3), temperature control panel (6) is connected with refrigeration system (7), three-way connector (2), be placed in high low temperature vacuum correction chamber (4) by school vacuum meter (3) and temperature control panel (6), monitoring vacuum meter (5) is connected with high low temperature vacuum correction chamber (4), the unit (8) of bleeding is connected with high low temperature vacuum correction chamber (4) by valve (9), air supply system (10) is connected with high low temperature vacuum correction chamber (4) by micrometering valve (11),
It is characterized in that: described calibration steps step is as follows:
1. open standard vacuum gauge (1) and monitoring vacuum meter (5), standard vacuum gauge (1) is stablized 24 hours;
2. start the unit (8) of bleeding, open valve (9), bled in high low temperature vacuum correction chamber (4) and pipeline; When monitoring vacuum meter (5) reading shows that the vacuum tightness of high low temperature vacuum correction chamber (4) is less than 1 × 10
-6when the final vacuum of Pa, keep the state of calibration chamber to wait for subsequent operation;
3. open micrometering valve (11), calibration gas in air supply system (10) is incorporated in high low temperature vacuum correction chamber (4), when the gaseous tension in high low temperature vacuum correction chamber (4) reaches balance, and when standard vacuum gauge (1) reading reaches required base measuring pressure, close micrometering valve (11); Start refrigeration system (7) and temperature control panel (6), when equalized temperature in high low temperature vacuum correction chamber (4) and while reaching required base measuring temperature, close refrigeration system (7) and temperature control panel (6), keep the state of temperature in high low temperature calibration chamber; In chamber to be calibrated, gaseous tension reaches after balance, respectively the pressure reading p of record standard vacuum meter (1)
1with by the shown pressure reading p of school vacuum meter (3)
2;
Calculate the normal pressure of high low temperature vacuum correction chamber (4) according to formula (I),
In formula: the normal pressure of the high low temperature vacuum correction of p-chamber (4), unit: Pa;
T
1the residing ambient temperature of-standard vacuum gauge (1), unit: K;
The interior temperature in the high low temperature vacuum correction of T-chamber (4), unit: K;
Calculate calibration factor according to formula (II),
In formula, c-is calibration factor, dimensionless;
Wherein, step 3. described in base measuring pressure with relevant by the measurement range of school vacuum meter (3), base measuring temperature scope is-140 ℃～+ 100 ℃.
2. the high low temperature vacuum correction of one according to claim 1 method, it is characterized in that: described air supply system (10) is gas cylinder or airbag, high low temperature vacuum correction chamber (4) is reflection multilayer heat-insulation material, temperature control panel (6) is for being tied with the copper plate of resistive heater, and valve (9) is ultrahigh vacuum all-metal push-pull valve; Micrometering valve (11) is ultrahigh vacuum all-metal micrometering valve (11), the 0.05% capacitor thin film type vacuum meter that it is full scale that standard vacuum gauge (1) comprises three accuracies of measurement, and full scale is respectively 0.02Torr, 10Torr, 1000Torr; Refrigeration system (7) adopts the solutions for refrigeration of cryopump one-level cold head and compressor combination; The unit (8) of bleeding adopts the scheme of bleeding of turbomolecular pump and mechanical pump combination.
3. the high low temperature vacuum correction of one according to claim 1 method, is characterized in that: 3. repeating step, chooses different base measuring pressures and base measuring temperature at every turn, takes multiple measurements, then averages measuring each time the calibration factor calculating.
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| CN103808457B (en) * | 2013-12-24 | 2016-01-13 | 兰州空间技术物理研究所 | Vacuum correction device and method under low temperature |
| CN104776956A (en) * | 2014-01-15 | 2015-07-15 | 上海理工大学 | Test device for pressure sensors |
| CN104316260B (en) * | 2014-11-14 | 2017-02-22 | 陕西电器研究所 | Calibration system suitable for high-temperature environment micro-pressure sensor |
| CN104748911A (en) * | 2015-03-13 | 2015-07-01 | 成都飞机工业（集团）有限责任公司 | Multifunctional vacuum calibrating device |
| CN105466633B (en) * | 2015-11-18 | 2018-10-16 | 西安航天计量测试研究所 | A kind of low temperature lower pressure sensor calibrating installation |
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| CN106289666B (en) * | 2016-08-31 | 2020-03-06 | 兰州空间技术物理研究所 | Calibration device and method for vacuum leak at ambient temperature |
| CN107860510A (en) * | 2017-11-07 | 2018-03-30 | 中航（重庆）微电子有限公司 | A kind of calibration method of pressure sensor |
| CN109341946B (en) * | 2018-11-28 | 2021-09-14 | 北京东方计量测试研究所 | Composite type comparison method vacuum calibration system and method |
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| CN114526863B (en) * | 2022-01-27 | 2022-10-14 | 中国科学院合肥物质科学研究院 | Ultralow temperature vacuum measurement calibration device and method based on GM refrigerator cooling |
| CN115060414B (en) * | 2022-08-17 | 2022-11-25 | 成都凯天电子股份有限公司 | Device and method for providing high-precision pressure standard |
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| JPS60177235A (en) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | Calibrating device of vacuum gauge |
| KR100805926B1 (en) * | 2006-08-22 | 2008-02-21 | 한국표준과학연구원 | Integral calibration apparatus for low vacuum gauge and high vacuum gauge |
| CN101458144B (en) * | 2008-12-22 | 2010-09-08 | 中国航天科技集团公司第五研究院第五一○研究所 | Direction gage calibration device |
| CN201555691U (en) * | 2009-10-15 | 2010-08-18 | 李宏仁 | Standard vacuum metering device |
| CN102749170A (en) * | 2012-07-16 | 2012-10-24 | 卢耀文 | Compound vacuum gauge calibration system and method |
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