CN105466633B - A kind of low temperature lower pressure sensor calibrating installation - Google Patents
A kind of low temperature lower pressure sensor calibrating installation Download PDFInfo
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- CN105466633B CN105466633B CN201510796292.9A CN201510796292A CN105466633B CN 105466633 B CN105466633 B CN 105466633B CN 201510796292 A CN201510796292 A CN 201510796292A CN 105466633 B CN105466633 B CN 105466633B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
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Abstract
The present invention relates to a kind of low temperature lower pressure sensor calibrating installations, including pressure calibration, pressure control unit, low-temperature working environment provides unit, protective cover and calibration module, pressure control unit is for generating normal pressure and normal pressure being transmitted in protective cover, protective cover is located on pressure calibration, pressure sensor is calibrated to be located in protective cover, the output end of pressure control unit leads in protective cover, protective cover and pressure calibration are located at low-temperature working environment and provide in the low temperature environment that unit is provided, calibration module is used to acquire the real-time pressure in measuring environment and is calibrated with the pressure for being calibrated pressure sensor output.In order to make up the blank for lacking low-temperature pressure sensor calibration technique, calibrating installation of the present invention can realize the stabilization temperature control of multi-temperature point with the low temperature environment of simulated engine liquid oxygen pipeline in range of temperature of the room temperature to 196 DEG C.
Description
Technical field
The present invention relates to a kind of calibration dedicated units of low-temperature pressure sensor.
Background technology
There are two types of the pressure sensors used in engine test at present, this one is common pressure sensor
Pressure sensor is used in the pressure tap apart from liquid oxygen pipeline relatively far away from；Another kind is the pressure sensor of low form, this
Pressure sensor is used directly in pressure tap in liquid oxygen pipeline.The pressure parameter metrology and measurement water of China's numerous values under normal temperature state
It is flat substantially suitable with foreign countries, and the DATA REASONING uncertainty of low-temperature pressure parameter differs larger with foreign countries.It is reported that at present still
Professional measurement unit is not engaged in the research of low-temperature pressure pick up calibration work, current low-temperature pressure pick up calibration shape
Condition is to calibrate at normal temperatures.The Calibration equation obtained under room temperature can only be used to convert when using at low ambient temperatures in this way,
Cause larger measurement error.Systematic error must be eliminated as much as possible caused by this kind of temperature.
Low-temperature pressure sensor in actual use can only be used temporarily normal due to lacking the calibration means under low temperature environment
The calibration method of pressure sensor is advised, and the temperature range of liquid oxygen reaches -174 DEG C~-183 DEG C when engine test, calibration
Have big difference with the environment temperature used, the zero-bit of pressure sensor and sensitivity coefficient is caused to be sent out with room temperature measurement and calibration result
Raw larger offset, causes sensor output signal that can not accurately reflect measurement true value.According to a large amount of engine test it is found that low
Temperature is affected to the zero-bit of sensor, and low temperature environment can make the diaphragm stress of pressure sensor change, and generates zero-bit
Drift is up to the pressure signal output of (0.1~2) MPa.It is tested by the temperature effect of pressure sensor, research shows that environment
When temperature changes in low temperature range, the output characteristics of pressure sensor still keeps good linear, but offset output have compared with
Big variation, sensitivity coefficient reduce with the raising of temperature.It can be seen that the calibration characteristics, under room temperature can not reflect practical low temperature work
True pressure value under condition, it is therefore necessary to by developing low-temperature pressure calibrating device for sensors, carry out low-temperature pressure sensor school
The research of quasi- characteristic reduces the influence of systematic error.Thus the system pressure measurement for engine liquid oxygen pipeline, which provides, effectively may be used
The Metrology Support leaned on, to ensure the accuracy of fault diagnosis and the reliability of Performance Evaluation.
Invention content
In order to make up the blank for lacking low-temperature pressure sensor calibration technique, the present invention provides pressure sensing under a kind of low temperature
Device calibrating installation, the maximum feature of the calibrating installation is can be with the low temperature environment of simulated engine liquid oxygen pipeline, can be in room temperature
The stabilization temperature control of multi-temperature point is realized in -196 DEG C of range of temperature.Can in a low temperature of stabilization automatic base measuring pressure model
It encloses for the low-temperature pressure sensor of (0~20) MPa, it is unreliable to overcome low-temperature pressure sensor that can only calibrate at normal temperatures
Property.
Technical solution of the invention：
A kind of low temperature lower pressure sensor calibrating installation, is characterized in that：It is single including pressure calibration, pressure control
Member, low-temperature working environment provide unit, protective cover 5 and calibration module, and the pressure control unit is for generating normal pressure
And normal pressure is transmitted in protective cover, the protective cover is located on pressure calibration, is calibrated pressure sensor and is located at guarantor
In shield, the output end of the pressure control unit leads in protective cover, and the protective cover and pressure calibration are located at low temperature work
Make environment to provide in the low temperature environment that is provided of unit, the calibration module be used to acquire real-time pressure in measuring environment and by
The pressure of calibrating pressure sensor output is calibrated.
Above-mentioned pressure control unit includes air source, automatic pressure control tester, pressure charging system and high-pressure gas pipeline,
The air source enters automatic pressure by high-pressure gas pipeline after pressure charging system and controls tester, the automatic pressure control
Tester outputting standard pressure.
It includes cooled cryostat tank 10, control valve 11, the mobile liquid nitrogen storage of supercharging certainly that above-mentioned low-temperature working environment, which provides unit,
Tank 12, temperature sensor 8, heater 7 and temperature acquisition and control unit are hidden, liquid nitrogen is contained in the cooled cryostat tank,
Described mobile one end from supercharging liquid nitrogen storage tank 12, which is connected to by control valve 11 with cooled cryostat tank 10, carries out liquid nitrogen recycling,
It the protective cover 5 and is calibrated pressure sensor 6 and is respectively positioned in cooled cryostat tank 10, the temperature sensor 8 and heating
Device 7 is respectively positioned in protective cover, and the output end of the temperature sensor 8 is connect with temperature acquisition with control unit, the movable type
It is connected to from the other end of supercharging liquid nitrogen storage tank 12 with protective cover by cryogenic coolant transfer valve cryogenic coolant pipe, it is described low
Cryogenic coolant transfer valve 13 is provided on warm coolant hose, the temperature acquisition is with control unit according to collected temperature control
Heater start and stop processed.
Temperature sensor, heater are all made of carbon resistance.
Above-mentioned calibration module includes standard pressure transducer and industrial personal computer.
Exhaust pipe, electric wire skirt and high pressure gas pipeline are provided on above-mentioned protective cover, the pressure control unit passes through
High pressure gas pipeline is connect with protective cover, and the temperature sensor and heater pass through with temperature acquisition and the lead of control unit
Electric wire skirt.
Said wires skirt is copper tube.
The present invention has the advantage that：
1, apparatus of the present invention use continuous flow control.The cold air of low temperature liquid nitrogen evaporation enters protection by cryogenic coolant pipe
In cover, its refrigeration is made full use of, then passes through escape pipe and draws, use noticeable degree gas output at room temperature, carry out preliminary temperature
Degree control.Gas refrigeration thermally contacts poor with the component that temperature is controlled, and does temperature sensor and heater with carbon resistance, passes through
Thermostat accurately controls the temperature of component.
2, apparatus of the present invention all draw all electrical measurement leads from copper tube, substantially increase chamber and air in this way
Channel, so that low pressure chamber is remained consistent with atmospheric pressure.
3, apparatus of the present invention development pressure control module uses pressure precision to control verification for the automatic pressure of 0.01%FS
Instrument is connected on by school low-temperature pressure sensor in cooled cryostat as pressure controller, maximum pressure 20MPa, according to related inspection
Set pattern Cheng Jinhang gage works.
4, calibrating installation of the invention may be implemented in (- 196 DEG C~room temperature) temperature range to (0~20) MPa low temperature
Pressure sensor is calibrated, and expanded uncertainty meets the magnitude tracing requirement of related model pressure measurement up to 0.2%,
Starting realizes the calibration of low-temperature pressure sensor true environment.
Description of the drawings
Fig. 1 is the structural schematic diagram of low temperature lower pressure sensor calibrating installation of the present invention；
Fig. 2 is the partial enlarged view in Fig. 1；
Wherein reference numeral is：1- high pressure gas pipelines, 2- exhaust pipes, 3- electrical lead pipes, 4- cryogenic coolant inlet pipes, 5- are protected
Shield, 6- are calibrated pressure sensor, 7- heaters, 8- temperature sensors, 9- pressure calibrations, 10- cooled cryostat tanks, 11-
Control valve, 12- movable types are pressurized liquid nitrogen storage tank, 13- cryogenic coolant transfer valves certainly.
Specific implementation method
As shown in Figure 1, low temperature lower pressure sensor calibrating installation of the present invention is to realize low temperature environment lower pressure sensor
Calibration, realizes the low-temperature working environment of temperature-controllable, includes mainly pressure calibration, pressure control unit, low-temperature working environment
Unit, protective cover 5 and calibration module are provided, pressure control unit is for generating normal pressure and normal pressure being transmitted to guarantor
In shield, protective cover is located on pressure calibration 9, is calibrated pressure sensor and is located in protective cover, pressure control unit it is defeated
Outlet is led in protective cover, and protective cover and pressure calibration are located at low-temperature working environment and provide the low temperature environment that unit is provided
In, calibration module is used to acquire the real-time pressure in measuring environment and is calibrated with the pressure for being calibrated pressure sensor output.
Pressure control unit includes air source, automatic pressure control tester, pressure charging system and high-pressure gas pipeline, and air source is by supercharging
Automatic pressure is entered by high-pressure gas pipeline after system and controls tester, the automatic pressure controls tester outputting standard pressure
Power.Air source is generally helium tank.
It includes cooled cryostat tank 10, control valve 11, mobile supercharging liquid nitrogen storage tank certainly that low-temperature working environment, which provides unit,
12, temperature sensor 8, heater 7 and temperature acquisition and control unit, are contained with liquid nitrogen in cooled cryostat tank, it is mobile from
One end of supercharging liquid nitrogen storage tank 12 is connected to progress liquid nitrogen recycling by control valve 11 with cooled cryostat tank 10, protective cover 5 and
It is calibrated pressure sensor 6 to be respectively positioned in cooled cryostat tank 10, temperature sensor 8 and heater 7 are respectively positioned in protective cover, temperature
The output end of degree sensor 8 is connect with temperature acquisition with control unit, and the mobile other end from supercharging liquid nitrogen storage tank 12 is logical
Cross low temperature coolant hose to be connected to protective cover, be provided with cryogenic coolant transfer valve 13 on cryogenic coolant pipe, temperature acquisition with
Control unit is according to collected temperature control heater start and stop.General temperature sensor, heater are all made of carbon resistance.Calibration
Module includes standard pressure transducer and industrial personal computer.
Exhaust pipe, electric wire skirt and high pressure gas pipeline are provided on protective cover, pressure control unit passes through high pressure gas transmission
Pipe is connect with protective cover, and temperature sensor and heater and the lead of temperature acquisition and control unit pass through electric wire skirt.Electricity
Line skirt is copper tube.
Pressure control module, which mainly generates and controls normal pressure, is transferred to tested pressure sensor, then passes through school
Quasi-mode block is compared and is calibrated using standard pressure transducer and tested pressure sensor.
Low-temperature working environment provides unit and mainly generates low temperature and control temperature.Include mainly：Cooled cryostat, low temperature
Valve, mobile formula booster-type liquid nitrogen storage tank, platinum resistance thermometer, low-temp. liquid-level meter, carbon resistance heater and corresponding electricity
Survey lead etc..
Mobile liquid nitrogen storage tank (band is pressurized certainly) is for transporting liquid nitrogen for cooled cryostat tank and being provided for pressure check platform
Cryogenic coolant.
Protective cover is used to that temperature to be assisted to control, and the pressure sensor for preventing the vapor in air to be condensate in low temperature
On.
Calibration module is mainly to realize automatically controlling for this system, reference《JJG860-1994 pressure sensor devices calibrating rule
Journey》Method, when gas circuit is open-minded, after the initial work before calibrating is finished, device can simultaneously to pressure control tester into
Row control is controlled with to thermal module.The automatic calibration of low-temperature sensor is carried out according to pre-designed program,
Form report on credentials.
Calibration process：
By cooled cryostat tank low temperature environment (inspection temperature of the temperature less than tested pressure sensor is provided for pressure calibration
Degree)；(can be low temperature nitrogen or liquid nitrogen, according to by pressure measurement by the cryogenic coolant being input in pressure calibration protective cover
Depending on the inspection temperature requirement of force snesor) accelerate pressure sensor cooling procedure；Temperature control is realized by electric heater；Platinum
Resistance thermometer is inserted by red copper casing and carries out temperature monitoring, close proximity to pressure transducer diaphragm.
Tested pressure sensor is installed on pressure calibration, by electrical lead pipe easily by tested pressure sensor,
The connections such as electric heater and thermometer, pressure calibration is installed on by protective cover；Then entire pressure calibration is put into low
In temperature, its height is adjusted, ensures that the temperature of pressure calibration is less than the inspection temperature of tested pressure sensor；Open low temperature cold
But agent transfer valve 13, low temperature nitrogen is sent in protective cover, and it is warm less than examining to temperature to be quickly cooled down tested pressure sensor
Degree；By temperature acquisition and control unit opening electric heater, controlled into trip temperature；Reach after examining temperature requirement, according to
《JJG860-1994 pressure sensor device vertification regulations》Carry out calibration；After pressure calibration, by pressure calibration from low
It is taken out in warm Dewar tank, after warming to room temperature again, protective cover can be opened, to prevent the vapor in air from condensing in the quilt of low temperature
Examine pressure sensor；It, can be by being connected to the cryogenic coolant inlet pipe of protective cover into protective cover in order to accelerate rewarming process
Be sent into room temperature under nitrogen (using nitrogen cylinder as air source or dry air can also), if tested pressure sensor allows, Ke Yitong
Enter the nitrogen or dry air of heat.
Claims (4)
1. a kind of low temperature lower pressure sensor calibrating installation, it is characterised in that：Including pressure calibration, pressure control unit, low
Warm working environment provides unit, protective cover (5) and calibration module, and the pressure control unit is used to generate normal pressure and will
Normal pressure is transmitted in protective cover, and the protective cover is located on pressure calibration, is calibrated pressure sensor and is located at protective cover
Interior, the output end of the pressure control unit leads in protective cover, and the protective cover and pressure calibration are located at low-temperature working ring
Border is provided in the low temperature environment that unit is provided, the real-time pressure and be calibrated that the calibration module is used to acquire in measuring environment
The pressure of pressure sensor output is calibrated；The pressure control unit includes air source, automatic pressure control tester, supercharging
System and high-pressure gas pipeline, the air source enter automatic pressure by high-pressure gas pipeline after pressure charging system and control school
Instrument is tested, the automatic pressure controls tester outputting standard pressure；It includes cooled cryostat that the low-temperature working environment, which provides unit,
Tank (10), control valve (11), mobile supercharging liquid nitrogen storage tank (12), temperature sensor (8), heater (7) and temperature certainly
Acquisition and control unit are contained with liquid nitrogen in the cooled cryostat tank, described mobile from the one of supercharging liquid nitrogen storage tank (12)
End is connected to progress liquid nitrogen recycling with cooled cryostat tank (10) by control valve (11), the protective cover (5) and is calibrated pressure
Sensor (6) is respectively positioned in cooled cryostat tank (10), and the temperature sensor (8) and heater (7) are respectively positioned in protective cover,
The output end of the temperature sensor (8) is connect with temperature acquisition with control unit, described mobile from supercharging liquid nitrogen storage tank
(12) the other end is connected to by cryogenic coolant transfer valve cryogenic coolant pipe with protective cover, the cryogenic coolant Guan Shangshe
It is equipped with cryogenic coolant transfer valve (13), the temperature acquisition is opened with control unit according to collected temperature control heater
Stop；Exhaust pipe, electric wire skirt and high pressure gas pipeline are provided on the protective cover, the pressure control unit is defeated by high pressure
Tracheae is connect with protective cover, and the temperature sensor and heater are drawn by electric wire with temperature acquisition and the lead of control unit
Pipe.
2. low temperature lower pressure sensor calibrating installation according to claim 1, it is characterised in that：Temperature sensor, heating
Device is all made of carbon resistance.
3. low temperature lower pressure sensor calibrating installation according to claim 2, it is characterised in that：The calibration module includes
Standard pressure transducer and industrial personal computer.
4. low temperature lower pressure sensor calibrating installation according to claim 3, it is characterised in that：The electric wire skirt is purple
Copper pipe.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510796292.9A CN105466633B (en) | 2015-11-18 | 2015-11-18 | A kind of low temperature lower pressure sensor calibrating installation |
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| CN201510796292.9A CN105466633B (en) | 2015-11-18 | 2015-11-18 | A kind of low temperature lower pressure sensor calibrating installation |
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| CN105466633A CN105466633A (en) | 2016-04-06 |
| CN105466633B true CN105466633B (en) | 2018-10-16 |
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| CN107860510A (en) * | 2017-11-07 | 2018-03-30 | 中航（重庆）微电子有限公司 | A kind of calibration method of pressure sensor |
| CN109724896B (en) * | 2018-11-26 | 2024-04-12 | 西安航天计量测试研究所 | Constant temperature tank for working viscosity fluid constant value |
| CN114272969B (en) * | 2021-12-28 | 2023-07-25 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Liquid nitrogen liquid discharge device, liquid nitrogen liquid discharge method and chip test system |
| CN115389099A (en) * | 2022-10-26 | 2022-11-25 | 北京中科富海低温科技有限公司 | Pressure sensor calibration device |
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