CN105892355A - Instant vacuum providing device - Google Patents

Instant vacuum providing device Download PDF

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Publication number
CN105892355A
CN105892355A CN201610200863.2A CN201610200863A CN105892355A CN 105892355 A CN105892355 A CN 105892355A CN 201610200863 A CN201610200863 A CN 201610200863A CN 105892355 A CN105892355 A CN 105892355A
Authority
CN
China
Prior art keywords
vacuum
chamber
cavity
vacuum degree
moment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610200863.2A
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Chinese (zh)
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CN105892355B (en
Inventor
张德龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Weige Technology Suzhou Co ltd
Original Assignee
Zweig Gas Purification Technology (suzhou) Ltd By Share Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201610200863.2A priority Critical patent/CN105892355B/en
Publication of CN105892355A publication Critical patent/CN105892355A/en
Application granted granted Critical
Publication of CN105892355B publication Critical patent/CN105892355B/en
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/25Pc structure of the system
    • G05B2219/25338Microprocessor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Fluid Pressure (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses an instant vacuum providing device. The instant vacuum providing device comprises at least one chamber communicated with a cavity to be vacuumed, wherein an on-off unit is further arranged between the chamber and the cavity; a vacuum pump connected with the chamber through a pipeline; a vacuum degree measuring part and a vacuum degree adjusting part which are respectively arranged on the pipeline, the chamber and/or the cavity; a processing control part which is electrically connected with the vacuum degree measuring part and the vacuum degree adjusting part. The vacuum degree measuring part measures the vacuum degree in the chamber in real time and feeds the vacuum degree back to the processing control part, the processing control part compares the vacuum degree measured in real time with a required vacuum degree, and if the vacuum degree measured in real time is not consistent with the required vacuum degree, the processing control part control the vacuum degree adjusting part to adjust the vacuum degree in the chamber to the required vacuum degree. Compared with the prior art, on the premise of low cost and high efficiency, an instant vacuum environment is obtained for the cavity needing the vacuum environment, and the control of the vacuum degree is more precise.

Description

Moment vacuum provides device
Technical field
The present invention relates to a kind of vacuum and provide device, being specifically related to a kind of moment vacuum provides dress Put.
Background technology
In scientific research and production process, a lot of research experiments and technique are all in vacuum equipment Carry out.The acquisition of general vacuum is all to use different vacuum pumps or pump group, then or uses true Empty generators etc. realize, but vacuum pump etc. are all to connect equipment, on pipeline by relatively tubule road Adding vacuum control valve, such vacuum acquirement relatively slowly, and controls to be difficult to accurately, and easy mistake is rushed, no Some needs moment vacuum and the scientific research accurately controlled or manufacturing technique requirent can be met.Just also have Being that enlarged vacuum pump group realizes, but cost is the highest, vacuum is uncontrollable.
Summary of the invention
In order to solve above-mentioned technical problem, the invention provides one can meet moment vacuum want Ask and control the most accurate moment vacuum and device is provided.
In order to achieve the above object, technical scheme is as follows:
Moment vacuum provides device, comprising:
At least one chamber, it connects with the cavity of evacuation object, between this chamber and cavity also It is provided with keying unit;
Vacuum pump, it connects chamber by pipeline;
Vacuum measurement portion, it is arranged on pipeline, chamber and/or cavity, is used for measuring chamber Interior vacuum;
Vacuum regulation portion, it is arranged on pipeline, chamber and/or cavity, is used for regulating chamber Interior vacuum;
Processing controls portion, its electrical connection vacuum measurement portion and vacuum regulation portion, vacuum is surveyed Amount portion measures the vacuum in chamber in real time and feeds back to processing controls portion, and processing controls portion will be real Time measure vacuum contrast with required vacuum, when not meeting control vacuum tune Vacuum in chamber is adjusted to required vacuum by joint portion.
The moment vacuum that the present invention provides provides device, is provided with the cavity with evacuation object even Logical chamber, connected the vacuum pump of chamber by pipeline, be arranged at pipeline, chamber and/or cavity On vacuum measurement portion and vacuum regulation portion and processing controls portion;During use, with true Empty pump is in advance to chamber evacuation, and vacuum is by processing controls portion, vacuum measurement portion and true Air-conditioning joint unit controls to adjust desirable value, then opens keying unit, the at this moment gas of cavity Quick intake chamber can reach vacuum degree equilibrium, be then shut off opening and closing unit, be derived from cavity The vacuum environment of interior moment, and the control to vacuum is the most accurate.
Therefore, the present invention compared with prior art, can be on the premise of low cost and high efficiency For needing the cavity of vacuum environment to obtain the vacuum environment of moment, simultaneously for the control of vacuum The most accurate.
On the basis of technique scheme, the present invention can also improve as follows:
As preferred scheme, above-mentioned keying unit also electrically connects with processing controls portion, chamber When interior vacuum is not up to demand, processing controls portion controls to open keying unit, in cavity After air rapidly enters chamber, whether the vacuum that vacuum measurement portion is measured in chamber reaches flat Weighing apparatus, controls to cut out keying unit as reached then processing controls portion.
Use above-mentioned preferred scheme, can coordinate the control of vacuum make cavity and chamber it Between vacuum be quickly and accurately balanced, due to chamber vacuum Du Genggao (more preferably, this be Absolute pressure is lower), after chamber and cavity balance, target cavity knows from experience the higher vacuum of acquisition. Aerating can also reduce vacuum in turn, at this moment be intended to another Chamber vacuum degree lower (more Difference, absolute pressure is higher).
As preferred scheme, above-mentioned keying unit is valve.
Use above-mentioned preferred scheme, can be so that quickly connecting on and off between chamber and cavity Open.
As preferred scheme, above-mentioned valve is push-pull valve or butterfly valve.
Use above-mentioned preferred scheme, can be so that valve be controlled.
As preferred scheme, above-mentioned chamber is arranged in vertical cylindrical body.
Use above-mentioned preferred scheme, can be so that the circulation of gas so that moment vacuum Obtain the rapidest.
Accompanying drawing explanation
The moment vacuum that Fig. 1 is the present invention provides device structural representation under some embodiments Figure.
The moment vacuum that Fig. 2 is the present invention provides device structure under other embodiments to show It is intended to.
The moment vacuum that Fig. 3 is the present invention provides device structure under other embodiments to show It is intended to.
Wherein, 1. chamber 2. cavity 3. opens and closes the survey of unit 4. vacuum pump 41. pipeline 42. vacuum Processing controls portion of vacuum regulation portion 5. of amount portion 43..
Detailed description of the invention
Describe the preferred embodiment of the present invention below in conjunction with the accompanying drawings in detail.
In order to reach the purpose of the present invention, as it is shown in figure 1, the moment vacuum in the present invention provides In the some of them embodiment of device, comprising: multiple chamber 1, itself and evacuation object Cavity 2 connect, be additionally provided with between this chamber 1 and cavity 2 keying unit 3, this keying Unit 3 is specifically as follows the valve such as push-pull valve or butterfly valve, it is also possible to for lid, push-pull valve also may be used To be specifically configured to bigbore vacuum gate valve;Vacuum pump 4, it connects chamber by pipeline 41 Room 1;Vacuum measurement portion 42, it is arranged on pipeline 41, for measuring in chamber 1 Vacuum;Vacuum regulation portion 43, it is arranged on pipeline 41, is used for regulating in chamber 1 Vacuum;Processing controls portion 5, its electrical connection vacuum measurement portion 42 and vacuum regulation portion 43, vacuum measurement portion 42 measures the vacuum in chamber 1 in real time and feeds back to processing controls Portion 5, the vacuum measured in real time is contrasted by processing controls portion 5 with required vacuum, Control vacuum regulation portion 43 when not meeting and the vacuum in chamber 1 is adjusted to required Vacuum.
Wherein, chamber 1 can also the most only be set to one, and in order to arrive faster Purpose, can arrange multiple chamber 1, opens simultaneously or open successively multiple chamber 1 during use; Vacuum measurement portion 42 and vacuum regulation portion 43 then can use existing vacuum measuring device With vacuum regulator;Processing controls portion 5 then uses conventional single-chip microcomputer.It addition, As Figure 2-3, vacuum measurement portion 42 and vacuum regulation portion 43 can also directly be arranged On chamber 1 or cavity 2, it can be with the vacuum measurement portion 42 on pipeline 41 and true Reciprocal of duty cycle regulation portion 43 keeps three to exist simultaneously, can also only arrange one and sentence individually in three Exist.
The moment vacuum that the present embodiment provides provides device, is provided with and the cavity of evacuation object The chamber of connection, connected the vacuum pump of chamber by pipeline, the vacuum that is arranged on pipeline is surveyed Amount portion and vacuum regulation portion and processing controls portion;During use, with vacuum pump in advance to chamber Room evacuation, vacuum is by processing controls portion, vacuum measurement portion and vacuum conditions unit control System is adjusted to desirable value, then opens keying unit, and at this moment the gas of cavity can quick suction chamber Room reaches vacuum degree equilibrium, is then shut off opening and closing unit, is derived from the vacuum of moment in cavity Environment, and the control to vacuum is the most accurate.Therefore, the present embodiment compared with prior art, Can be that the cavity needing vacuum environment obtains moment on the premise of low cost and high efficiency Vacuum environment, the control simultaneously for vacuum is the most accurate.
In order to optimize the implementation result of the present invention further, as it is shown in figure 1, the present invention's Moment vacuum provides in other embodiments of device, on the basis of the above, above-mentioned Keying unit 3 also electrically connect with processing controls portion 5, the vacuum in chamber 1 not up to needs When asking, processing controls portion 5 controls to open keying unit 3, and the air in cavity 2 rapidly enters After chamber 1, vacuum measurement portion 42 measures whether the vacuum in chamber 1 reaches balance, Control to close keying unit 3 as reached then processing controls portion 5.Use the scheme of this embodiment, The control that can coordinate vacuum makes the vacuum between cavity and chamber quickly and accurately Being balanced, this is due to chamber vacuum Du Genggao (more preferably, absolute pressure is lower), chamber After balancing with cavity, target cavity knows from experience the higher vacuum of acquisition.Can also aerating drop in turn Rough vacuum, is at this moment intended to another Chamber vacuum degree lower (worse, absolute pressure is higher).
In order to optimize the implementation result of the present invention further, as it is shown in figure 1, the present invention's Moment vacuum provides in other embodiments of device, on the basis of the above, above-mentioned Chamber 1 be arranged in vertical cylindrical body.Use the scheme of this embodiment, can so that The circulation of gas so that the acquisition of moment vacuum is the rapidest.
Above-described is only the preferred embodiment of the present invention, it is noted that for this area Those of ordinary skill for, without departing from the concept of the premise of the invention, it is also possible to do Going out some deformation and improvement, these broadly fall into protection scope of the present invention.

Claims (5)

1. moment vacuum provides device, it is characterised in that including:
At least one chamber, it connects with the cavity of evacuation object, described chamber and described cavity it Between be additionally provided with keying unit;
Vacuum pump, it connects described chamber by pipeline;
Vacuum measurement portion, it is arranged on described pipeline, described chamber and/or described cavity, uses Vacuum in measuring described chamber;
Vacuum regulation portion, it is arranged on described pipeline, described chamber and/or described cavity, uses Vacuum in regulating described chamber;
Processing controls portion, it electrically connects described vacuum measurement portion and described vacuum regulation portion, institute State vacuum measurement portion measure the vacuum in described chamber in real time and feed back to described processing controls Portion, the vacuum measured in real time is contrasted by described processing controls portion with required vacuum, Control described vacuum regulation portion when not meeting and the vacuum in described chamber is adjusted to required Vacuum.
Moment vacuum the most according to claim 1 provide device, it is characterised in that described in open Close unit also to electrically connect with described processing controls portion, when the vacuum in described chamber is not up to demand, Described processing controls portion controls to open described keying unit, and the air in described cavity rapidly enters institute After stating chamber, described vacuum measurement portion measures whether the vacuum in described chamber reaches balance, Processing controls portion as described in reach then controls to open and close as described in closedown unit.
Moment vacuum the most according to claim 1 and 2 provides device, it is characterised in that institute Stating keying unit is valve.
Moment vacuum the most according to claim 3 provides device, it is characterised in that described valve Door is push-pull valve or butterfly valve.
Moment vacuum the most according to claim 1 and 2 provides device, it is characterised in that institute State chamber to be arranged in vertical cylindrical body.
CN201610200863.2A 2016-03-31 2016-03-31 Moment vacuum provides device Active CN105892355B (en)

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Application Number Priority Date Filing Date Title
CN201610200863.2A CN105892355B (en) 2016-03-31 2016-03-31 Moment vacuum provides device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610200863.2A CN105892355B (en) 2016-03-31 2016-03-31 Moment vacuum provides device

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CN105892355A true CN105892355A (en) 2016-08-24
CN105892355B CN105892355B (en) 2018-07-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107694851A (en) * 2017-11-13 2018-02-16 苏州新智机电工业有限公司 Online high-efficiency energy-saving vacuum operating system
CN111312841A (en) * 2018-12-12 2020-06-19 汉能移动能源控股集团有限公司 Evacuating device and laminating system

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010844A (en) * 1988-07-12 1991-04-30 Orion Machinery Co., Ltd. Vacuum-pressure supply device
CN203697430U (en) * 2013-10-22 2014-07-09 铜陵格瑞特挤出技术有限公司 Vacuumizing device of profile extrusion spin-drying type stock mould
CN203756459U (en) * 2014-03-06 2014-08-06 重庆市陆顺科技发展有限公司 Vacuum pumping system with vacuum gas circuit control device
WO2014125249A1 (en) * 2013-02-13 2014-08-21 Edwards Limited Pumping system
CN203941462U (en) * 2014-06-26 2014-11-12 遵义长征汽车零部件有限公司 A kind of canister control valve flow rate test vacuum degree control device
CN104339624A (en) * 2014-10-23 2015-02-11 金都精密机械(大连)有限公司 Profile extrusion setting table vacuum system and working method thereof
CN104635605A (en) * 2014-11-28 2015-05-20 苏州迈创信息技术有限公司 Pipeline vacuum degree detection control system
CN204851579U (en) * 2015-07-15 2015-12-09 陆铭 Intelligence vacuum -exhaust platform

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010844A (en) * 1988-07-12 1991-04-30 Orion Machinery Co., Ltd. Vacuum-pressure supply device
WO2014125249A1 (en) * 2013-02-13 2014-08-21 Edwards Limited Pumping system
CN203697430U (en) * 2013-10-22 2014-07-09 铜陵格瑞特挤出技术有限公司 Vacuumizing device of profile extrusion spin-drying type stock mould
CN203756459U (en) * 2014-03-06 2014-08-06 重庆市陆顺科技发展有限公司 Vacuum pumping system with vacuum gas circuit control device
CN203941462U (en) * 2014-06-26 2014-11-12 遵义长征汽车零部件有限公司 A kind of canister control valve flow rate test vacuum degree control device
CN104339624A (en) * 2014-10-23 2015-02-11 金都精密机械(大连)有限公司 Profile extrusion setting table vacuum system and working method thereof
CN104635605A (en) * 2014-11-28 2015-05-20 苏州迈创信息技术有限公司 Pipeline vacuum degree detection control system
CN204851579U (en) * 2015-07-15 2015-12-09 陆铭 Intelligence vacuum -exhaust platform

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107694851A (en) * 2017-11-13 2018-02-16 苏州新智机电工业有限公司 Online high-efficiency energy-saving vacuum operating system
CN111312841A (en) * 2018-12-12 2020-06-19 汉能移动能源控股集团有限公司 Evacuating device and laminating system

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Address after: No. 58, Tingtao Road, Suzhou Industrial Park, Jiangsu 215000

Patentee after: Weige Technology (Suzhou) Co.,Ltd.

Address before: 215026 No.2 workshop, Xinxing Industrial Park, 78 Xinglin street, Suzhou Industrial Park, Jiangsu Province

Patentee before: VIGOR GAS PURIFICATION TECHNOLIGIES, Inc.

CP03 Change of name, title or address