CN207793425U - Control pressurer system and plasma deposition apparatus - Google Patents
Control pressurer system and plasma deposition apparatus Download PDFInfo
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- CN207793425U CN207793425U CN201721849679.7U CN201721849679U CN207793425U CN 207793425 U CN207793425 U CN 207793425U CN 201721849679 U CN201721849679 U CN 201721849679U CN 207793425 U CN207793425 U CN 207793425U
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Abstract
The utility model is related to plasma chemical vapor deposition technical field, discloses control pressurer system and apply the plasma deposition apparatus of the control pressurer system.Wherein, control pressurer system includes：The vacuum pump being connect by vacuum pipe with vacuum cavity is provided with electric control valve on vacuum pipe；Vacuum meter for the vacuum degree for measuring vacuum cavity, vacuum meter and electric control valve are communicated to connect by programmable controller.Control pressurer system provided by the utility model can be in spontaneous adjusting vacuum cavity pressure so that air pressure is kept in a certain range.
Description
Technical field
The utility model is related to plasma chemical vapor deposition technical field, more particularly to a kind of plasma deposition apparatus
And its control pressurer system.
Background technology
Vacuum cavity is widely used in various fields, for providing certain pressure vacuum reaction condition.
In traditional vacuum cavity, a vacuum meter being detected to pressure is generally included.But it is only true by one
Sky meter can only be observed the pressure of vacuum cavity, once adjusting pressure valve, the pressure in vacuum cavity will be made to occur
Change.But this pressure change can not accurately control, the display of vacuum meter can be lagged seriously.
Therefore, it if cavity needs to accurately control pressure, just needs to increase a vacuum meter, and the pressure gauge
It is connected to the control system, it can sensitive, the accurately pressure condition after vision-control.
But while increasing a vacuum meter, also increase the manufacturing cost of vacuum cavity.Also, due to increasing one
A vacuum meter, so, the volume of vaccum case is also required to make corresponding adjustment, therefore some cavity body structures not matched may
It can not use, and then increase production cost.
Utility model content
The purpose of this utility model is to provide a kind of control pressurer systems to wrap for controlling the pressure in vacuum cavity
It includes：
The vacuum pump being connect by vacuum pipe with vacuum cavity is provided with electric control valve on vacuum pipe；
Vacuum meter for the vacuum degree for measuring vacuum cavity, vacuum meter and electric control valve pass through programmable controller
Communication connection；
The aperture of pressure signal control electric control valve of the programmable controller transmitted by vacuum meter.
Compared to existing technologies, vacuum meter, electric control valve are communicatively coupled by the utility model so that in chamber
In vivo be provided only with a vacuum meter in the case of, can it is sensitive, accurately the pressure in cavity is adjusted.Wherein, it adjusts
The concrete mode of cavity internal pressure is that the gas flow of electric control valve is flowed through by limitation, reaches the mesh of control cavity internal pressure
's.Also, it uses programmable controller to be communicatively coupled so that it is more accurate to the regulation and control of electric control valve, reach
Better regulating effect.
The utility model additionally provides a kind of plasma deposition apparatus, including above-mentioned vacuum cavity and pressure control system
System.
Compared to existing technologies, the pressure in plasma deposition apparatus provided by the utility model is more stablized,
And then can more uniformly be deposited in sample both sides, and then improve deposition quality.
Preferably, electric control valve is butterfly valve or gate valve.
Electric control valve selects butterfly valve or gate valve, can achieve the purpose that control by valve gas flow, to control
The amount of gas in vacuum cavity processed, the final pressure for controlling vacuum cavity.
In addition, preferably, programmable controller includes：
Sequentially connected voltage signal receiving module, data-converting block, Linear processing module and analog signal output mould
Block；
Wherein, voltage signal receiving module is used to receive the pressure signal transmitted by vacuum meter；
Data-converting block is used to being converted to pressure signal into the numerical value in preset numerical intervals；
Linear processing module is used to numerical linear processing be analog signal；
Analog signal output module is used to export analog signal to electric control valve.
Pressure signal is received by programmable processor, and is calculated, is sent out to automatically controlled gate further according to result of calculation
Command signal is sent, controls the degree of electric control valve opening and closing, and then control the gas flow by electric control valve, it is final to make
The interior pressure of cavity changes.
Further, preferably, programmable controller further includes：
Filter module between voltage signal receiving module and data-converting block is set.
It may lead to the jitter or mutation that voltage signal receiving module receives due to various reasons, therefore
The signal of mutation can be eliminated by the filter module between voltage signal receiving module and data-converting block, can be ensured
Programmable controller more stably works.
In addition, preferably, the connector of vacuum pipe and vacuum cavity is located on a side wall of vacuum cavity；
Position measured by vacuum meter is located on the side wall to connect with side wall.
The connector of vacuum pipe and vacuum cavity is located on a side wall of vacuum cavity, is used for gas bleeding, adjusts
Vacuum meter is measured position on the position that side wall or side wall are connected so that vacuum meter is protected with bleeding point by cavity internal pressure
Hold a certain distance so that the data of measurement are more accurate.
In addition, preferably, being provided with first filter between vacuum meter and programmable controller.
There is and might have an excessively high signal or too low signal is transferred to programmable controller, therefore by true
First filter is set between sky meter and variable title controller, excessively high and too low signal can be filtered out, and then prevent
The unexpected opening and closing of electric control valve.
In addition, preferably, being provided with second filter between programmable controller and electric control valve.
Second filter is set between programmable controller and electric control valve, programmable controller can be sent out
The signal gone out is filtered, and is filtered out too high or too low signal, is prevented valve from opening and closing suddenly, it is ensured that air pressure is steady in vacuum cavity
It is fixed.
In addition, preferably, control pressurer system further includes the check valve being arranged between electric control valve and vacuum pump.
Set check valve can further increase the safety of control pressurer system.
In addition, preferably, programmable controller is integrated on electric control valve.
Programmable controller is integrated on electric control valve, the volume of control structure can be reduced, and is conducive to
Repair.
Description of the drawings
Fig. 1 is the structural schematic diagram for the control pressurer system that first embodiment of the invention electric control valve is butterfly valve；
Fig. 2 is the structural schematic diagram for the control pressurer system that first embodiment of the invention electric control valve is gate valve；
Fig. 3 is the block diagram representation of second embodiment of the invention programmable controller；
Fig. 4 is the block diagram representation for the programmable controller that second embodiment of the invention is equipped with filter module；
Fig. 5 is the structural schematic diagram for the control pressurer system that third embodiment of the invention is equipped with first filter；
Fig. 6 is the structure for the control pressurer system that third embodiment of the invention is equipped with first filter and second filter
Schematic diagram；
Fig. 7 is the structural representation that check valve control pressurer system is arranged in four embodiment of the invention on vacuum pipe
Figure；
Fig. 8 is that the pressure control that fifth embodiment of the invention electric control valve is integrated with programmable controller is
The perspective exploded view of system；
Fig. 9 is the flow diagram of sixth embodiment of the invention compress control method；
Figure 10 is the block diagram representation of sixth embodiment of the invention programmable controller work step；
Figure 11 is the programmable controller that seventh embodiment of the invention includes the first filter step and the second filter step
The block diagram representation of work step.
Reference sign：
1- vacuum pumps；2- vacuum cavities；3- vacuum meters；4- electric control valves；41- butterfly valves；42- gate valves；5- vacuum pipes；
6- programmable controllers；7a- first filters；7b- second filters；8- check valves.
Specific implementation mode
With reference to the accompanying drawings of the specification, the present invention is further described in detail.Schematically simplification is shown in attached drawing
The structure etc. of control pressurer system is gone out.
Embodiment one
The first embodiment of the present invention provides a kind of control pressurer system, for controlling the pressure in vacuum cavity 2,
Shown in referring to Fig. 1 and Fig. 2, including：
The vacuum pump 1 being connect by vacuum pipe 5 with vacuum cavity 2 is provided with electric control valve 4 on vacuum pipe 5；
Vacuum meter 3 for the vacuum degree for measuring vacuum cavity 2, vacuum meter 3 and electric control valve 4 pass through programmable control
Device 6 processed communicates to connect；
The aperture of pressure signal control electric control valve 4 of the programmable controller 6 transmitted by vacuum meter 3.
Specifically, vacuum pump 1 is evacuated under the power of setting to vacuum cavity 2 so that air pressure is kept in vacuum cavity 2
In a certain range, corresponding vacuum environment is provided.Wherein, vacuum pump 1 connects vacuum cavity 2 by vacuum pipe 5, can be true
The side wall of cavity body 2 or bottom setting trepanning make vacuum cavity 2 be connected with vacuum pipe 5.Preferably, can be arranged in tapping
Sealing structure, the air-tightness for enhancing cavity.
Electric control valve 4 is set on vacuum pipe 5, by the opening and closing degree of valve, controls gas flow rate, and then control
The amount of gas in cavity realizes the regulation and control to air pressure.
Vacuum meter 3 is used to measure the pressure of vacuum cavity 2, is set in vacuum cavity 2.Programmable controller 6 with it is true
Sky meter 3 and electric control valve 4 communicate to connect.
After the pressure measured is transferred to programmable controller 6 by vacuum meter 3 as electronic signals, program controller PLC
Device 6 is calculated and compared processing, the conversion electric signal that electrically operated valve door 4 opens and closes in order to control to the electric signal received.The telecommunications
Number it is transferred to electric control valve 4 again, electric control valve 4 is made to make the feedback for meeting the electric signal.
More specifically, the pressure value that observation vacuum meter 3 measures can be controlled when needing the air pressure in vacuum cavity 2 to reduce
4 closure degree of electric control valve processed reduces gas flow rate, final so that the air pressure in vacuum cavity 2 reduces；
When needing the air pressure in vacuum cavity 2 to reduce, the stretching degree of electric control valve 4 can be controlled to increase gas
Flow velocity, it is final so that the air pressure in vacuum cavity 2 increases.
Compared to existing technologies, vacuum meter 3, electric control valve 4 are communicatively coupled by the present invention so that in cavity
In the case of being inside provided only with a vacuum meter 3, can it is sensitive, accurately the pressure in cavity is adjusted.Wherein, adjusting cavity
The concrete mode of internal pressure is that the gas flow of electric control valve 4 is flowed through by limitation, reaches the mesh of control cavity internal pressure
's.Also, it uses programmable controller 6 to be communicatively coupled so that it is more accurate to the regulation and control of electric control valve 4, it reaches
To better regulating effect.
Preferably, in the present embodiment, electric control valve 4 is butterfly valve 41 or gate valve 42.
It, can be according to programmable controller since butterfly valve 41 and gate valve 42 are all the valves that can adjust opening and closing degree
Instruction adjust opening and closing degree, and then realize gas flow adjusting.
Electric control valve 4 selects butterfly valve 41 or gate valve 42, can achieve the purpose that control passes through valve gas flow, from
And the amount of the gas in vacuum cavity 2 is controlled, the final pressure for controlling vacuum cavity 2.
In the present embodiment, vacuum pipe 5 and the connector of vacuum cavity 2 are located on a side wall of vacuum cavity 2；
Position measured by vacuum meter 3 is located on the side wall to connect with side wall.
Specifically, the measurement position of vacuum meter 3 and the connector of vacuum pipe 5 and vacuum cavity 2 are staggered, can be made
The pressure data measured is closer to the pressure mean values in cavity, it is ensured that pressure controlled accuracy and sensitivity.
Vacuum pipe 5 and the connector of vacuum cavity 2 are located on a side wall of vacuum cavity 2, are used for gas bleeding, adjust
Cavity internal pressure is saved, vacuum meter 3 is measured into position on the position that side wall or side wall are connected so that vacuum meter 3 and pumping
Mouth maintains a certain distance so that the data of measurement are more accurate.
In summary it considers, present embodiment is used programmable controller 6 and vacuum meter 3 and electric control valve 4
Communication connection.Therefore vacuum meter 3, which can be realized simultaneously, measures pressure and the work(for adjusting the index of pressure in wall in vacuum cavity 2
Can, and the air pressure in vacuum cavity 2 is adjusted in time so that pressure is maintained in stable range.
Embodiment two
Second embodiment of the present invention provides a kind of control pressurer system, and second embodiment is first embodiment
Be further improved, mainly the improvement is that, shown in Figure 3 in second embodiment of the present invention, programmable control
Device 6 processed includes：
Sequentially connected voltage signal receiving module, data-converting block, Linear processing module and analog signal output mould
Block；
Wherein, voltage signal receiving module is used to receive the pressure signal transmitted by vacuum meter 3；
Data-converting block is used to being converted to pressure signal into the numerical value in preset numerical intervals；
Linear processing module is used to numerical linear processing be analog signal；
Analog signal output module is used to export analog signal to electric control valve 4.
Simply, the pressure value measured is converted to electric signal by the control pressurer system for inventing offer, then is carried out follow-up
Calculating, then control machinery structure.
Specifically, it when measuring pressure anomaly, converts the pressure value measured to pressure signal and is sent to variable program
Controller；
Pressure signal is converted into electric signal, is transferred to digital module by after voltage signal receiving module；
Data-converting block converts the electrical signal to as the numerical value in numerical intervals, facilitates follow-up calculation processing, retransmits
To Linear processing module；
Linear processing module carries out calculation processing to the numerical value received, is calculated such as linear, then the simulation handled well is believed
Number it is sent to analog signal output module；
Analog signal is sent to the structures such as electric control valve 4 by analog signal output module, is finally completed to valve opening
Adjusting.
Pressure signal is received by programmable processor, and is calculated, is sent out to automatically controlled gate further according to result of calculation
Command signal, the degree of 4 opening and closing of control electric control valve are sent, and then controls the gas flow by electric control valve 4, is finally made
The interior pressure for obtaining cavity changes.
Further, in the present embodiment, shown in Figure 4, programmable controller 6 further includes：
Filter module between voltage signal receiving module and data-converting block is set.
Due to during the work time, electric signal may be interfered or mutate and electric signal receiving module is caused to receive
Pressure signal is crossed greater than too small so that the larger reaction of 6 bad student of programmable controller, so that the pressure in vacuum cavity 2
Violent change occurs for power.Therefore, filter module is added between voltage signal receiving module and data-converting block can be to filter out excessively high
Or too low signal so that opening and closing operations larger suddenly will not occur for control pressurer system.
It may lead to the jitter or mutation that voltage signal receiving module receives due to various reasons, therefore
The signal of mutation can be eliminated by the filter module between voltage signal receiving module and data-converting block, can be ensured
Programmable controller 6 more stably works.
Embodiment three
Third embodiment of the present invention provides a kind of control pressurer system, and third embodiment is second embodiment
Be further improved, mainly the improvement is that, in third embodiment of the present invention, shown in Figures 5 and 6, in vacuum
It is provided with first filter 7a between meter 3 and programmable controller 6.
Preferably, digital filter or analog filter may be used in above-mentioned first filter 7a, and digital filter is used
In processing discrete signal, analog filter is for handling continuous analog signal.Therefore, in the present embodiment, analog filtering
Device is more highly preferred to.
Be transferred to programmable controller 6 due to might have an excessively high signal or too low signal, by
Vacuum meter 3 and variable setting first filter 7a between claiming controller, can filter out excessively high and too low signal, in turn
Prevent the unexpected opening and closing of electric control valve 4.
Preferably, in the present embodiment, the second filter is provided between programmable controller 6 and electric control valve 4
Wave device 7b.
In the present embodiment, digital filter or analog filter may be used in second filter 7b, wherein number filter
The cost of wave device is lower, therefore is more highly preferred to.
Filter is set between programmable controller 6 and electric control valve 4, programmable controller 6 can be sent out
The signal gone out is filtered, and is removed too high or too low signal, is prevented valve from opening and closing suddenly, it is ensured that air pressure is steady in vacuum cavity 2
It is fixed.
Embodiment four
The 4th embodiment of the present invention provides a kind of control pressurer system, and the 4th embodiment first to third is implemented
Any one embodiment is further improved in mode, is mainly theed improvement is that, in the 4th embodiment of the present invention, ginseng
As shown in Figure 7, control pressurer system further includes the check valve 8 being arranged between electric control valve 4 and vacuum pump 1.
Specifically, check valve 8 can be set between electric control valve 4 and vacuum pump 1.Since fluid can only be from unidirectional
Valve 8 flows to another side on one side, therefore can be effectively prevented gas backflow, and then ensures the pressure stability in vacuum cavity 2.
Therefore, set check valve 8 can further increase the safety of control pressurer system.
Embodiment five
The 5th embodiment of the present invention provides a kind of control pressurer system, the 4th embodiment of the 5th embodiment
It is further improved, mainly thes improvement is that, in the 5th embodiment of the present invention, shown in Figure 8, program controller PLC
Device 6 is integrated on electric control valve 4.
Programmable controller 6 is integrated on electric control valve 4, the volume of control structure can be reduced, and advantageous
In repair.
Embodiment six
The sixth embodiment of the present invention provides a kind of plasma deposition apparatus, including vacuum cavity 2 and pressure control
System processed.
Compared to existing technologies, plasma deposition apparatus provided by the invention is as a result of above-mentioned pressure control
System processed, therefore the pressure in vacuum cavity 2 can be regulated and controled in time so that the pressure in vacuum cavity 2 is more stablized,
And then be conducive to plasma-deposited uniform progress, it can more uniformly be deposited in sample both sides, and then realize and arrive high-quality
Deposition.
Embodiment seven
The present invention also provides a kind of compress control methods to include the following steps shown in Fig. 9 and Figure 10：
Signal measurement step：Vacuum meter 3 measures the vacuum degree of vacuum cavity 2, and pressure signal is sent to programmable
Controller 6；
Signal switch process：Pressure signal of the programmable controller 6 transmitted by vacuum meter 3, is converted to digital letter
Number and be sent to electrically operated valve door 4；
Valve rate-determining steps：The digital signal of 4 basis of electric control valve adjusts itself aperture.
Compress control method provided by the invention can be realized well by above-mentioned control pressurer system, but simultaneously not only
The application being limited in above-mentioned control pressurer system.Present embodiment completes pressure by using three above-mentioned different steps
Force signal realizes the control to vacuum degree in wall to the conversion of analog signal.
In the present embodiment, programmable controller 6 includes：Sequentially connected voltage signal receiving module, number turn
Change the mold block, Linear processing module and analog signal output module；
Further include following sub-step in signal switch process：
Voltage signal receiving module receives the pressure signal transmitted by vacuum meter 3, and is sent to data-converting block；
Pressure signal is converted to the numerical value in preset numerical intervals by data-converting block, and is sent to linear process mould
Block；
Numerical linear processing is analog signal by Linear processing module, and is sent to analog signal output module；
Analog signal output module exports analog signal to electric control valve 4.
Pressure signal is received by programmable processor, and is calculated, is sent out to automatically controlled gate further according to result of calculation
Command signal, the degree of 4 opening and closing of control electric control valve are sent, and then controls the gas flow by electric control valve 4, is finally made
The interior pressure for obtaining cavity changes.
Preferably, in the present embodiment, programmable controller 6 further includes：
Filter module between voltage signal receiving module and data-converting block is set；
Further include following sub-step in signal switch process：
The Linear processing module that data-converting block is sent out is filtered by filter module.
Specifically, by taking air pressure in vacuum cavity 2 is higher as an example.Gauge 3 measures the vacuum degree in cavity, and will pressure
Force signal is transmitted to programmable controller 6, completes signal measurement step.
In programmable controller 6, voltage signal receiving module receives the pressure signal that vacuum meter 3 transmits, and is passing
Signal, which is completed, to data-converting block receives sub-step；
Data-converting block converts the pressure signal transmitted, and completion signal conversion sub-step subsequently to calculate suitable
Profit carries out；
Linear processing module is compared well calculating to the letter by conversion, it is found that measured value is higher than preset value, by the meter
It calculates result and is sent to analog signal output module, complete signal processing sub-step；
Above-mentioned result of calculation is become the analog signal that requirement electric control valve 4 is closed by analog signal output module, is completed
Signal exports sub-step.Programmable controller 6 completes signal switch process, and analog signal is reached electric control valve 4.
Electric control valve 4 carries out the operation of valve closure according to the analog signal received, completes valve rate-determining steps.
Programmable controller 6 works according to above-mentioned sub-step, and pressure signal is received by voltage signal receiving module, then
Pressure signal is converted to computable signal by data-converting block, then by Linear processing module to signal at
Reason sends out the signal that control valve opens and closes finally by analog signal output module, 4 aperture of control electric control valve, and then controls
System finally makes the interior pressure of cavity change by the gas flow of electric control valve 4.
Embodiment eight
The 8th embodiment of the present invention provides a kind of compress control method, and present embodiment is to the 7th embodiment
Be further improved.Mainly the improvement is that, it is shown in Figure 11, further include such as sub-step in signal measurement step：
First filter step：The pressure signal that first filter sends out vacuum meter 3 is filtered.
By the first filter step, the too high or too low pressure signal that vacuum meter 3 is spread out of filters out, and reaches electric signal reception
Module.So that the pressure signal that electric signal receiving module receives tends towards stability.
Further include such as sub-step in addition, preferably, in signal switch process：
Second filter step：The digital signal that second filter sends out programmable controller 6 is filtered.
By the second filter step, the signal that programmable controller 6 is sent out is filtered, prevents electric control gate from receiving
Opening and closing suddenly is sent out after to signal, keeps the stable gas pressure of cavity.
It will be understood by those skilled in the art that in above-mentioned each embodiment, in order to keep reader more preferably geographical
It solves the application and proposes many technical details.But even if without these technical details and based on the respective embodiments described above
Various changes and modifications can also realize each claim of the application technical solution claimed substantially.Therefore, in reality
In, can to the above embodiment, various changes can be made in the form and details, without departing from the present invention spirit and model
It encloses.
Claims (10)
1. a kind of control pressurer system, for controlling the pressure in vacuum cavity (2), including：
The vacuum pump (1) being connect by vacuum pipe (5) with the vacuum cavity (2) is provided with electricity on the vacuum pipe (5)
Control valve (4)；
Vacuum meter (3) for the vacuum degree for measuring the vacuum cavity (2), the vacuum meter (3) and the electric control valve
(4) it is communicated to connect by programmable controller (6)；
Pressure signal of the programmable controller (6) transmitted by the vacuum meter (3) controls the electric control valve
(4) aperture.
2. control pressurer system according to claim 1, which is characterized in that the electric control valve (4) is butterfly valve (41)
Or gate valve (42).
3. control pressurer system according to claim 1, which is characterized in that the programmable controller (6) includes：
Sequentially connected voltage signal receiving module, data-converting block, Linear processing module and analog signal output module；
Wherein, voltage signal receiving module is used to receive the pressure signal transmitted by the vacuum meter (3)；
Data-converting block is used to being converted to the pressure signal into the numerical value in preset numerical intervals；
Linear processing module is used to numerical linear processing be analog signal；
Analog signal output module is used to export the analog signal to the electric control valve (4).
4. control pressurer system according to claim 3, which is characterized in that the programmable controller (6) further includes：
Filter module between voltage signal receiving module and data-converting block is set.
5. control pressurer system according to claim 1, which is characterized in that the vacuum pipe (5) and the vacuum chamber
The connector of body (2) is located on a side wall of the vacuum cavity (2)；
Position measured by the vacuum meter (3) is located on the side wall to connect with the side wall.
6. control pressurer system according to claim 1, which is characterized in that in the vacuum meter (3) and described programmable
First filter (7a) is provided between sequence controller (6).
7. control pressurer system according to claim 1, which is characterized in that in the programmable controller (6) and institute
It states and is provided with second filter (7b) between electric control valve (4).
8. control pressurer system according to claim 1, which is characterized in that the control pressurer system further includes that setting exists
Check valve (8) between the electric control valve (4) and the vacuum pump (1).
9. control pressurer system according to claim 1, which is characterized in that the programmable controller (6) is integrated
On the electric control valve (4).
10. a kind of plasma deposition apparatus, which is characterized in that including arbitrary in vacuum cavity (2) and such as claim 1 to 9
Control pressurer system described in one.
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| CN201721849679.7U CN207793425U (en) | 2017-12-26 | 2017-12-26 | Control pressurer system and plasma deposition apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109957787A (en) * | 2017-12-26 | 2019-07-02 | 上海稷以科技有限公司 | Control pressurer system and compress control method |
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| CN109957787A (en) * | 2017-12-26 | 2019-07-02 | 上海稷以科技有限公司 | Control pressurer system and compress control method |
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