CN115060414B - Device and method for providing high-precision pressure standard - Google Patents

Device and method for providing high-precision pressure standard Download PDF

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Publication number
CN115060414B
CN115060414B CN202210986206.0A CN202210986206A CN115060414B CN 115060414 B CN115060414 B CN 115060414B CN 202210986206 A CN202210986206 A CN 202210986206A CN 115060414 B CN115060414 B CN 115060414B
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temperature
pressure
box
standard
pressure sensing
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CN115060414A (en
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陈笑宇
李沁洋
吕玉娟
黎玲
曹德垚
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Chengdu CAIC Electronics Co Ltd
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Chengdu CAIC Electronics Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a device and a method for providing a high-precision pressure standard, wherein the device comprises a constant-temperature pressure sensing box, a central control board and a temperature adjusting box; the constant-temperature pressure sensing box is fixed in the temperature adjusting box through a mounting support plate, and the central control plate is in communication connection with the temperature adjusting box; the invention uses 3 pressure sensors with 0.002% FS precision as a standard pressure, and can use the pressure sensors with less than or equal to 0.002% FS as standard pressure, compares the output performance of the pressure sensor to be tested with the standard pressure, and adopts a comparison method to judge the output precision, thereby improving the coverage rate of the test.

Description

Device and method for providing high-precision pressure standard
Technical Field
The invention belongs to the technical field of pressure sensor calibration, and particularly relates to a device and a method for providing a high-precision pressure standard.
Background
With the increasing requirements of modern airplanes on the quantity and precision of various kinds of information of air data, air data computers are widely adopted on modern airplanes to measure and process various kinds of air data information. The most basic information of the air data computer is 6 of flight altitude, true airspeed, indicated airspeed, mach number, atmospheric temperature and atmospheric density of the airplane, and the rest information can be calculated by the 6 information. And the 6 basic information is obtained by resolving by totally depending on 4 original parameters of total pressure, static pressure, total temperature and attack angle. Accurate and stable measurement of these 4 parameters is important to ensure accurate and stable operation of the air data computer. Therefore, a pressure sensor for measuring static pressure and full pressure is required to have high stability, repeatability and precision.
The pressure sensor is one of a plurality of sensors, is the most widely applied sensor in the current pressure measurement, and along with the improvement and development of the technology of the pressure sensor, especially the improvement of stability, reliability, accuracy grade and working environment applicability, the application range is wider and wider, the accuracy of the use environment and the detection, calibration and precision of related parameters are directly related to the evaluation of product quality and detection quality, and the necessary means and function for ensuring the accuracy and reliability of the sensor through the regular metering and calibration of the sensor are more and more prominent.
In the prior art, a calibration pressure sensor is a process for calibrating its static characteristics, i.e. sensitivity, linearity, hysteresis, repeatability, accuracy, temperature drift and zero drift, and the calibration pressure sensor generally uses standard equipment to generate a known non-electrical quantity (standard quantity) or uses a reference quantity to determine the relationship between the electrical output quantity and the non-electrical input quantity of the sensor. The parameter index of a pressure sensor needs to be detected and calibrated, a standard pressure sensor with 10 times higher precision than the pressure sensor to be calibrated needs to be selected, and meanwhile, the standard pressure sensor needs not to have the influence of objective factors such as environment, proportion and the like.
The pressure sensor is frequently used in various fields, the requirement is higher and higher, the calibration requirement on the pressure sensor is stricter and stricter, and in order to ensure the accuracy and reliability of the pressure standard and eliminate various interferences on the standard pressure, the pressure standard equipment capable of providing stability and high precision is invented. The device can obtain an accurate pressure standard, and can be used for calibrating and testing other pressure sensors with low levels.
Disclosure of Invention
Aiming at the defects in the prior art, the device and the method for providing the high-precision pressure standard provided by the invention solve the problem that the precision of the calibrated pressure sensor is influenced along with the change of the ambient temperature.
In order to achieve the purpose of the invention, the invention adopts the technical scheme that: the device for providing the high-precision pressure standard is characterized by comprising a central control board and a temperature adjusting box;
the temperature adjusting box is internally provided with a constant temperature pressure sensing box, a third temperature diode group, a fan and a heating sheet;
the constant-temperature pressure sensing box is internally provided with three pressure sensing units, a first temperature diode group and a second temperature diode group; each pressure sensing unit is internally provided with a standard pressure sensor and an air pressure sensing element;
the central control board is respectively in communication connection with the pressure sensing unit, the first temperature diode group, the second temperature diode group, the third temperature diode group, the fan and the heating sheet;
the constant temperature pressure sensing box is used for controlling the temperature value in the constant temperature pressure sensing box to be the same as the temperature value in a sensed or tooling cavity, the temperature adjusting box is used for controlling the temperature of the constant temperature pressure sensing box, the central control panel is used for generating excitation and is also used for acquiring the measured value of a standard pressure sensor to obtain a pressure standard value.
Further: still be provided with the base in the constant temperature pressure sensing box, the shell material of constant temperature pressure sensing box is the aluminum alloy plate, the base is fixed to be set up on the aluminum alloy plate.
The beneficial effects of the above further scheme are: the outside is communicated with the standard pressure sensor through the air pressure sensing element, the standard pressure sensor senses the pressure same as that of a measured sensor or a tool cavity, the sensed pressure consistency is guaranteed, and the problem of non-uniform standard caused by inconsistent calibration is avoided.
Further: the three pressure sensing units are also provided with a sensor sealing plate, the standard pressure sensor is fixedly arranged on the sensor sealing plate through an air pressure sensing element, the sensor sealing plate is fixedly arranged on the base, and the precision of the standard pressure sensor is 0.002 percent FS.
The beneficial effects of the above further scheme are: the material with good heat conductivity is selected to form a closed environment at the same time, so that the interior of the constant-temperature pressure sensing box forms a static constant-temperature environment in a heat conduction mode.
Further: the fan is installed to the top of the temperature adjusting box through a fan support, and the heating sheets are arranged on the two sides in the box of the temperature adjusting box.
Further, the method comprises the following steps: the first temperature diode group is arranged in a cavity of the base, the second temperature diode group is arranged on the stand column on the side face of the base, and the third temperature diode group is arranged on the other side of the installation support plate on which the constant temperature pressure sensing box is installed.
Further, the method comprises the following steps: the temperature adjusting box is arranged inside the heat preservation shell, and the central control panel is arranged on the top panel of the heat preservation shell.
A method of providing a high accuracy pressure standard comprising the steps of:
s1, controlling a heating sheet to work through a central control board, and controlling a constant-temperature pressure sensing box to reach a set temperature;
and S2, acquiring the pressure value of the standard pressure sensor through the central control board to obtain a final pressure standard value.
Further, the method comprises the following steps: the S1 specifically comprises the following steps:
according to the voltage of the first temperature diode group, the second temperature diode group and the third temperature diode group which are monitored and compared by the central control board, the working of the heating sheet is controlled to enable the temperature in the temperature adjusting box to reach the set temperature value of the adjusting box, and then the temperature in the constant-temperature pressure sensing box reaches the set temperature value of the pressure sensing box.
Further: the S2 specifically comprises the following steps:
and exciting and collecting pressure values of 3 standard pressure sensors through a central control board, and selecting a middle value of the pressure values of the 3 standard pressure sensors as a final pressure standard value when the difference value of the pressure values of any two standard pressure sensors is less than 10 ppm.
The invention has the beneficial effects that: the present invention uses 3 pressure sensors of 0.002% FS accuracy as a reference, and may use a pressure sensor of less than or equal to 0.002% FS as a standard pressure, compares the output performance of the pressure sensor to be tested with it, and uses a comparison method to perform interpretation of the output accuracy, thereby improving the coverage of the test.
Drawings
FIG. 1 is a schematic diagram of an apparatus for providing a high precision pressure standard according to the present invention.
FIG. 2 is a schematic sectional view of the thermostatic pressure sensing cassette according to the first embodiment of the present invention.
FIG. 3 is a schematic cross-sectional view of the structure of the thermostatic pressure-sensing cassette of the present invention.
Fig. 4 is a schematic sectional view of the temperature regulating box according to the first embodiment of the present invention.
FIG. 5 is a schematic sectional view of the temperature regulating box according to the second embodiment of the present invention.
Fig. 6 is a schematic cross-sectional view of an apparatus for providing a high precision pressure standard according to the present invention.
Fig. 7 is a schematic cross-sectional view of a device for providing a high-precision pressure standard according to the present invention.
FIG. 8 is a flow chart of a method of providing a high accuracy pressure standard.
Wherein: 1. a standard pressure sensor; 2. an air pressure sensing element; 3. a base; 4. a first temperature diode group; 5. a column; 6. a second temperature diode group; 7. a sensor seal plate; 8. a constant temperature pressure sensing box; 9. an aluminum alloy plate; 10. mounting a support plate; 11. a third temperature diode group; 12. a central control panel; 13. a temperature regulating box; 14. a fan; 15. a fan bracket; 16. a heating plate; 17. a heat preservation shell.
Detailed Description
The following description of the embodiments of the present invention is provided to facilitate the understanding of the present invention by those skilled in the art, but it should be understood that the present invention is not limited to the scope of the embodiments, and it will be apparent to those skilled in the art that various changes may be made without departing from the spirit and scope of the invention as defined and defined in the appended claims, and all matters produced by the invention using the inventive concept are protected.
As shown in fig. 1, in one embodiment of the present invention, an apparatus for providing a high precision pressure standard includes a central control board 12 and a temperature adjusting box 13;
wherein, a constant temperature pressure sensing box 8, a third temperature diode group 11, a fan 14 and a heating plate 16 are arranged in the temperature adjusting box 13;
as shown in fig. 2 and 3, the constant temperature pressure sensing cell 8 is provided therein with three pressure sensing units, a first temperature diode group 4 and a second temperature diode group 6; each pressure sensing unit is internally provided with a standard pressure sensor 1 and an air pressure sensing element 2;
the central control board 12 is respectively connected with the pressure sensing unit, the first temperature diode group 4, the second temperature diode group 6, the third temperature diode group 11, the fan 14 and the heating plate 16 in a communication way;
the constant temperature pressure sensing box 8 is used for controlling the temperature value in the constant temperature pressure sensing box 8 to be the same as the temperature value in a sensed or tooling cavity, the temperature adjusting box 13 is used for controlling the temperature of the constant temperature pressure sensing box 8, the central control panel 12 is used for generating excitation and collecting the measured value of the standard pressure sensor 1 to obtain a pressure standard value.
Still be provided with base 3 in the constant temperature pressure sensing box 8, the shell material of constant temperature pressure sensing box 8 is aluminium alloy plate 9, base 3 is fixed to be set up on aluminium alloy plate 9.
The three pressure sensing units are further provided with a sensor sealing plate 7, the standard pressure sensor 1 is fixedly arranged on the sensor sealing plate 7 through the air pressure sensing element 2, the sensor sealing plate 7 is fixedly arranged on the base 3, and the accuracy of the standard pressure sensor 1 is 0.002 percent FS.
The fan 14 is mounted to the top of the temperature adjusting box 13 through a fan bracket 15, and the heating sheets 16 are disposed on both sides of the inside of the temperature adjusting box 13.
In this embodiment, 3 high-precision pressure sensors with high linearity and small hysteresis are selected as the standard pressure sensor 1, and a constant-temperature stable environment is generated by the cooperation of the constant-temperature pressure sensing box 8, the central control board 12 and the temperature adjusting box 13 through the pressure sensed by the air pressure sensing element 2 and the same pressure as that sensed by the sensor or a tool cavity.
The air pressure sensing element 2 is a hinge for connecting the standard pressure sensor 1 and a sensed object or a tool cavity. Make external world and standard pressure sensor 1 carry out the UNICOM through atmospheric pressure sensing element 2, let standard pressure sensor 1 experience with the pressure that is surveyed and receive sensor or frock cavity, guaranteed the pressure sensitivity uniformity, avoided the calibration inconsistent, lead to the problem of standard incoherence.
The sensor sealing plate 7 fixes the standard pressure sensor 1 and is arranged in the base 3, so that the sealing performance of the air pressure sensing element 2 is ensured to be reliable.
The fan 14 is arranged to convect air inside the temperature adjusting box 13, so as to achieve the effect of dynamically keeping the temperature in the box constant and keeping the temperature uniform.
As shown in fig. 4 and 5, the temperature adjusting box 13 is provided with a fan 14 and a heating plate 16, and the heating plate 16 is connected with the central control board 12 in a communication way;
the fan 14 is installed on the top of the temperature adjusting box 13 through a fan bracket 15, the heating sheets 16 are arranged on two sides in the box of the temperature adjusting box 13, and the heating sheets 16 are used for keeping the temperature in the temperature adjusting box 13 within a certain range.
In this embodiment, the temperature adjusting box 13 controls the temperature environment of the cavity by using the temperature control principle, and the temperature of the constant temperature pressure sensing box 8 reaches a constant state by using the heat conduction and heat dissipation principle.
The constant temperature pressure-sensitive cell 8 is closed by the air pressure-sensitive element 2 with an aluminum alloy plate 9 of 10mm to form a closed system environment inside. The constant temperature pressure sensing box 8 provides a stable temperature environment for the high-precision pressure sensor, and the aluminum alloy is selected because of strong heat conductivity, relatively large heat transfer capacity and high economic performance. Aluminum is a good steady state heat conducting material. The material with good heat conductivity is selected to form a closed environment at the same time, so that the interior of the constant-temperature pressure sensing box 8 forms a static constant-temperature environment in a heat conduction mode.
The first temperature diode group 4 is arranged in a cavity of the base 3, the second temperature diode group 6 is arranged on an upright post 5 on the side surface of the base 3, and the third temperature diode group 11 is arranged on the other side of an installation support plate 10 for installing the constant temperature pressure sensing box 8.
As shown in fig. 6 and 7, the temperature adjustment box 13 is disposed inside the heat preservation housing 17, and the central control board 12 is disposed on the top panel of the heat preservation housing 17.
As shown in fig. 8, a method of providing a high accuracy pressure standard includes the steps of:
s1, controlling a heating sheet 16 to work through a central control board 12, and controlling a constant-temperature pressure sensing box 8 to reach a set temperature;
and S2, acquiring the pressure value of the standard pressure sensor 1 through the central control board 12 to obtain a final pressure standard value.
The S1 specifically comprises the following steps:
according to the voltage of the first temperature diode group 4, the second temperature diode group 6 and the third temperature diode group 11 which are monitored and compared by the central control board 12, the operation of the heating sheet 16 is controlled to enable the temperature in the temperature adjusting box 13 to reach the set temperature value of the adjusting box, and further enable the temperature in the constant temperature pressure sensing box 8 to reach the set temperature value of the pressure sensing box.
The S2 specifically comprises the following steps:
the central control board 12 is used for exciting and collecting the pressure values of the 3 standard pressure sensors 1, and when the difference value of the pressure values of any two standard pressure sensors 1 is less than 10ppm, the middle value of the pressure values of the 3 standard pressure sensors 1 is selected as a final pressure standard value.
The invention has the beneficial effects that: the present invention uses 3 pressure sensors of 0.002% FS accuracy as a reference, and may use a pressure sensor of less than or equal to 0.002% FS as a standard pressure, compares the output performance of the pressure sensor to be tested with it, and uses a comparison method to perform interpretation of the output accuracy, thereby improving the coverage of the test.
In the description of the present invention, it is to be understood that the terms "center", "thickness", "upper", "lower", "horizontal", "top", "bottom", "inner", "outer", "radial", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or an implicit indication of the number of technical features. Thus, features defined as "first", "second", "third" may explicitly or implicitly include one or more of the features.

Claims (7)

1. An apparatus for providing a high precision pressure standard, characterized by comprising a central control panel (12) and a temperature regulation box (13);
wherein the temperature adjusting box (13) is internally provided with a constant temperature pressure sensing box (8), a third temperature diode group (11), a fan (14) and a heating sheet (16);
the constant-temperature pressure sensing box (8) is internally provided with three pressure sensing units, a first temperature diode group (4) and a second temperature diode group (6); each pressure sensing unit is internally provided with a standard pressure sensor (1) and an air pressure sensing element (2);
the central control board (12) is respectively in communication connection with the pressure sensing unit, the first temperature diode group (4), the second temperature diode group (6), the third temperature diode group (11), the fan (14) and the heating sheet (16);
the constant temperature pressure sensing box (8) is internally provided withClosed system environmentThe temperature control device comprises a constant temperature pressure sensing box (8), a temperature adjusting box (13), a central control board (12) and a standard pressure sensor (1), wherein the constant temperature pressure sensing box (8) is used for controlling the temperature value in the constant temperature pressure sensing box (8) to be the same as the temperature value in a sensed or tooling cavity, the temperature adjusting box (13) is used for controlling the temperature of the constant temperature pressure sensing box (8), and the central control board is used for generating excitation and acquiring the measured value of the standard pressure sensor (1) to obtain a standard pressure value;
still be provided with base (3) in constant temperature pressure sensing box (8), the shell material of constant temperature pressure sensing box (8) is aluminium alloy plate (9), base (3) are fixed to be set up on aluminium alloy plate (9), aluminium alloy plate (9) be used for with atmospheric pressure receives sensing element (2)For sealing and for thermally conducting saidConstant temperature pressure sensing box (8)A static constant temperature environment is formed inside;
the temperature-sensing pressure-sensing device is characterized in that the first temperature diode group (4) is arranged in a cavity of the base (3), the second temperature diode group (6) is arranged on the stand column (5) on the side face of the base (3), and the third temperature diode group (11) is arranged on the other side of the installation support plate (10) of the installation constant-temperature pressure-sensing box (8).
2. The apparatus for providing a high accuracy pressure standard according to claim 1, wherein three of the pressure sensing units are further provided with a sensor sealing plate (7), the standard pressure sensor (1) is fixedly provided on the sensor sealing plate (7) through the air pressure sensing element (2), the sensor sealing plate (7) is fixedly provided on the base (3), and the accuracy of the standard pressure sensor (1) is 0.002% FS.
3. A device for providing high accuracy pressure calibration as claimed in claim 1, characterized in that the fan (14) is mounted to the top of the temperature regulation box (13) by means of a fan bracket (15), and the heating plates (16) are arranged on both sides of the temperature regulation box (13) inside the box.
4. Device for providing high accuracy pressure standards according to claim 1, characterized in that the temperature regulation box (13) is arranged inside the insulated casing (17) and the central control board (12) is arranged on the top panel of the insulated casing (17).
5. A method for providing a high accuracy pressure standard based on the apparatus for providing a high accuracy pressure standard according to any one of claims 1 to 4, comprising the steps of:
s1, controlling a heating sheet (16) to work through a central control board (12), and controlling a constant-temperature pressure sensing box (8) to reach a set temperature;
s2, collecting the pressure value of the standard pressure sensor (1) through the central control board (12) to obtain a final pressure standard value.
6. The method for providing a high accuracy pressure standard according to claim 5, wherein S1 is specifically:
according to the voltage of the first temperature diode group (4), the second temperature diode group (6) and the third temperature diode group (11) monitored and compared by the central control board (12), the operation of the heating sheet (16) is controlled to enable the temperature in the temperature adjusting box (13) to reach the set temperature value of the adjusting box, and further enable the temperature in the constant-temperature pressure sensing box (8) to reach the set temperature value of the pressure sensing box.
7. The method for providing a high accuracy pressure standard according to claim 5, wherein S2 is specifically:
the central control board (12) is used for exciting and collecting pressure values of 3 standard pressure sensors (1), and when the difference value of the pressure values of any two standard pressure sensors (1) is smaller than 10ppm, the middle value of the pressure values of the 3 standard pressure sensors (1) is selected as a final pressure standard value.
CN202210986206.0A 2022-08-17 2022-08-17 Device and method for providing high-precision pressure standard Active CN115060414B (en)

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