Summary of the invention
The object of the present invention is to provide a kind of gas detections to absorb inside cavity temperature and pressure integrated control unit, real
The accurate control of inside cavity temperature and pressure is now absorbed to gas detection.
To achieve the above object, the present invention provides following schemes:
A kind of gas detection absorption inside cavity temperature and pressure integrated control unit, described device include: gas inspection
It surveys and absorbs cavity, pressure reducing valve, electronically controlled proportional valve, vacuum pump, pressure sensor, thermocouple, heating plate and controller;The gas
It is provided with the electronically controlled proportional valve and the pressure reducing valve on the air inlet pipeline of detection absorption cavity, the gas detection absorbs cavity
Outlet pipe on be provided with the electronically controlled proportional valve and the vacuum pump, the pressure sensor and the gas detection absorb
Cavity connection, two electronically controlled proportional valves and the pressure sensor are connect with the controller respectively;The thermocouple position
The inner wall of cavity is absorbed in the gas detection, the thermocouple is connect with the controller, and the gas detection absorbs cavity
Outer wall be enclosed with the heating plate, the heating plate is connect with the controller.
Optionally, described device further includes insulating, and the insulating is located at the outside of the heating plate.
Optionally, the quantity of the thermocouple is three, and each thermocouple is located at the gas detection absorbing cavity
The both ends of internal wall and medium position.
Optionally, the quantity of the heating plate is three sections, and each heating plate is respectively with three thermocouple centre bits
Set winding.
Optionally, described device includes heating plate controller, and one end of the heating plate controller and the controller connect
It connects, the other end is connect with the heating plate.
Optionally, described device further includes winding heating tape, and the winding heating tape is located at the gas detection absorbing cavity
On the air inlet pipeline of body.
Optionally, the controller is the internal control for using fuzzy self-adaption proportional integral differential loop control algorithm
Device.
Optionally, described device further includes analog-digital converter, the input terminal of the analog-digital converter with it is described
Pressure sensor connection, the output end of the analog-digital converter are connect with the controller.
The specific embodiment provided according to the present invention, the invention discloses following technical effects: the present invention provides a kind of gas
Physical examination, which is surveyed, absorbs inside cavity temperature and pressure integrated control unit, and described device includes: that gas detection absorbs cavity, decompression
Valve, electronically controlled proportional valve, vacuum pump, pressure sensor, thermocouple, heating plate and controller;The gas detection absorbs cavity
It is provided with the electronically controlled proportional valve and the pressure reducing valve on air inlet pipeline, is set on the outlet pipe of the gas detection absorption cavity
It is equipped with the electronically controlled proportional valve and the vacuum pump, the pressure sensor absorbs cavity with the gas detection and connect, and two
The electronically controlled proportional valve and the pressure sensor are connect with the controller respectively;The thermocouple is located at the gas detection
The inner wall of cavity is absorbed, the thermocouple is connect with the controller, and the gas detection has absorbed the outer wall package of cavity
Heating plate is stated, the heating plate is connect with the controller, can be realized inside cavity temperature and pressure by above-mentioned apparatus
Accurate control.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of gas detections to absorb inside cavity temperature and pressure integrated control unit, real
The accurate control of inside cavity temperature and pressure is now absorbed to gas detection.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
Fig. 1 is that gas detection of the embodiment of the present invention absorbs the integrated control unit structural representation of inside cavity temperature and pressure
Figure.As shown in Figure 1, a kind of gas detection absorbs inside cavity temperature and pressure integrated control unit, described device includes: gas
Physical examination, which is surveyed, absorbs cavity 1, pressure reducing valve 2, electronically controlled proportional valve 3, vacuum pump 4, pressure sensor 5, thermocouple 6, heating plate 7 and control
Device 8;It is provided with the electronically controlled proportional valve 3 and the pressure reducing valve 2 on the air inlet pipeline of the gas detection absorption cavity 1, it is described
The electronically controlled proportional valve 3 and the vacuum pump 4, the pressure sensing are provided on the outlet pipe of gas detection absorption cavity 1
Device 5 and the gas detection absorb cavity 1 and connect, two electronically controlled proportional valves 3 and the pressure sensor 5 respectively with it is described
Controller 8 connects;The thermocouple 6 is located at the inner wall that the gas detection absorbs cavity 1, the thermocouple 6 and the control
Device 8 connects, and the outer wall that the gas detection absorbs cavity 1 is enclosed with the heating plate 7, the heating plate 7 and the controller 8
Connection.
In order to guarantee that the temperature of cavity wraps up insulating 9 outside cavity winding heating plate.The effect of insulating 9
It is to reduce internal and environment temperature exchange, guarantees the constant of cavity temperature, reduce temperature fluctuation.
The quantity of the thermocouple 6 is three, and each thermocouple 6 is located at the gas detection and absorbs in cavity 1
The both ends of wall and medium position.The quantity of the heating plate 7 is three sections, and each heating plate 7 is respectively with three thermocouples 6
Center winding.It is common that gas detection absorbs three 6 temperature measuring equipment of thermocouple cooperation three pieces heating plates 7 of installation inside cavity 1
Complete the control of inside cavity steady temperature.
Described device includes heating plate controller 10, and one end of the heating plate controller 10 is connect with the controller 8,
The other end is connect with the heating plate 7.
Described device further includes winding heating tape 11, and the winding heating tape 11 is located at the gas detection and absorbs cavity 1
Air inlet pipeline on.
The controller 8 is the internal controller for using fuzzy self-adaption proportional integral differential loop control algorithm.
Described device further includes analog-digital converter, the input terminal of the analog-digital converter and the pressure sensing
Device connection, the output end of the analog-digital converter are connect with the controller.
The case where interfering with each other figure is not present in Fig. 2 between gas absorption spectrum line of the embodiment of the present invention.It is inhaled using laser
During receiving spectral technique progress gas detection, as there is no the feelings interfered with each other between used gas absorption spectrum line
Condition, as shown between a, b, c in Fig. 2, the spectral line time can independently be distinguished, and be conducive to the inverting of gas concentration;Fig. 3 is this hair
There is the case where interfering with each other figure between bright embodiment gas absorption spectrum line.In some cases, especially in the presence of interference gas
In the case of, such as: when measurement alkanes gas, the adjacent absorption line of gas can exist under normal pressure to be composed as shown in Fig. 3 a and b
Line interference, if carrying out concentration calculation using interactional spectral line, it will cause very big errors.It can be obtained by experiment
Know, if spectral line a and spectral line b can gradually be separated with the reduction of pressure by the pressure reduction inside gas cavity, by
It is gradually restored to the discrete situation of Fig. 2, when gas absorption spectrum line comes back to non-interfering state, just needs to guarantee and accurate
The pressure of inside cavity at this time is controlled, the concentration of gas is calculated at this time and carries out pressure according to the pressure of current inside cavity and repair
Just, correct measurement result will be obtained.Therefore, by the present invention in that carrying out cavity with vacuum pump, electronically controlled proportional valve, pressure reducing valve
Internal Pressure Control Unit is formed feedback information and is sent by the gas pressure of pressure sensor real-time monitoring inside cavity
The PID control of controller progress pressure.
During laser absorption spectrum gas detection, used gas absorption spectrum line will receive inside cavity gas temperature
The variation of degree and change, relational graph of the Fig. 4 between second harmonic signal of embodiment of the present invention intensity and temperature change.Such as Fig. 4
Relationship between shown second harmonic signal intensity and temperature change.Fig. 5 is the variation and temperature of gas concentration of the embodiment of the present invention
The variation diagram of degree carries out retrieving concentration, the then change of gas concentration according to the intensity of spectral line after variation in the case where temperature change
Change the influence as shown in Figure 5 with the variation of temperature, it will generate very big error.Therefore, the present invention is pre- by using air inlet
Heat and heating tape directly-heated two-stage accurate temperature controlling mode carry out the temperature control of inside cavity, pass through thermocouple sensor real-time monitoring
Inside cavity temperature, formed feedback information be sent into fuzzy self-adaption proportional integral differential loop control algorithm (PID) controller into
Trip temperature control, cavity wind thermal insulation material (can be the common materials such as asbestos, alumina silicate heat-preservation cotton, rubber and plastic heat-preservation cotton) outside
Completely cut off the influence of ambient temperature variation.In conventional temperature control method, the temperature of control cavity is usually only considered, and have ignored
The temperature of air inlet gas sample causes subsequent cavity temperature control that can generate variation because of the variation of gas flow rate, causes temperature wave
The disadvantages of dynamic big, temperature control energy consumption is high.Therefore, the present invention fully considers intake air temperature situation, proposes a kind of preheating temperature control side
Formula, by air inlet tracheae wind heating tape formed heat tracing form of tubes to enter cavity gas preheat, then into
The external heating plate of gas transit chamber for entering cavity carries out direct temperature control, not only realizes that temperature-controlled precision is high, structure is simple, control in this way
Temperature purpose high-efficient, at low cost, and on the processing of the stabilizing mechanical of optical component, there is no influence.
Heretofore described accurate control be not be accurately controlled in different temperatures and different pressure values, but
Actual conditions according to measured gas pursue system in the stability of some fixed value.Such as to inside cavity temperature and
Speech: considering the influence of steam using air inlet preheating and heating plate directly-heated two-stage accurate temperature controlling mode, will be in air absorbing cavity body
Stable amplitude (rise and fall < 0.005 DEG C) of the gas temperature control in portion at 40 degree.Pressure control is carried out according to the interval of interference spectral line
Adjustment, its pressure of different gas control be different, must satisfy under regular situation low pressure stablize (generally tens~it is several hundred
Mbar), control precision high (< 0.5mbar) etc. requires.
Specific implementation process is as follows:
Pressure control procedure: the cross jamming in order to reduce absorption line between gas, the air pressure of inside cavity need to control
In low-pressure state.When using extraction-type measuring device under normal circumstances, the pressure majority for being measured gas is equal to or more than
Atmospheric pressure, then entering inside cavity since the tested gas of the effect of internal and external pressure difference can be forced " pressure ".In order to improve tested gas
To the impact stability of intracavitary air pressure under big differential pressure action, the barometric information real-time control inlet air flow according to inside cavity is needed
Amount.Firstly, carrying out pressure buffer to high pressure gas using pressure reducing valve in air inlet gas circuit, guarantee the subsequent gas pressure of pressure reducing valve
Stablize.The volume of fluid is to change with the change of state, and temperature, pressure can all influence the volume of fluid, and quality
Then different, it will not change, and mass flow controller can control the amount of flow of fluid.All mass flow controllers
Structure be all it is similar, have an entrance, one outlet, a mass flow sensor and a proportional control valve.MFC is furnished with
One closed-loop control system, the system provide the value of a setting by user or external circuit/computer, the value with sensor
It is compared, and correspondingly changes valve, flow needed for meeting.Corresponding parameter is set, realizes the accurate control to fluid, makes
It is circulated with stable state.
The pressure of inside cavity is measured using pressure sensor, and is extracted in real time using vacuum pump.Use gas
Pressure sensor is based on pressure in serial ports transmission real-time inspection and control gas chamber, and analog-digital converter (AD, 16 or more) will
Controller is given after the pressure signal digitlization of simulation, the aperture that controller adjusts rapidly proportioning valve carries out flow control, true
Intracavitary stable gas pressure control may be implemented under the action of sky pump.By above-mentioned working method, pressure is finally maintained at tens
Mbar, precision < 0.5mbar realize the stabilization to inside cavity pressure.
Temperature controlled processes: gas detection absorbs cavity pollution of the steam to reflecting optics in order to prevent, guarantees ray machine knot
The stability of structure and the consistency of absorption line.In the cavity thermocouple assembly is installed on portion's wall and carries out temperature precise measurement, is
The consistency and control precision of measurement cavity temperature detection, thermocouple installation position is the middle part and both ends of cavity, at totally three.
Containment portion winds three sections of heating plates around cavity centered on three thermocouples respectively, and the temperature value according to thermocouple measurement is anti-
Feedforward information, setting heating plate control electric current, and electric current is bigger, and heating efficiency is bigger.In order to guarantee that the temperature of cavity adds in cavity winding
Insulating is wrapped up outside hot plate.Insulating effect is to reduce internal and environment temperature exchange, guarantees cavity temperature
It is constant, reduce temperature fluctuation.Three thermocouple formation temperature feedback informations are sent into controller, and controller uses pid control algorithm
Temperature is configured, heating plate control order is exported, different control is carried out to three pieces heating plate and is reached to inside cavity
To set temperature value, and uniformity of temperature profile.Meanwhile in order to increase the fast setting of inside cavity gas temperature, in air inlet pipe
Outer winding heating tape carries out the setting of level-one temperature, and processing in this way can reduce the energy consumption that cavity temperature controls, and quickly by cavity
Internal gas is set as setting value.
Core control algolithm: in control process, algorithm is the core of control, in order to realize that robustness is good, high reliablity
Temperature and pressure accurate control, introduce fuzzy self-adaption proportional integral differential loop control algorithm (PID) shown in fig. 5,
The control algolithm is summarizing control module technological know-how and practical operation using error e (k), error rate ec (k) as input
On the basis of experience, establishes the domain subset subordinating degree function being adapted with module and distinguish for tri- parameters of kp, ki, kd whole
Fixed fuzzy control table, realizes the fuzzy on-line adaptively correcting of three parameters, to accurately be controlled temperature and pressure.
Fig. 6 is temperature, pressure of embodiment of the present invention PID loop control algolithm flow chart.
The temperature and pressure that gas detection in laser absorption spectrum system absorbs inside cavity is controlled integration by the present invention
Design forms the simply comprehensive control system simultaneously of high-precision, high stable, structure.Temperature and pressure of the invention accurately controls
System has been all made of fuzzy self-adaption proportional integral differential loop control algorithm, by phases such as error term, actual measured value, pre- control value
It has been implemented in combination with the accurate control of inside cavity temperature and pressure.In the cavity in portion's temperature controlled processes, air inlet pipe is used
Two-stage temperature control technique ensure that the gas pre-control temperature value into inside cavity, simplify the complexity of the direct temperature control of cavity.?
In inside cavity pressure control procedure, the pressure for having used pressure reducing valve to be lowered into gas makes flow rate kept constant, and use is automatically controlled
Proportioning valve accurately controls air-flow velocity, carries out air suction process using vacuum pump, makes gas cavity that sample gas be kept to enter;Negative-pressure vacuum
Pump is mounted on cavity outlet port, ensure that inside cavity always is in a state of negative pressure, ensure that the separation of gas absorption spectrum line
With the ability for reducing interference;Three thermocouple temperature measuring apparatus cooperation three pieces heating sheets are installed to complete jointly inside air absorbing cavity body
The control of inside cavity steady temperature;The additional heating tape of cavity carries out the accurate control of temperature, winds asbestos etc. outside heating tape and protects
Ambient temperature influence is preferably minimized, improves the temperature controlled accuracy of system inside cavity and reduce temperature by adiabator
The frequency of regulation;System uses single-chip microcontroller, ARM or industrial control mainboard for master control set, conjunction measuring value of feedback, in internal PID
The overall-in-one control schema of the temperature and pressure of inside cavity is completed under control algolithm effect.
The invention has the following advantages that
(1) in order to which the gas of inside cavity is quickly heated to setting value, and guarantee the constant and consistency of temperature, design
Two-stage heat-operated system, introduces three thermocouples and three pieces heating plate is monitored and controls respectively;
(2) in order to increase the consistency of pressure setting value, reduce fluctuation, complete inside cavity low voltage situations, design is completed
The extract system that aspiration pump and electronically controlled proportional valve combine;
(3) pid control algorithm is used, closed-loop control is carried out to temperature and pressure control module according to initial set value, it is complete
At the quick, stable of temperature and pressure, high precision control.Precision is controlled up to temperature ± 0.005 degree, pressure 0.5mbar.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
Used herein a specific example illustrates the principle and implementation of the invention, and above embodiments are said
It is bright to be merely used to help understand system and its core concept of the invention;At the same time, for those skilled in the art, foundation
Thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.