CN106017742A - Calibration method for temperature sensor used in vacuum environment - Google Patents
Calibration method for temperature sensor used in vacuum environment Download PDFInfo
- Publication number
- CN106017742A CN106017742A CN201610674296.4A CN201610674296A CN106017742A CN 106017742 A CN106017742 A CN 106017742A CN 201610674296 A CN201610674296 A CN 201610674296A CN 106017742 A CN106017742 A CN 106017742A
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- Prior art keywords
- vacuum
- temperature sensor
- chamber
- vacuum chamber
- temperature
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/002—Calibrated temperature sources, temperature standards therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Provided is a calibration method for a temperature sensor used in a vacuum environment. The temperature sensor used in the vacuum environment can be calibrated. The calibration method is characterized in that calibration on a calibrated temperature sensor is completed by comparing an indicating value of the calibrated temperature sensor with an indicating value of a standard platinum resistance thermometer on the basis of condition setting of a temperature sensor metering system in the vacuum environment, and the temperature sensor metering system in the vacuum environment comprises a vacuum cavity, a gas mixing chamber and a transition vacuum chamber.
Description
Technical field
The present invention relates to technical field of thermal measurement, mainly for the calibration of the temperature sensor used under vacuum environment, especially
It it is temperature sensor calibration steps under a kind of vacuum environment.
Background technology
Owing to using gas temperature under the temperature sensor measurement vacuum environment demarcated and calibrate under normal pressure to there is many uncertainties
Factor, so inventors believe that, the necessary temperature sensor to using under vacuum environment is calibrated.
Summary of the invention
The present invention is directed to defect or deficiency present in prior art, it is provided that temperature sensor calibration steps under a kind of vacuum environment,
The temperature sensor used under vacuum environment can be calibrated.
Technical scheme is as follows:
Temperature sensor calibration steps under a kind of vacuum environment, it is characterised in that measure based on temperature sensor under vacuum environment
The condition setting of system, by by be calibrated the indicating value of temperature sensor and the indicating value of Grade I standard Platinum resistance thermometer carry out right
Ratio, to complete to be calibrated the calibration of temperature sensor, under described vacuum environment temperature sensor metering system include vacuum chamber,
Mixing chamber and transition vacuum chamber.
Described calibration steps comprises the following steps:
Step one, opens upper bottom surface and the bottom surface of vacuum chamber, will be calibrated temperature sensor and be arranged in vacuum chamber, uses
Contact vacuum chamber inwall is installed or is not contacted vacuum chamber inwall and installs；
Step 2, all realizes the sealing of vacuum chamber by vacuum chamber upper bottom surface and bottom surface by screw fit sealing cushion rubber；
Step 3, puts into vacuum chamber in temperature chamber, sets the temperature of temperature chamber；
Step 4, is arranged on Grade I standard Platinum resistance thermometer in vacuum chamber outer wall copper pipe；
Step 5: the signal lead being calibrated temperature sensor and First class standard temperature sensor is connected on electric logging equipment；
Step 6, carries out evacuation to vacuum chamber, mixing chamber and transition vacuum chamber；
Step 7, treats that the vacuum of vacuum chamber reaches capacity vacuum, and temperature chamber temperature reaches the target temperature value set, vacuum
Chamber, temperature chamber, Grade I standard Platinum resistance thermometer and be calibrated thermometer when reaching hygral equilibrium, be filled with target by mixing chamber
Gas；
Step 8, by the reset valve between regulation mixing chamber and vacuum chamber, the vacuum of regulation vacuum chamber, when vacuum chamber
When vacuum reaches target vacuum, record Grade I standard Platinum resistance thermometer calculates indicating value T1Be calibrated showing of temperature sensor
Value T2, calculate and be calibrated the temperature sensor error of indication under this vacuum, this temperature spot；
Step 9, changes the vacuum of vacuum chamber, the gas component of mixing chamber and the temperature spot of setting, repeats step 6 to step
Rapid eight, carry out the calibration being calibrated temperature sensor under different condition.
Gas in described mixing chamber uses nitrogen, oxygen, argon and/or carbon dioxide.
The final vacuum of described vacuum chamber is 1 × 10‐5Pa。
The temperature conditions scope of described temperature chamber is-80～300 DEG C.
Accompanying drawing explanation
Fig. 1 is temperature sensor metering system structural representation under the vacuum environment implementing the present invention.
Reference lists as follows: 1-vacuum chamber；2-vacuum cavity outer wall copper pipe；3-transition corrugated tube；4-temperature chamber；5,6,19,20-
Capacitor thin film vacuometer；7-temperature sensor vacuum conversion head；8-buffer vacuum chamber；9-vent valve；10-isolating valve,；11-electricity
From rule；12-Pirani gauge；The 13-i.e. reset valve of face seal valve；14-transition vacuum chamber；15-molecular pump；16,17,18-electromagnetism cuts off
Valve；21-mixing chamber；22,23,24-cut off charge valve；25,26,27-(high-purity) gas tank；28-push-pull valve；29-
Mechanical pump.
Detailed description of the invention
Below in conjunction with the accompanying drawings (Fig. 1) the present invention will be described.
Fig. 1 is temperature sensor metering system structural representation under the vacuum environment implementing the present invention.As it is shown in figure 1, vacuum
Temperature sensor metering system under environment, including vacuum chamber 1, described vacuum chamber 1 connects buffer vacuum chamber 8 and mixing chamber respectively
21, described buffer vacuum chamber 8 connects molecular pump 15, described buffer vacuum chamber 8, described mixing chamber by transition vacuum chamber 14
21 and described molecular pump 15 each via roughing pipe connect mechanical pump 29.Described mixing chamber 21 connects three gas tank respectively
25,26,27, described mixing chamber 21 is provided with capacitor thin film vacuometer 19,20.Described buffer vacuum chamber 8 is provided with electricity
Hold diagram vacuum gauge 5,6 and temperature sensor vacuum conversion head 7.Described vacuum chamber 1 is by face seal valve i.e. reset valve 13
Connect described mixing chamber 21.Described buffer vacuum chamber 8 connects described transition vacuum chamber 14, described partition by isolating valve, 10
It is provided with vent valve 9, described transition vacuum chamber 14 and described molecular pump in valve 10 and the intermediate duct of described buffer vacuum chamber 8
Push-pull valve 28 it is provided with between 15.Battery isolating valve, 16,17,18 it is provided with on described roughing pipe.Described transition vacuum chamber
Ionization gauge 11 and Pirani gauge 12 it is provided with on 14.It is corresponding that described mixing chamber 21 cuts off charge valve 22,23,24 by three
Connect described three gas tank 25,26,27.Described vacuum chamber 1 is immersed in temperature chamber 4, the outer wall of described vacuum chamber 1
It is provided with the vacuum cavity outer wall copper pipe 2 accommodating Grade I standard Platinum resistance thermometer, the bottom of described vacuum cavity outer wall copper pipe 2
Blocked.The upper end of described vacuum cavity outer wall copper pipe 2 is installing port.
Temperature sensor calibration steps under a kind of vacuum environment, sets based on the condition of temperature sensor metering system under vacuum environment
Put, by the indicating value of the indicating value and Grade I standard Platinum resistance thermometer that are calibrated temperature sensor is contrasted, with complete by
The calibration of calibration temperature sensor, under described vacuum environment, temperature sensor metering system includes vacuum chamber, mixing chamber and transition
Vacuum chamber, described calibration steps comprises the following steps: step one, opens upper bottom surface and the bottom surface of vacuum chamber, will be calibrated
Temperature sensor is arranged in vacuum chamber, uses contact vacuum chamber inwall to install or do not contact vacuum chamber inwall and installs；Step 2,
Vacuum chamber upper bottom surface and bottom surface are all realized by screw fit sealing cushion rubber the sealing of vacuum chamber；Step 3, by vacuum chamber
Put in temperature chamber, set the temperature of temperature chamber；Step 4, is arranged on vacuum chamber outer wall by Grade I standard Platinum resistance thermometer
In copper pipe；Step 5: the signal lead being calibrated temperature sensor and First class standard temperature sensor is connected to electric logging equipment
On；Step 6, carries out evacuation to vacuum chamber, mixing chamber and transition vacuum chamber；Step 7, treats that the vacuum of vacuum chamber reaches
To end vacuum, temperature chamber temperature reaches the target temperature value set, vacuum chamber, temperature chamber, First class standard platinum resistance temperature
Meter and be calibrated thermometer when reaching hygral equilibrium, is filled with object gas by mixing chamber；Step 8, by regulation mixing chamber and
Reset valve between vacuum chamber, the vacuum of regulation vacuum chamber, when the vacuum of vacuum chamber reaches target vacuum, record
Grade I standard Platinum resistance thermometer calculates indicating value T1With indicating value T being calibrated temperature sensor2, calculating is calibrated temperature sensor and exists
The error of indication under this vacuum, this temperature spot；Step 9, change the vacuum of vacuum chamber, the gas component of mixing chamber and
The temperature spot set, repetition step 6, to step 8, carries out the calibration being calibrated temperature sensor under different condition.Described
Gas in mixing chamber uses nitrogen, oxygen, argon and/or carbon dioxide.The final vacuum of described vacuum chamber is 1 ×
10-5Pa.The temperature conditions scope of described temperature chamber is-80～300 DEG C.
It is hereby stated that, described above contribute to skilled artisan understands that the invention, but and unrestricted the invention
Protection domain.Any without departing from the invention flesh and blood to equivalent described above, modify improve and/or
The enforcement deleting numerous conforming to the principle of simplicity and carry out, each falls within the protection domain of the invention.
Claims (5)
1. temperature sensor calibration steps under a vacuum environment, it is characterised in that measure based on temperature sensor under vacuum environment
The condition setting of system, by by be calibrated the indicating value of temperature sensor and the indicating value of Grade I standard Platinum resistance thermometer carry out right
Ratio, to complete to be calibrated the calibration of temperature sensor, under described vacuum environment temperature sensor metering system include vacuum chamber,
Mixing chamber and transition vacuum chamber.
Temperature sensor calibration steps under vacuum environment the most according to claim 1, it is characterised in that described calibration steps
Comprise the following steps:
Step one, opens upper bottom surface and the bottom surface of vacuum chamber, will be calibrated temperature sensor and be arranged in vacuum chamber, uses
Contact vacuum chamber inwall is installed or is not contacted vacuum chamber inwall and installs；
Step 2, all realizes the sealing of vacuum chamber by vacuum chamber upper bottom surface and bottom surface by screw fit sealing cushion rubber；
Step 3, puts into vacuum chamber in temperature chamber, sets the temperature of temperature chamber；
Step 4, is arranged on Grade I standard Platinum resistance thermometer in vacuum chamber outer wall copper pipe；
Step 5: the signal lead being calibrated temperature sensor and First class standard temperature sensor is connected on electric logging equipment；
Step 6, carries out evacuation to vacuum chamber, mixing chamber and transition vacuum chamber；
Step 7, treats that the vacuum of vacuum chamber reaches capacity vacuum, and temperature chamber temperature reaches the target temperature value set, vacuum
Chamber, temperature chamber, Grade I standard Platinum resistance thermometer and be calibrated thermometer when reaching hygral equilibrium, be filled with target by mixing chamber
Gas；
Step 8, by the reset valve between regulation mixing chamber and vacuum chamber, the vacuum of regulation vacuum chamber, when vacuum chamber
When vacuum reaches target vacuum, record Grade I standard Platinum resistance thermometer calculates indicating value T1Be calibrated showing of temperature sensor
Value T2, calculate and be calibrated the temperature sensor error of indication under this vacuum, this temperature spot；
Step 9, changes the vacuum of vacuum chamber, the gas component of mixing chamber and the temperature spot of setting, repeats step 6 to step
Rapid eight, carry out the calibration being calibrated temperature sensor under different condition.
Temperature sensor calibration steps under vacuum environment the most according to claim 1, it is characterised in that in described mixing chamber
Gas use nitrogen, oxygen, argon and/or carbon dioxide.
Temperature sensor calibration steps under vacuum environment the most according to claim 1, it is characterised in that described vacuum chamber
Final vacuum is 1 × 10‐5Pa。
Temperature sensor calibration steps under vacuum environment the most according to claim 1, it is characterised in that described temperature chamber
Temperature conditions scope is-80～300 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610674296.4A CN106017742A (en) | 2016-08-16 | 2016-08-16 | Calibration method for temperature sensor used in vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610674296.4A CN106017742A (en) | 2016-08-16 | 2016-08-16 | Calibration method for temperature sensor used in vacuum environment |
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| Publication Number | Publication Date |
|---|---|
| CN106017742A true CN106017742A (en) | 2016-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610674296.4A Pending CN106017742A (en) | 2016-08-16 | 2016-08-16 | Calibration method for temperature sensor used in vacuum environment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192478A (en) * | 2017-07-05 | 2017-09-22 | 明光旭升科技有限公司 | Temperature sensor calibration method under a kind of vacuum environment |
| CN111174943A (en) * | 2020-02-27 | 2020-05-19 | 明光旭升科技有限公司 | Temperature sensor calibration method in vacuum environment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993012411A1 (en) * | 1991-12-07 | 1993-06-24 | Leybold Aktiengesellschaft | Leak indicator for vacuum systems and a method of searching for leaks in vacuum systems |
| CN102944358A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | High and low temperature vacuum calibrating device and method |
| CN103090995A (en) * | 2013-02-06 | 2013-05-08 | 北京东方计量测试研究所 | Temperature comparison testing system under vacuum environment |
| CN103808457A (en) * | 2013-12-24 | 2014-05-21 | 兰州空间技术物理研究所 | Low-temperature vacuum calibration device and method |
-
2016
- 2016-08-16 CN CN201610674296.4A patent/CN106017742A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993012411A1 (en) * | 1991-12-07 | 1993-06-24 | Leybold Aktiengesellschaft | Leak indicator for vacuum systems and a method of searching for leaks in vacuum systems |
| CN102944358A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | High and low temperature vacuum calibrating device and method |
| CN103090995A (en) * | 2013-02-06 | 2013-05-08 | 北京东方计量测试研究所 | Temperature comparison testing system under vacuum environment |
| CN103808457A (en) * | 2013-12-24 | 2014-05-21 | 兰州空间技术物理研究所 | Low-temperature vacuum calibration device and method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192478A (en) * | 2017-07-05 | 2017-09-22 | 明光旭升科技有限公司 | Temperature sensor calibration method under a kind of vacuum environment |
| CN111174943A (en) * | 2020-02-27 | 2020-05-19 | 明光旭升科技有限公司 | Temperature sensor calibration method in vacuum environment |
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| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Xiong Wei Inventor after: Jia Junwei Inventor after: Zhang Mingzhi Inventor after: Li Enguang Inventor before: Xiong Wei Inventor before: Jia Junwei Inventor before: Wang Shuqiang |
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Application publication date: 20161012 |
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