CN106500910A - A kind of vacuometer dynamic contrast calibrating installation - Google Patents
A kind of vacuometer dynamic contrast calibrating installation Download PDFInfo
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- CN106500910A CN106500910A CN201611093790.8A CN201611093790A CN106500910A CN 106500910 A CN106500910 A CN 106500910A CN 201611093790 A CN201611093790 A CN 201611093790A CN 106500910 A CN106500910 A CN 106500910A
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- vacuum
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- vacuometer
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- correction room
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
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Abstract
A kind of vacuometer dynamic contrast calibrating installation, including vacuum measurement system and control system；The vacuum measurement system includes vacuum correction room 2, fine setting static organ 1, vacuum pump 7, standard vacuum sensor 3；2 upper end of vacuum correction room arranges fine setting gas access, and equatorial positions are arranged and are calibrated 3 interface of 10 interface of vacuometer and standard vacuum sensor, and lower end is arranged vacuumizing and exhausting outlet and is connected with vacuum pump 7；The control system includes control chamber 5, control cable 6；The control vacuum pump 7 respectively with vacuum measurement system of cable 6, fine setting static organ 1, standard vacuum sensor 3 are connected.The vacuum correction chamber pressure of this calibrating installation is stable, and fluctuation is less than 3%, it is ensured that the quality of comparison calibration.Device can concurrently set multiple calibration point vacuums, and automatically into the calibration to next calibration point after the calibration of a calibration point on completing, work efficiency is improved.
Description
Technical field
The present invention relates to a kind of vacuometer dynamic contrast calibrating installation, for true compared with scene or laboratory in the range of wide-range
The calibration or test of empty meter, belongs to field of measuring technique.
Background technology
Vacuometer is the instrument for measuring atmospheric pressure under absolute pressure state, is widely used in military project, electronics, medical treatment food
The various fields such as product, electric power, metallurgy, chemical industry.With the development of science and technology, the requirement in industry to vacuometer is also carried constantly
Rise, precision has generally reached 10-2Pa or so.Due to vacuum measurement system be comprising vacuometer, vacuum pump (lobe pump, mechanical pump,
Molecular pump etc.), various connecting pipes and vacuum barrier valve interior complete set test system, bulky, and
Fix in-site installation position, it is impossible to realize that the laboratory investment to vacuum measurement system, the integrated production of modernization are gradually required
Field calibration is carried out to vacuum measurement system.It is also the development trend of vacuum correction from now on to the field calibration of vacuum system.
Existing vacuum gauge calibration generally measures calibration operation with static expanding method and dynamic contrast method.Dynamic contrast method
Calibration chamber is generally evacuated to end vacuum, Ran Houtong using first with forepump and the combination of molecule pump group by calibrating installation
Fine regulating device is crossed to calibration chamber nitrogen injection, target vacuum is obtained, it is right with standard vacuum gauge by school vacuometer to realize
Than calibration.
CN200955987Y Chinese invention patents, disclose " Portable vaccum meter calibrating equipment ", reach pole in calibration chamber
After limit vacuum, by adjusting the Mini-adjustable valve nitrogen injection in circular calibration chamber, calibration chamber is made to obtain target vacuum
Degree.This kind of calibrating installation existing defects, as each calibration vacuum progressively can only be carried out from low to high, flexible operation degree compares
Difference.In addition manual fine regulating device is to calibration chamber nitrogen injection, it is more difficult to accurately controls flow, easily deviates target vacuum,
Stablizing for calibration chamber vacuum is affected, meanwhile, pointer standard vacuum gauge easily produces error in reading.
CN102564696A discloses a kind of vacuum rule calibration system and method, for existing compared with the range of wide-range
Field or the calibration or test of laboratory vacuum meter.Including mechanical pump, the first vacuum valve, molecular pump, the second vacuum valve, first
Vacuum gauge, the second vacuum gauge, the 3rd vacuum gauge, valve, the 4th vacuum gauge, aperture, fine setting vacuum valve, source of the gas, vacuum chamber and
5th vacuum gauge；Connected using pipeline between whole system.The present invention works as quilt using the direct Comparison calibration vacuum gauge of reference standard
Calibration range is 10-1～105During Pa, using Capacitance Diaphragm Gauge as reference standard, when calibration range is 10-6～10-2During Pa,
Using B-A type substandards ionization gauge as reference standard, calibration process selects suitable reference standard simultaneously according to scope is calibrated
Determine the vacuum that vacuum chamber needs.
Content of the invention
In order to overcome inefficiency in prior art, malfunction, easily produce error in reading.The invention provides
A kind of target vacuum follows technology automatically, after setting vacuum correction room target vacuum, system according to practical vacuum degree
Deviation, is automatically adjusted the operating frequency of vacuum pump, and is linked with the fine setting static organ on vacuum correction room, make vacuum correction room true
Reciprocal of duty cycle is stable in target range.
A kind of vacuometer dynamic contrast calibrating installation, including vacuum measurement system and control system；The vacuum measurement system
System includes vacuum correction room 2, fine setting static organ 1, vacuum pump 7, standard vacuum sensor 3；2 upper end of vacuum correction room arranges fine setting
Gas access, equatorial positions arrange and are calibrated 3 interface of 10 interface of vacuometer and standard vacuum sensor, and lower end arranges evacuation row
Gas is exported and is connected with vacuum pump 7；The control system includes control chamber 5, control cable 6；Control cable 6 is surveyed with vacuum respectively
The vacuum pump 7 of amount system, fine setting static organ 1, standard vacuum sensor 3 connect；Fine setting 1 one end of static organ and atmosphere, separately
One end is connected with vacuum correction room 2 through collecting pipe 14, is calibrated vacuometer 10 and is connected with vacuum correction room 2 by vacuum valve b 9,
Standard vacuum sensor 3 is connected with vacuum correction room 2 by vacuum valve special for low c 4, and vacuum pump 7 is by vacuum valve a 8 and vacuum
Calibration chamber 2 connects.
Device can concurrently set 2-5 calibration point vacuum, automatically into right after the calibration of a calibration point on completing
The calibration of next calibration point, improves work efficiency.
The equatorial positions of the vacuum correction room 2 can arrange 1-5 opening, and connection 1-5 is calibrated vacuometer, preferably
It it is 2-3, while completing to calibrate.
Three groups of capillary tubies and solenoid valve block are set in the fine setting static organ 1, are encapsulated in same casing, respectively micro-
1 upper end of leveling weighing apparatus arranges air intake, and lower end is connected with same "T"-shaped collecting pipe 14, and collecting pipe 14 is in fine setting static organ 1
Lower end is arranged air outlet slit and is connected with vacuum correction room 2, and three groups of flow is different, and control system is according to the target vacuum for setting
Pre-selected working capillary and solenoid valve block, and controlled to be somebody's turn to do with the difference of target setting vacuum according to vacuum correction room vacuum
Group capillary tube and the folding of solenoid valve block.The dynamic regulation to charge flow rate is realized, makes the pressure of vacuum correction room 2 keep steady
Fixed.
The invention has the beneficial effects as follows, vacuometer dynamic contrast calibrating installation is true by contrasting vacuum correction room target setting
Reciprocal of duty cycle fine setting static organ capillary tube corresponding to the operating frequency of practical vacuum degree real-time adjustment vacuum pump and control and solenoid valve block
Folding, make vacuum correction chamber pressure keep stable state, fluctuation to be less than 3%, it is ensured that the quality of comparison calibration.System can
To concurrently set multiple calibration target vacuums, automatically into the school to next vacuum after the calibration of a vacuum on completing
Standard, realizes the flexible, efficient of work.
Description of the drawings
The present invention is further described with example below in conjunction with the accompanying drawings.
Fig. 1 is this vaccum meter calibrating equipment operation principle schematic diagram；
Fig. 2 is fine setting balancer structure schematic diagram；
Fig. 3 is control system logic chart.
In figure, 1. finely tune static organ, 2. vacuum correction room, 3. standard vacuum sensor, 4. vacuum valve c, 5. control chamber, 6.
Control cable, 7. vacuum pump, 8. vacuum valve a, 9. vacuum valve b, is 10. calibrated vacuometer, 11. capillary tubies and solenoid valve block a,
12. capillary tubies and solenoid valve block b, 13. capillary tubies and solenoid valve block c, 14. collecting pipes
Specific embodiment
Embodiment 1
The vacuometer dynamic contrast calibrating installation is divided into vacuum measurement system and control system, vacuum in vacuum measurement system
The lower end of calibration chamber 2 is connected with vacuum pump 7 through vacuum valve 9, after vacuum pump 7 starts, is arranged on 2 equatorial positions one of vacuum correction room
The opening of side is connected with standard vacuum sensor 3 through vacuum valve c 4, the vacuum of real-time monitoring vacuum correction room 2, and measured is true
Null value is delivered to control chamber 5 through controlling cable 6, and control chamber 5 is compared with target setting vacuum afterwards through controlling the adjustment vacuum of cable 6
The working power frequency of pump 7.In vacuum correction room 2 equator opposite side arrange opening through vacuum valve a 8 be calibrated vacuometer 10
Connection, shows the vacuum of vacuum correction room in real time.
The upper end of vacuum correction room 2 is arranged opening and is connected with fine setting static organ 1, is provided with capillary tube in fine setting static organ 1
With solenoid valve block a 11, capillary tube and solenoid valve block b 12 and capillary tube and solenoid valve block c 13, three groups of capillary tubies and electromagnetic valve
Group is connected with collecting pipe 14.One group of capillary tube and solenoid valve block are selected after 5 target setting vacuum of control chamber automatically.Work as vacuum
When vacuum in calibration chamber 2 is less than 50Pa with target setting vacuum difference, control chamber 5 is through controlling what the opening of cable 6 was selected
Capillary tube and the electromagnetic valve of solenoid valve block, extraneous air enter vacuum correction room 2, realize vacuum correction room together with vacuum pump 7
Pressure is stablized.
After vacustat in vacuum correction room 2, contrast is calibrated the standard vacuum that vacuometer 10 and control chamber 5 show
Degree, completes the primary calibration to being calibrated vacuometer 10.
Control chamber 5 can once set all calibration points, and after completing the calibration of a bit, 5 automatic start up system of control chamber enters
Enter the calibration to next calibration point, until completing the calibration to being calibrated 10 all calibration points of vacuometer.
Claims (7)
1. a kind of vacuometer dynamic contrast calibrating installation, including vacuum measurement system and control system；The vacuum measurement system
Including vacuum correction room (2), fine setting static organ (1), vacuum pump (7), standard vacuum sensor (3)；Vacuum correction room (2) upper end
Fine setting gas access is set, and equatorial positions are arranged and are calibrated vacuometer (10) interface and standard vacuum sensor (3) interface, lower end
Vacuumizing and exhausting outlet is set and is connected with vacuum pump (7)；The control system includes control chamber (5), control cable (6)；Control
Cable (6) processed vacuum pump (7) respectively with vacuum measurement system, fine setting static organ (1), standard vacuum sensor (3) are connected；Micro-
Leveling weighing apparatus (1) one end and atmosphere, the other end are connected with vacuum correction room (2) through collecting pipe (14), are calibrated vacuometer
(10) be connected with vacuum correction room (2) by vacuum valve b (9), standard vacuum sensor (3) by vacuum valve special for low c (4) with true
Empty calibration chamber (2) are connected, and vacuum pump (7) is connected with vacuum correction room (2) by vacuum valve a (8).
2. calibrating installation according to claim 1, it is characterised in that the three groups of capillary tubies and electromagnetism in fine setting static organ (1)
Valve group is corresponding with the target vacuum that control chamber (5) sets respectively, with vacuum pump (7) after capillary tube and solenoid valve block opening
Low frequency work is engaged, and realizes stablizing for vacuum correction room (2) pressure.
3. calibrating installation according to claim 1 and 2, it is characterised in that the operating frequency of vacuum pump (7) is according to setting
Determine the difference linear regulation of vacuum and vacuum correction room practical vacuum degree.
4. the calibrating installation according to claims 2, it is characterised in that three groups of capillarys are set in fine setting static organ (1)
Pipe and solenoid valve block, be encapsulated in same casing, respectively fine setting static organ (1) upper end arrange air intake, lower end with
One "T"-shaped collecting pipe (14) connect, and collecting pipe (14) arranges air outlet slit and vacuum correction room in fine setting static organ (1) lower end
(2) connect, three groups of flow is different, control system is according to the pre-selected working capillary of the target vacuum that sets and electromagnetic valve
Group, and opening for this group of capillary tube and solenoid valve block is controlled according to the difference of vacuum correction room vacuum and target setting vacuum
Close；The dynamic regulation to charge flow rate is realized, the pressure remained steady of vacuum correction room (2) is made.
5. the calibrating installation according to claims 2, it is characterised in that the equatorial positions in vacuum correction room (2) arrange 1-
5 openings, connection 1-5 are calibrated vacuometer, and preferably 2-3 is individual, while completing to calibrate.
6. the method calibrated by the calibrating installation according to any one of claim 1-5, vacuum school in vacuum measurement system
The lower end of quasi- room (2) is connected with vacuum pump (7) through vacuum valve b (9), after vacuum pump (7) starts, is arranged on vacuum correction room (2)
The opening of equatorial positions side is connected with standard vacuum sensor (3) through vacuum valve c (4), real-time monitoring vacuum correction room (2)
Vacuum, the vacuum values for measuring are delivered to control chamber (5) through controlling cable (6), and control chamber (5) is compared with target setting vacuum
Working power frequency by control cable (6) adjustment vacuum pump (7)；In vacuum correction room (2) equator, opposite side arranges opening
It is connected with vacuometer (10) is calibrated through vacuum valve a (8), shows the vacuum of vacuum correction room (2) in real time；Vacuum correction room
(2) upper end is arranged opening and is connected with fine setting static organ (1), is provided with capillary tube and solenoid valve block a in fine setting static organ (1)
(11), capillary tube and solenoid valve block b (12) and capillary tube and solenoid valve block c (13), three groups of capillary tubies and solenoid valve block with remittance
Flow tube (14) connects；One group of capillary tube and solenoid valve block are selected after control chamber (5) target setting vacuum automatically；Work as vacuum correction
When vacuum in room (2) is less than 50Pa with target setting vacuum difference, control chamber (5) is selected through controlling cable (6) opening
Capillary tube and solenoid valve block electromagnetic valve, extraneous air enter vacuum correction room (2), realize vacuum together with vacuum pump (7)
Calibrate stablizing for chamber pressure；After vacustat in vacuum correction room (2), contrast is calibrated vacuometer (10) and control chamber
(5) the standard vacuum degree for showing, completes the primary calibration to being calibrated vacuometer (10).
7. method according to claim 6, it is characterised in that 2-5 calibration point vacuum can be concurrently set, completed
Automatically into the calibration to next calibration point after the calibration of a upper calibration point, work efficiency is improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611093790.8A CN106500910B (en) | 2016-12-02 | 2016-12-02 | Dynamic contrast calibration device for vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611093790.8A CN106500910B (en) | 2016-12-02 | 2016-12-02 | Dynamic contrast calibration device for vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
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| CN106500910A true CN106500910A (en) | 2017-03-15 |
| CN106500910B CN106500910B (en) | 2022-06-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611093790.8A Active CN106500910B (en) | 2016-12-02 | 2016-12-02 | Dynamic contrast calibration device for vacuum gauge |
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| CN (1) | CN106500910B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956007A (en) * | 2017-05-23 | 2018-12-07 | 成都飞机工业（集团）有限责任公司 | A kind of vacuum meter on-line calibration room |
| CN111306941A (en) * | 2020-03-12 | 2020-06-19 | 浙江吉成新材股份有限公司 | Vacuum degree abnormity alarm device for high-temperature pressureless sintering |
| CN112461446A (en) * | 2020-11-23 | 2021-03-09 | 阿米检测技术有限公司 | Rapid dynamic vacuum calibration method for vacuum gauge |
Citations (5)
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|---|---|---|---|---|
| JP2007121267A (en) * | 2005-10-27 | 2007-05-17 | Korea Research Inst Of Standards & Science | ABSOLUTE CALIBRATION OF VACUUM GAUGE BY In-Situ METHOD, COMPARISON CALIBRATION DEVICE, AND ITS CALIBRATION METHOD |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN203191151U (en) * | 2012-12-21 | 2013-09-11 | 黄鸣 | Vacuum gauge automatic calibrating device |
| CN204027887U (en) * | 2014-08-26 | 2014-12-17 | 天津市环境保护科学研究院 | A kind of adjustable extraction-type dilution sampling instrument |
| CN206269962U (en) * | 2016-12-02 | 2017-06-20 | 山东中检高科检测技术有限公司 | A kind of vacuum meter dynamic contrast calibrating installation |
-
2016
- 2016-12-02 CN CN201611093790.8A patent/CN106500910B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007121267A (en) * | 2005-10-27 | 2007-05-17 | Korea Research Inst Of Standards & Science | ABSOLUTE CALIBRATION OF VACUUM GAUGE BY In-Situ METHOD, COMPARISON CALIBRATION DEVICE, AND ITS CALIBRATION METHOD |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN203191151U (en) * | 2012-12-21 | 2013-09-11 | 黄鸣 | Vacuum gauge automatic calibrating device |
| CN204027887U (en) * | 2014-08-26 | 2014-12-17 | 天津市环境保护科学研究院 | A kind of adjustable extraction-type dilution sampling instrument |
| CN206269962U (en) * | 2016-12-02 | 2017-06-20 | 山东中检高科检测技术有限公司 | A kind of vacuum meter dynamic contrast calibrating installation |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956007A (en) * | 2017-05-23 | 2018-12-07 | 成都飞机工业（集团）有限责任公司 | A kind of vacuum meter on-line calibration room |
| CN111306941A (en) * | 2020-03-12 | 2020-06-19 | 浙江吉成新材股份有限公司 | Vacuum degree abnormity alarm device for high-temperature pressureless sintering |
| CN111306941B (en) * | 2020-03-12 | 2022-03-25 | 浙江吉成新材股份有限公司 | Vacuum gauge abnormity alarm device for monitoring vacuum degree of high-temperature pressureless sintering |
| CN112461446A (en) * | 2020-11-23 | 2021-03-09 | 阿米检测技术有限公司 | Rapid dynamic vacuum calibration method for vacuum gauge |
| CN112461446B (en) * | 2020-11-23 | 2022-04-19 | 阿米检测技术有限公司 | Rapid dynamic vacuum calibration method for vacuum gauge |
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| Publication number | Publication date |
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| CN106500910B (en) | 2022-06-14 |
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Address after: 266000 second floor, building 4, No.19 Hechuan Road, Licang District, Qingdao City, Shandong Province Applicant after: Shandong aoshengtai Testing Technology Co.,Ltd. Address before: 266000 second floor, building 4, No.19 Hechuan Road, Licang District, Qingdao City, Shandong Province Applicant before: SHANDONG ZHONGJIANGAOKE TESTING TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20230327 Address after: 266000 Building G, Industrial Park Road South, both sides of Yingjiu Road, Jiaodong Street Office, Jiaozhou City, Qingdao City, Shandong Province Patentee after: Aiyouxin (Shandong) Measurement and Testing Co.,Ltd. Address before: 266000 second floor, building 4, No.19 Hechuan Road, Licang District, Qingdao City, Shandong Province Patentee before: Shandong aoshengtai Testing Technology Co.,Ltd. |
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