CN107192478A - Temperature sensor calibration method under a kind of vacuum environment - Google Patents
Temperature sensor calibration method under a kind of vacuum environment Download PDFInfo
- Publication number
- CN107192478A CN107192478A CN201710540967.2A CN201710540967A CN107192478A CN 107192478 A CN107192478 A CN 107192478A CN 201710540967 A CN201710540967 A CN 201710540967A CN 107192478 A CN107192478 A CN 107192478A
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- Prior art keywords
- temperature sensor
- vacuum
- calibrated
- vacuum chamber
- temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
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- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention discloses temperature sensor calibration method under a kind of vacuum environment, comprise the following steps：First temperature sensor to be measured and standard thermometer are arranged in vacuum chamber, then the air in vacuum chamber is extracted, inert gas is passed through in toward vacuum chamber to adjust the vacuum in vacuum chamber, the water in heated constant temperature tank carries out temperature adjustment simultaneously, then treat testing temperature sensor in the temperature measured according to temperature sensor to be measured and standard thermometer to be calibrated, finally repeat above-mentioned calibration operation in atmosphere temperature sensor to be measured and standard thermometer are put.The invention is heated by Water Tank with Temp.-controlled to vacuum chamber, not only heat rapid, the ratio of temperature heating simultaneously is more uniform, temperature sensor to be calibrated and calibrated in atmosphere again after first being calibrated under vacuum conditions as the thermometer of standard, it ensure that the accuracy and stability of calibration, it is easy to operate, it is applied widely, be conducive to popularizing.
Description
Technical field
The invention belongs to temperature sensor technology field, more specifically, more particularly under a kind of vacuum environment temperature is passed
Sensor calibration method.
Background technology
With the development of science and technology, vacuum metallurgy and heat treatment technics are widely used to production and scientific research field etc. perhaps
It is multidisciplinary.Some high-tech equipments, it is necessary to using vacuum technique as means, could realize its high-technology index.It is many traditional
Industrial circle, only according to vacuum technique, could cause properties of product to increase substantially.In order to realize vacuum metallurgy and heat treatment
The accurate production of industry and high-quality and efficient overall strategy target, the accurate measurement and control of temperature are highly important.But
There are many inert gases to influence the calibration accuracy of temperature sensor under vacuum conditions, while the different of vacuum also can be right
The calibration of temperature sensor produces influence, and does not have under vacuum conditions to the mode that temperature sensor is calibrated in the prior art
Consider these factors, the poor accuracy of calibration is unfavorable for widely popularizing.
The content of the invention
The invention aims to solve shortcoming present in prior art, and temperature under a kind of vacuum environment proposed
Sensor calibrating method.
To achieve the above object, the present invention provides following technical scheme：Temperature sensor calibration side under a kind of vacuum environment
Method, comprises the following steps：
S1, elder generation prevent from temperature sensor to be calibrated, in the inside of vacuum chamber, then again to plug in the thermometer as standard
Enter in vacuum chamber, and temperature sensor to be calibrated and the terminals of thermometer connect calibration system by light pricker line
Signal input part；
S2 and then vacuum chamber is placed in the Water Tank with Temp.-controlled that can be heated, and at the top of vacuum chamber by pipeline with it is external
Vavuum pump connection；
S3 and then control vacuum pump work as needed extract the air in vacuum chamber, and are extracted into the vacuum of vacuum chamber
Spend the vacuum that reaches capacity；
S4 and then toward the vacuum for inert gas is passed through in vacuum chamber adjusting vacuum chamber, and heated constant temperature water trough inner water
Temperature, records temperature sensor to be calibrated and thermometric temperature difference, and carry out school to temperature sensor to be calibrated
It is accurate；
Water temperature in S5 and then regulating thermostatic tank, or the vacuum of regulation vacuum chamber continue aforesaid operations, knot to be calibrated
The temperature sensor after calibration and thermometer are taken out the water surface in directly contact Water Tank with Temp.-controlled after beam；
S6, the water temperature in control Water Tank with Temp.-controlled contrast temperature sensor to be calibrated and thermometric temperature difference, simultaneously
Temperature sensor to be calibrated is calibrated.
It is preferred that, it is described to be calculated as platinum resistance thermometer as the temperature of standard.
It is preferred that, the inert gas includes helium, neon, argon, krypton, xenon or nitrogen.
It is preferred that, the water temperature change that the side of the vacuum chamber is connected with vacuum inspective meter, and Water Tank with Temp.-controlled exists
20℃-800℃。
The technique effect and advantage of the present invention：Temperature sensor calibration method under a kind of vacuum environment that the present invention is provided,
Compared with traditional calibration method, the present invention is heated by Water Tank with Temp.-controlled to vacuum chamber, is not only heated rapidly, while warm
The ratio for spending heating is more uniform, temperature sensor to be calibrated and the thermometer as standard first calibrate under vacuum conditions after again
Calibrated in atmosphere, it is ensured that the accuracy and stability of calibration, the invention are easy to operate, calibration accuracy is high, safety
It is stable, it is applied widely, be conducive to popularizing.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with specific embodiment, to this
Invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, not
For limiting the present invention.Based on the embodiment in the present invention, those of ordinary skill in the art are not before creative work is made
The every other embodiment obtained is put, the scope of protection of the invention is belonged to.
Temperature sensor calibration method, comprises the following steps under a kind of vacuum environment：
S1, elder generation prevent from temperature sensor to be calibrated, in the inside of vacuum chamber, then again to plug in the thermometer as standard
Enter in vacuum chamber, and temperature sensor to be calibrated and the terminals of thermometer connect calibration system by light pricker line
Signal input part；
S2 and then vacuum chamber is placed in the Water Tank with Temp.-controlled that can be heated, and at the top of vacuum chamber by pipeline with it is external
Vavuum pump connection；
S3 and then control vacuum pump work as needed extract the air in vacuum chamber, and are extracted into the vacuum of vacuum chamber
Spend the vacuum that reaches capacity；
S4 and then toward the vacuum for inert gas is passed through in vacuum chamber adjusting vacuum chamber, and heated constant temperature water trough inner water
Temperature, records temperature sensor to be calibrated and thermometric temperature difference, and carry out school to temperature sensor to be calibrated
It is accurate；
Water temperature in S5 and then regulating thermostatic tank, or the vacuum of regulation vacuum chamber continue aforesaid operations, knot to be calibrated
The temperature sensor after calibration and thermometer are taken out the water surface in directly contact Water Tank with Temp.-controlled after beam；
S6, the water temperature in control Water Tank with Temp.-controlled contrast temperature sensor to be calibrated and thermometric temperature difference, simultaneously
Temperature sensor to be calibrated is calibrated.
Further, it is described to be calculated as platinum resistance thermometer as the temperature of standard.
Further, the inert gas includes helium, neon, argon, krypton, xenon or nitrogen.
Further, the side of the vacuum chamber is connected with the water temperature change in vacuum inspective meter, and Water Tank with Temp.-controlled
At 20 DEG C -800 DEG C.
In summary：Temperature sensor calibration method under a kind of vacuum environment that the present invention is provided, with traditional calibration side
Method is compared, and the present invention is heated by Water Tank with Temp.-controlled to vacuum chamber, is not only heated rapidly, while the comparison of temperature heating is equal
Even, temperature sensor to be calibrated and the thermometer as standard carry out school in atmosphere again after first calibrating under vacuum conditions
Accurate, it is ensured that the accuracy and stability of calibration, the invention are easy to operate, calibration accuracy is high, safety and stability, the scope of application
Extensively, be conducive to popularizing.
Finally it should be noted that：The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention,
Although the present invention is described in detail with reference to the foregoing embodiments, for those skilled in the art, it still may be used
To be modified to the technical scheme described in foregoing embodiments, or equivalent substitution is carried out to which part technical characteristic,
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., should be included in the present invention's
Within protection domain.
Claims (4)
1. temperature sensor calibration method under a kind of vacuum environment, it is characterised in that：Comprise the following steps：
S1, elder generation prevent from temperature sensor to be calibrated, in the inside of vacuum chamber, then again to plug in the thermometer as standard
Enter in vacuum chamber, and temperature sensor to be calibrated and the terminals of thermometer connect calibration system by light pricker line
Signal input part；
S2 and then vacuum chamber is placed in the Water Tank with Temp.-controlled that can be heated, and at the top of vacuum chamber by pipeline with it is external
Vavuum pump connection；
S3 and then control vacuum pump work as needed extract the air in vacuum chamber, and are extracted into the vacuum of vacuum chamber
Spend the vacuum that reaches capacity；
S4 and then toward the vacuum for inert gas is passed through in vacuum chamber adjusting vacuum chamber, and heated constant temperature water trough inner water
Temperature, records temperature sensor to be calibrated and thermometric temperature difference, and carry out school to temperature sensor to be calibrated
It is accurate；
Water temperature in S5 and then regulating thermostatic tank, or the vacuum of regulation vacuum chamber continue aforesaid operations, knot to be calibrated
The temperature sensor after calibration and thermometer are taken out the water surface in directly contact Water Tank with Temp.-controlled after beam；
S6, the water temperature in control Water Tank with Temp.-controlled contrast temperature sensor to be calibrated and thermometric temperature difference, simultaneously
Temperature sensor to be calibrated is calibrated.
2. temperature sensor calibration method under a kind of vacuum environment according to claim 1, it is characterised in that：The conduct
The temperature of standard is calculated as platinum resistance thermometer.
3. temperature sensor calibration method under a kind of vacuum environment according to claim 1, it is characterised in that：The inertia
Gas includes helium, neon, argon, krypton, xenon or nitrogen.
4. temperature sensor calibration method under a kind of vacuum environment according to claim 1, it is characterised in that：The vacuum
The water temperature that the side of chamber is connected with vacuum inspective meter, and Water Tank with Temp.-controlled changes at 20 DEG C -800 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710540967.2A CN107192478A (en) | 2017-07-05 | 2017-07-05 | Temperature sensor calibration method under a kind of vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710540967.2A CN107192478A (en) | 2017-07-05 | 2017-07-05 | Temperature sensor calibration method under a kind of vacuum environment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107192478A true CN107192478A (en) | 2017-09-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201710540967.2A Pending CN107192478A (en) | 2017-07-05 | 2017-07-05 | Temperature sensor calibration method under a kind of vacuum environment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884094A (en) * | 2017-10-31 | 2018-04-06 | 北京航天计量测试技术研究所 | A kind of special-shaped high temperature sensor and calibration method |
| CN107907247A (en) * | 2017-11-27 | 2018-04-13 | 中国电子科技集团公司第四十八研究所 | A kind of big hot-fluid laser calibrating equipment |
| CN111174943A (en) * | 2020-02-27 | 2020-05-19 | 明光旭升科技有限公司 | Temperature sensor calibration method in vacuum environment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09250956A (en) * | 1996-03-15 | 1997-09-22 | Tanaka Kikinzoku Kogyo Kk | Fixed point calibrating method for nobel metal thermocouple |
| CN102539019A (en) * | 2012-01-05 | 2012-07-04 | 北京东方计量测试研究所 | Temperature measurement and calibration platform in space vacuum environment |
| CN103115699A (en) * | 2013-02-06 | 2013-05-22 | 北京东方计量测试研究所 | Temperature equalizing system for calibration of temperature sensors in vacuum |
| CN106017742A (en) * | 2016-08-16 | 2016-10-12 | 江苏东方航天校准检测有限公司 | Calibration method for temperature sensor used in vacuum environment |
-
2017
- 2017-07-05 CN CN201710540967.2A patent/CN107192478A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09250956A (en) * | 1996-03-15 | 1997-09-22 | Tanaka Kikinzoku Kogyo Kk | Fixed point calibrating method for nobel metal thermocouple |
| CN102539019A (en) * | 2012-01-05 | 2012-07-04 | 北京东方计量测试研究所 | Temperature measurement and calibration platform in space vacuum environment |
| CN103115699A (en) * | 2013-02-06 | 2013-05-22 | 北京东方计量测试研究所 | Temperature equalizing system for calibration of temperature sensors in vacuum |
| CN106017742A (en) * | 2016-08-16 | 2016-10-12 | 江苏东方航天校准检测有限公司 | Calibration method for temperature sensor used in vacuum environment |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884094A (en) * | 2017-10-31 | 2018-04-06 | 北京航天计量测试技术研究所 | A kind of special-shaped high temperature sensor and calibration method |
| CN107907247A (en) * | 2017-11-27 | 2018-04-13 | 中国电子科技集团公司第四十八研究所 | A kind of big hot-fluid laser calibrating equipment |
| CN107907247B (en) * | 2017-11-27 | 2019-10-25 | 中国电子科技集团公司第四十八研究所 | A kind of big hot-fluid laser calibrating equipment |
| CN111174943A (en) * | 2020-02-27 | 2020-05-19 | 明光旭升科技有限公司 | Temperature sensor calibration method in vacuum environment |
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Application publication date: 20170922 |
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