CN106483088A - A kind of gas concentration measuring apparatus based on ultraviolet light modulation and method - Google Patents
A kind of gas concentration measuring apparatus based on ultraviolet light modulation and method Download PDFInfo
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- CN106483088A CN106483088A CN201611230406.4A CN201611230406A CN106483088A CN 106483088 A CN106483088 A CN 106483088A CN 201611230406 A CN201611230406 A CN 201611230406A CN 106483088 A CN106483088 A CN 106483088A
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- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000012360 testing method Methods 0.000 claims abstract description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 15
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims abstract description 11
- 229910052805 deuterium Inorganic materials 0.000 claims abstract description 11
- 238000012545 processing Methods 0.000 claims abstract description 8
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 239000013307 optical fiber Substances 0.000 claims abstract description 6
- 238000013461 design Methods 0.000 claims abstract description 4
- 238000010521 absorption reaction Methods 0.000 claims description 17
- 238000002835 absorbance Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 238000002211 ultraviolet spectrum Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 80
- 238000005516 engineering process Methods 0.000 description 15
- 238000000862 absorption spectrum Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 5
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000004867 photoacoustic spectroscopy Methods 0.000 description 3
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000001658 differential optical absorption spectrophotometry Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004204 optical analysis method Methods 0.000 description 1
- 238000010895 photoacoustic effect Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
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- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of gas concentration measuring apparatus based on ultraviolet light modulation, include signal transmitting module, gasmetry module, signal receiving module and signal processing module successively;Signal transmitting module includes the ultraviolet deuterium lamp source being connected by UV Silica Optical Fibers and optical chopper;Gasmetry module includes heat tracing pipe racks, gas pond and is wrapped in the heating module outside gas pond;Signal receiving module is formed for the spectrogrph detecting core by with ccd array;Under test gas enter gas pond after the preheating of heat tracing pipe racks, heating module makes gas pond maintain design temperature, the light that ultraviolet deuterium lamp source sends is transmitted by UV Silica Optical Fibers to the entrance port in gas pond after optical chopper modulation, by spectrogrph receipt signal after absorbing through under test gas, transmit and processed to signal processing module.The invention also discloses a kind of gas concentration measuring method based on ultraviolet light modulation, it can be greatly improved the signal to noise ratio of measurement signal, is highly suitable for the monitoring of light concentration gas.
Description
Technical field
The present invention relates to a kind of gas concentration measuring apparatus based on optics and spectroscopy technology, especially relate to a kind of base
In gas concentration measuring apparatus and the method for ultraviolet light modulation, belong to field of optical measuring technologies.
Background technology
In recent years, with country for environmental conservation attention increasingly, and for ensure commercial production safe and efficient enter
The needs of row, the concentration of accurate measurements contaminant gases component has great meaning for control air pollution gas discharge.
The method being applied to contaminant gases measurement of concetration at present, to divide according to operation principle, be broadly divided into non-optical and
Two kinds of Optical Analysis Method.Non-optical analytic process mainly has ultrasonic technology method, air-sensitive method, thermocatalytic method, gas chromatogram, the interference of light
Method etc., but because it is easily affected by environmental factorss such as such as temperature, pressure, humidity, it is difficult to apply to gas on-site analysis.
Optical gas concentration analysis method, is mainly based upon the ultimate principle of spectroscopy, when the transition of laser frequency and GAS ABSORPTION component
When frequency is identical, laser energy will be absorbed, and can obtain the absorption along light path by contrasting incident intensity with transmitted light intensity
Value, and then determine the physical parameter such as gas temperature and concentration, has without pretreatment, response quickly, data be accurate, multiparameter is same
When detection etc. advantage, become and be applied to one of live online measuring technique of various fields at present.
Spectrographic method mainly includes Ftir Spectroscopy (FTIR), Laser Photoacoustic Spectroscopy technology (PAS), adjustable
Humorous laser diode absorption spectral technique (TDLAS), difference absorption spectrum technology (DOAS) etc..FTIR technology is based primarily upon mikey
The inferior interferometer principle of that, sends directional light after the collimated collimated of infrared light supply, by telescope system after absorbing through under test gas
System receives, then converges to detector through interferometer, thus obtaining the interference signal of under test gas, after being fourier transformed
Obtain the absorption spectrum information of gas under variable concentrations, thus calculating the concentration of gas.But FTIR equipment is huger, ring
Answer speed also relatively slow, and price is relatively costly, therefore future also needs to certain development.PAS technology is a kind of utilization
The gas concentration measuring method of optoacoustic effect, the laser speed energy of laser diode transmitting is converted into heat after being absorbed by under test gas
Can, so that the temperature of local gas creates change, cause the change of air pressure simultaneously, produce photoacoustic waves, using sound wave microphony
Device detects generation volume sound wave and completes the inverting of gas concentration according to the amplitude of sound wave.But environment is easily subject to using resonance mode
The interference of noise, affects certainty of measurement.TDLAS technology is a kind of spectral measurement of the narrow linewidth characteristic based on semiconductor laser
Method, it is possible to achieve the multicomponent of mixed gas, multi parameter simultaneous measuring, its versatility is very strong, and Measurement Resolution is high, selects
Box-like under test gas characteristic absorpting spectruming line can measure the concentration of trace gas, but its system structure complexity, equipment become
This costliness, and sweep limitss are narrower.
DOAS technology is the narrow-band absorption characteristic of the gas absorption spectra according to gas in air in ultraviolet band carrying out
Retrieving concentration.The absorption spectrum signal of under test gas showing as with the fast-changing narrow-band spectrum of wavelength spectrally.Generally
By technology such as filtering, the wideband components in absorption spectrum are deducted, obtain the difference absorption spectrum of GAS ABSORPTION, and then pass through
Least-squares algorithm is calculated gas concentration.Its system structure is simple, and measurement wavelength band is big, is widely used to air dirty
The detection of dye thing, including ozone, nitrogen oxides, sulfur dioxide etc..For spectrogrph, noise is mainly derived from CCD device, including
The noise of CID during the output noise of floating amplifiers, transfer noise, dark current noise, integration, in low concentration
Detection of gas aspect, because the absorption of gas is weaker, the useful signal amplitude of spectrometer collection is less, and noise is to measurement result
Interference is fairly obvious, seriously limits the lower limit of its measurement gas concentration.Therefore, develop a kind of reduction luminosity noise, improve letter
Make an uproar than gas concentration measuring apparatus and method particularly important.
Content of the invention
Goal of the invention:The technical problem to be solved is to provide a kind of gas concentration based on ultraviolet light modulation to survey
Amount device.
Present invention technical problem also to be solved is to provide the above-mentioned gas concentration measuring apparatus based on ultraviolet light modulation
Gas concentration measuring method, the method can greatly improve the signal to noise ratio of measurement signal, is highly suitable for light concentration gas
Monitoring.
For solving above-mentioned technical problem, the technical solution adopted in the present invention is:
A kind of gas concentration measuring apparatus based on ultraviolet light modulation, include signal transmitting module, gasmetry mould successively
Block, signal receiving module and signal processing module;Signal transmitting module is included by the ultraviolet deuterium light of ultraviolet quartz light connects
Source and optical chopper;Gasmetry module includes heat tracing pipe racks, gas pond and is wrapped in the heating module outside gas pond;Signal connects
Receive module to be formed for the spectrogrph detecting core by with ccd array;Under test gas enter gas pond after the preheating of heat tracing pipe racks, plus
Thermal modules make gas pond maintain design temperature, and the light that ultraviolet deuterium lamp source sends is after optical chopper modulation by ultraviolet quartz light
Fibre transmits to the entrance port in gas pond, from gas pond out and by spectrogrph receipt signal after absorbing through under test gas, transmits to signal
Processing module is processed.
Wherein, described ultraviolet source can continuously send out the ultraviolet spectra of stable 185nm to 400nm wave band.
A kind of gas concentration measuring method based on ultraviolet light modulation, comprises the steps:
Step 1, carries out Sine Modulated using optical chopper to the light that ultraviolet source is launched, by the light after modulation through ultraviolet
Silica fibre transmits to the incident optical port in gas pond;
Step 2, the modulation light of step 1 is passed through full of N2Gas pond, by spectrometer collection background light intensity signal;To walk again
Rapid 1 modulation light passes through full of reference standard gas (N2) gas pond, by spectrometer collection with reference to transmitted light intensity signal;Finally will
The modulation light of step 1 passes through the gas pond full of under test gas, by spectrometer collection transmitted light intensity to be measured signal;
Step 3, enters line parameter and sets to background light intensity signal, with reference to transmitted light intensity signal and transmitted light intensity signal to be measured respectively
Put identical digital servo-control, low-pass filtering process, obtain each self-corresponding first harmonic signal;
Step 4, according to Beer-Lambert law, to background light intensity, is carried out with reference to the first harmonic of transmitted light intensity signal
Process further, select the slow changing unit in suitable multinomial coefficient fit-spectra absorbance, obtain each gas component and exist
The differential absorption cross-section of measurement wave band;
Step 5, according to Beer-Lambert law, to background light intensity, the first harmonic of transmitted light intensity signal to be measured is carried out
Process further, select the slow changing unit in suitable multinomial coefficient fit-spectra absorbance, obtain difference absorbance, build
Equation group between vertical difference absorbance and differential absorption cross-section, concentration;
Step 6, using the differential absorption cross-section obtaining in step 4 as it is known that bringing the equation group in step 5 into, is finally inversed by
The each concentration of component of under test gas.
Compared with prior art, technical solution of the present invention has an advantageous effect in that:
With respect to existing difference absorption spectrum technology, the method that present invention employs ultraviolet light modulation carries out gas concentration
Measurement, the method do not need additionally to consider the low-frequency noises such as the background dark current of spectrogrph, has good noise suppressed special
Property, there is to weak absorbing high sensitivity, reduce the Concentration Testing lower limit of existing difference absorption spectrum technology, therefore, this
Bright technology has important using value for realizing accurately detection under test gas concentration in severe industry spot.
Brief description
Fig. 1 is the systematic schematic diagram of the gas concentration measuring apparatus based on ultraviolet light modulation for the present invention;
Fig. 2 is the flow chart of the gas concentration measuring method based on ultraviolet light modulation for the present invention.
Specific embodiment
Below in conjunction with accompanying drawing, technical scheme is described further, but the scope of protection of present invention is simultaneously
It is not limited to this.
Experimental provision as shown in figure 1, include successively signal transmitting module 1, gasmetry module 2, signal receiving module 3 with
And signal processing module 4;Signal transmitting module 1 includes the ultraviolet deuterium lamp source 5 being connected by UV Silica Optical Fibers 7 and optics copped wave
Device 6;Gasmetry module 2 includes heat tracing pipe racks 10, gas pond 8 and is wrapped in the heating module 9 outside gas pond 8;Signal receives mould
Block 3 is formed for the spectrogrph 12 detecting core by with ccd array;Under test gas 13 enter gas pond after heat tracing pipe racks 10 preheating
8, heating module 9 makes gas pond 8 maintain design temperature, and the light that ultraviolet deuterium lamp source 5 sends is after optical chopper 6 modulation by purple
Outer silica fibre 7 transmits to the entrance port in gas pond 8, out and by spectrogrph 12 receives letter from gas pond 8 after absorbing through under test gas
Number, then the optical signal collecting is converted into electric signal transmission and is processed to signal processing module 4.
Ultraviolet deuterium lamp source 5 can continuously send out the ultraviolet spectra of stable 185nm to 400nm wave band, in actual measurement
The ultraviolet source of middle employing is not limited to deuterium lamp.
As shown in Fig. 2 the gas concentration measuring method based on ultraviolet light modulation for the present invention, comprise the steps:
Step 1, any wavelength X ultraviolet deuterium lamp source launched using optical chopperiLight carry out high frequency sinusoidal tune
System, modulating frequency is fm, UV Silica Optical Fibers by modulate after optical transport to gas pond entrance port;
Step 2, the modulation light of step 1 is passed through full of N2Gas pond, by spectrometer collection background light intensity signal, be designated as0Iλi(t);The modulation light of step 1 is passed through the gas pond full of reference standard gas, is believed with reference to transmitted light intensity by spectrometer collection
Number, it is designated asRIλi(t);The modulation light of step 1 is passed through the gas pond full of under test gas, by spectrometer collection transmitted light intensity to be measured
Signal, is designated asMIλi(t);Subscript λiRepresent at a certain wavelength that 185nm to 400nm wave band is selected;
Step 3, processes background light intensity signal using digital servo-control process0Iλi(t), with reference to transmitted light intensity signalRIλi(t) and
Transmitted light intensity signal to be measuredMIλiT (), obtains x-component and the y-component comprising first harmonic signal:
In formula (1),It is background light intensity respectively0Iλi(t) corresponding x-component, y-component; It is reference gas transmitted light intensity signal respectivelyRIλi(t) corresponding x-component, y-component;It is respectively
Process transmitted light intensity signal to be measuredMIλiT x-component that () obtains, y-component;
Then low-pass filtered device extracts first harmonic X-component and the Y-component of each signal:
Wavelength XiPlace's background light intensity signal, with reference to transmitted light intensity signal and under test gas transmitted light intensity signal once humorous
Shown in ripple such as formula (3);
Step 4, according to Beer-Lambert law,WithBetween there is following relation:
In formula, σ 'j(λi) it is with wavelength fast-changing high-frequency narrow-band absorption cross-section, σjs(λi) it is slowly varying with wavelength
Broad band low frequency absorption cross-section, each gas component concentrations C in reference standard gasjFor it is known that εR(λi) and εM(λi) be respectively
Rayleigh and Mie scattering section caused by grain.According to difference absorption spectrum technology, by σjs(λi)、εR(λi) and εM(λi) return
Become low frequency part, σ 'j(λi) it is attributed to HFS;Suitable multinomial coefficient is selected to come the low frequency portion in matching formula (4)
Point, acquisition does not have the corresponding first harmonic of transmitted light intensity in the case of any Difference Absorption
Formula (5) is brought into formula (4), obtains:
It is calculated each gas component using formula (6) Simultaneous Equations in wavelength XiThe differential absorption cross-section σ ' at placej(λi);
Step 5,WithBetween there is following relation:
Under test gas concentration cjUnknown.Suitable multinomial coefficient is selected to carry out the low frequency part in matching formula (7), acquisition does not have
There is the corresponding first harmonic of transmitted light intensity in the case of any Difference Absorption
Obtain difference absorbance D ' (λi):
Step 6, for n kind gas component, selects m wavelength, formula (9) can be expressed as equation group in wave band,
Can get under test gas each component concentration c by solving equationsj:
Obviously, above-described embodiment is only intended to clearly illustrate example of the present invention, and is not to the present invention
The restriction of embodiment.For those of ordinary skill in the field, can also be made it on the basis of the above description
The change of its multi-form or variation.There is no need to be exhaustive to all of embodiment.And these belong to this
Obvious change that bright spirit is extended out or change among still in protection scope of the present invention.
Claims (3)
1. a kind of gas concentration measuring apparatus based on ultraviolet light modulation it is characterised in that:Include signal transmitting module, gas successively
Bulk measurement module, signal receiving module and signal processing module;Signal transmitting module includes being connected by UV Silica Optical Fibers
Ultraviolet deuterium lamp source and optical chopper;Gasmetry module includes heat tracing pipe racks, gas pond and is wrapped in the heating outside gas pond
Module;Signal receiving module is formed for the spectrogrph detecting core by with ccd array;Under test gas are after the preheating of heat tracing pipe racks
Enter gas pond, heating module makes gas pond maintain design temperature, the light that ultraviolet deuterium lamp source sends is after optical chopper modulation
Transmitted by UV Silica Optical Fibers to the entrance port in gas pond, by spectrogrph receipt signal after absorbing through under test gas, transmit to signal
Processing module is processed.
2. the gas concentration measuring apparatus based on ultraviolet light modulation according to claim 1 it is characterised in that:Described ultraviolet
Light source can continuously send out the ultraviolet spectra of stable 185nm to 400nm wave band.
3. a kind of gas concentration measuring method based on ultraviolet light modulation is it is characterised in that comprise the steps:
Step 1, carries out Sine Modulated using optical chopper to the light that ultraviolet source is launched, by the light after modulation through ultraviolet quartz
Fiber-optic transfer to gas pond incident optical port;
Step 2, the modulation light of step 1 is passed through full of N2Gas pond, by spectrometer collection background light intensity signal;Again by step 1
Modulation light passes through the gas pond full of reference standard gas, by spectrometer collection with reference to transmitted light intensity signal;Finally by the tune of step 1
Light processed passes through the gas pond full of under test gas, by spectrometer collection transmitted light intensity to be measured signal;
Step 3, carries out parameter setting phase to background light intensity signal, with reference to transmitted light intensity signal and transmitted light intensity signal to be measured respectively
Digital servo-control together, low-pass filtering process, obtain each self-corresponding first harmonic signal;
Step 4, according to Beer-Lambert law, to background light intensity, enters traveling one with reference to the first harmonic of transmitted light intensity signal
Step is processed, and selects the slow changing unit in suitable multinomial coefficient fit-spectra absorbance, obtains each gas component in measurement
The differential absorption cross-section of wave band;
Step 5, according to Beer-Lambert law, to background light intensity, the first harmonic of transmitted light intensity signal to be measured enters traveling one
Step is processed, and selects the slow changing unit in suitable multinomial coefficient fit-spectra absorbance, obtains difference absorbance, and it is poor to set up
Divide the equation group between absorbance and differential absorption cross-section, concentration;
Step 6, using the differential absorption cross-section obtaining in step 4 as it is known that bringing the equation group in step 5 into, is finally inversed by be measured
The each concentration of component of gas.
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CN107271049A (en) * | 2017-07-07 | 2017-10-20 | 中国科学院工程热物理研究所 | A kind of apparatus and method for measuring HTHP mixed gas radiation characteristic |
CN107290298A (en) * | 2017-07-17 | 2017-10-24 | 电子科技大学 | A kind of device and method that mixed gas is detected based on Fast Fourier Transform (FFT) |
CN109596566A (en) * | 2018-10-29 | 2019-04-09 | 中国科学院合肥物质科学研究院 | A kind of gas detection absorption inside cavity temperature and pressure integrated control unit |
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