CN109957787A - Control pressurer system and compress control method - Google Patents
Control pressurer system and compress control method Download PDFInfo
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- CN109957787A CN109957787A CN201711437411.7A CN201711437411A CN109957787A CN 109957787 A CN109957787 A CN 109957787A CN 201711437411 A CN201711437411 A CN 201711437411A CN 109957787 A CN109957787 A CN 109957787A
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000012545 processing Methods 0.000 claims description 25
- 230000008569 process Effects 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 11
- 238000009790 rate-determining step (RDS) Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 2
- 230000002269 spontaneous effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 230000006872 improvement Effects 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
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- 235000008434 ginseng Nutrition 0.000 description 1
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- 238000005086 pumping Methods 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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Abstract
The present invention relates to plasma chemical vapor deposition technical field, discloses control pressurer system and control the compress control method of the system.Wherein, control pressurer system includes: the vacuum pump being connect with vacuum cavity by vacuum pipe, and electric control valve is provided on vacuum pipe；It is communicated to connect for measuring the vacuum meter of the vacuum degree of vacuum cavity, vacuum meter and electric control valve by programmable controller.Control pressurer system provided by the present invention can the spontaneous intracorporal pressure of adjusting vacuum chamber so that air pressure keep in a certain range.
Description
Technical field
The present invention relates to plasma chemical vapor deposition technical field, in particular to a kind of control pressurer system and pressure control
Method processed.
Background technique
Vacuum cavity is widely used in various fields, for providing certain pressure vacuum reaction condition.
In traditional vacuum cavity, the vacuum meter detected to pressure is generally included.But it is only true by one
Sky meter can only be observed the pressure of vacuum cavity, once adjusting pressure valve, the intracorporal pressure of vacuum chamber will be made to occur
Change.But this pressure change is unable to accurately control, the display of vacuum meter can be lagged seriously.
Therefore, if cavity needs accurately to control pressure, just need to increase a vacuum meter, and the pressure gauge
It is connected to the control system, it can sensitive, the accurately pressure condition after vision-control.
But while increasing a vacuum meter, also increase the manufacturing cost of vacuum cavity.Also, due to increasing one
A vacuum meter, so, the volume of vaccum case is also required to make corresponding adjustment, therefore some cavity body structures not matched may
It is not available, and then increases production cost.
Summary of the invention
The purpose of the present invention is to provide a kind of control pressurer systems, for controlling the intracorporal pressure of vacuum chamber, comprising:
The vacuum pump being connect with vacuum cavity by vacuum pipe is provided with electric control valve on vacuum pipe；
For measuring the vacuum meter of the vacuum degree of vacuum cavity, vacuum meter and electric control valve pass through programmable controller
Communication connection；
The aperture of programmable controller pressure signal according to transmitted by vacuum meter control electric control valve.
Compared to existing technologies, vacuum meter, electric control valve are communicatively coupled by the present invention, so that in the cavity
In the case where being provided only with a vacuum meter, sensitive, accurately the intracorporal pressure of chamber can be adjusted.Wherein, cavity is adjusted
The concrete mode of interior pressure is the gas flow that electric control valve is flowed through by limiting, and achievees the purpose that control cavity internal pressure.
Also, it is communicatively coupled using programmable controller, so that it is more accurate to the regulation of electric control valve, reach more preferable
Regulating effect.
The present invention also provides a kind of plasma deposition apparatus, including above-mentioned vacuum cavity and control pressurer system.
Compared to existing technologies, the pressure in plasma deposition apparatus provided by the invention is more stable, in turn
It can more uniformly be deposited in sample two sides, and then improve deposition quality.
Preferably, electric control valve is butterfly valve or gate valve.
Electric control valve selects butterfly valve or gate valve, can achieve the purpose that control passes through valve gas flow, to control
The amount of gas in vacuum cavity processed, the final pressure for controlling vacuum cavity.
In addition, preferably, programmable controller includes:
Sequentially connected voltage signal receiving module, data-converting block, Linear processing module and analog signal output mould
Block；
Wherein, voltage signal receiving module is for receiving pressure signal transmitted by vacuum meter；
Data-converting block is used to being converted to pressure signal into the numerical value in preset numerical intervals；
Linear processing module is for handling numerical linear for analog signal；
Analog signal output module is used to export analog signal to electric control valve.
The present invention also provides a kind of compress control methods, include the following steps:
Signal measurement step: vacuum meter measures the vacuum degree of vacuum cavity, and pressure signal is sent to programmable control
Device processed；
Signal switch process: programmable controller pressure signal according to transmitted by vacuum meter is converted to digital signal
And it is sent to electrically operated valve door；
Valve rate-determining steps: electric control valve according to digital signal adjust itself aperture.
Compress control method provided by the invention can be realized well by above-mentioned control pressurer system.Three differences
The step of complete the conversion of pressure signal to analog signal, realize the control to vacuum degree in wall.
Further, preferably, programmable controller includes: sequentially connected voltage signal receiving module, number
Conversion module, Linear processing module and analog signal output module；
Further include following sub-step in signal switch process:
Voltage signal receiving module receives pressure signal transmitted by vacuum meter, and is sent to data-converting block；
Pressure signal is converted to the numerical value in preset numerical intervals by data-converting block, and is sent to linear process mould
Block；
Linear processing module handles numerical linear for analog signal, and is sent to analog signal output module；
Analog signal output module exports analog signal to electric control valve.
Programmable controller works according to above-mentioned sub-step, receives pressure signal by voltage signal receiving module, then
Pressure signal is converted to computable signal by data-converting block, then by Linear processing module to signal at
The signal of control valve folding is issued finally by analog signal output module, controls the aperture of electric control valve, in turn by reason
Control passes through the gas flow of electric control valve, and the interior pressure of cavity is finally made to change.
Further, preferably, programmable controller further include:
Filter module between voltage signal receiving module and data-converting block is set；
Further include following sub-step in signal switch process:
The Linear processing module that filter module is issued data-converting block is filtered.
By the way that filter module is added, it joined the sub-step of filtering during signal conversion, voltage force signal connect
The too high or too low pressure signal for receiving module outflow filters out, and reaches data-converting block.So that signal is in a certain range,
And then keep subsequent calculating more accurate.
In addition, further including such as sub-step in signal measurement step:
First filter step: the pressure signal that first filter issues vacuum meter is filtered.
By the first filter step, the too high or too low pressure signal of vacuum meter outflow is filtered out, and reaches electric signal reception
Module.So that the pressure signal that electric signal receiving module receives tends towards stability.
In addition, preferably, further including such as sub-step in signal switch process:
Second filter step: the digital signal that second filter issues programmable controller is filtered.
By the second filter step, the signal of programmable controller is filtered, prevents electric control gate from receiving
It is opened and closed suddenly after to signal, keeps the stable gas pressure of cavity.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the control pressurer system that first embodiment of the invention electric control valve is butterfly valve；
Fig. 2 is the structural schematic diagram for the control pressurer system that first embodiment of the invention electric control valve is gate valve；
Fig. 3 is the block diagram representation of second embodiment of the invention programmable controller；
Fig. 4 is the block diagram representation for the programmable controller that second embodiment of the invention is equipped with filter module；
Fig. 5 is the structural schematic diagram for the control pressurer system that third embodiment of the invention is equipped with first filter；
Fig. 6 is the structure for the control pressurer system that third embodiment of the invention is equipped with first filter and second filter
Schematic diagram；
Fig. 7 is the structural representation that check valve control pressurer system is arranged in four embodiment of the invention on vacuum pipe
Figure；
Fig. 8 is that the pressure control that fifth embodiment of the invention electric control valve and programmable controller integrate is
The perspective exploded view of system；
Fig. 9 is the flow diagram of sixth embodiment of the invention compress control method；
Figure 10 is the block diagram representation of sixth embodiment of the invention programmable controller work step；
Figure 11 is the programmable controller that seventh embodiment of the invention includes the first filter step and the second filter step
The block diagram representation of work step.
Description of symbols:
1- vacuum pump；2- vacuum cavity；3- vacuum meter；4- electric control valve；41- butterfly valve；42- gate valve；5- vacuum pipe；
6- programmable controller；7a- first filter；7b- second filter；8- check valve.
Specific embodiment
With reference to the accompanying drawings of the specification, the present invention is further described in detail.Schematically simplification is shown in attached drawing
The structure etc. of control pressurer system is gone out.
Embodiment one
First embodiment of the invention provides a kind of control pressurer system, for controlling the pressure in vacuum cavity 2,
Referring to figure 1 and figure 2, comprising:
Pass through the vacuum pump 1 that vacuum pipe 5 is connect with vacuum cavity 2, is provided with electric control valve 4 on vacuum pipe 5；
For measuring the vacuum meter 3 of the vacuum degree of vacuum cavity 2, vacuum meter 3 and electric control valve 4 pass through programmable control
Device 6 processed communicates to connect；
The aperture of the pressure signal according to transmitted by vacuum meter 3 of programmable controller 6 control electric control valve 4.
Specifically, vacuum pump 1 is evacuated under the power of setting to vacuum cavity 2, so that air pressure is kept in vacuum cavity 2
In a certain range, corresponding vacuum environment is provided.Wherein, vacuum pump 1 connects vacuum cavity 2 by vacuum pipe 5, can be true
The side wall of cavity body 2 or bottom setting aperture make vacuum cavity 2 be connected with vacuum pipe 5.Preferably, it can be set in tapping
Sealing structure, for enhancing the air-tightness of cavity.
Electric control valve 4 is set on vacuum pipe 5, by the opening and closing degree of valve, controls gas flow rate, and then control
The amount of gas in cavity realizes the regulation to air pressure.
Vacuum meter 3 is used to measure the pressure of vacuum cavity 2, is set in vacuum cavity 2.Programmable controller 6 and true
Sky meter 3 and electric control valve 4 communicate to connect.
After the pressure measured is transferred to programmable controller 6 by vacuum meter 3 as electronic signals, program controller PLC
Device 6 is calculated and compared processing to the electric signal received, is converted to the electric signal that control electric control valve 4 opens and closes.The telecommunications
Number it is transferred to electric control valve 4 again, electric control valve 4 is made to make the feedback for meeting the electric signal.
More specifically, the pressure value that observation vacuum meter 3 measures can be controlled when needing the air pressure in vacuum cavity 2 to reduce
4 closure degree of electric control valve processed reduces gas flow rate, reduces the air pressure in vacuum cavity 2；
When needing the air pressure in vacuum cavity 2 to reduce, the opening degree of electric control valve 4 can control to increase gas
Flow velocity increases the air pressure in vacuum cavity 2.
Compared to existing technologies, vacuum meter 3, electric control valve 4 are communicatively coupled by the present invention, so that in cavity
In the case where being inside provided only with a vacuum meter 3, sensitive, accurately the intracorporal pressure of chamber can be adjusted.Wherein, adjusting cavity
The concrete mode of internal pressure is the gas flow that electric control valve 4 is flowed through by limiting, and reaches the mesh of control cavity internal pressure
's.Also, programmable controller 6 is used to be communicatively coupled, so that it is more accurate to the regulation of electric control valve 4, it reaches
To better regulating effect.
Preferably, in the present embodiment, electric control valve 4 is butterfly valve 41 or gate valve 42.
It, can be according to programmable controller since butterfly valve 41 and gate valve 42 are all the valves of adjustable opening and closing degree
Instruction adjust opening and closing degree, and then realize gas flow adjusting.
Electric control valve 4 selects butterfly valve 41 or gate valve 42, can achieve the purpose that control passes through valve gas flow, from
And the amount of the gas in vacuum cavity 2 is controlled, the final pressure for controlling vacuum cavity 2.
In the present embodiment, the connector of vacuum pipe 5 and vacuum cavity 2 is located on a side wall of vacuum cavity 2；
Position measured by vacuum meter 3 is located on the side wall to connect with side wall.
Specifically, the measurement position of vacuum meter 3 and the connector of vacuum pipe 5 and vacuum cavity 2 are staggered, can be made
The pressure data measured is closer to the intracorporal pressure mean values of chamber, it is ensured that pressure controlled accuracy and sensitivity.
The connector of vacuum pipe 5 and vacuum cavity 2 is located on a side wall of vacuum cavity 2, is used for gas bleeding, adjusts
Cavity internal pressure is saved, by 3 measurement position of vacuum meter on the position that side wall or side wall are connected, so that vacuum meter 3 and pumping
Mouth maintains a certain distance, so that the data of measurement are more accurate.
In summary it considers, present embodiment is used programmable controller 6 and vacuum meter 3 and electric control valve 4
Communication connection.Therefore vacuum meter 3 can be realized simultaneously pressure and the function for adjusting the index of pressure in wall in measurement vacuum cavity 2
Can, and the air pressure in vacuum cavity 2 is adjusted in time, so that pressure is maintained in stable range.
Embodiment two
Second embodiment of the present invention provides a kind of control pressurer system, and second embodiment is first embodiment
Further improvement, mainly the improvement is that, shown in Figure 3 in second embodiment of the present invention, programmable control
Device 6 processed includes:
Sequentially connected voltage signal receiving module, data-converting block, Linear processing module and analog signal output mould
Block；
Wherein, voltage signal receiving module is for receiving pressure signal transmitted by vacuum meter 3；
Data-converting block is used to being converted to pressure signal into the numerical value in preset numerical intervals；
Linear processing module is for handling numerical linear for analog signal；
Analog signal output module is used to export analog signal to electric control valve 4.
Simply, the pressure value measured is converted to electric signal, then carried out subsequent by the control pressurer system for inventing offer
Calculating, then control mechanical structure.
Specifically, when measuring pressure anomaly, pressure signal is converted by the pressure value measured and is sent to variable program
Controller；
Pressure signal is converted into electric signal, is transferred to digital module by after voltage signal receiving module；
Data-converting block converts the electrical signal to as the numerical value in numerical intervals, facilitates subsequent calculation processing, retransmits
To Linear processing module；
Linear processing module carries out calculation processing to the numerical value received, calculates such as linear, then the simulation handled well is believed
Number it is sent to analog signal output module；
Analog signal is sent to the structures such as electric control valve 4 by analog signal output module, is finally completed to valve opening
Adjusting.
Pressure signal is received by programmable processor, and is calculated, is sent out further according to calculated result to automatically controlled gate
Command signal, the degree that control electric control valve 4 is opened and closed are sent, and then controls the gas flow for passing through electric control valve 4, is finally made
The interior pressure for obtaining cavity changes.
Further, in the present embodiment, shown in Figure 4, programmable controller 6 further include:
Filter module between voltage signal receiving module and data-converting block is set.
Due to during the work time, electric signal may be interfered or mutate and electric signal receiving module is caused to receive
Pressure signal is crossed greater than too small, so that the biggish reaction of 6 bad student of programmable controller, so that the pressure in vacuum cavity 2
Violent change occurs for power.Therefore, filter module is added between voltage signal receiving module and data-converting block can be to filter out excessively high
Or too low signal, so that unexpected biggish opening and closing operations will not occur for control pressurer system.
It may cause the jitter or mutation that voltage signal receiving module receives due to various reasons, therefore
The signal of mutation can be eliminated by the filter module between voltage signal receiving module and data-converting block, can be guaranteed
Programmable controller 6 more stably works.
Embodiment three
Third embodiment of the present invention provides a kind of control pressurer system, and third embodiment is second embodiment
Further improvement, mainly the improvement is that, in third embodiment of the present invention, referring to shown in Figures 5 and 6, in vacuum
First filter 7a is provided between meter 3 and programmable controller 6.
Preferably, above-mentioned first filter 7a can use digital filter or analog filter, and digital filter is used
In processing discrete signal, analog filter is for handling continuous analog signal.Therefore, in the present embodiment, analog filtering
Device is more highly preferred to.
Be transferred to programmable controller 6 due to might have an excessively high signal or too low signal, by
First filter 7a is set between vacuum meter 3 and variable title controller, excessively high and too low signal can be filtered out, in turn
Prevent the unexpected opening and closing of electric control valve 4.
Preferably, in the present embodiment, the second filter is provided between programmable controller 6 and electric control valve 4
Wave device 7b.
In the present embodiment, second filter 7b can use digital filter or analog filter, wherein number filter
The cost of wave device is lower, therefore is more highly preferred to.
Filter is set between programmable controller 6 and electric control valve 4, programmable controller 6 can be sent out
Signal out is filtered, and is removed too high or too low signal, is prevented valve from opening and closing suddenly, it is ensured that air pressure is steady in vacuum cavity 2
It is fixed.
Embodiment four
4th embodiment of the invention provides a kind of control pressurer system, and the 4th embodiment first to third is implemented
The further improvement of any one embodiment, mainly thes improvement is that in mode, in the 4th embodiment of the invention, ginseng
As shown in Figure 7, control pressurer system further includes the check valve 8 being arranged between electric control valve 4 and vacuum pump 1.
Specifically, check valve 8 can be set between electric control valve 4 and vacuum pump 1.Since fluid can only be from unidirectional
Valve 8 flows to another side on one side, therefore can be effectively prevented gas backflow, and then ensures that the pressure in vacuum cavity 2 is stablized.
Therefore, set check valve 8 can further increase the safety of control pressurer system.
Embodiment five
5th embodiment of the invention provides a kind of control pressurer system, the 4th embodiment of the 5th embodiment
It is further improved, mainly thes improvement is that, in the 5th embodiment of the invention, shown in Figure 8, program controller PLC
Device 6 is integrated on electric control valve 4.
Programmable controller 6 is integrated on electric control valve 4, can reduce the volume of control structure, and advantageous
In maintenance.
Embodiment six
Sixth embodiment of the invention provides a kind of plasma deposition apparatus, including vacuum cavity 2 and pressure control
System processed.
Compared to existing technologies, plasma deposition apparatus provided by the invention is due to using above-mentioned pressure control
System processed, therefore the pressure in vacuum cavity 2 can be regulated and controled in time, so that the pressure in vacuum cavity 2 is more stable,
And then be conducive to plasma-deposited uniform progress, it can more uniformly be deposited in sample two sides, and then realize and arrive high-quality
Deposition.
Embodiment seven
The present invention also provides a kind of compress control methods to include the following steps: referring to shown in Fig. 9 and Figure 10
Signal measurement step: vacuum meter 3 measures the vacuum degree of vacuum cavity 2, and pressure signal is sent to programmable
Controller 6；
Signal switch process: the pressure signal according to transmitted by vacuum meter 3 of programmable controller 6 is converted to digital letter
Number and be sent to electrically operated valve door 4；
Valve rate-determining steps: the digital signal of 4 basis of electric control valve adjusts itself aperture.
Compress control method provided by the invention, which passes through above-mentioned control pressurer system, to be realized well, but simultaneously not only
The application being limited in above-mentioned control pressurer system.Present embodiment is by completing pressure using three above-mentioned different steps
Force signal realizes the control to vacuum degree in wall to the conversion of analog signal.
In the present embodiment, programmable controller 6 includes: sequentially connected voltage signal receiving module, and number turns
Change the mold block, Linear processing module and analog signal output module；
Further include following sub-step in signal switch process:
Voltage signal receiving module receives pressure signal transmitted by vacuum meter 3, and is sent to data-converting block；
Pressure signal is converted to the numerical value in preset numerical intervals by data-converting block, and is sent to linear process mould
Block；
Linear processing module handles numerical linear for analog signal, and is sent to analog signal output module；
Analog signal output module exports analog signal to electric control valve 4.
Pressure signal is received by programmable processor, and is calculated, is sent out further according to calculated result to automatically controlled gate
Command signal, the degree that control electric control valve 4 is opened and closed are sent, and then controls the gas flow for passing through electric control valve 4, is finally made
The interior pressure for obtaining cavity changes.
Preferably, in the present embodiment, programmable controller 6 further include:
Filter module between voltage signal receiving module and data-converting block is set；
Further include following sub-step in signal switch process:
The Linear processing module that filter module is issued data-converting block is filtered.
Specifically, by taking air pressure in vacuum cavity 2 is higher as an example.Gauge 3 measures the intracorporal vacuum degree of chamber, and will pressure
Force signal is transmitted to programmable controller 6, completes signal measurement step.
In programmable controller 6, voltage signal receiving module receives the pressure signal that vacuum meter 3 transmits, and is passing
Signal, which is completed, to data-converting block receives sub-step；
Data-converting block converts the pressure signal transmitted, completes signal conversion sub-step and makes subsequent calculating suitable
Benefit carries out；
Linear processing module is compared well calculating to the letter by conversion, and discovery measured value is higher than preset value, by the meter
It calculates result and is sent to analog signal output module, complete signal processing sub-step；
Above-mentioned calculated result is become the analog signal for requiring electric control valve 4 to be closed by analog signal output module, is completed
Signal exports sub-step.Programmable controller 6 completes signal switch process, and analog signal is reached electric control valve 4.
Electric control valve 4 carries out the operation of valve closure according to the analog signal received, completes valve rate-determining steps.
Programmable controller 6 works according to above-mentioned sub-step, receives pressure signal by voltage signal receiving module, then
Pressure signal is converted to computable signal by data-converting block, then by Linear processing module to signal at
Reason issues the signal of control valve folding finally by analog signal output module, controls 4 aperture of electric control valve, and then control
System passes through the gas flow of electric control valve 4, and the interior pressure of cavity is finally made to change.
Embodiment eight
8th embodiment of the invention provides a kind of compress control method, and present embodiment is to the 7th embodiment
Further improvement.Mainly the improvement is that, it is shown in Figure 11, further include such as sub-step in signal measurement step:
First filter step: the pressure signal that first filter issues vacuum meter 3 is filtered.
By the first filter step, the too high or too low pressure signal that vacuum meter 3 is spread out of is filtered out, and reaches electric signal reception
Module.So that the pressure signal that electric signal receiving module receives tends towards stability.
In addition, preferably, further including such as sub-step in signal switch process:
Second filter step: the digital signal that second filter issues programmable controller 6 is filtered.
By the second filter step, the signal that programmable controller 6 issues is filtered, prevents electric control gate from receiving
Opening and closing suddenly is sent out after to signal, keeps the stable gas pressure of cavity.
It will be understood by those skilled in the art that in above-mentioned each embodiment, in order to keep reader more preferably geographical
It solves the application and proposes many technical details.But even if without these technical details and based on the respective embodiments described above
Various changes and modifications can also realize each claim of the application technical solution claimed substantially.Therefore, in reality
In, can to above embodiment, various changes can be made in the form and details, without departing from spirit and model of the invention
It encloses.
Claims (10)
1. a kind of control pressurer system, for controlling the pressure in vacuum cavity (2), comprising:
Pass through the vacuum pump (1) that vacuum pipe (5) are connect with the vacuum cavity (2), is provided with electricity on the vacuum pipe (5)
Control valve (4)；
For measuring the vacuum meter (3) of the vacuum degree of the vacuum cavity (2), the vacuum meter (3) and the electric control valve
(4) it is communicated to connect by programmable controller (6)；
Programmable controller (6) pressure signal according to transmitted by the vacuum meter (3) controls the electric control valve
(4) aperture.
2. control pressurer system according to claim 1, which is characterized in that the programmable controller (6) includes:
Sequentially connected voltage signal receiving module, data-converting block, Linear processing module and analog signal output module；
Wherein, voltage signal receiving module is for receiving pressure signal transmitted by the vacuum meter (3)；
Data-converting block is used to being converted to the pressure signal into the numerical value in preset numerical intervals；
Linear processing module is for handling the numerical linear for analog signal；
Analog signal output module is used to export the analog signal to the electric control valve (4).
3. control pressurer system according to claim 2, which is characterized in that the programmable controller (6) further include:
Filter module between voltage signal receiving module and data-converting block is set.
4. control pressurer system according to claim 1, which is characterized in that in the vacuum meter (3) and described programmable
First filter (7a) is provided between sequence controller (6).
5. control pressurer system according to claim 1, which is characterized in that in the programmable controller (6) and institute
It states and is provided with second filter (7b) between electric control valve (4).
6. a kind of compress control method, which comprises the steps of:
Signal measurement step: vacuum meter (3) measures the vacuum degree of vacuum cavity (2), and pressure signal is sent to programmable
Controller；
Signal switch process: programmable controller pressure signal according to transmitted by vacuum meter (3) is converted to digital signal simultaneously
It is sent to electric control valve (4)；
Valve rate-determining steps: electric control valve (4) adjusts itself aperture according to the digital signal.
7. compress control method according to claim 6, which is characterized in that programmable controller includes: to be sequentially connected
Voltage signal receiving module, data-converting block, Linear processing module and analog signal output module；
Further include following sub-step in the signal switch process:
Voltage signal receiving module receives pressure signal transmitted by the vacuum meter (3), and is sent to data-converting block；
The pressure signal is converted to the numerical value in preset numerical intervals by data-converting block, and is sent to linear process mould
Block；
Linear processing module handles the numerical linear for analog signal, and is sent to analog signal output module；
Analog signal output module exports the analog signal to the electric control valve (4).
8. compress control method according to claim 7, which is characterized in that the programmable controller (6) further include:
Filter module between voltage signal receiving module and data-converting block is set；
Further include following sub-step in the signal switch process:
The Linear processing module that the data-converting block is issued is filtered filter module.
9. control pressurer system according to claim 6, which is characterized in that in the signal measurement step, further include
Such as sub-step:
First filter step: the pressure signal that first filter (7a) issues vacuum meter is filtered.
10. control pressurer system according to claim 6, which is characterized in that in the signal switch process, further include
Such as sub-step:
Second filter step: the digital signal that second filter (7b) issues programmable controller is filtered.
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| CN201711437411.7A CN109957787A (en) | 2017-12-26 | 2017-12-26 | Control pressurer system and compress control method |
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| CN112947613A (en) * | 2021-02-05 | 2021-06-11 | 河北光兴半导体技术有限公司 | Pressure regulation system, method and apparatus |
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| CN112947613A (en) * | 2021-02-05 | 2021-06-11 | 河北光兴半导体技术有限公司 | Pressure regulation system, method and apparatus |
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